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Yttria-stabilized zirconia flow sensor for high-temperature and humidity with compensation algorithm

flow MEASUREMENT AND INSTRUMENTATION 2025年 104卷

作者： Sun, Huiying Zhang, Yongping Wang, Yang Wang, Wentian Zhao, Lei Yan, Xinxin Shen, Jie Li, Junliang Zou, Jie Jian, Jiawen Ningbo Univ Fac Elect Engn & Comp Sci Ningbo 315211 Peoples R China Zhejiang Excellent Intelligent Mfg Co Ltd Ningbo 315010 Zhejiang Peoples R China Beihang Univ Hangzhou Int Innovat Inst Hangzhou 311115 Peoples R China Shanghai Aici Sensing Technol Co Ltd Shanghai 201600 Peoples R China

flow sensors are widely used in industrial production, but their measurement accuracy remains insufficient in high-temperature and high-humidity environments. To address this issue, this study developed a novel flow sensor based on yttria-stabilized zirconia (YSZ) solid-state electrolytes. It integrates both flow velocity and humidity measurement capabilities. This research systematically investigated the effects of environmental temperature and humidity on the sensor's output signals and proposed a compensation algorithm to mitigate temperature and humidity interference, thereby enhancing measurement accuracy. Experimental results showed that the sensor output signal decreases with increasing inlet temperature and increases with rising inlet humidity. Through linear fitting, the relationship between flow velocity output signal drift and environmental temperature and humidity was established. This relationship was then utilized for compensation, resulting in a significant improvement in measurement accuracy. The experiments demonstrated that the sensor exhibits high accuracy and stability in high-temperature and high-humidity environments, effectively optimizing flow velocity detection performance.

关键词： flow sensor YSZ High-temperature and high-humidity Compensation method

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Research on flow measurement and control integrated strategy based on a flow sensor with active regulation

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MEASUREMENT 2025年 249卷

作者： Liu, He Geng, Huaide Yang, Guoqi Huang, Weinan Wang, Xuping Quan, Long Taiyuan Univ Technol Key Lab Adv Transducers & Intelligent Control Syst Minist Educ & Shanxi Taiyuan 030024 Peoples R China

Accurate flow measurement is crucial for the efficient operation and precise control of hydraulic systems. However, current flow measurement and control technologies exhibit certain limitations. Existing flow sensors suffer from increased pressure drop as flow rise, resulting in diminished measurement accuracy and higher energy consumption. Soft measurement methods for flow rely heavily on extensive experimental data sets, which may not always be available or practical. Pressure compensation valves also present challenges, including inadequate control accuracy, reduced flow capacity, and elevated pressure drop. To address these issues, this paper proposes an innovative method for a flow sensor with active regulation capabilities, which directly converts spool displacement into flow information. Additionally, an electromagnetic force active control unit is incorporated to compensate for measurement errors caused by factors such as spring force and flow force. The active control unit can also adjust flow gain to expand the measurement range or enhance measurement resolution, thereby accommodating both high-flow and low-flow conditions. Furthermore, the sensor can be easily installed on the valve to facilitate high-precision closed-loop flow control without the need for pressure compensation valves. The effectiveness of the proposed configuration and method has been validated verified through multidisciplinary co-simulation and testing. Results indicate that the flow measurement error is approximately 0.66 % with active regulation, and variable flow gain functionality can be achieved. The flow control accuracy is about 1 %, and the system demonstrates strong anti-load disturbance.

关键词： Electro hydraulic proportional control flow sensor flow measurement Active regulation flow closed-loop

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Resealable Antithrombotic Artificial Vascular Graft Integrated with a Self-Healing Blood flow sensor

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ACS NANO 2023年第8期17卷 7296-7310页

作者： Park, Kijun An, Soojung Kim, Jihyun Yoon, Sungjun Song, Jihyang Jung, Daekwang Park, Jae Lee, Yeontaek Son, Donghee Seo, Jungmok Yonsei Univ Sch Elect & Elect Engn Seoul 03722 South Korea Sungkyunkwan Univ Dept Elect & Comp Engn Suwon 16419 South Korea Inst Basic Sci IBS Ctr Neurosci Imaging Res Suwon 16419 South Korea Sungkyunkwan Univ Dept Superintelligence Engn Suwon 16419 South Korea Lynk Solutec Inc Seoul 03722 South Korea

