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Positive/Negative Decision via Outlier Detection Toward Automatic Performance Evaluation for defect detector

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 2023年第4期36卷 527-536页

作者： Yamauchi, Toshinori Ohira, Kentaro Kakinuma, Takefumi Hitachi High Tech Corp Syst Dev Dept 1 Tokyo 1046031 Japan Hitachi High Tech Corp Metrol Syst Solut Dev Dept Hitachinaka Ibaraki 3120005 Japan

In the field of semiconductor defect inspection, detecting defects with high accuracy is possible owing to the object detection model (defect detector) composed of the deep learning model. On the other hand, the performance of the deep learning model depends highly on training data. Therefore, during the operational phase at the customer site, we need to frequently evaluate the model's performance to deal with shifts in appearance for defects. However, frequently executing general evaluation methods is difficult at the customer site. Hence, we need a method to automatically evaluate performance. In this study, for the purpose of automatically evaluating the performance of the defect detector, we propose Positive/Negative Decision via Outlier Detection (PNDOD). The PNDOD decides on the positive of negative for each detection result based on comparing features corresponding to the detected result with statistics computed from training data. Using this method, we can calculate the estimated precision from the ratio of the estimated number of positive detections to the number of total detections, and we can evaluate the performance automatically based on it. Through experiments, we confirm the PNDOD can decide on the positive or negative with high accuracy, and we can precisely evaluate the model's performance.

关键词： Semiconductor defect inspection defect detector deep learning object detection outlier detection

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Fabrication and Evaluation of Electromagnetic defect detector for Laser Welding Joint on Stainless Steel Pipe 9

Fabrication and Evaluation of Electromagnetic Defect Detecto...

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2015 9th International Conference on Sensing Technology (ICST)

作者： Sonehara, Makoto Nagashima, Fumiya Sato, Toshiro Yazaki, Kohei Aota, Noritaka Shimadu, Susumu Shinshu Univ Fac Engn Dept Elect & Elect 4-17-1 Wakasato Nagano Nagano 3808553 Japan Takashima Sangyo Co Ltd Chino Nagano 3910012 Japan

ISBN: (纸本)9781479963140

Inline total inspection of the laser welding joint of ultra-fine suction stainless steel pipes for medical apparatus is very important. An electromagnetic defect detector for laser welding joint on stainless steel pipe was proposed. The electromagnetic defect detector consists of a figure-eight detection coil and an exciting coil. The stainless steel pipe with laser welding joint (i.e. "acceptance") is fixed in a coil of the figure-eight coil. And the pipes of inspection target are passed through another coil. When the "acceptance" is passed through the coil, the output voltage e(8) in the figure-eight coil equals zero. It is judged as an acceptance certainly. On the other hand, when a stainless steel pipe excluding the welding joint or the pipe with a defect (i.e. "reject") are passed through the Coil 2, e(8) not equal 0 is obtained. The authors fabricated and evaluated the electromagnetic defect detector. The detector was able to determine the acceptance of the reject at the laser welding joints on stainless steel pipe.

关键词： defect detector electromagnetic means figure-eight detection coil laser welding stainless steel pipe

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Fabrication and Evaluation of Electromagnetic defect detector for Laser Welding Joint on Stainless Steel Pipe

Fabrication and Evaluation of Electromagnetic Defect Detecto...

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International Conference on Sensing Technology

作者： Makoto Sonehara Fumiya Nagashima Toshiro Sato Kohei Yazaki Noritaka Aota Susumu Shimadu Dept. of Electric and Electronics Fac. of Engineering Shinshu University Takashima Sangyo Co. Ltd.

ISBN: (纸本)9781479963157

Inline total inspection of the laser welding joint of ultra-fine suction stainless steel pipes for medical apparatus is very important. An electromagnetic defect detector for laser welding joint on stainless steel pipe was proposed. The electromagnetic defect detector consists of a figure-eight detection coil and an exciting coil. The stainless steel pipe with laser welding joint (i.e. "acceptance") is fixed in a coil of the figure-eight coil. And the pipes of inspection target are passed through another coil. When the "acceptance" is passed through the coil, the output voltage e_8 in the figure-eight coil equals zero. It is judged as an acceptance certainly. On the other hand, when a stainless steel pipe excluding the welding joint or the pipe with a defect (i.e. "reject") are passed through the Coil 2, e_8 ≠ 0 is obtained. The authors fabricated and evaluated the electromagnetic defect detector. The detector was able to determine the acceptance of the reject at the laser welding joints on stainless steel pipe.

