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25th Eurosensors Conference

作者： Tsouti, Vasiliki Filippidou, Myrto Boutopoulos, Christos Broutas, Panagiotis Zergioti, Ioanna Chatzandroulis, Stavros NCSR Demokritos Inst Microelect Aghia Paraskevi 15310 Greece Natl Tech Univ Athens Dept Appl Sci Zografos 15780 Greece

The fabrication process of a surface stress based capacitive biosensor array is presented. Flexible membranes and a fixed electrode on the substrate constitute the capacitive biosensors. Probe molecules are immobilized on the membrane surface and the surface stress variations during biological interactions force the membrane to deflect and effectively change the capacitance between the flexible membrane and the fixed substrate. The array consists of 60 sensors and thus is suitable for parallel sensing. Through the presented fabrication process, which is described in detail, sensitive membranes can be created. The process simplicity and the increased sensitivity of the biosensors are related to the use of boron implantation and the consequent self-aligned creation of the conductive membranes after the silicon fusion bonding technique. (C) 2011 Published by Elsevier Ltd.

关键词： biosensor array sensor fabrication capacitive biosensors DNA detection

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Fiber optic enzymatic biosensors and biosensor arrays for measurement of chlorinated ethenes

Fiber optic enzymatic biosensors and biosensor arrays for me...

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作者： Zhong, Zhong Colorado State University

学位级别：Ph.D.

Chlorinated ethenes such as trichloroethylene (TCE), tetrachloroethylene (PCE), three isomers of dichloroethylene (DCEs) and vinyl chloride (VC) are used as solvents and cleaners in a variety of industrial and commercial areas. Chlorinated ethenes have become one of the most common environmental pollutants in groundwater contamination sites due to their widespread usage, moderate solubility compared with other organic pollutants and recalcitrance to natural attenuation. Fiber optic enzymatic biosensor was developed in this study as a continuous, real time and in situ measurement principle. TOM biosensor, first reported enzymatic biosensor, was initiated with toluene measurement in aqueous solution as proof-of-concept experiments. The subsequent success of TOM and TOM-Green in TCE analysis showed great potential of biosensor measurement for chlorinated ethenes, despite the ubiquitous problem for monooxygenase-based biosensor with NADH consumption overtime and after usage. In addition, epoxide toxicity also increased the difficulty of biosensor application for measurement of chlorinated ethenes, although several TOM-Green transformants could mitigate the toxicity with rapid epxoide degradation. Plasmid transformation with was introduced to manipulate the construction of new TOM and TOM-Green transformants with capability of intracellular NADH regeneration. FDH regeneration system was studied for both TOM and TOM-Green cells, while TOM+FDH showed great activity retention and regeneration ability and TOM-Green+FDH was able to retain activity over prolonged storage but failed on regeneration after repeated usage due to the toxicity of TCE epoxide. biosensor array was built with pH-based biosensor to measure a group of haloalkanes. The design concept of biosensor array and detection instrumentation was successful. Linear approach in array data analysis was simple and fast but lacked of accuracy, while nonlinear approach increased the complexity of data analysis to a new l

关键词： biosensor array enzyme biosensor optode toluene o-monooxygenase

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Enumeration of circulating tumor cells and investigation of cellular responses using aptamer-immobilized AlGaN/GaN high electron mobility transistor sensor array

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SENSORS AND ACTUATORS B-CHEMICAL 2018年 257卷 96-104页

作者： Pulikkathodi, Anil Kumar Sarangadharan, Indu Hsu, Chen-Pin Chen, Yi-Hong Hung, Lien-Yu Lee, Geng-Yen Chyi, Jen-Inn Lee, Gwo-Bin Wang, Yu-Lin Natl Tsing Hua Univ Inst NanoEngn & MicroSyst Hsinchu 300 Taiwan Natl Tsing Hua Univ Dept Power Mech Engn Hsinchu 300 Taiwan Natl Tsing Hua Univ Inst Biomed Engn Hsinchu 300 Taiwan Natl Cent Univ Dept Elect Engn Jhongli 320 Taoyuan County Taiwan

This study reports the fabrication and characterization of electrical double layer gated AlGaN/GaN High electron mobility (HEMT) biosensor array to capture, detect and count circulating tumor cells (CTCs) of colorectal cancer (CRC). GaN HEMT chips were assembled into a sensor array on a thermo-curable polymer substrate in a simple and robust packaging process. The array had multiple aptamer immobilized sensing sites and was highly sensitive and selective with up to single cell resolution. The present method can detect cells in their native electrolyte composition, in a very short time with extremely low cost compared to the conventional circulating tumor cell assays. The effect of cellular binding in different test environments was further studied and reported. The electrical response of the sensor was discovered to be relevant to the transmembrane potential of the cell. This whole cell sensor array has the potential to be used as a point-of-care diagnostic tool in varied applications such as detection of rare cells, pathogens and studying the dynamics of cellular interactions. (c) 2017 Elsevier B.V. All rights reserved.

