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检索条件"主题词=Algorithm development"

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THERMAL DESIGN METHODOLOGY OF HOT AND CHILL PLATES FOR PHOTOLITHOGRAPHY 8

THERMAL DESIGN METHODOLOGY OF HOT AND CHILL PLATES FOR PHOTO...

引用

Conference on IC Inspection, Metrology, and Process Control VIII, at the SPIE Microlithography 1994 Symposium

作者： DEWITT, DP MACK, CA NIEMOELLER, TC YETTER, G PURDUE UNIV SCH MECH ENGNW LAFAYETTEIN 47907

ISBN: (纸本)0819414913

The major requirement for hot- and chill-plate designs is that they provide repeatable and uniform process conditions thereby assuring consistent photoresist quality. A collection of feature-based thermal models has been developed to predict temperature-time histories considering plate construction features including chuck heating/cooling methods, sensor placement with a PID control algorithm, and effects due to vacuum grooves, access holes, support pins and edge-gap. These models can be used by designers and process technologists to assess new approaches, optimize current design and set performance specifications.

关键词： Optical lithography algorithm development Performance modeling Photoresist materials Sensors Thermal modeling

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INHERENT OPTICAL PROPERTY ESTIMATION IN OCEAN WATER USING THE ZANEVELD-WELLS algorithm 12

INHERENT OPTICAL PROPERTY ESTIMATION IN OCEAN WATER USING TH...

引用

Ocean Optics XII Conference

作者： HOLL, LJ MCCORMICK, NJ UNIV WASHINGTON DEPT MECH ENGNSEATTLEWA 98195

ISBN: (纸本)081941574X

The Zaneveld-Wells technique for determining the inherent optical properties of ocean water is based on calculating the angle-integrated moments of the radiant light field at various depths by an inversion algorithm based on the radiative transfer equation. The hypothesis is that N $PLU 1 sensors can be used to obtain N `inherent optical expansion coefficients,' A$-n$/, from which the single scattering albedo and N-1 expansion coefficients of the volume scattering function can be calculated. We have evaluated the performance and limitations of the proposed algorithm. Results from numerical testing indicate that this technique is a promising way to estimate optical properties of some ocean waters, but attempts to estimate too many expansion coefficients give spurious results for the higher-order coefficients in other cases. Recommendations are given for improving the implementation of the algorithm.

关键词： Ocean optics Scattering Sensors Error analysis Water Optical properties algorithm development Absorption Signal attenuation Radiative transfer

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COMPUTER-ASSISTED PERCEPTION AIDS PULMONARY-NODULE DETECTION

COMPUTER-ASSISTED PERCEPTION AIDS PULMONARY-NODULE DETECTION

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Conference on Image Perception: Medical Imaging 1994

作者： NODINE, CF KUNDEL, HL UNIV PENN PENDERGRASS LABPHILADELPHIAPA 19104

ISBN: (纸本)0819414611

We have been monitoring the eye fixations of radiologists in order to identify why errors occur in the detection of pulmonary nodules. From these studies we have concluded that most errors are due not to overlooking, but to failure to report nodules that have been fixated by the eyes, often for prolonged gaze durations. Observers visually attend to the nodule, perhaps even apply decision criteria, but falsely decide that it is not the target of search. Because omission errors are associated with clusters of eye fixations having prolonged gaze durations, visual dwell can be used to predict the locations of potentially-missed nodules. A computer-assisted perception (CAP) algorithm has been developed to localize potential lung nodules based on measuring the durations of clusters of eye fixations during search for nodules. In an experiment to test the effectiveness of CAP, observers' eye-position was recorded during initial image reading. This was followed by CAP which consisted of playing back the highlighted locations of prolonged dwells indicating sites of potentially-missed nodules. The observers evaluated each CAP site for nodules and revised their initial decisions. For comparison, the same observers read the images a second time, after a two- month interval, without CAP in a counterbalanced design. The CAP condition resulted in a 16 percent increase in detection performance (AFROC) compared to the non-CAP condition.

