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Conference on Interferometry XVII - Techniques and analysis

作者： Kemao, Qian Nanyang Technol Univ Sch Comp Engn Singapore 639798 Singapore

ISBN: (纸本)9781628412307

A windowed, optimal and tracking (WOT) strategy for measurement data analysis is described, explained and discussed. Many fringe pattern analysis and digital image correlation algorithms adopted this strategy, and thus their similarities and links are revealed. Although this strategy is not new, highlighting it is believed to be helpful for future algorithm development.

关键词： fringe pattern analysis digital image correlation local analysis optimal estimation tracking

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The leveling of mask and wafer in proximity nanolithography using fringe pattern phase analysis

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OPTIK 2014年第13期125卷 3176-3180页

作者： Xu, Feng Zhou, Shaolin Hu, Song Southwest Univ Sci & Technol Fac Informat & Engn Mianyang 621010 Sichuan Peoples R China S China Univ Technol Sch Elect & Informat Guangzhou 510640 Guangdong Peoples R China Chinese Acad Sci Inst Opt & Elect Chengdu 610209 Peoples R China Robot Technol Used Special Environm Key Lab Sichu Mianyang 621010 Sichuan Peoples R China

The fringe pattern phase analysis method is proposed for the leveling of mask and wafer in proximity lithography. The tilt between mask and wafer in the space is reflected in the tilted fringe pattern. The method combining the 2-D Fourier transform and 2-D Hanning window is proposed for processing the tilted fringe pattern. The offset and angle of tilt are extracted through phase analysis. Computer simulation and experiment are both performed to verify this method. The results indicate that the tilt of the mask and wafer in the space can be extracted with high accuracy through this method. (C) 2014 Elsevier GmbH. All rights reserved.

关键词： Nanolithography Leveling fringe pattern analysis Phase extraction

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A two steps phase-shifting demodulation method using the VU factorization

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OPTICS AND LASERS IN ENGINEERING 2021年 147卷 106730-106730页

作者： Estrada, Julio C. Flores, Victor H. Vargas, Javier Ctr Invest Matemat CIMAT Callejon Jalisco S-N Guanajuato 36023 Gto Mexico Univ Politcn Bicentenario Dept Ingn Robot Silao 36283 Gto Mexico Univ Complutense Madrid Opt Dept Fac CC Fis Ciudad Univ S-N E-28040 Madrid Spain

In this paper, we present a two steps phase-shifting fringe pattern demodulation method using the VU factorization. Compared with other methods, our proposal is robust to non-constant background illuminations and modulating terms (non-normalized fringes). We use the two given fringe patterns, and from these, we synthetically generate another two images that approach the background illumination in order to obtain a total set of four images. Such set is used in a matrix model that can be factorized using the VU factorization method to determine the modulating phase. Our proposal is able to recover the phase without 1) known phase shift, 2) normalized fringe patterns, and 3) any special non-linear pre-processing. Tests and results with an important representative diversity of interferograms, taken from different experiments, are shown to demonstrate the feasibility of this method.

关键词： Phase shifting VU Factorization fringe pattern analysis Optical interferometry

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3D surface reconstruction of small height object based on thin structured light scanning

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MICRON 2021年 143卷 103022-103022页

作者： Liu, Jinghui Wang, Yuezong Inst Disaster Prevent Sanhe 065201 Hebei Peoples R China Beijing Univ Technol Fac Mat & Mfg Beijing 100124 Peoples R China

Aiming at the problem of 3D surface reconstruction of small height objects, a method based on the scanning principle with thin structured light is proposed. The laser fringe is produced by a laser light source. It scans the surface of small height object under the control of a precise motion control system, and is integrated with a stereo light microscope and two cameras to form a complete structured light profilometry system. This method is very suitable for 3D surface reconstruction of small height objects. In order to deal with the phenomenon of "cracking" and local uneven brightness in microscope fringe image, the fringe image sequence is captured under different camera exposure parameters, and the quality of fringe image is improved by image fusion. The location of pixels on the center line of laser stripes is detected by the Loess local second-order fitting method, and the positions of these pixels are smoothed and predicted by using the Lowess local linear fitting method. The deformation of the laser stripe center curve is calculated by constructing a baseline, and the 3D surface reconstruction of the object with small height is realized in the image space. Taking the small characters on the surface of Chinese coins and human hair as test samples, their 3D surfaces are constructed by using the method proposed in this paper. The reconstructed 3D surface shapes are highly consistent with the real 3D surface shapes of objects.

