咨询与建议

限定检索结果

文献类型

  • 1 篇 会议

馆藏范围

  • 1 篇 电子文献
  • 0 种 纸本馆藏

日期分布

学科分类号

  • 1 篇 理学
    • 1 篇 物理学

主题

  • 1 篇 root cause analy...
  • 1 篇 design-based pat...
  • 1 篇 region of intere...
  • 1 篇 sem to design ov...
  • 1 篇 weakpoint rankin...
  • 1 篇 design-based det...
  • 1 篇 inline defect to...

机构

  • 1 篇 globalfoundries ...
  • 1 篇 anchor semicond ...

作者

  • 1 篇 venkatachalam pa...
  • 1 篇 lee julie
  • 1 篇 chen zhijin
  • 1 篇 zafar khurram
  • 1 篇 xie qian

语言

  • 1 篇 英文
检索条件"主题词=Design-Based Detection"
1 条 记 录,以下是1-10 订阅
排序:
Precise design-based Defect Characterization and Root Cause Analysis  31
Precise Design-Based Defect Characterization and Root Cause ...
收藏 引用
31st Conference on Metrology, Inspection, and Process Control for Microlithography
作者: Xie, Qian Venkatachalam, Panneerselvam Lee, Julie Chen, Zhijin Zafar, Khurram GLOBALFOUNDRIES Santa Clara CA 95054 USA Anchor Semicond Santa Clara CA USA
As semiconductor manufacturing continues its march towards more advanced technology nodes, it becomes increasingly important to identify and characterize design weak points, which is typically done using a combination... 详细信息
来源: 评论