关键词： Eye Visualization Detection and tracking algorithms Lung algorithm development Chest Image enhancement Signal detection Target detection Cancer

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ADAPTIVE APPROACHES FOR SAR PROCESSING

ADAPTIVE APPROACHES FOR SAR PROCESSING

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Conference on algorithms for Synthetic Aperture Radar Imagery

作者： SAZONOV, VV AL MINTZ RADIOTECH INST MOSCOW 125083RUSSIA

ISBN: (纸本)0819415340

High resolution in synthetic aperture radar (SAR) could be achieved by the convolution of the received signal with the reference function. The right selection of the reference function is necessary to obtain high accuracy in this processing. The reference function of the azimuth processing is characterized by two parameters: the central Doppler frequency and the speed of the azimuth signal frequency modulation. The principles of the proposed algorithms are discussed in this report. These algorithms are intended for more precise estimation of the reference function parameters; they utilize received realization of the reflected signal.

关键词： Synthetic aperture radar Modulation Ions Signal processing Reflectors Convolution Doppler effect algorithm development Frequency modulation Image processing

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SAMPLE-3D BENCHMARKS INCLUDING HIGH NA AND THIN-FILM EFFECTS 7

SAMPLE-3D BENCHMARKS INCLUDING HIGH NA AND THIN-FILM EFFECTS

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Optical/Laser Microlithography VII Conference

作者： HELMSEN, JJ YEUNG, M LEE, D NEUREUTHER, AR UNIV CALIF BERKELEY DEPT ELECT ENGN & COMP SCIBERKELEYCA 94720

ISBN: (纸本)0819414921

A method of imaging thin films under high NA conditions is described and implemented. This method is based on the Hopkins' theory. This technique is benchmarked on two examples. Run times and profiles are reported. This method is used to calculate the etch rate of the photoresist and is used as an input to a development simulator for one of the benchmarks. Three methods of simulating photolithographic development are cell removal, ray-trace, and advection. Each solves for the advancing surface as the motion of a contour of an imaginary function under the Hamilton-Jacobi equation. Each method has advantages and limitations in reaching the goal of a fast, accurate and easy to maintain photolithography simulator. A discussion of the algorithms necessary for a ray-trace simulator are also included. Aspects of proper mesh maintenance and implementing correct boundary condition solutions are demonstrated, with the Hamilton-Jacobi formulation used as justification. A new deloop algorithm specially designed for ray-trace advancement is presented. A new triangulation technique, specially designed for surface advancement simulators is outlined.

关键词： Photoresist materials Optical lithography Thin films Etching Photoresist developing Computer simulations Plasma etching algorithm development Anisotropy Ions

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RECONSTRUCTION AND RESTORATION METHODS IN CONE-BEAM TOMOGRAPHY

RECONSTRUCTION AND RESTORATION METHODS IN CONE-BEAM TOMOGRAP...

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Conference on Image Processing

作者： HIRIYANNAIAH, HP SATYARANJAN, M RAMAKRISHNAN, KR TATA ELXSI INDIA LTD BANGALOREINDIA

ISBN: (纸本)081941462X

A method for 3D cone beam tomographic reconstruction from limited data has been developed. This method uses a modified form of convolution backprojection and projection onto convex sets for handling the limited data problem. Convex constraints applicable to cone beam projection data have been identified, and their associated projection operators have been used. The algorithm has been tested with simulated data for circular source point trajectory. The method however is independent of source point geometry, and will be useful in any limited view cone beam reconstruction.

关键词： Reconstruction algorithms Tomography 3D image processing Image processing Radon transform X-rays algorithm development Fourier transforms Detector arrays Fluctuations and noise

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Digital image processing in the Xerox DocuTech document processing system

Digital image processing in the Xerox DocuTech document proc...

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Document Recognition

作者： Lin, Ying-wei Xerox Corp. (United States)

ISBN: (纸本)081941476X

This paper describes the realtime image processing features in the Xerox DocuTech document processing system. The image processing features offered include image enhancement, halftone screen removal (de-screening) with an FIR low pass filter, and an image segmentation algorithm developed by Xerox, which can be used for documents with text and high frequency halftone images, such as pages from typical magazines. The image segmentation algorithm uses a modified auto correlation function approach to detect halftone areas on the document. With this set of image processing features, it is possible to handle a wide variety of input documents on the scanner, and generate high quality output prints.

关键词： Halftones Image processing Correlation function Image enhancement Image quality algorithm development Digital image processing Image segmentation Image processing algorithms and systems Printing

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DUAL-ENERGY COMPUTED RADIOGRAPHY - IMPROVEMENTS IN PROCESSING

DUAL-ENERGY COMPUTED RADIOGRAPHY - IMPROVEMENTS IN PROCESSIN...

