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检索条件"主题词=Algorithm Development"

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High aspect ratio depth determination using non-destructive AFM

High aspect ratio depth determination using non-destructive ...

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Conference on Metrology, Inspection, and Process Control for Microlithography XIII

作者： Jaiprakash, VC Lagus, ME Meyyappan, A Muckenhirn, S Siemens Mciroelect Inc Hopewell Junction NY 12533 USA

ISBN: (纸本)0819431516

ULSI processing for the manufacture of devices such as DRAMs involves fabrication of several high aspect ratio structures. The determination and control of depth of these structures is crucial for device performance. We report the utilization of Atomic Force Microscopy to characterize 0.2 mu m ground rule products. Features with 2.1 mu m depth and 0.2 mu m top nominal top width dimensions can be consistently measured. To accomplish this a recently developed Deep Trench (DT) scan mode is employed and used in conjunction with new Super Angle Tapered CD (SATCD) and Super Angle Cone (SAC) tips. New analysis algorithms are developed to extract the data in a repeatable form with decreased sensitivity to changes in tip size (initial quality), tip shape (wear), and sample (process shift).

关键词： Critical dimension metrology Atomic force microscopy Nondestructive evaluation Process control algorithm development Manufacturing Semiconducting wafers Pattern recognition Metrology Microelectronics

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Tensorial generalization of a phenomenological material law for shape memory alloys

Tensorial generalization of a phenomenological material law ...

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International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering

作者： Terriault, P Trochu, F Brailovski, V Ecole Polytech Dept Mech Engn Montreal PQ H3C 3A7 Canada

ISBN: (纸本)0819431613

Several years ago, the use of shape memory alloys (SMA) in industrial applications gained a real interest. Even if SMA suppliers can produce a wide variety of materials, the elaboration of efficient and optimized applications remains quite hazardous due to the lack of computer-aided design tools. To fill this gap, a new phenomenological material law based on kriging was recently developed. From a single formulation constructed with isothermal tensile curves, the model calculates the thermomechanical behavior of SMA including superelasticity, one-way and assisted two-way shape memory effects among others. This paper presents the concepts that are used to generalize the model from a uniaxial to a tensorial formulation. Equivalent values defined from a Prager criterion are adapted from plasticity. Numerical results are validated by a series of experimental curves obtained with SMA samples for different loading conditions. The generalized material law is intended to be implemented with finite elements in order to calculate the thermomechanical behavior of complex shape memory devices.

关键词： Shape memory alloys 3D modeling Actinium Chlorine Electroluminescence algorithm development Astatine Computer aided design Nomenclature Solid modeling

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Evolution of neural controllers for salamander-like locomotion

Evolution of neural controllers for salamander-like locomoti...

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Sensor Fusion and Decentralized Control in Robotic Systems II Conference

作者： Ijspeert, AJ Univ So Calif Dept Comp Sci Los Angeles CA 90879 USA

ISBN: (纸本)0819434329

This paper presents an experiment in which evolutionary algorithms are used for the development of neural controllers for salamander locomotion. The aim of the experiment is to investigate which kind of neural circuitry can produce the typical swimming and trotting gaits of the salamander, and to develop a synthetic approach to neurobiology by using genetic algorithms as design tool. A 2D bio-mechanical simulation of the salamander's body is developed whose muscle contraction is determined by the locomotion controller simulated as continuous-time neural networks. While the connectivity of the neural circuitry underlying locomotion in the salamander has not been decoded for the moment, the general organization of the designed neural circuits corresponds to that hypothesized by neurobiologists for the real animal. in particular, the locomotion controllers are based on a body central pattern generator (CPG) corresponding to a lamprey-like swimming controller as developed by Ekeberg,(1) and are extended with a limb CPG for controlling the salamander's body. A genetic algorithm is used to instantiate synaptic weights of the connections within the limb CPG and from the limb CPG to the body CPG given a high level description of the desired gaits. A set of biologically plausible controllers are thus developed which can produce a neural activity and locomotion gaits very similar to those observed in the real salamander. By simply varying the external excitation applied to the network, the speed, direction and type of gait can be varied.

