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AFM: A valid reference tool?

AFM: A valid reference tool?

引用

Conference on Metrology, Inspection, and Process Control for Microlithography XII

作者： Marchman, HM Dunham, N Texas Instruments Inc Dallas TX 75243 USA

ISBN: (纸本)0819427772

To first order, the use of AFM as a reference tool potentially offers a large improvement over previous techniques for matching and calibration of on-line CD-SEMs. However, the utility of this approach depends on the validity of the assumption that AFM precision and accuracy are relatively constant with sample type. A full-factorial design using analysis of variations (ANOVA) has been employed in order to gauge the precision of a non-contact mode CD AFM over multiple sample types and instrument conditions. The effects of material layer, pattern geometry, feature shape, and tip size on AFM precision will be presented.

关键词： Scanning electron microscopy Atomic force microscopy Calibration Critical dimension metrology Silicon Edge roughness Line scan image sensors Servomechanisms algorithm development Signal detection

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Soft computing applications: the advent of hybrid systems

Soft computing applications: the advent of hybrid systems

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Conference on Applications and Science of Neural Networks, Fuzzy Systems, and Evolutionary Computation

作者： Bonissone, PP Gen Elect Corp Res R&D Schenectady NY 12309 USA

ISBN: (纸本)0819429104

Soft Computing is a new field of Computer Sciences that deals with the integration of problem-solving technologies such as Fuzzy Logic, Probabilistic Reasoning, Neural Networks, and Genetic algorithms. Each of these technologies provide us with complementary reasoning and searching methods to solve complex, real-world problems. We will analyze some of the most synergistic combinations of Soft Computing technologies, with an emphasis on the development of smart algorithm-controllers, such as the use of FL to control GAs and NNs parameters. We will also discuss the application of GAs to evolve NNs (topologies or weights) or to tune FL controllers;and the implementation of FL controllers as NNs tuned by backpropagation-type algorithms. We will conclude with a detailed description of a GA-tuned Fuzzy Controller to implement a train handling control.

关键词： Fuzzy logic algorithm development Genetic algorithms Systems modeling Neural networks Computer programming Computing systems Device simulation Control systems Evolutionary algorithms

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Reentry survivability and risk

Reentry survivability and risk

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Conference on Image Intensifiers and Applications;and Characteristics and Consequences of Space Debris and Near-Earth Objects

作者： Fudge, ML ITT Syst Alexandria VA 22303 USA

ISBN: (纸本)0819428892

This paper is the culmination of the research effort which was reported on last year while still in-progress. As previously reported, statistical methods for expressing the impact risk posed to space systems in general land the International Space Station (IISS) in particular) by other resident space objects have been examined. One of the findings of this investigation is that there are legitimate physical modeling reasons for the common statistical expression of the collision risk. A combination of statistical methods and physical modeling is also used to express the impact risk posed by reentering space systems to objects of interest (e.g., people and property) on Earth. One of the largest uncertainties in the expressing of this risk is the estimation of survivable material which survives reentry to impact Earth's surface. This point was demonstrated in dramatic fashion in January 1997 by the impact of an intact expendable launch vehicle (ELV) upper stage near a private residence in the continental United States. Since approximately half of the missions supporting ISS will utilize ELVs, it is appropriate to examine the methods used to estimate the amount and physical characteristics of ELV debris surviving reentry to impact Earth's surface. This report details reentry survivability estimation methodology, including the specific methodology used by ITT Systems' (formerly Kaman Sciences) "SURVIVE' model. The major change to the model in the last twelve months has been the increase in the fidelity with which upper-atmospheric aerodynamics has been modeled. This has resulted in an adjustment in the factor relating the amount of kinetic energy loss to the amount of heat entering the reentering body, and also validated and removed the necessity for certain empirically-based adjustments made to the theoretical heating expressions. Comparisons between empirical results (observations of objects which have been recovered on Earth after surviving reentry) and SURVIVE estimat

关键词： Optical spheres Titanium Aluminum Systems modeling Rockets Atmospheric modeling Statistical modeling algorithm development Earth's atmosphere Statistical methods

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Signal to clutter measurement and ATR performance

Signal to clutter measurement and ATR performance

引用

Conference on Automatic Target Recognition VIII

作者： Sims, SRF USA Aviat & Missile Command Missile Res Dev & Eng Ctr IPMGRDAMSAM Redstone Arsenal AL 35898 USA

ISBN: (纸本)0819428205

Many different ATR algorithms have had their performance quantified for more than twenty years. These algorithms have been tested on data sets with significantly varying difficulty, however, the quantification of the data set difficulty has previously only been coarsely partitioned based on target operational state and the meteorological environment. Also, this has typically been done without mention of the correlation between the training and test set. In this paper we show the quantification of the signal to clutter measure (SCM) versus ATR performance, specifically the typical probabilities of detection (P_d), recognition (P_r) and false alarm rates directly. This SCM provides a basis for knowing what these performance statistics actually mean, since a 'good' or 'bad' set of performance numbers taken without quantified knowledge of the difficulty level of the data generally does not reflect the limitations or capabilities of the ATR algorithm(s) or provide an especially relevant basis for comparison.

