检索结果-内蒙古大学图书馆

Characterization of line edge roughness in resist patterns by using Fourier analysis and auto-correlation function

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 2003年第6B期42卷 3763-3770页

作者： Yamaguchi, A Komuro, O Hitachi Ltd Cent Res Lab Kokubunji Tokyo 1858601 Japan Hitachi High Technol Corp Hitachi Ibaraki 3128504 Japan

We have evaluated periodicity of line edge roughness (LER) in electron beam (EB), KrF, and ArF resists. A set of 512 edge-point coordinates was obtained for a scanning electron microscope (SEM) image of one edge by using an in-house image-processing program. The edge-point fluctuations were given and analyzed by Fourier transform and auto-correlation function. Fourier analysis has shown that (1) the spatial frequency (f) distribution of LER can be described with the 1/f-rule and (2) an additional component appears at around 100 nm in the results from several kinds of ArF resists. The auto-correlation-function method gives histograms of the basic period of LER. The results from this method are consistent with those from Fourier analysis and show that several ArF resist samples have a specific period distribution at around 240 nm. Results from both of these methods show that not only the resist materials but also the lithographic tools and processes affect the period distribution.

关键词： line edge roughness periodicity Fourier analysis auto-correlation function

来源：评论

学校读者我要写书评

暂无评论

Application of two-point orientation auto-correlation fucntion (TP-OACF)

引用

MATERIALS TRANSACTIONS 2006年第5期47卷 1313-1316页

作者： Choi, Yoon Suk Rollett, Anthony D. Piehler, Henry R. Universal Energy Syst Inc Dayton OH 45432 USA Carnegie Mellon Univ Dept Mat Sci & Engn Pittsburgh PA 15213 USA

A two-point orientation auto-correlation function (TP-OACF) was developed in order to quantify the spatial distribution of targeted texture components. An example of a TP-OACF was demonstrated using an idealized orientation map. Characteristics of the spatial distribution of major texture components in 6022-T4 Al sheets deformed in plane-strain tension were also quantified using a TP-OACF. The results showed that {110} < 112 > and {123} < 634 > orientations (in {ND} < PD > notation, where PD is the pulling direction) tend to form localized diagonal and horizontal bands through the thickness, respectively, after the plane-strain deformation. The cube orientation on the surface initially showed a relatively strong texture band along the RD, but this banding behavior was less significant after the plane-strain deformation.

关键词： crystallographic texture spatial distribution auto-correlation function disorientation characterization method

来源：评论

学校读者我要写书评

暂无评论

Filter diagonalization with finite Fourier transform eigenfunctions

引用

JOURNAL OF MATHEMATICAL CHEMISTRY 2006年第1期40卷 43-47页

作者： Levitina, T. Brandas, E. J. TU Braunschweig Inst Computat Math D-38106 Braunschweig Germany Uppsala Univ Dept Quantum Chem SE-75120 Uppsala Sweden

Below, we briefly report on the progress in the development of the Filter Diagonalization technique when filtering is carried out with the aid of Finite Fourier Transform (FFT) eigenfunctions. During recent years interest in these functions, also known as 'prolates', or 'slepians', has increased among scientists doing research in the field of signal processing. The main explanation to this follows from the set of very special extremal and orthogonality properties exibited by the FFT eigenfunctions. Recent results of Walter and Shen on sampling with prolate spheroidal functions will necessary produce a new wave of interest. In the presented, Filter diagonalization machinery, we show that the sampling formula of Walter and Shen simplifies essentially the computation of matrix elements as certain 2D-integrals involving FFT eigenfunctions.

关键词： filter diagonalization spectral analysis auto-correlation function finite Fourier transform prolates sampling theorem

来源：评论

学校读者我要写书评

暂无评论

Topography measurements and applications

Topography measurements and applications

引用

3rd International Symposium on Precision Mechanical Measurements

作者： Song, Junfeng Vorburger, Theodore Natl Inst Stand & Technol Gaithersburg MD 20899 USA

ISBN: (纸本)0819463515

Based on auto- and cross-correlation functions (ACF and CCF), a new surface parameter called profile (or topography) difference, D-s, has been developed for quantifying differences between 2D profiles or between 3D topographies with a single number. When D-s = 0, the two compared 2D profiles or 3D topographies must be exactly the same (point by point). A 2D and 3D topography measurement system was established at NIST. This system includes data acquisition stations using a stylus instrument and a confocal microscope, and a correlation program using the proposed parameters D-s and the cross-correlation function maximum CCFmax. Applications in forensic science and surface metrology are described;those include profile signature measurements for 40 NIST Standard Reference Material (SRM) 2460 standard bullets, and comparisons of profile measurements with four different techniques. An approach to optimizing the Gaussian filter long wavelength cutoff, lambda c, is proposed for topography measurements.