关键词： Oscillators Gait analysis Device simulation Genetic algorithms Neurons algorithm development Neuroscience Evolutionary algorithms Neural networks Systems modeling

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Revisions to the JDL data fusion model

Revisions to the JDL data fusion model

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Conference on Sensor Fusion - Architectures, algorithms, and Applications III

作者： Steinberg, AN Bowman, CL White, FE ERIM Int Inc Arlington VA 22209 USA

ISBN: (纸本)0819431931

The Data Fusion Model maintained by the Joint Directors of Laboratories (JDL) Data Fusion Group is the most widely-used method for categorizing data fusion-related functions. This paper discusses the current effort to revise and expand this model to facilitate the cost-effective development, acquisition, integration and operation of multi-sensor/multi-source systems. Data fusion involves combining information - in the broadest sense - to estimate or predict the state of some aspect of the universe. These may be represented in terms of attributive and relational states. If the job is to estimate the state of a people (or any other sentient beings), it can be useful to include consideration of informational and perceptual stares in addition to the physical state. Developing cost-effective multi-source information systems requires a method for specifying data fusion processing and control functions, interfaces, and associated databases. The lack of common engineering standards for data fusion systems has been a major impediment to integration and re-use of available technology: current developments do nor lend themselves to objective evaluation, comparison or re-use. This paper reports on proposed revisions and expansions of the JDL Data Fusion model to remedy some of these deficiencies. This involves broadening the functional model and related taxonomy beyond the original military focus, and integrating the Data Fusion Tree Architecture model for system description, design and development.

关键词： Data fusion Data modeling Systems modeling Standards development Data processing Sensors algorithm development Data analysis Systems engineering Signal detection

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Experiments with driving modes for urban robots

Experiments with driving modes for urban robots

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Conference on Mobile Robots XIV

作者： Hebert, M MacLachlan, R Chang, P Carnegie Mellon Univ Inst Robot Pittsburgh PA 15213 USA

ISBN: (纸本)0819434310

In this paper, we describe experiments on semi-autonomous control of a small urban robot. Three driving modes allow semiautonomous control of the robot through video imagery, or by using partial maps of the environment. Performance is analyzed in terms of maximum speed, terrain roughness, environmental conditions, and ease of control. We concentrate the discussion on a driving mode based on visual servoing. In this mode, a template designated in an image is tracked as the robot moves toward the destination designated by the operator. Particular attention is given to the robustness of the tracking with respect to template selection, computational resources, occlusions, and rough motion. The discussion of algorithm performance is based on experiments conducted at Ft. Sam Houston, TX, on Jul. 5-9 1999. In addition to the driving modes themselves, the performance and practicality of an omnidirectional imaging sensor is discussed. In particular, we discuss the typical imaging artifacts due to ambient lighting.

关键词： Robots Cameras Detection and tracking algorithms algorithm development Image processing Visualization Light sources and illumination Robotics Control systems Fourier transforms

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Tracking radar echoes by multiscale correlation: a nowcasting weather radar application

Tracking radar echoes by multiscale correlation: a nowcastin...

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Conference on Image and Signal Processing for Remote Sensing V

作者： Tanelli, S Facheris, L Cuccoli, F Giuli, D Univ Florence Dipartimento Ingn Elettron I-50139 Florence Italy

ISBN: (纸本)0819434663

An algorithm for storm tracking through weather radar data is presented. It relies on the crosscorrelation principle as in TREC (Tracking Radar Echoes by Correlation) and derived algorithms. The basic idea is to subdivide the radar maps in Cartesian format in a grid of square boxes and to exploit the so called local translation hypothesis. The motion vector is estimated as the space shift such that corresponding boxes at different times exhibit the maximum correlation coefficient. The discussed technique adopts a multiscale, multiresolution, and partially overlapped box grid which adapts to the radar reflectivity pattern. Multiresolution decomposition is performed through 2D wavelet based filtering. Correlation coefficients are calculated taking into account unreliable data (e.g. due to ground clutter or beam shielding) in order to avoid strong undesired motion estimation biases due to the presence of such stationary features. Data are gathered through a C-band multipolarimetric doppler weather radar. Results show that the technique overcomes some problems highlighted by researchers in previous related studies. Comparison with radial velocity maps shows good correlation values;although they may vary depending on the specific event and on the orographic complexity of the considered area, estimated motion fields are consistent with the shift of the pattern determined through simple visual inspection.

关键词： Radar Motion estimation Wavelets Doppler effect Reflectivity Detection and tracking algorithms Spatial resolution algorithm development Wavelet transforms Optical inspection

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Observability of sensor biases using multiple track reports

Observability of sensor biases using multiple track reports

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Conference on Signal and Data Processing of Small Targets 1999

作者： Easthope, PF Adv Syst Architectures Ltd Alton GU34 4PU Hants England

ISBN: (纸本)0819432954

This paper examines the determination of sensor biases by comparing multiple track outputs from spatially disparate platforms. In many cases, this can be achieved using least-squares methods, minimising the summed-squares of track differences. This method, while simple, is shown to provide valuable information concerning the observability of a given type of bias. Observability is here defined as permitting (in principle) the determination of a unique value for that bias, for each sensor in a pair (to take the simplest case), given sufficient measurement pairs. For the purposes of this study, the types of bias are divided into three main classes: measurement, own-position and alignment. In general, only members of the first group are individually observable, while for the other two classes observable combinations of the individual biases can be derived. The least-squares method also provides an effective method for assessing observability in practice (for example, in certain sensor-track configurations), and in determining which estimated biases are most reliable in such circumstances.