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Conference on Image Processing

作者： ERGUN, DL PEPPLER, WW DOBBINS, JT ZINK, FE KRUGER, DG KELCZ, F DEBRUIJN, FJ BELLERS, EW WANG, Y ALTHOF, RJ WIND, MGJ PHILIPS MED SYST N AMER SHELTONCT 06484

ISBN: (纸本)081941462X

We have reported on a single-exposure dual-energy system based on computed radiography (CR) technology. In a clinical study conducted over a two year period, the dual-energy system proved to be highly successful in improving the detection (p=0.0005) and characterization (p=0.005) of pulmonary nodules when compared to conventional screen-film radiography. The basic components of our dual-energy detector system include source filtration with gadolinium to produce a bi-modal x-ray spectrum and a cassette containing four CR imaging plates. The front and back plates record the low-energy and high-energy images, respectively, and the middle two plates serve as an intermediate filter. Since our initial report, a number of improvements have been made to make the system more practical. An automatic registration algorithm based on image features has been developed to align the front and back image plates. There have been two improvements in scatter correction: a simple correction is now made to account for scatter within the multi-plate detector; and a correction algorithm is applied to account for scatter variations between patients. An improved basis material decomposition (BMD) algorithm has been developed to facilitate automatic operation of the algorithm. Finally, two new noise suppression techniques are under investigation: one adjusts the noise filtering parameters depending on the strength of edge signals in the detected image in order to greatly reduce quantum mottle while minimizing the introduction of artifacts; a second routine uses knowledge of the region of valid low-energy and high-energy image data to suppress noise with minimal introduction of artifacts. This paper is a synthesis of recent work aimed at improving the performance of dual-energy CR conducted at three institutions: Philips Medical Systems, the University of Wisconsin, and Duke University.

关键词： algorithm development Tissues Image processing Bone Point spread functions Denoising Detection and tracking algorithms Radiography Sensors Chromium

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Extraction of object lines in engineering drawings

Extraction of object lines in engineering drawings

引用

Document Recognition

作者： Lai, Chan P. Kasturi, Rangachar The Pennsylvania State Univ. (United States)

ISBN: (纸本)081941476X

Classification of object lines in mechanical part drawings is a critical problem for automated conversion of drawings from paper medium to CAD databases. We describe new methods for classifying object lines. These methods include section line detection, hidden line detection, centerline detection and object line extraction. A self-supervised approach which includes a spacing estimation step and a recognition step to extract section lines is described. A general purpose algorithm that not only detects dashed lines but also classifies them based on their attributes is described. These attributes are used for classification of detected dashed lines as hidden lines or centerlines. Object line extraction facilitates intelligent interpretation of geometric objects for integration with CAD/CAM systems.

关键词： Databases Computer aided design algorithm development Detection and tracking algorithms Image segmentation System integration Surface plasmons Gallium Silicon Computer science

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REFERENCE-BASED AUTOMATIC VISUAL INSPECTION OF ELECTRONIC PACKAGING USING A PARALLEL IMAGE-PROCESSING SYSTEM

REFERENCE-BASED AUTOMATIC VISUAL INSPECTION OF ELECTRONIC PA...

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20th Annual SPIE Conference on Machine Vision Applications in Industrial Inspection

作者： DORUNDO, AD MANDEVILLE, JR WU, FY IBM CORP CTR MFG TECHNOLREDMONDWA 98053

ISBN: (纸本)0819414786

We introduce the Advanced Thin Film Inspection System (ATFIS), a state-of-the-art automatic visual inspection (AVI) system developed by IBM that integrates sophisticated subsystems to inspect advanced multilayer electronic packaging. The image acquisition and 'image segmentation' (material discrimination) is based on a high-radiance illumination, multiband line scan cameras and the Low-level Image Segmentation Architecture (LISA). LISA employs a decision-theoretic approach that classifies pixels according to a decision function defined over a multidimensional 'feature space' (for example, local or global image statistics). The image processing and pattern analysis is based on the Parallel Image Processing System for Inspection (PIPSI) architecture. PIPSI's key features include exploitation of emerging hardware and software technologies; highly programmable to adapt quickly to changing functional requirements; and exploitation of image and operator parallelism, making it highly scalable to meet manufacturing requirements. The pattern analysis algorithm is a synthesis of reference-based comparison and design-rule analysis.

关键词： Image segmentation Image processing Inspection Control systems algorithm development Image processing algorithms and systems Human-machine interfaces Image acquisition Image analysis Image registration

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