A new line shape was chosen for curve fitting of XPS (X-ray photoelectron spectroscopy) data. In general, the GLP(Gauss-Lorentz product function) or GLS(Gauss-Lorentz sum function) was used as the line shape of XPS, b...
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A new line shape was chosen for curve fitting of XPS (X-ray photoelectron spectroscopy) data. In general, the GLP(Gauss-Lorentz product function) or GLS(Gauss-Lorentz sum function) was used as the line shape of XPS, but they are not strict because the true line shape is a convolution of many comments. A convoluted line shape is chosen in fitting procedure. The new algorithm is called 'combination algorithm'. A detection was taken with Cu 3p spectrum and O 1s spectra of Fe-Mn-Al alloy. It is shown that the combination algorithm is more effective for the process of XPS data than GLP and GLS.
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