关键词： Sensors Filtering (signal processing) Radar algorithm development Berkelium Error analysis Matrices Ruthenium Time metrology Signal processing

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Anticipation as a key for collaboration in a team of agents: A case study in robotic soccer

Anticipation as a key for collaboration in a team of agents:...

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Sensor Fusion and Decentralized Control in Robotic Systems II Conference

作者： Veloso, M Stone, P Bowling, M Carnegie Mellon Univ Dept Comp Sci Pittsburgh PA 15213 USA

ISBN: (纸本)0819434329

We investigate teams of complete autonomous agents that can collaborate towards achieving precise objectives in an adversarial dynamic environment. We have pursued this work in the context of robotic soccer both in simulation and with real physical robots. We briefly present these two frameworks emphasizing their different technical challenges. Creating effective members of a team is a challenging research problem. We first address this issue by introducing a team architecture organization which allows for a rich task decomposition between team members. The main contribution of this paper is our introduction of an action-selection algorithm that allows for a teammate to anticipate the needs of other teammates. Anticipation is critical for maximizing the probability of successful collaboration in teams of agents. We show how our contribution applies to the two concrete robotic soccer frameworks and present controlled empirical results run in simulation. Anticipation was successfully used by both our CMUnited-98 simulator and CMUnited-98 small-robot teams in the RoboCup98 competition. The two teams are RoboCup-98 world champions each in its own league.

关键词： Robots Robotics Computer simulations algorithm development Indium nitride Motion estimation Robotic systems Sensors Ions Process control

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Hierarchical mask data preparation and special fracturing techniques in MGS

Hierarchical mask data preparation and special fracturing te...

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15th European Conference on Mask Technology for Integrated Circuits and Microcomponents

作者： Bürger, B Bätz, U Kunze, K Wolf, H Fraunhofer IMS Dresden Germany

ISBN: (纸本)0819431397

MGS is a layout postprocessor software including a fracturing engine for Leica's ZBA e-beam writers. With the ZBA series including the new ZBA300 and its ability to write submicrometer masks for advanced technologies two main tasks have to be mastered in data preparation: 1. Processing of large and dense layouts. 2. Contribution to increased mask quality by optimized fracturing. These challenges are not restricted to the ZBA tools only;on the contrary they are of general interest for data preparation.

关键词： Magnesium Photomasks algorithm development Edge roughness Integrated circuit design Integrated circuits Liquid crystals Lithography Sensors Structural design

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Nitrogen dioxide and ozone retrieval from simulated SAGE III transmission measurements

Nitrogen dioxide and ozone retrieval from simulated SAGE III...

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3rd Optical Spectroscopic Techniques and Instrumentation for Atmospheric and Space Research

作者： Bazureau, A Brogniez, C Lenoble, J Univ Sci & Technol Opt Atmospher Lab Lille France

ISBN: (纸本)0819432423

A detailed discussion on the inversion algorithm developed by the Laboratoire d'Optique Atmospherique, University of Lille, France, for the analysis of the Stratospheric Aerosol and Gas Experiment III (SAGE III) solar occultation data is presented. The scope of the paper is limited to nitrogen dioxide, ozone and aerosol retrieval. The forward model algorithm for calculating atmospheric transmittances in the two SAGE III solar channels, at 440 nm and at 600 nm, is presented. Then the inversion algorithm is introduced, accomplished in two sequential steps : the first one is the spatial inversion of the simulated slant optical thickness profile to obtain the extinction coefficient profile and the second is the spectral inversion of the extinction coefficient at each altitude to separate gas and aerosol contributions by using a least squares method over the spectral signatures. Error analysis is also discussed : the results of this analysis indicate regression error of 1% or less in the aerosol retrieval, of 0.1% or less for the ozone retrieval and of about 0.1% for the nitrogen dioxide retrieval. The paper also discuss on the correlation between the relative differences and the relative contribution of the considered constituents in the total extinction coefficient and then can determine the inversion algorithm's performances.

关键词： Aerosols NOx Mass attenuation coefficient Ozone Atmospheric modeling Atmospheric particles Absorption Computer simulations Error analysis algorithm development

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