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A polymer-based compliant force/torque and displacement sensor with creep compensation

MECHANICAL SYSTEMS AND SIGNAL PROCESSING 2025年 226卷

作者： Choi, Sunghyun Kim, Jisu Yun, Dongwon Daegu Gyeongbuk Inst Sci & Technol DGIST Dept Robot & Mechatron Engn Daegu 711873 South Korea

Automation of assembly processes using robots remains challenging, requiring advanced capabilities in sensing for assembly state estimation and shock absorption to protect the robot from external forces. Traditional devices such as passive compliance devices and force/torque sensors provide only a subset of these functionalities. To integrate these capabilities into a single system, a polymer-based compliant force/torque and displacement sensor has been proposed. However, polymers classified as viscoelastic materials exhibit significant creep, degrading the sensing performance. Therefore, this paper addresses the development of a polymer-based compliance force/torque and displacement sensor with a creep compensation algorithm. The proposed sensor is made of viscoelastic materials to provide passive compliance, allowing it to adapt to external forces and protect the robot from shocks. Especially, it can achieve a remote center of compliance through a novel deformable structure. Moreover, it can measure the six-axis external forces and displacements generated by the passive compliance. In this process, the creep of the viscoelastic material is analyzed and compensated to improve the sensing performance. First, a stiffness analysis was conducted for the design of the sensor and finite element analysis was performed to verify that the sensor has a remote center of compliance. Then, a method for applying a creep compensation algorithm based on a viscoelastic model to the multi-axis force/torque and displacement sensor was proposed. The effectiveness of the creep compensation algorithm was evaluated through experiments, resulting in an 85.42 % reduction in creep error, a 63.52 % improvement in response time, and a 49.37 % reduction in hysteresis error. The proposed sensor can be utilized in various fields that require both flexibility and task state estimation such as robotic assembly, wearable robots, and medical robots.

关键词： Force/torque sensor displacement sensor Creep compensation Compliance device Robotic assembly Remote center compliance

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A Unit Volume Sensitivity Optimized Optical Fiber displacement sensor With Multihinge Lever Symmetrical Structure

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IEEE sensorS JOURNAL 2025年第8期25卷 12768-12778页

作者： Kang, Yufei Song, Han Cai, Qihui Zhao, Huawei Wang, Zhen Chen, Xiangzuo Wuhan Univ Technol Sch Mech & Elect Engn Wuhan 430070 Peoples R China Wuhan Univ Technol Sch Mech & Elect Engn Hubei Digital Mfg Key Lab Wuhan 430070 Peoples R China China Nucl Power Operat Technol Corp Ltd Wuhan 430070 Peoples R China

Optical fiber Fabry-Perot (F-P) sensor is a high-sensitivity sensor based on fiber-optic sensing and interference principle, which can be used in sensing of displacement, stress, strain, temperature, and so on. In this article, we propose an optical fiber F-P displacement sensor based on a flexible hinge structure, and develop a compact microsized displacement sensor with high sensitivity to measure microdisplacement, with a size of 15x10x2.4 mm(3). On the basis of mathematical model, we used an optimization algorithm to globally optimize the displacement sensitivity and obtained the optimal dimensional parameters of the sensor structure. We used ANSYS to simulate and analyze our sensor, and the results were basically consistent with the theoretical results. Then, we encapsulated and pasted the F-P cavity with a small-diameter glass capillary, and the F-P was fabricated with an optical fiber at one end and a fiber Bragg grating (FBG) for temperature measurement at the other end. The final experimental tests showed that the sensor had good linearity and displacement sensitivity can reach up to 64 100 pm/mm. The temperature sensitivity is 10.04 pm/degrees C for FBG and 33.04 pm/degrees C for F-P.