关键词： fringe pattern analysis Optical profilometry 3D shape reconstruction Microscopic vision Small scale reconstruction

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Development of a New Normalization Technique for Twelve fringe Photoelasticity (TFP)

Development of a New Normalization Technique for Twelve Frin...

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Society-for Experimental-Mechanics (SEM) Annual Conference and Exposition on Experimental and Applied Mechanics

作者： Pandey, Ashutosh Ramesh, K. Indian Inst Technol Madras Dept Appl Mech Chennai Tamil Nadu India

ISBN: (纸本)9783319974811;9783319974804

The use of theoretical calibration table for fringe pattern demodulation in isochromatic images is revisited and a sensitivity analysis of material stress fringe value to generate theoretical calibration table is studied. The influence of filter parameter 'R' in normalization is discussed and its nuances are brought out. A substitution for theoretical calibration table and a new normalization technique is proposed to alter the dynamic range over the entire model domain of the isochromatic image suitably.

关键词： Photoelasticity fringe pattern analysis Theoretical calibration Image processing Normalization

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Wavelet selection in two-dimensional continuous wavelet transform technique for optical fringe pattern analysis

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JOURNAL OF OPTICS 2012年第6期14卷 065403-65403页

作者： Ma, Jun Wang, Zhaoyang Minh Vo Pan, Bing Catholic Univ Amer Dept Mech Engn Washington DC 20064 USA Beijing Univ Aeronaut & Astronaut Inst Solid Mech Beijing 100191 Peoples R China

The performance of different kinds of mother wavelets for the two-dimensional continuous wavelet transform (2D-CWT) technique being used in optical fringe pattern analysis is evaluated in this paper. Based on this investigation, a two-dimensional modulated Mexican hat wavelet is introduced. The validity of the wavelet for the 2D-CWT technique in fringe pattern analysis is demonstrated by computer simulation and real applications.

关键词： continuous wavelet transform fringe pattern analysis phase extraction

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3-D optical profilometry at micron scale with multi-frequency fringe projection using modified fibre optic Lloyd's mirror technique

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OPTICS AND LASERS IN ENGINEERING 2018年第Jun.期105卷 14-26页

作者： Inanc, Arda Kosoglu, Gulsen Yuksel, Heba Inci, Mehmet Naci Bogazici Univ Dept Phys TR-34342 Istanbul Turkey Marmara Univ Dept Phys TR-34722 Istanbul Turkey Bogazici Univ Dept Elect & Elect Engn TR-34342 Istanbul Turkey

A new fibre optic Lloyd's mirror method is developed for extracting 3-D height distribution of various objects at the micron scale with a resolution of 4 mu m. The fibre optic assembly is elegantly integrated to an optical microscope and a CCD camera. It is demonstrated that the proposed technique is quite suitable and practical to produce an interference pattern with an adjustable frequency. By increasing the distance between the fibre and the mirror with a micrometre stage in the Lloyd's mirror assembly, the separation between the two bright fringes is lowered down to the micron scale without using any additional elements as part of the optical projection unit. A fibre optic cable, whose polymer jacket is partially stripped, and a microfluidic channel are used as test objects to extract their surface topographies. Point by point sensitivity of the method is found to be around 8 mu m, changing a couple of microns depending on the fringe frequency and the measured height. A straightforward calibration procedure for the phase to height conversion is also introduced by making use of the vertical moving stage of the optical microscope. The phase analysis of the acquired image is carried out by One Dimensional Continuous Wavelet Transform for which the chosen wavelet is the Morlet wavelet and the carrier removal of the projected fringe patterns is achieved by reference subtraction. Furthermore, flexible multi -frequency property of the proposed method allows measuring discontinuous heights where there are phase ambiguities like 2 pi by lowering the fringe frequency and eliminating the phase ambiguity. (C) 2017 Elsevier Ltd. All rights reserved.

关键词： Lloyd's mirror fringe pattern analysis Multi-frequency fringes Optical profilometry Wavelet transform

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Adaptive automatic data analysis in full-field fringe pattern based optical metrology 20

Adaptive automatic data analysis in full-field fringe patter...