关键词： Automatic target recognition Particle filters Detection and tracking algorithms Target detection Target recognition Image filtering Signal detection algorithm development Meteorology Missiles

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Performance of multiresolution pattern classifiers in medical image encoding from wavelet coefficient distributions

Performance of multiresolution pattern classifiers in medica...

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Medical Imaging 1998 Conference on Image Processing

作者： Mitra, S Wilson, M Kompella, S Texas Tech Univ Dept Elect Engn Lubbock TX 79409 USA

ISBN: (纸本)0819427837

The fidelity of the reconstructed image in an image coding/decoding scheme and the lowest transmission bit rate from rate-distortion theory can be predicted provided the image statistics are known. Currently popular subband image coding assumes Gaussian source with memory for optimal performance. However, most images do not follow the ideal distribution. The advantage of subband coding lies in the fact that the wavelet coefficients in decomposed subimages have probability distribution functions ( pdf s) that can be modeled as a generalized Gaussian when proper parameters are chosen experimentally. However, the filter length chosen for digital implementation of a specific wavelet is crucial in shaping the pdf characteristics and hence in the ability to predict the achievable bit late at minimum distortion in a quantization scheme. We have analyzed the pdf s of a number of wavelets and chosen filter lengths providing the best fit to a generalized Gaussian distribution for encoding an image by vector quantization of multiresolution wavelet subimages using an adaptive clustering. Our results demonstrate that the performance of the adaptive vector quantizer improves significantly when wavelet filter lengths are chosen to fit the generalized Gaussian distribution.

关键词： Wavelets Image compression Quantization Computer programming Distortion Medical imaging Gaussian filters Image transmission Digital filtering algorithm development

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Nonlinear FDTD analysis of Back-to-back varactor diode frequency tripler

Nonlinear FDTD analysis of Back-to-back varactor diode frequ...

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4th International Conference on Millimeter and Submillimeter Waves and Applications

作者： Ren, JS Wang, XD Hwu, RJ Univ Utah Dept Elect Engn Salt Lake City UT 84112 USA

ISBN: (纸本)0819429201

A quasi-optical diode-grid frequency tripler array was analyzed by the Finite-Difference Time-Domain (FDTD) method in this paper. A nonlinear algorithm was successfully developed in order to deal with the nonlinear characteristic of a varactor. The results obtained for a test case showed excellent agreement between the FDTD and a direct mathematical method. The detailed analysis of a frequency tripler array employing back-to-back AlGaAs/GaAs heterojunction varactor was given.

关键词： Finite-difference time-domain method algorithm development Mirrors Diodes Heterojunctions Extremely high frequency Virtual colonoscopy Astatine Magnetism Electrical engineering

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Damage detection of bridge-like structures using neural networks

Damage detection of bridge-like structures using neural netw...

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Conference on Smart Structures and Materials - Smart Systems for Bridges, Structures, and Highways

作者： Valentin-Sivico, J Rao, VS Samanthula, V Univ Missouri Dept Elect Engn Rolla MO 65409 USA

ISBN: (纸本)0819427691

It is well known that the static and dynamic structural response of materials can indirectly indicate the health of structural systems. The changes in natural frequencies, mode shapes, and stiffness matrices due to damage are utilized for determination of occurrence, location and extent of damages. In recent years, many researchers have developed global damage detection algorithms using structural modal response. However most of these methods are off-line techniques based on frequency domain data. In this paper we have proposed real-time damage detection methods based on time domain data. In this method damages in the structure can be detected while the structure is kept on its regular use. The algorithm determines reduction in stiffness and/or damping of the structural elements, while assuming that the mass of the structure does not vary due to damage. This algorithm is based on the state space representation of the structure, which is identified from the time domain data. We have also determined a linear transformation matrix for converting the identified model into a state space representation based on physical coordinates of the structural system. The self-organization and learning capabilities of neural networks can be effectively used for structural damage detection purpose. In this paper a hybrid method for the damage detection has been proposed by combining the features of best achievable eigenvector method and neural network classification techniques for detection of location and extent of damage in the structural systems. The feasibility of the proposed method is verified by using simple three-bar truss structure and a cantilever beam test article.

关键词： Damage detection Neural networks System identification Systems modeling Detection and tracking algorithms Matrices algorithm development Computing systems Evolutionary algorithms Intelligence systems

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Capabilities for the retrieval of coastal water constituents (case II) using multispectral satellite data

Capabilities for the retrieval of coastal water constituents...