关键词： sensors Optical fiber sensors Sensitivity Fasteners Temperature sensors Optical fibers sensor phenomena and characterization Fiber gratings Deformation Structural beams displacement sensor Fabry-Perot (F-P) cavity fiber Bragg grating (FBG) flexible hinge global optimization temperature compensated

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Design of a vector displacement sensor based on a cross-slot structure

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MEASUREMENT 2025年 247卷

作者： Cai, Jianxian Li, Ziqi Zhou, Yinxing Jiang, Tao Wang, Chenxu Inst Disaster Prevent Sch Elect Sci & Control Engn Sanhe 065201 Hebei Peoples R China Hebei Key Lab Earthquake Disaster Instrumentat & M Sanhe 065201 Hebei Peoples R China Beijing Gangzhen Sci & Technol Co Beijing 102627 Peoples R China Shandong Keyue Technol Co Ltd Jinan 250014 Peoples R China

To address the issues in the current monitoring of rubber bearing displacement sensors, where it is impossible to obtain vector displacement and deflection angles, leading to inadequate evaluation of bearing deformation and low measurement accuracy, a vector displacement sensor based on a cross-slot structure is proposed. The sensor adopts two pairs of "cantilever beam-wedge slider" structures to identify the positive and negative displacements, achieving a comprehensive evaluation of bearing deformation. By designing a cross-slot structure to measure the displacement and angle in the horizontal plane of the rubber bearing, the sensor can simultaneously measure displacement and deflection angle in the horizontal plane and direction. Theoretical formulas and ANSYS software are used to optimize the design and simulation analysis of the sensor's structural parameters. Based on the simulation results, a physical sensor is fabricated. Finally, a displacement testing system is constructed to test the sensor's performance. Experimental results show that the sensor has a measurement range of 100 mm, a sensitivity of 28.17 mV/mm, and a total accuracy of 1.94 %, meeting the requirements for displacement measurement accuracy and sensitivity in the health monitoring of actual rubber bearing structures, providing a new technical solution for the field of rubber bearing monitoring.

关键词： displacement sensor Rubber bearings Vector displacement

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High-Performance Optical Fiber displacement sensor with Extended Linear Range and Sensitivity

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sensorS 2025年第2期25卷 418-418页

作者： Zubia, Gorka Zubia, Joseba Amorebieta, Josu Aldabaldetreku, Gotzon Zubia, Asier Durana, Gaizka Univ Basque Country Dept Express Graph & Project Engn Bilbao 48013 Spain Univ Cent Florida Coll Opt & Photon CREOL Orlando FL 32816 USA Univ Basque Country Dept Commun Engn Bilbao 48013 Spain Univ Basque Country EHU Quantum Ctr Bilbao 48013 Spain Univ Basque Country Dept Appl Math Bilbao 48013 Spain Basque Res & Technol Alliance TECNALIA Derio 48160 Spain

Optical Fiber displacement sensors (OFDSs) provide several advantages over conventional sensors, including their compact size, flexibility, and immunity to electromagnetic interference. These features make OFDSs ideal for use in confined spaces, such as turbines, where direct laser access is impossible. A critical aspect of OFDS performance is the geometry of the fiber bundle, which influences key parameters such as sensitivity, range, and dead zones. In this work, we present a streamlined design methodology for azimuthally symmetric OFDSs to improve the linear range of these sensors. The most effective configuration we propose is the pentafurcated bundle, which consists of a central transmitting fiber surrounded by four concentric rings of fibers with different radii. Our experimental results show that the pentafurcated designs increase both the range-up to 10.5 mm-and the sensitivity of the sensor-2mm-1-while minimizing the dead zone of the sensor (2.5 mm), allowing accurate measurements even at very short distances

关键词： optical fiber sensor intensity-modulated optical sensor optical fiber bundle design displacement sensor structural health monitoring aeronautical sensing tip timing tip clearance

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High-precision displacement sensor in advanced manufacturing: Principle and application

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MEASUREMENT 2025年 242卷

作者： Zhou, Yufang Liu, Junfeng Li, Huang Li, Zelong Li, Saichen Lai, Tao Natl Univ Def Technol Coll Intelligence Sci & Technol Lab Sci & Technol Integrated Logist Support Changsha 410073 Peoples R China Hunan Key Lab Ultraprecis Machining Technol Changsha 410073 Peoples R China

