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Optical Response of Titanium Nitride Plasmonic Nanohole arrays: Impact of Square and hexagonal array Geometry, Pitch, and Nanohole Diameter

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PLASMONICS 2025年 1-10页

作者： Reiter, Sebastian Ratzke, Markus Nitsch, Paul-Gregor Mai, Christian Spirito, Davide Corley-Wiciak, Agnieszka Anna Wenger, Christian Fischer, Inga A. Brandenburg Tech Univ Cottbus Senftenberg Experimentalphysik & Funktionale Materialien Erich-Weinert-Str 1 D-03046 Cottbus Germany IHP Leibniz Inst Innovat Mikroelekt Technologiepark 25 D-15236 Frankfurt Germany

Plasmonic nanohole arrays (NHAs) exhibit extraordinary optical transmission (EOT) evoked by resonant excitation of surface plasmons at an excitation wavelength, which is highly sensitive to changes in refractive index in the surrounding dielectric. This can enable the use of plasmonic NHAs in on-chip refractive index sensors. Such sensors can be realized on the cost-effective silicon platform by the integration of a plasmonic NHA and a Ge photodetector, provided that complementary metal-oxide-semiconductor (CMOS)-compatible materials are used for their fabrication. Titanium nitride (TiN) as a biocompatible and CMOS-compatible plasmonic transition metal nitride is well-suited for integration on the silicon platform;however, the comparatively large losses within the material require geometry optimization strategies in order to improve the optical properties of TiN NHAs for sensing. In this work, we investigated different TiN NHA geometries both in experiment and simulation. We extensively characterized square and hexagonal arrays with varying pitches and nanohole diameters and provide a detailed comparison of their optical properties. We also discuss characterization results for surface refractive index changes imposed by depositing a thin Al2O3 layer on top of the NHAs. While we do not observe a clear advantage of hexagonal arrays compared to square arrays for sensing, our results highlight the importance of geometry optimization for TiN NHAs integrated with devices.

关键词： Plasmonic nanohole array Titanium nitride hexagonal array Square array Nanohole diameters

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High-resolution hexagonal array patterns fabricated by dipole cross-exposure in deep ultraviolet lithography

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JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 2025年第1期24卷

作者： Dhankhar, Meena Keil, Matthias Khomtchenko, Elena Pret, Alessandro Vaglio Birkelund, Karen Tech Univ Denmark DTU Nanolab Copenhagen Denmark KLA Corp Milpitas CA USA

Background: A persistent challenge in deep ultraviolet (UV) projection lithography is to develop processes that can print patterns with higher resolution while maintaining acceptable control of their critical dimensions. Aim: We have improved the resolution of hexagonal array patterns using a combination comprising dipole illumination, cross patterning, triple exposure, and assist lines. Approach: Off-axis dipole illumination, achieved by self-constructed dipole apertures, is used together with a triple cross-exposure technique to produce small pitch patterns of varying sizes. We use a 248-nm wavelength KrF DUV stepper to expose mask patterns comprising arrays of quadratic structures crossed by assisted lines to print patterns with a minimum pitch size of 320 nm. The pattern optimization was accompanied by lithographic simulation calculations optimizing both the aerial image and the resist pattern after development. Results: By varying the pattern dimensions on the mask, process control can be improved, which produces robust patterns with a minimum pillar size of approximate to 95 nm both for 320- and 340-nm pitch sizes. Changing the mask polarity delivers holes with similar dimensions, whereas off-axis dipole illumination along with double cross exposure can fabricate quasi-elliptical structures with different sizes and angles. In all cases, the size of pillars, holes, and quasi-elliptical structures can be altered by changing the size of the square and/or assist line on the mask. Conclusion: We have applied resolution enhancement techniques that apply to any kind of projection lithography system. (c) 2025 Society of Photo-Optical Instrumentation Engineers (SPIE)

关键词： deep ultraviolet lithography dipole illumination dipole cross-exposure assist feature hexagonal array

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Novel Auto-Calibration Method for 7-Elements hexagonal array with Mutual Coupling

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IEICE TRANSACTIONS ON FUNDAMENTALS OF ELECTRONICS COMMUNICATIONS AND COMPUTER SCIENCES 2023年第5期E106A卷 858-862页