关键词： defect detector Electromagnetic means Figure-eight detection coil Laser welding Stainless steel pipe

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Highly Sensitive defect detectors and Comparators Exploiting Port Imbalance in Rat-Race Couplers Loaded With Step-Impedance Open-Ended Transmission Lines

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IEEE SENSORS JOURNAL 2021年第23期21卷 26731-26745页

作者： Herrojo, Cristian Velez, Paris Munoz-Enano, Jonathan Su, Lijuan Casacuberta, Pau Barba, Marta Gil Martin, Ferran Univ Autonoma Barcelona Dept Engn Elect GEMMA CIMITEC Barcelona 08193 Spain Univ Politecn Madrid Dept Ingn Audiovisual & Comunicac Madrid 28031 Spain

defect detectors and comparators, able to detect tiny differences between a reference (REF) sample and a material under test (MUT), are presented in this paper. In one version, the comparator is implemented by means of a rat-race hybrid coupler and a single step-impedance open-ended transmission line connected to one of the ports of the coupler. The comparator exploits the imbalance generated in one of the two pairs of isolated ports of the coupler when the MUT sample differs from the REF sample. The other pair of isolated ports is used for comparator feeding (Delta-port) and for recording the output signal (Sigma-port), and feeding is achieved by means of a harmonic signal tuned to the operating frequency MUT of the coupler. The resulting device is therefore a two-port structure, and the considered output variable is the magnitude of the transmission coefficient, an easily measurable quantity. By virtue of the step-impedance transmission line, used as the sensitive element of the comparator, the device exhibits very high sensitivity to variations in the dielectric constant between the REF and MUT samples, this being the input variable. A prototype device example, with a maximum sensitivity of 0.72 is reported, and applied to the detection of defects in the REF sample, a dielectric slab, generated by drilling holes of different densities across it. In the second prototype, a true differential-mode sensor, two identical sensing elements (step impedance lines) are connected to one of the pairs of isolated ports of the coupler, and roughly perfect balance is obtained when the MUT is identical to the reference sample. The maximum sensitivity in this case is 1.20, and the device discriminates also small perturbations generated in the REF material. The main relevant aspect of the reported prototypes, phase-variation sensing devices by nature, is the phase-to-magnitude conversion achieved by means of the hybrid coupler. This transforms the reflective-mode phase-variation s

关键词： Comparator defect detector dielectric constant sensor microwave sensor microstrip technology phase-variation sensor rat-race coupler step-impedance transmission line

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Inductive Sensor Based on Micromachined Coil for Conductive Target Detection

IEEE SENSORS LETTERS

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IEEE SENSORS LETTERS 2024年第8期8卷 1页

作者： Nastro, A. Bau, M. Ferrari, M. Cerini, F. Paci, D. Adorno, S. Foncellino, F. Ferrari, V. Univ Brescia Dept Informat Engn I-25123 Brescia Italy STMicroelectronics I-20007 Milan MI Italy STMicroelectronics I-80022 Arzano NA Italy

This letter presents an inductive sensor based on a micromachined coil for the detection of conductive targets. The proposed sensor consists of a planar micromachined sensing coil, a signal conditioning instrumentation, and a nearby nonferromagnetic conductive target. The working principle relies on the magnetic coupling between the sensing coil, driven by AC current, and the target. Due to the eddy currents induced in the target, the magnetic flux and, thus, the equivalent inductance of the sensing coil is altered as a function of the target position. Two configurations have been experimentally adopted to explore the proposed inductive sensor. A proximity sensor has been achieved by measuring the inductance variation while changing the distance between the coil and a brass tip with a diameter of 3 mm. A nondestructive defect detector has been achieved by sliding a copper target over the sensing coil. For the proximity sensor, a sensitivity of 6500 nH/m within the range 0-50 mu m has been achieved. The resolution of the proximity sensor at one standard deviation is 470 nm. For the defect detector, a 1-mm wide and 35-mu m deep cut induced in the target has been detected. Experimental results have confirmed the possibility to exploit the proposed sensor in both configurations, thus validating its working principle in good agreement with the theoretical analysis.

关键词： Sensors Coils Inductance Magnetic sensors defect detection Couplings Sensor phenomena and characterization Mechanical sensors defect detector eddy currents inductive micromachined sensor inductive sensor micromachined coil nondestructive techniques proximity sensor

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A Probabilistic Approach for defect Detection based on Saliency Mechanisms 19

A Probabilistic Approach for Defect Detection based on Salie...

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19th IEEE International Conference on Emerging Technology and Factory Automation (ETFA)

作者： Bonnin-Pascual, Francisco Ortiz, Alberto Univ Balearic Isl Dept Math & Comp Sci Palma De Mallorca 07122 Spain

ISBN: (纸本)9781479948451

The use of saliency mechanisms for defect detection is discussed in this work. We consider defects on regular surfaces as conspicuous areas that catch the attention of the surveyors. Following this approach, we propose the use of the Bayesian framework SUN, devised to provide saliency information based on natural statistics, to combine information about the visual appearance of the surface under inspection, to finally indicate where the defects (if any) are located. The visual information is suggested to be based on features commonly used to predict human eye fixations: contrast and symmetry. We demonstrate that these two features provide a description of the surface that can be used to indicate whether it is defective or not. Our approach is assessed using a publicly available image dataset containing a variety of surfaces with defective areas. The performance of the defect detector is evaluated through cross-validation and successful results are obtained.