Coronary artery bypass grafting is commonly used to treat cardiovascular diseases by replacing blocked blood vessels with autologous or artificial blood vessels. Nevertheless, the availability of autologous vessels in infants and the elderly and low long-term patency rate of grafts hinder extensive application of autologous vessels in clinical practice. The biological and mechanical properties of the resealable antithrombotic artificial vascular graft (RAAVG) fabricated herein, comprising a bioelectronic conduit based on a tough self-healing polymer (T-SHP) and a lubricious inner coating, match with the functions of autologous blood vessels. The self-healing and elastic properties of the T-SHP confer resistance against mechanical stimuli and promote conformal sealing of suturing regions, thereby preventing leakage (stable fixation under a strain of 50%). The inner layer of the RAAVG presents antibiofouling properties against blood cells and proteins, and antithrombotic properties, owing to its lubricious coating. Moreover, the blood-flow sensor fabricated using the T-SHP and carbon nanotubes is seamlessly integrated into the RAAVG via self-healing and allows highly sensitive monitoring of blood flow at low and high flow rates (10 and 100 mL min-1, respectively). Biocompatibility and feasibility of RAAVG as an artificial graft were demonstrated via ex vivo, and in vivo experiment using a rodent model. The use of RAAVGs to replace blocked blood vessels can improve the long-term patency rate of coronary artery bypass grafts.

关键词： self-healing antibiofouling artificial blood vessel biomaterials flow sensor

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Design and Fabrication of a Four-Electrodes PVDF Fiber for a flow sensor

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IEEE sensorS JOURNAL 2023年第3期23卷 1982-1989页

作者： Jiang, Yani Guo, Chengdong Zhang, Yu Zhang, Wenxuan Wu, Zhixue Shen, Hui Gong, Junjie Bian, Yixiang Yangzhou Univ Sch Mech Engn Yangzhou 225000 Peoples R China Qingdao Univ Coll Mech & Elect Engn Qingdao 266000 Peoples R China

Inspired by seal vibrissa, an ingenious bionic flow sensor, that had four electrodes and dual-sensing circuits, was designed and fabricated using polyvinylidene fluoride (PVDF) and optical fiber. Based on the piezoelectric equation, the sensing model of this bionic vibrissa sensor (BVS) was deduced. The BVS was thoroughly investigated for airflow and oscillatory water flow monitoring applications. The results indicated that the BVS had a faster response to airflow compared with the anemometer, and it could sense the direction and the magnitude of the airflow simultaneously. The BVS could recognize the frequencies, phases, and waveforms of the oscillatory water flow. The unique dual-sensing circuit and flexible characteristics endowed the BVS with excellent underwater sensing abilities. It exhibited a very low-velocity detection threshold (0.15 mm/s). It could accurately sense the flow speed and direction at the same time by measuring only once. The success of this study paves the way for extending this technology to many applications, such as underwater detection, water leak monitoring, and blood/urine flow monitoring.

关键词： sensors Electrodes Seals sensor arrays Biosensors Surface morphology Shape Bionic vibrissa sensor (BVS) flow sensor piezoelectric effect polyvinylidene fluoride (PVDF)

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A Flexible flow sensor for Detecting Airflow Velocity and Incident Angle

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IEEE sensorS JOURNAL 2022年第16期22卷 15884-15892页

作者： Dong, Zihao Shen, Dawei Gong, Zheng Zhang, Deyuan Jiang, Yonggang Beihang Univ Sch Mech Engn & Automat Inst Bion & Micronano Syst Beijing 100191 Peoples R China

A flexible flow sensor is proposed to measure the airflow velocity and incident angle. The sensor consists of a polyimide (PI) substrate, a flat cantilever beam and a graphene piezoresistor. The cantilever beam deforms under the action of fluid-structure interaction (FSI), resulting in changes in the resistance of the graphene piezoresistor. The piezoresistor was prepared by spraying coating of graphene inks using a patterned parylene mask and then encapsulated by coating another polyimide layer to form a sandwiched structure. Experimental results indicate that the flow sensor has a wide detection range of flow velocity (0-30 m/s) and incident angle (0-25 degrees), with a high resolution of 0.94 m/s and 0.23 degrees, respectively. Compared with curved cantilever, the flat cantilever achieves higher sensitivity to the incident angle, and smaller disturbance to the flow field. The arrangement of the flow sensors on an airfoil is discussed for estimation of flight parameters.