作者： Zeng, Fankun Qiu, Xin LI, Jinhai Long, Biqi Su, Wuhai Chen, Xiaoran Inst Microelect Chinese Acad Sci Beijing 100029 Peoples R China Univ Chinese Acad Sci Beijing 100049 Peoples R China Shenzhen Huazhixinlian Technol Co Ltd Shenzhen Peoples R China

Mutual coupling between antenna array elements will significantly degrade the performance of the array signal processing methods. Due to the Toeplitz structure of mutual coupling matrix (MCM), there exist some mutual coupling calibration algorithms for the uniform linear array (ULA) or uniform circular array (UCA). But few methods for other arrays. In this letter, we derive a new transformation formula for the MCM of the 7 -elements hexagonal array (HA-7). Further, we extend two mutual coupling auto-calibration methods from UCA to HA by the transformation formula. Simulation results demonstrate the validity of the proposed two methods.

关键词： array signal processing mutual coupling hexagonal array auto-calibration

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Enhanced bit error rate in visible light communication: a new LED hexagonal array distribution

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OPTICAL AND QUANTUM ELECTRONICS 2022年第8期54卷 506-506页

作者： Matter, Kareem Mostafa Fayed, Heba A. Abd El-Aziz, Ahmed Aly, Moustafa H. Arab Acad Sci Technol & Maritime Transport Elect & Commun Engn Dept Coll Engn & Technol Alexandria Egypt

Due to the exponential growth of mobile devices and wireless services, a huge demand for radio frequency has increased. The presence of several frequencies causes interference between cells, which must be minimized to get the lower bit error rate (BER). For this reason, it is of great interest to use visible light communication (VLC). This paper suggests a VLC system that decreases the BER with applying a new LED distribution with a hexagonal shape using different techniques: on-off keying (OOK), quadrature amplitude modulation, and frequency reuse concept to mitigate the interference between the reused frequencies inside the hexagonal shape. The BER is measured in two scenarios line of sight (LoS) and non-line of sight for each technique that we used. The recommended values of BER in the proposed model for soft frequency reuse in case of LoS at 4, 8, and 10 dB signal to noise ratio, are 3.6 x 10(-6), 6.03 x 10(-13), and 2.66 x 10(-18), respectively.

关键词： Visible light communication (VLC) hexagonal array Field of view (FoV) Access point (AP) Bit error rate (BER) Quadrature amplitude modulation (QAM) Frequency reuse (FR) Soft frequency reuse (SFR) Fractional frequency reuse (FFR) On-off keying (OOK)

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Peak in Angular Dependence of Coercivity in a hexagonal array of Permalloy Spherical Nanocaps

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IEEE MAGNETICS LETTERS 2019年 10卷 1-3页

作者： Davila, Yuset Guerra Revoredo Junior, Frederico Alves Pena-Garcia, Ramon Padron-Hernandez, Eduardo Univ Fed Pernambuco BR-50670901 Recife PE Brazil Univ Fed Pernambuco Dept Fis BR-50670901 Recife PE Brazil

Micromagnetic simulations of coercivity as a function of external magnetic field direction were performed for a hexagonal array of hemispherical Permalloy nanocaps. The analysis was based on hysteresis loops for arrangements of nanocaps of variable thickness (5 nm and 10 nm). The angular dependence of coercivity had a maximum at about 80 degrees with respect to the arrangement plane. An increase in coercivity with nanocap thickness is related to the magnetization reversal mechanism, where the dipole energy of individual caps generates an effective intermediate axis, locking the magnetic moments. The coercivity has maximum values of 109 Oe for 5 nm and 156 Oe for 10 nm thickness. The remanence decreases monotonically with angle. This is associated with the influence of shape anisotropy, where the demagnetizing field in the plane of the array is much smaller than the demagnetizing field perpendicular to the plane.

