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检索条件"主题词=3D Pattern Collapse"
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Investigation into deformation of Three-dimensional Microstructures via Surface Tension of a Rinsing Material during a developing Process
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TRANSACTIONS OF THE KOREAN SOCIETY OF MECHANICAL ENGINEERS A 2008年 第4期32卷 303-309页
作者: Park, Sang-Hu Yang, dong-Yol 부산대학교 정밀금형 및 금형가공연구소 (ERC) / 부산대학교 기계공학부 한국과학기술원 기계공학과
dense and fine polymer patterns often collapse, as they come into contact with each other at their protruding tips. Resist pattern collapse depends on the aspect ratio of patterns and the surface tension of rinsing ma... 详细信息
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