关键词： sensors Structural beams Strain Sensitivity sensor arrays Graphene Polyimides Flexible electronics flow sensor graphene piezoresistive cantilever

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Volatile anesthetic gas concentration sensing using flow sensor fusion for use in Austere settings

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JOURNAL OF CLINICAL MONITORING AND COMPUTING 2022年第3期36卷 725-733页

作者： Kolbay, Patrick R. Orr, Joseph A. Kuck, Kai Univ Utah Dept Anesthesiol Sch Med Salt Lake City UT 84132 USA Univ Utah Dept Biomed Engn Salt Lake City UT 84112 USA

flow sensors are often sensitive to the presence of volatile anesthetics. However, this sensitivity provides a unique opportunity to combine flow sensors of differing technological principles as an alternative to measuring volatile anesthetic gas concentration, particularly for austere settings. To determine the feasibility of flow sensor fusion for volatile anesthetic concentrations monitoring, eight flow sensors were tested with isoflurane, sevoflurane, and desflurane, ranging in concentrations from 0-4.5%, 0-3.5%, and 0-18%, respectively. Pairs of flow sensors were fit to the volatile anesthetic gas concentration with a leave-one-out cross-validation method to reduce the likelihood of overfitting. Bland-Altman was used for the final evaluation of sensor pair performance. Several sensor pairs yielded limits of agreement comparable to the rated accuracy of a commercial infrared spectrometer. The ultrasonic and orifice-plate flowmeters yielded the most combinations of viable sensor pairs for all three volatile anesthetic gases. Conclusion: Measuring volatile anesthetic gases using flow sensor fusion is a feasible low-cost, low-maintenance alternative to infrared spectroscopy. In this study, testing was done under steady-state conditions in 100% oxygen. Further testing is necessary to ensure sensor fusion performance under conditions that are more reflective of the clinical use case.

关键词： Volatile anesthetic monitoring Inhalational anesthetics sensor fusion flow sensor

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A Thermal Microfluidic flow sensor Screen-Printed onto an Ultrathin PMMA Foil

A Thermal Microfluidic Flow Sensor Screen-Printed onto an Ul...

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IEEE sensors Conference

作者： Ecker, Rafael Mitteramskogler, Tina Jakoby, Bernhard Johannes Kepler Univ Linz Inst Microelect & Microsensors A-4040 Linz Austria

ISBN: (纸本)9798350303872

This paper reports on the devised fabrication procedure and experimental investigation and characterization of a thermal based flow sensor for microfluidic systems based on polymer technology. The sensor itself is screen-printed onto a self-fabricated ultrathin polymethylmethacrylate (PMMA) foil, which minimizes the heat capacity and therefore yields fast response times of integrated thermal transducers. Integrating the foil-based sensor into the center of a PMMA stack consisting of a substrate and a top plate (both preprocessed to form a microfluidic channel) enables a suitable material compatibility and a low-cost fabrication procedure. Using the well-known evaluation principles of thermal anemometers, the four-wire sensor can be used for accurate flow measurements in such polymer-based microfluidic systems, where the measurement range of the sensor is easily adaptable by changing the channel's height. Currently, it is possible to measure flows starting in the range of 10 mu l per minute up to 1000 mu l per minute.

关键词： microfluidic flow sensor ultrathin foil screen printed sensor low heat capacity

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An Ultralow-Power Flexible Thermal flow sensor Based on Electrochemical Impedance 22

An Ultralow-Power Flexible Thermal Flow Sensor Based on Elec...