关键词： Whole cell sensor AlGaN/GaN HEMT biosensor array Colorectal cancer Circulating tumor cells

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Compact Low-Power Impedance-to-Digital Converter for Sensor array Microsystems

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IEEE JOURNAL OF SOLID-STATE CIRCUITS 2009年第10期44卷 2844-2855页

作者： Yang, Chao Jadhav, Sachin R. Worden, R. Mark Mason, Andrew J. Michigan State Univ E Lansing MI 48824 USA

With the rapid progress in CMOS compatible micro-fabrication of biosensors, there is an emerging need to miniaturize biosensor arrays onto the surface of silicon chips that acquire and process sensor data, permitting improved sensitivity, cost and throughput. In this paper, a low power circuit that extracts and digitizes sensor impedance information is presented. Composed of a novel multiplying integrator and a unique bidirectional counter/shifter, the circuit shares resources for impedance extraction and digitization to maximize hardware efficiency. The extremely compact size of the circuit enables the implementation of sensor array microsystems with simultaneous multi-channel readout. Fabricated in 0.5 mu m CMOS, the circuit consumes 6 mu W at 3 V and occupies only 0.06 mm(2), permitting over 100 readout channels within a 3 x 3 mm die. Circuit performance has been verified with a biosensor for gramicidin ion channel embedded in a tethered bilayer lipid membrane.

关键词： biosensor array electrochemical instrumentation impedance spectroscopy impedance-to-digital converter

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An Integrated ISFET Sensor array

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SENSORS 2009年第11期9卷 8831-8851页

作者： Nakazato, Kazuo Nagoya Univ Grad Sch Engn Dept Elect Engn & Comp Sci Chikusa Ku Aichi 4648603 Japan

A monolithically integrated ISFET sensor array and interface circuit are described. A new high-density, low-power source-drain follower was developed for the sensor array. ISFETs were formed by depositing Au/Ti extended-gate electrodes on standard MOSFETs, then thin silicon nitride layers using catalytic chemical vapor deposition and/or SU-8 protective layers were formed on the extended-gate electrodes. Applications for the array include: (1) pH detection by statistical distribution observing time and space fluctuations;(2) DNA detection using thiol-modified or silane-coupled oligonucleotides;(3) bio-image sensing by converting photons to electrons using Photosystem I of Thermosynechococcus elongatus, and sensing the converted electric charges by ISFETs.

关键词： ISFET biosensor array source-drain follower CMOS biotechnology

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A Micromachined Quartz Resonator array for Biosensing Applications

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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 2009年第3期18卷 522-530页

作者： Kao, Pine Doerner, Steffen Schneider, Thomas Allara, David Hauptmann, Peter Tadigadapa, Srinivas Penn State Univ Dept Elect Engn University Pk PA 16802 USA Otto VonGuericke Univ Magdegurg TEPROSA D-39016 Magdeburg Germany Otto VonGuericke Univ Magdegurg Dept Elect Engn & Informat Technol D-39016 Magdeburg Germany Otto VonGuericke Univ Magdegurg Inst Micro & Sensor Syst D-39016 Magdeburg Germany Penn State Univ Dept Chem University Pk PA 16802 USA Penn State Univ Mat Res Inst University Pk PA 16802 USA Inst Automat & Commun D-39106 Magdeburg Germany

An 8-pixel micromachined quartz crystal resonator array with a fundamental resonance frequency of 66 MHz has been designed, fabricated, and tested. A compact impedance-spectrum-analyzer electronic interface has been developed and combined with the quartz resonator array to form the biosensing system. The sensor array was calibrated using water-glycerol solutions, and the performance was found to be exactly as expected. Measurement of the crosstalk between the sensor pixels showed an isolation of similar to 30 dB. Selective functionalization of the pixels was achieved through the use of aqueous 3, 3'-Dithiobis (sulfosuccin-imidylpropionate) (DTSSP) molecules. The adsorption of avidin on DTSSP gave a frequency signal of 60 kHz in comparison to unfunctionalized pixels. The specific adsorption of avidin on functionalized pixels was confirmed through fluorescence microscopy. Comparing the performance of the micromachined quartz crystal microbalance (QCM) with a commercial 5-MHz device, we found that the micromachined QCM has a 4.25 times higher signal-to-noise ratio. Based on the measurement of the noise and using three times the frequency noise as the limit for the detection of avidin molecules, we expect to resolve a minimum of similar to 1/960 of a monolayer of avidin corresponding to an aerial mass density resolution of 0.7 ng/cm(2). [2008-0196]

关键词： biosensor array impedance spectrum analyzer quartz crystal microbalance (QCM) quartz micromachining

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Process Integration of Ion Sensitive Field Effect Transistor Bio-Sensor array Platform

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JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 2017年第11期17卷 8321-8325页

