Based on the improved five-interferogram algorithm, a novel interferometer with special etalon is developed. The distance between two standard surfaces of this etalon can be changed by pressure in vertical direction t...
详细信息
Based on the improved five-interferogram algorithm, a novel interferometer with special etalon is developed. The distance between two standard surfaces of this etalon can be changed by pressure in vertical direction to realize phase shift and can be come back with accuracy better than 0.1 nm when the pressure is free. The measurement standard uncertainty of diameter of the silicon sphere is better than 3 nm and measurement standard uncertainty of the silicon crystal density is 1 × 10-7.
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