Ultraprecision machining extensively utilizes high-precision displacement sensors due to their exceptional stability, sensitivity, and accuracy. Such sensors can directly measure displacement but are typically components of precision measurement systems, such as atomic force microscopes, profilometers, or coordinate measuring machines. Currently, as displacement sensors are moving towards the direction of high precision, large range, and universal applicability, the market has seen a large variety of new displacement sensor products. However, there is a dearth of comprehensive and systematic reviews of their application specifically in the field of ultraprecision inspection. This review discusses existing research on typical contact and noncontact displacement sensors in high-precision machine tools. First, it reviews and classifies the displacement sensors. Then, it introduces the principles, characteristics, and applications of these types of sensors, along with the technical indicators of their corresponding commercial sensors, and discusses the latest advances in related technologies. Moreover, it also presents a comprehensive summary and comparative study of various high-precision displacement sensors from the perspectives of measurement range, accuracy, resolution, and applicability. Finally, it discusses the technical obstruction and development trends of high-precision displacement sensors.

关键词： displacement sensor High precision Contact measurement Optical measurement Surface profile

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displacement sensor for indoor machine calibrations

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APPLIED OPTICS 2013年第15期52卷 3461-3472页

作者： Mudassar, Asloob Ahmad Butt, Saira Pakistan Inst Engn & Appl Sci Islamabad 45650 Pakistan Pakistan Inst Nucl Sci & Technol Islamabad 45650 Pakistan

This paper presents a simple displacement sensor for indoor machine calibrations. The sensor, which is placed in the path of a diverging laser beam, consists of two plane mirror pieces laterally displaced with the line joining their centers initially held perpendicular to the optical axis of the beam during the displacement of the sensor with one of the mirrors always traveling along the optical axis of the laser beam. The optical signals from the two mirrors are combined and a simple detector at the interference plane counts the fringes during the sensor displacement. The sensor could be mounted on the moving head of any mechanical machine, e.g., the lathe machine for displacement calibration. The device has been tested over a range of 10 cm beyond a distance of 150 cm from a diverging laser source giving an accuracy of 1.1015 mu m. Theoretical modeling, simulation, and experimental results are presented which establish that the proposed sensor can be used as a promising displacement measuring device. (C) 2013 Optical Society of America

关键词： Dislocated Workers Optic axis displacement sensors lathe machining laser beams line join Mirrors displacement sensor machine interference pattern Laser Source

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displacement sensor With High Sensitivity and Linearity Based on a Half-Wavelength SIR for Crack Width Measurement

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IEEE sensorS JOURNAL 2024年第8期24卷 12332-12339页

作者： Hernandez-Aguila, Miguel Olvera-Cervantes, Jose-Luis Hernandez-Gomez, Edel-Serafin Corona-Chavez, Alonso Inst Nacl Astrofis Opt & Elect INAOE Elect Dept Cholula 72840 Puebla Mexico Tecnol Nacl Mexico Dept Basic Sci Campus Acayucan Acayucan 96100 Veracruz Mexico

In this work, a displacement sensor designed for measuring crack width is proposed. The sensor is based on a half-wavelength stepped impedance resonator (SIR) consisting of a fixed transmission line and a movable patch. The sensor was analyzed using a full-wave simulator (HFSS) and experimentally measured using a vector network analyzer (VNA). The sensor's experimental sensitivity is 0.121 GHz/mm, with linearity, assessed by the coefficient of determination, of 0.998. Both sensitivity and linearity were measured within a measurement range from 0 to 8.5 mm, with an initial resonance frequency of 2.701 GHz. Additionally, the sensor's resolution is 0.06 mm. The proposed sensor demonstrates high sensitivity and linearity, along with low distortion within the test measurement range.