关键词： surface metrology auto-correlation function ACF cross-correlation function CCF forensic science ballistics identification

来源：评论

学校读者我要写书评

暂无评论

Evaluation of decay ratio of BWRs using singular value decomposition method

引用

JOURNAL OF NUCLEAR SCIENCE AND TECHNOLOGY 2005年第2期42卷 169-182页

作者： Tsuji, M Shimazu, Y Hokkaido Univ Grad Sch Engn Dept Nucl Engn Kita Ku Sapporo Hokkaido 0608628 Japan

A new rnethod for evaluating the decay ratio of boiling water reactors (BWR) using the singular value decomposition (SVD) method was proposed. In the SVD method, time-series data are decomposed into uncorrelated signal components and the auto-correlation functions (ACF) of these decomposed components are calculated. The ACF having a form of damping oscillation is related to the complex conjugate dominant poles of the frequency transfer function of BWR dynamics. The decay ratio and the natural frequency can be determined by applying a least square fitting to the ACE The proposed method was applied to LPRM and APRM signals measured during stability experiments performed in Ringhals-1 at BOC-14. It was found that LPRM signals that were measured under 9 operating conditions were consistently decomposed into three type components whose ACFs had the forms of slow attenuation, fast attenuation and damping oscillation. Under the respective operating conditions, LPRM signals measured at various positions were decomposed into the ACFs with almost the same values of the decay ratio and the natural frequency. In virtue of this high decomposition performance, the decay ratios can be estimated with small standard deviations compared with conventional methods. Some guidelines for an accurate determination of decay ratios are also presented.

关键词： decay ratio BWR type reactors stability monitoring space embedding singular value decomposition auto-correlation function covariance matrix autoregressive model identification local power range monitor Ringhals-1

来源：评论

学校读者我要写书评

暂无评论

Stability monitoring for BWR based on singular value decomposition method using artificial neural network

引用

JOURNAL OF NUCLEAR SCIENCE AND TECHNOLOGY 2005年第12期42卷 1054-1066页

作者： Tsuji, M Michishita, H Shimazu, Y Hokkaido Univ Grad Sch Engn Dept Nucl Engn Kita Ku Sapporo Hokkaido 0608628 Japan Fujitsu Ltd Makuhari Syst Lab Mihama Ku Chiba 2618588 Japan

A new method for evaluating the decay ratios in a boiling water reactor (BWR) using the singular value decomposition (SVD) method had been proposed. In this method, a signal component closely related to the BWR stability can be extracted from independent components of the neutron noise signal decomposed by the SVD method. However, real-time stability monitoring by the SVD method requires an efficient procedure for screening such compoments. For efficient screening, an artificial neural network (ANN) with three layers was adopted. The trained ANN was actually applied to decomposed components of local power range monitor (LPRM) signals that were measured in stability experiments conducted in the Ringhals-1 BWR. In each LPRM signal, multiple candidates were screened from the decomposed components. However, decay ratios could be estimated by introducing appropriate criterions for selecting the most suitable component among the candidates. The estimated decay ratios are almost identical to those evaluated by visual screening in a previous study. The selected components commonly have the largest singular value, the largest decay ratio and the least squared fitting error among the candidates. By virtue of excellent screening performance of the trained ANN, the real-time stability monitoring by the SVD method can be applied in practice.