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22nd International Conference on Solid-State sensors, Actuators and Microsystems, Transducers 2023

作者： Xiao, Ke Song, Xiangyu Duan, Mingzheng Xu, Wei Shenzhen University Shenzhen China University Of California BerkeleyCA United States

ISBN: (纸本)9784886864352

For the first time, we report an Electrochemical Impedance (EI) based ultrathin and low-power Flexible Thermal flow (FTF) sensor using MEMS technology. For the 0.9% NaCl solution flow, the fabricated 7.4 μm thick FTF sensor achieved a normalized sensitivity of 19.53 PPM/(μm/s)/mW with respect to the input heating power, which is twice better than previously reported EI flow sensors. Besides, tested in 0~400 μm/s flow, the FTF sensor gains a LOD of 6.2 μm/s with an ultralow heating power of © 2023 IEEJ.

关键词： Electrochemical Impedance Flexible sensor flow sensor Low Power Ultrathin Film

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A Smart Real-Time Human Respiratory Monitoring System Based on a High-Performance flow sensor and an Accurate Breathing Rate Recognition Algorithm 22

A Smart Real-Time Human Respiratory Monitoring System Based ...

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22nd International Conference on Solid-State sensors, Actuators and Microsystems, Transducers 2023

作者： Cai, Shiqian Liu, Zhongyi Yang, Gai Ding, Houbo Xie, Huikai Wang, Xiaoyi Beijing Institute Of Technology Beijing China Bit Chongqing Institute Of Microelectronics And Microsystems China

ISBN: (纸本)9784886864352

This paper describes a real-time human respiratory monitoring system based on high-performance flow sensors, which incorporates a high-accuracy algorithm for extracting respiratory rate and monitoring abnormal respiration. The experimental findings demonstrate that the maximum absolute error of the frequency extraction algorithm is 0.007 Hz, and the average absolute error is 0.0003 Hz, which is superior by one order of magnitude to previous work. Additionally, we have developed an abnormal respiration algorithm that enables the recognition of specific breathing symptoms, such as apnea, bradypnea, tachypnea, hyperpnea, and hypopnea. Our approach involved integrating sensors, circuits, algorithms, and software to develop a portable smart human respiratory monitoring system that can share respiration information and conclusions through a smartphone application. The accuracy of the respiration monitoring results of this system indicates its potential utility in point-of-care settings. This work is a step towards the development of low-cost and high-performance respiratory monitoring systems that can improve early detection and management of respiratory disorders. © 2023 IEEJ.

关键词： abnormal respiration detection flow sensor respiration monitoring smart sensor system

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A biomimetic orthogonal flow sensor based on an asymmetric optical fiber sensory structure for marine sensing

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BIOINSPIRATION & BIOMIMETICS 2024年第3期19卷 036002-036002页

作者： Wang, Yujia Song, Mingwang Fu, Xianping Dalian Maritime Univ Informat Sci & Technol Coll Dalian Peoples R China Dalian Maritime Univ Marine Engn Coll Dalian Peoples R China Peng Cheng Lab Shenzhen Peoples R China

With increasing attention on the world's oceans, a significant amount of research has been focused on the sensing of marine-related parameters in recent years. In this paper, a bioinspired flow sensor with corrosion resistance, anti-interference capability, a portable design structure, easy integration, and directional sensing ability is presented to realize flow speed sensing in open water. The sensor is realized by a flexible artificial cupula that seals one side of an optical fiber acting as an artificial kinocilium. Below the artificial kinocilium, an encapsulated s-tapered optical fiber mimics the fish neuromast sensory mechanism and is supported by a 3D-printed structure that acts as the artificial supporting cell. To characterize the sensor, the optical transmission spectra of the sensory fiber under a set of water flow velocities and four orthogonal directions were monitored. The sensor's peak intensity responses were found to demonstrate flow sensing ability for velocity and direction, proving that this biomimetic portable sensing structure is a promising candidate for flow sensing in marine environments.

关键词： flow sensor artificial lateral line sensor biomimetic optical fiber sensor s-tapered fiber marine sensor

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