关键词： high sensitivity microwave sensor resonance frequency stepped impedance resonator (SIR) structural health monitoring (SHM) Crack witch displacement sensor

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displacement sensor With Nanometric Resolution Based on Magnetoelectric Effect

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IEEE sensorS JOURNAL 2021年第10期21卷 12084-12091页

作者： Yang, Yikun Yang, Bintang Shanghai Jiao Tong Univ State Key Lab Mech Syst & Vibrat Shanghai 200240 Peoples R China

Micro-displacement measurement is essential in precision fields, such as precision positioning, micro-vibration control and biological engineering. Conventional sensors have disadvantages of susceptibility to environmental, high cost and difficulty in integration. To address these deficiencies, this paper developed a novel displacement sensor with nanometric resolution based on magnetoelectric effect. Combining equivalent magnetic circuit method and equivalent circuit method for magnetoelectric effect using the nonlinear constitutive parameters, an equivalent circuit model of the proposed sensor is established to analyse and predict the performance of displacement sensor. Then a prototype of sensor based on Terfenol-D/PZT composites is fabricated, and the performance of prototype for dynamic displacement amplitude and static position measurement are tested. The results not only validate the developed equivalent circuit model, but also evidence the potential of magnetoelectric displacement sensor. Especially for dynamic displacement amplitude measurement, the resolution of it is better than 13.27 nm, which is close to or even beyond commercial laser displacement sensor.

关键词： displacement sensor equivalent circuit model magnetoelectric effect

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displacement sensor Based on Diamond-Shaped Tapered Split Ring Resonator

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IEEE sensorS JOURNAL 2013年第4期13卷 1153-1160页

作者： Horestani, Ali Karami Fumeaux, Christophe Al-Sarawi, Said F. Abbott, Derek Univ Adelaide Sch Elect & Elect Engn Adelaide SA 5005 Australia Minist Sci Res & Technol Tehran *** Iran

Split-ring resonators (SRRs) are ideal structures for the realization of compact high-sensitivity and high-resolution sensors due to their high-quality factor resonance, compact size, and high sensitivity to changes in the constituent materials and physical dimensions. This paper presents a displacement sensor based on a diamond-shaped tapered SRR coupled to a coplanar waveguide. Two significant improvements over previous designs are reported. Firstly, the proposed sensor has higher dynamic range and linearity for displacement sensing. Secondly, compared with previous designs, where the displacement changes both the resonant frequency and depth of the transmission notch, the proposed sensor has a fixed resonant frequency. This is an important improvement since the sensor can be operated at a single fixed frequency and bypass the need for a frequency-sweeping microwave source and measurement system such as an expensive network analyzer. It is shown that, while preserving the compact size, the proposed sensor also benefits from a lower operating frequency. The design principle and simulation results are validated through measurement.

关键词： displacement sensor metamaterials microwave sensors

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displacement sensor based on optical fibre with multiple overlapping imperfections

Displacement sensor based on optical fibre with multiple ove...

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3rd European Workshop on Optical Fibre sensors

作者： Vilge, Eli Levantovsky, Moshe Arieli, Yoel Poisel, Hans Babchenko, Anatoly Jerusalem Coll Technol Adv Fiber Opt Syst Lab 21 Havaad HaleumiPOB 16031 IL-91160 Jerusalem Israel Univ Appl Sci Nuremberg POF AC Polymer Opt Fiber Applicat Ctr D-90489 Nurnberg Germany

ISBN: (纸本)9780819467614

The concept of highly sensitive fibre optic displacement sensor is presented. It is based on macrobending step index polymer optical fibre with multiple overlapping surface-side imperfections. The theoretical principles of optical power losses in such fibres due to multiple curvatures are based on a surface that serves as a model for an imperfect layer and has the same optical properties. The sensing element was tested using two different types of roughness topologies and their combination. The various angles of imperfections (90 and 45 degrees) placed on the fibre's core were evaluated. We discuss some experimental results that confirm our prediction of considerable dependence of the output signal on the changing imperfections caused by bending the fibre. It was found that sensitivity to bending of the angular imperfections could be further increased by implementing multiple overlapping imperfections.

关键词： displacement sensor plastic optical fibre surface-side imperfections multiple overlapping

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