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检索条件"主题词=Advanced Process Controls"
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A rapid control prototyping platform methodology for decentralized automation
A rapid control prototyping platform methodology for decentr...
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Conference on Design and Architectures for Signal and Image processing (DASIP)
作者: Kaestner, Florian Janssen, Benedikt Schwanewilms, Sebastian Huebner, Michael Ruhr Univ Bochum Chair Embedded Syst Informat Technol Bochum Germany
Today's industrial requirements regarding the ability of embedded devices used for decentralized automation are increasing. Industrial providers of automation equipment strive to make their products and thus, indu... 详细信息
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Implementation of an OES System to Detect Silane Bursting During HDP SiN Film Deposition  33
Implementation of an OES System to Detect Silane Bursting Du...
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33rd Annual SEMI advanced Semiconductor Manufacturing Conference (ASMC)
作者: Azevedo, Isabel Hurley, Matthew Mosher, David GlobalFoundries Chem Vapor Deposit Dept Essex Jct VT 05452 USA
A new fault detection data model was developed for High Density Plasma (HDP) SiN deposition processing to detect copper migration caused by silane (SiH4) introduction into the chamber prior to the deposition step. Bef... 详细信息
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