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Conference on Earth Surface Remote Sensing II

作者： Hetscher, M Krawczyk, H Neumann, A Walzela, T Zimmermann, G DLR German Aerosp Ctr Inst Space Sensor Technol D-12489 Berlin Germany

ISBN: (纸本)0819429554

The difficulty of the remote sensing of coastal water is the presence of more than one constituent with high variability ranges, different correlation and spectral behaviour. They are superimposing in their influence on the resulting total spectrum. Simple ratio algorithms applied to remote sensing data fail on the quantitative determination of the single constituents. However, coastal regions are of great interest for remote sensing since most of the consequences of urbanisation are manifested here. Far the improvement of remote sensing of coastal zones it is not only necessary to built a new generation of sensors that offer spectrally higher resolved data, but one has to develop a new methodology that allows the separation and determination of the water constituents based on the entire spectral signature of the different components of the water body. The imaging spectrometer MOS flying on the Indian remote sensing satellite IRS-P3 provides since March 1996 remote sensing data in 13 spectral channels far the scientific community. We implemented a new methodological approach to derive different case II water constituents as well as atmospheric turbidity for the application of MOS-data in coastal regions. A new point of the method is the uniform consideration of atmospheric and water constituent influences on the remote sensing signal. The payer will present a short overview on the algorithm's essentials and examples for the large variability of coastal waters around Europe basing on the results of the retrieved water constituents using the MOS algorithm. It will demonstrate the promising potential of this new algorithm for discrimination of single constituents under case Ii conditions. Derived maps of chlorophyll like pigments, sediments and aerosol optical thickness are shown and will he discussed.

关键词： Remote sensing algorithm development Atmospheric modeling Scattering Atmospheric corrections Absorption Satellites Molybdenum Ocean optics Spectroscopy

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Image pre-processing by neuron-like algorithms

Image pre-processing by neuron-like algorithms

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International Symposium on Optical Information Science and Technology (OIST 97) - Optical Recording Mechanisms and Media

作者： Kuznetsov, SO Nuidel, IV Panfilov, AI Yakhno, VG Russian Acad Sci Inst Appl Phys Nizhnii Novgorod 603600 Russia

ISBN: (纸本)0819428523

The problem of image pre-processing by neuron-like algorithms concerns development of systems and methods of image processing in parallel regime. The processing algorithms of grey-tone images to sets of simplified binary images by software of neuron-like filtration (based on the models of homogeneous neural networks) are considered in the paper and partially realised. The time of image processing is calculated. Carrying out of the required set of operations with image is possible according to the convolution function view. The neural network parameters (the type of coupling function and type of element response to the external influence) are selected in accordance with the solution which we want to receive. The programme uses function similar to the Mask Convolution function. This function as any other functions basic for image processing are realised in the Intel Corporation "Recognition Primitives Library (RPL) for the Pentium Processor" with great efficiency. Library works under Windows NT. Performed calculations confirm that neuron-like model may be applied for real time image processing using RPL.

关键词： Image processing algorithm development Convolution Neural networks Chemical elements Detection and tracking algorithms Binary data Evolutionary algorithms Real time image processing Systems modeling

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Ground target infrared signature uncertainties and their effect on simulation and validation

Ground target infrared signature uncertainties and their eff...

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Targets and Backgrounds - Characterization and Representation IV

作者： Sanders, JS Taylor, SB Simulat Technol Inc Huntsville AL 35807 USA

ISBN: (纸本)0819428248

Data and analyses demonstrating the variability and uncertainties in infrared (IR) ground target signatures are presented. The uncertainties are due to a variety of factors ranging from environmental effects to differences in vehicle configurations. Caution must be exercised when using predictive models for simulations because these models are usually pristine and present repeatable signatures for a given set of inputs. Actual vehicle signatures show the effects of wear and tear, aging, poor maintenance, etc., and these effects will vary from vehicle to vehicle. Vehicles encountered in real-life often have a variety of crew-specific signature components that will affect the signature of a vehicle as well, such as stowage of supplies or spare parts. It is important therefore to develop the concept of a "representative" target and take into consideration the expected variations from a baseline signature. It is common in an infrared scene simulation to have a single signature for a given type of vehicle when more than one of the vehicles is present in the scene at the same time. Limiting the target data in this manner can lead to biased results as observers and algorithms can memorize a particular signature. To avoid this, ground target signatures used for training simulations and algorithm development should incorporate variability in the target signatures. Varying ground target signatures in this manner will provide for more realistic sensor performance assessment, training, and algorithm development. The primary signature factor affecting training and algorithm development will be vehicle configuration. Model developers often use temperature deltas when assessing the fidelity of an IR signature model. When validating an infrared signature model, whether it is digital or a target surrogate, the model developer should take into account the uncertainty in the target signature caused by measurement errors and target surface optical variations. Portions of a vehicle wher

关键词： Infrared signatures Data modeling Temperature metrology Thermal modeling algorithm development Infrared radiation Thermography Aluminum Combustion Image enhancement

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