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20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics (SCPOC)

作者： Trusiak, Maciej Patorski, Krzysztof Sluzewski, Lukasz Pokorski, Krzysztof Sunderland, Zofia Warsaw Univ Technol Inst Micromech & Photon 8 Sw A Boboli St PL-02505 Warsaw Poland

ISBN: (纸本)9781510607330;9781510607347

fringe pattern processing and analysis is an important task of full-field optical measurement techniques like interferometry, digital holography, structural illumination and moire. In this contribution we present several adaptive automatic data analysis solutions based on the notion of Hilbert-Huang transform for measurand retrieval via fringe pattern phase and amplitude demodulation. The Hilbert-Huang transform consists of 2D empirical mode decomposition algorithm and Hilbert spiral transform analysis. Empirical mode decomposition adaptively dissects a meaningful number of same-scale subimages from the analyzed pattern - it is a data-driven method. Appropriately managing this set of unique subimages results in a very powerful fringe pre-filtering tool. Phase/amplitude demodulation is performed using Hilbert spiral transform aided by the local fringe orientation estimator. We describe several optical measurement techniques for technical and biological objects characterization basing on the especially tailored Hilbert-Huang algorithm modifications for fringe pattern denoising, detrending and amplitude/phase demodulation.

关键词： fringe pattern analysis empirical mode decomposition Hilbert transform Hilbert-Huang transform phase retrieval interferometry quantitative phase imaging adaptive data analysis

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Amplitude checker grating-based multichannel lateral shear interferometry for extended aberration sensing 19

Amplitude checker grating-based multichannel lateral shear i...

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19th Interferometry Conference

作者： Sluzewski, Lukasz Patorski, Krzysztof Trusiak, Maciej Warsaw Univ Technol Inst Micromech & Photon 8 Sw A Boboli St PL-02525 Warsaw Poland

ISBN: (数字)9781510620704

ISBN: (纸本)9781510620704

A novel, single shot, low cost, multidirectional lateral shear interferometer for extended range wave front sensing has been developed. It exploits the Fresnel diffraction field formed by five lowest diffraction orders of a simple amplitude checker grating. The Fresnel pattern encodes information on four directional partial derivatives of the wavefront under test. It has been theoretically and experimentally shown that for larger gradient phase objects or shear amounts only diagonal derivative information is easily accessible. The x and y direction gradient maps are strongly amplitude modulated. Therefore their demodulation becomes a formidable task. The same feature has been found in widely used quadriwave interferometer developed at ONERA, France. The results of analytical studies and experimental works including fringe pattern processing and phase demodulation are presented.

关键词： Interferometry Talbot and self-imaging effects diffraction fringe pattern analysis

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Adaptive information retrieval in automated fringe based full-field optical metrology 7

Adaptive information retrieval in automated fringe based ful...

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7th International Conference on Speckle Metrology

作者： Patorski, Krzysztof Trusiak, Maciej Warsaw Univ Technol Inst Micromech & Photon 8 Sw A Boboli St PL-02505 Warsaw Poland

ISBN: (纸本)9781510622982

Optical metrology provides very attractive means for noninvasive and highly accurate evaluation of different features of various objects. Information is acquired and processed over whole sensor area using so-called full-field methods. In coherent light techniques the measurand is stored in the complex amplitude of the optical field. Due to physical limitations the recorded intensity distribution is generally captured in a form of a fringe pattern with information encoded in phase and/or amplitude modulation distributions, hence the importance of their demodulation techniques. In this contribution several recently developed adaptive techniques for information retrieval in automated fringe based full-field optical metrology will be presented. Adaptivity constitutes advantage enabling robustness and versatility - presented methods adapt their performance according to characteristics of analyzed fringe patterns providing efficient means to successfully retrieve information obtained by various optical techniques, i.e., interferometry (classical two-beam, multi-beam, time-averaged, speckle, grating), moire and structured illumination. Developed fringe pattern demodulation techniques are based on the concept of single-frame processing using advanced image pre-filtering techniques, i.e., empirical mode decomposition and variational image decomposition. The phase/amplitude demodulation is conducted utilizing the 2D Hilbert transform and complex analytic signal paradigm. Applications of these specially tailored methods include but are not limited to: coherent phase microscopy for stationary and live biological objects (e.g., prostate cancer cells, red blood cells, semen cells etc.), vibration amplitude studies of technical microobjects, wavefront sensing, optical testing etc.

关键词： fringe pattern analysis empirical mode decomposition Hilbert transform Hilbert-Huang transform phase retrieval interferometry quantitative phase imaging adaptive data analysis

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