关键词： Bayes methods inspection object detection production engineering computing statistics Bayesian framework SUN contrast defect detection defect detector human eye fixations image dataset natural statistics probabilistic approach saliency information saliency mechanisms surface visual appearance symmetry Corrosion detectors Inspection Sun Training Visualization

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Reliability of ultrasonic measurement of thickness loss caused by corrosion

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INSIGHT 2011年第12期53卷 658-663页

作者： Yassen, Y. Ismail, M. P. Jemain, A. A. Daud, A. R. Univ Kebangsaan Malaysia Sch Appl Phys Ukm Bangi 43600 Selangor Malaysia Agensi Nuklear Malaysia Bangi 43000 Kajang Malaysia Univ Kebangsaan Malaysia Sch Math Sci Ukm Bangi 43600 Selangor Malaysia

The reliability of the ultrasonic technique for corrosion monitoring was assessed by using bivariate least squares (BLS) regression. The loss of thickness in corroded samples was measured using micrometer and ultrasonic methods. Micrometer measurement is quite accurate but it requires access to both sides of the structure. On the other hand, ultrasonic thickness measurement is fast but its accuracy is often doubtful. If both methods provide mean readings with comparable accuracy, then applying BLS regression would produce a straight line with an intercept and slope that are not significantly different from 0 and 1, respectively. A statistical test was applied to compare the obtained intercept and slope values with their respective theoretical values. In this work, a thickness gauge and a flaw detector were used to measure a thickness loss between 0.20 mm and 2.20 mm. The results showed that the mean measurement using the thickness gauge is more accurate than that using the flaw detector.

关键词： defect detector Corrosion monitoring Ultrasonography Gages Thickness gages micrometers side structure Intercept Micrometre RFXANK gene Corrosion Ultrasonic measurement

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Ring artifact correction for high-resolution micro CT

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PHYSICS IN MEDICINE AND BIOLOGY 2009年第17期54卷 N385-N391页

作者： Kyriakou, Yiannis Prell, Daniel Kalender, Willi A. Univ Erlangen Nurnberg Inst Med Phys D-8520 Erlangen Germany

In high-resolution micro CT using. at detectors (FD), imperfect or defect detector elements may cause concentric-ring artifacts due to their continuous over- or underestimation of attenuation values, which often disturb image quality. We here present a dedicated image-based ring artifact correction method for high-resolution micro CT, based on median filtering of the reconstructed image and working on a transformed version of the reconstructed images in polar coordinates. This post-processing method reduced ring artifacts in the reconstructed images and improved image quality for phantom and in in vivo scans. Noise and artifacts were reduced both in transversal and in multi-planar reformations along the longitudinal axis.

关键词： defect detector Transverse Noise Imaging Phantom median filters Artifacts microcomputed tomography Image quality Ring Artifact

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Real sensitivity of EMA instruments

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RUSSIAN JOURNAL OF NONDESTRUCTIVE TESTING 2007年第6期43卷 384-389页

作者： Suchkov, G. M. Donchenko, A. V. Kharkov Polytechn Inst UA-61002 Kharkov Ukraine

Results of experimental investigation into the detection of internal, surface, and subsurface flaws by ultrasonic vibration pulses that are excited and received via different types of EMATs are reported. The sensitivity of the EMA instruments developed is shown to be close to the sensitivity of modern contact flaw detectors. An EMAT and a flaw detector that take advantage of the EMA flaw-detection method for the inspection of surface and near-surface zones of metal products are developed.

关键词： defect detector EQUIPMENT Metal products European Medicines Agency inner surface

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A program for computer simulation of the operation of electroacoustic channels of IMPULSE plus flaw detectors

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RUSSIAN JOURNAL OF NONDESTRUCTIVE TESTING 2006年第3期42卷 174-180页

作者： Danilov, VN Cent Res Inst Machine Bldg Technol Moscow 115088 Russia

A program for computer simulation of the operation of electroacoustic channels of flaw detectors with normal and angle probes (including those with composite piezoelectric plates) is presented. The program utilizes algorithms of the IMPULSE-series programs and has extended capabilities. It is used jointly with the Windows 95-XP operating systems and allows simple and descriptive investig, gations of the influence of various parameters of channels on the characteristics of the recorded pulses.

关键词： defect detector electroacoustics Surgery piezoelectric plate

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