作者： Ha, Taemin Lee, Wooje Hong, Sang Jeen Myongji Univ Dept Elect Engn Yongin 17058 South Korea

Ion sensitive field effect transistor (ISFET) is a chemically activating electronic device for measuring pre-determined ion concentration of a solution in a way of measuring proton concentration of the solution. In this study, we present the process integration of ISFET based arrayed biosensor consists of 9 channels including reference electrode. The biosensor arrays, individual die size is 6.55 X 4.55 mm(2), are fabricated on a 6 inch silicon wafer with 15 photolithography steps. 17 process modules, including source/drain implanting, gate oxide, signal path, passivation and the forming of electrode, are integrated for the fabrication of the biosensor array platform. With the test circuit constructed for pH measure on chips, it is demonstrated that the basic functionality of the fabricated biosensor array with the sensor reading accuracy in two decimal points in the mixture of buffer solution. We convinced that the presented platform fabrication technology can lead the development of biosensor chip applications with further investigation of membrane technology for the detection of various bio and chemical related matters.

关键词： ISFET Process Integration biosensor array

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Fully integrated impedance spectroscopy systems for biochemical sensor array

Fully integrated impedance spectroscopy systems for biochemi...

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IEEE Biomedical Circuits and Systems Conference

作者： Yang, Chao Rairigh, Daniel Mason, Andrew Michigan State Univ E Lansing MI 48824 USA

ISBN: (纸本)9781424415243

With rapid progress in the miniaturization of biosensors, array microsystems utilizing impedance spectroscopy (IS) are of emerging interest. Focused on the electronics portion of such IS microsystems, this paper analyzes FFT-based and frequency response analyzer (FRA)-based approaches and compares them for hardware efficiency in array applications. For the chosen FRA-based approach, two possible systems are described and their circuit-level realizations are presented, one targeting high accuracy applications and the other prioritizing rapid interrogation.

关键词： impedance spectroscopy biosensor array microsystem analog/mixed signal integrated circuit

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array-based differential sensing of cancer cells using DNA-templated silver nanoclusters 17

Array-based differential sensing of cancer cells using DNA-t...

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Symposium on Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications, held at SPIE BiOS Conference

作者： Hong, Soonwoo Kuo, Yu-An Nguyen, Trung Chen, Yuan-, I Liu, Yen-Liang Shankar, Prathyush B. Yeh, Hsin-Chih Univ Texas Austin Dept Biomed Engn Austin TX 78712 USA Univ Texas Austin Texas Mat Inst Austin TX 78712 USA

ISBN: (纸本)9781510632714;9781510632721

While differential sensing has the potential to discriminate millions to trillions of analytes based on hundreds of sensing elements', most of the current differential sensor arrays have limited scalability, with only a handful of recognition elements demonstrated. Here we demonstrate a novel differential sensor array based on a class of organic/inorganic hybrid fluorophores, DNA-templated silver nanoclusters (DNA/Ag NCs), that not only has great scalability but also combine both recognition element and signal transduction element into one unit. Six DNA/Ag NC sensors were designed to classify the lysates of six breast epithelial and cancer cell lines with distinct metastatic potential. While MDA-MB-231 and MCF7 lysates showed significantly different fluorescence signatures upon interaction with the sensor array, other cell lines were also differentiable. Our method is simple, versatile, low-cost, reliable, and scalable.

关键词： Differential sensing biosensor array silver nanoclusters fluorescence sensors

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Energy-Efficient, On-Demand Activation of biosensor arrays for Long-Term Continuous Health Monitoring

BIOSENSORS-BASEL

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biosensorS-BASEL 2022年第5期12卷 358页

作者： Lundquist, Jonathan Horstmann, Benjamin Pestov, Dmitry Ozgur, Umit Avrutin, Vitaliy Topsakal, Erdem Virginia Commonwealth Univ Coll Engn Dept Elect & Comp Engn 907 Floyd Ave Richmond VA 23284 USA Virginia Commonwealth Univ Coll Engn Nanomat Core Characterizat Facil 907 Floyd Ave Richmond VA 23284 USA

Wearable biosensors for continuous health monitoring, particularly those used for glucose detection, have a limited operational lifetime due to biodegradation and fouling. As a result, patients must change sensors frequently, increasing cost and patient discomfort. arrays of multiple sensors, where the individual devices can be activated on demand, increase overall operational longevity, thereby reducing cost and improving patient outcomes. This work demonstrates the feasibility of this approach via decomposition of combustible nitrocellulose membranes that protect the individual sensors from exposure to bioanalytes using a current pulse. Metal contacts, connected by graphene-loaded PEDOT:PSS polymer on the surface of the membrane, deliver the required energy to decompose the membrane. Nitrocellulose membranes with a thickness of less than 1 mu m consistently transfer on to polydimethylsiloxane (PDMS) wells. An electrical energy as low as 68 mJ has been shown to suffice for membrane decomposition.

关键词： biosensor array pulse current activation continuous glucose monitoring

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