The crosstalk of a 10ghz-spaced 32 channel arrayed-waveguidegrating has been reduced from -17 to -30dB and from -16 to -27dB for the TE and TM modes, respectively, via the photosensitivity under 193nm ArF excimer las...
详细信息
The crosstalk of a 10ghz-spaced 32 channel arrayed-waveguidegrating has been reduced from -17 to -30dB and from -16 to -27dB for the TE and TM modes, respectively, via the photosensitivity under 193nm ArF excimer laser irradiation. A metal mask with a window was placed on the arrayedwaveguides and the unmasked arrayedwaveguides were irradiated until the crosstalk was reduced to the desired value. This technique means that fine adjustment of the laser beam on individual arrayedwaveguides is no longer necessary.
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