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A segmented model based internal model control scheme of electromagnetic micro-mirror systems

ISA transactions 2025年

作者： Ruili Dong Qingyuan Tan Yonghong Tan Xiaoli Song Tianyu Wang College of Information Science and Technology Donghua University Shanghai 201620 China. Electronic address: ruilidong@***. Department of Electrical and Computer Engineering University of Windsor Windsor N9B 3P4 ON Canada. Electronic address: tan1b@uwindsor.ca. College of Information Mechanical and Electrical Engineering Shanghai Normal University Shanghai 200234 China. Electronic address: tany@***. Nanjing Institute of Astronomical Optics & Technology Chinese Academy of Sciences Nanjing 210042 China CAS Key Laboratory of Astronomical Optics & Technology Nanjing Institute of Astronomical Optics & Technology Nanjing 210042 China. Electronic address: xlsong@***. School of Mathematical Sciences Henan Institute of Science and Technology Xinxiang 453003 China. Electronic address: wangtianyu125427@***.

In this paper, a segmented internal model control (SIMC) scheme based on the segmented combination model of the electromagnetic micro-mirror system (EMMS) is established. Notice that highly underdamped oscillation and rate-dependent hysteresis exist in the EMMS, so it is a complex nonlinear dynamic system. In order to control the deflection angle of the EMMS using the internal model control strategy, it is necessary to establish the inverse model of the EMMS. Therefore, a new model structure that is convenient for inversion is proposed in this paper to describe the characteristics of the EMMS with underdamped and rate-dependent hysteresis. In the proposed scheme, the model is a combination of a group of weighted sub-models based on the segmentation of the system's operating frequency. The weight of each segmented sub-model is not a constant but a new type of function which is also called the smoothing factor. Its function is to smooth the switching between sub-models, thereby reducing the dynamic error caused by model switching. In addition, the particle swarm optimization (PSO) algorithm is used to determine the optimal frequency segmentation points, which helps to obtain the optimal model for describing the system characteristics. Based on the proposed segmented combination model, the corresponding segmented internal model control with two-degree-of-freedom filters is proposed, and the corresponding filters in the internal model control are designed based on the small gain theorem. Finally, the proposed control strategy is applied to the control of the deflection angle of the electromagnetic micro-mirror to verify the proposed control method. Moreover, the non-smooth internal model control strategy is also used for comparison in the experiments.

关键词： Electromagnetic micro-mirror frequency segmented combination model Hysteresis Internal model control

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