关键词： decay ratio BWR type reactors stability monitoring singular value decomposition auto-correlation function artificial neural network back-propagation method local power range monotor Ringhals-1

来源：评论

学校读者我要写书评

暂无评论

Restricted diffusion of DNA segments within the isolated Escherichia coli nucleoid

引用

JOURNAL OF STRUCTURAL BIOLOGY 2005年第2期150卷 226-232页

作者： Cunha, S Woldringh, CL Odijk, T Delft Univ Technol Kluyver Inst Biotechnol Sect Theory Complex Fluids NL-2628 BC Delft Netherlands Univ Amsterdam Swammerdam Inst Life BioCtr Amsterdam NL-1098 SM Amsterdam Netherlands

To study the dynamics and organization of the DNA within isolated Escherichia coli nucleoids, we track the movement of a specific DNA region. Labeling of such a region is achieved using the Lac-O/Lac-I system. The Lac repressor-GFP fusion protein binds to the DNA section where tandem repeats of the Lac operator are inserted, which allows us to monitor the motion of the DNA. The movement of such a GFP spot is followed at 48 ms temporal resolution during 12 s. The spots are found to diffuse within a confined space, so that the nucleoid appears to behave like a viscoelastic network. The distribution of the '' particle '' position in time can be fitted to a Gaussian function indicating that the motion of the particle is Brownian. Ail average self-diffusion constant D-s = 0.12 mu m(2) s(-1) is derived via the time auto-correlation functions of the displacement and is compatible with the collective diffusion coefficient measured previously by dynamic light scattering. Restriction of a DNA sequence to a small region of the nucleoid is tentatively related to the existence of so-called supercoiling domains. (c) 2005 Elsevier Inc. All rights reserved.

关键词： isolated nucleoids E. coli oriC-GFP particles auto-correlation function Brownian motion restricted diffusion

来源：评论

学校读者我要写书评

暂无评论

Effects of implantation energy and annealing temperature on the structural evolution of Ge⁺-implanted amorphous Si

引用

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 2005年第1-2期237卷 384-389页

作者： He, JH Lin, HH Wu, WW Chen, LJ Natl Tsing Hua Univ Dept Mat Sci & Engn Hsinchu 300 Taiwan

High-resolution transmission electron microscopy in conjunction with autocorrelation function analysis have been applied to investigate the evolution of structural order in Ge+-preamorphized silicon layers. (001)Si wafers were preamorphized with 5 and 10 keV Ge+ to a dose of 5 x 10(15) ions/cm(2). A higher density of embedded nanocrystallites was found to be present in as-implanted amorphous Si layer for 10 keV Ge+ than that for 5 keV Ge+. The densities of embedded nanocrystallites in Ge+-preamorphized Si layer with 5 and 10 keV Ge+ were found to diminish with annealing temperature first then increase. The effects of ion-implantation energy and annealing temperature on the structural evolution in Ge+-implanted amorphous Si are discussed in terms of ion-beam induced annealing and free energy change of the system. The depth dependence on the density of embedded nanocrystallites is attributed to the nonuniform distribution of Ge atoms. (c) 2005 Elsevier B.V. All rights reserved.

关键词： implantation preamorphization TEM auto-correlation function nanocrystallite implantation energy

来源：评论

学校读者我要写书评

暂无评论

Effects of implantation energy and annealing temperature on the structural evolution of Ge⁺-implanted amorphous Si

Effects of implantation energy and annealing temperature on ...

引用

15th International Conference on Ion Implantation Technology

作者： He, JH Lin, HH Wu, WW Chen, LJ Natl Tsing Hua Univ Dept Mat Sci & Engn Hsinchu 300 Taiwan

关键词： implantation preamorphization TEM auto-correlation function nanocrystallite implantation energy

来源：评论

学校读者我要写书评

暂无评论

A method for synthesis of perfect two dimensional arrays

A method for synthesis of perfect two dimensional arrays

引用

3rd IEEE Intelligent Data Acquisition and Advanced Computing Systems

作者： Tasheva, Zhaneta Bedzhev, Borislav Stoyanov, Borislav NMU Fac Artillery & Air Defense Shumen Bulgaria

ISBN: (纸本)9780780394452

The most valuable feature of the of the communication signals is the level of their side lobes, because it determines some of the most important system characteristics. With regard, tremendous efforts have been taken in order to develop methods of synthesis of signals, which auto-correlation function is similar to a delta pulse. Despite of this, at present a small number of signal classes with zero level of their side lobes are known. Due to this reasons in our paper we suggest a mathematical method for synthesis of a class of signals, called perfect two-dimensional arrays, which two-dimensional periodic auto-correlation function has zero level of the side lobes and study briefly their applications.

关键词： auto-correlation function perfect two-dimensional arrays

来源：评论

学校读者我要写书评

暂无评论

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案：

请选择收藏分类：

通借通还

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：