关键词： Nanomagnetics magnetization reversal ferromagnetic nanocaps hexagonal array coercivity micromagnetic simulation

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Enhanced Superconductivity Induced by the hexagonal-array-Cooling-Shrinkage Effect

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ACS APPLIED ELECTRONIC MATERIALS 2020年第5期2卷 1381-1387页

作者： Li, Zhigang Wang, Tianle Feng, Shangshen Fang, Minghu Shen, Shijie Yang, Zhaorong Wei, Bingqing Taizhou Univ Sch Pharmaceut & Mat Engn Taizhou 318000 Peoples R China Univ Delaware Dept Mech Engn Newark DE 19716 USA Zhejiang Agr & Forestry Univ Sch Sci Hangzhou 311300 Peoples R China Zhejiang Univ Phys Dept Hangzhou 310027 Peoples R China Chinese Acad Sci High Magnet Field Lab Hefei 230031 Peoples R China

Improving the superconductivity of thin films, especially the critical current density (J(C)) and the critical field (H-C), is crucial for the application of superconducting devices. Here, we apply a simple hybrid structure to enhance the superconductivity of Nb films induced by a hexagonal-array-cooling-shrinkage (HACS) effect, which is very sensitive to the temperature and magnetic field. The H-C of the hybrid at 8.8 K is similar to 32% more than that of a flat Nb film, while it is increased to similar to 1000% at 8.97 K. In addition, the HACS effect to enhance superconductivity is more effective than that by uniform compression stress with the same value. The newly proposed approach can be used as self-protection to prevent superconducting devices from losing their superconductivity due to excessive current or magnetic fields.

关键词： polystyrene spheres hexagonal array superconductivity critical current density critical field

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Simulation for light extraction efficiency of OLEDs with spheroidal microlenses in hexagonal array

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OPTICS COMMUNICATIONS 2018年 415卷 168-176页

作者： Bae, Hyungchul Kim, Jun Soo Hong, Chinsoo Soonchunhyang Univ Dept Phys Asan 336745 Chungnam South Korea

A theoretical model based on ray optics is used to simulate the optical performance of organic light-emitting diodes (OLEDs) with spheroidal microlens arrays (MLAs) in a hexagonal array configuration using the Monte Carlo method. In simulations, ray tracing was performed until 20 reflections occurred from the metal cathode, with 10 consecutive reflections permitted in a single lens pattern. The parameters describing the shape and array of the lens pattern of a MLA are its radius, height, contact angle, and fill factor (FF). Many previous results on how these parameters affect light extraction efficiency (LEE) are inconsistent. In this paper, these contradictory results are discussed and explained by introducing a new parameter. To examine light extraction from an OLED through a MLA, the LEE enhancement is studied considering the effect of absorption by indium tin oxide during multiple reflections from the metal cathode. The device size where LEE enhancement is unchanged with changing lens pattern was identified for a fixed FF;under this condition, the optimal LEE enhancement, 84%, can be obtained using an OLED with a close-packed spheroidal MLA. An ideal maximum LEE enhancement of 120% was achieved with a device with an infinite-sized MLA. The angular intensity distribution of light emitted through a MLA is considered in addition to LEE enhancement for an optimized MLA.

关键词： Angular intensity distribution Fill factor (FF) hexagonal array Light extraction efficiency (LEE) Monte Carlo method OLEDs Spheroidal microlens array

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SPURIOUS MODE FREE hexagonal PMUT array 20

SPURIOUS MODE FREE HEXAGONAL PMUT ARRAY

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20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS)

作者： Kusano, Yuri Luo, Guo-Lun Horsley, David A. Univ Calif Davis Dept Elect & Comp Engn MEMS Lab Davis CA 95616 USA Univ Calif Davis Dept Mech & Aerosp Engn MEMS Lab Davis CA 95616 USA

ISBN: (纸本)9781728120072

This paper presents a hexagonal piezoelectric micromachined ultrasonic transducer (PMUT) array that can avoid spurious modes known to occur by mode coupling with adjacent elements. By designing an optimal hexagonal PMUT array with 10 mu m spacing resulting in high fill -factor, we were able to experimentally demonstrate well-matched spurious mode free resonances operating around 10 MHz. Furthermore, the effects of the center PMUT in arrays were investigated through various array designs based on finite clement method (FEM) simulations and experimental measurements.

关键词： MEMS PMUT hexagonal array spurious mode surface micromachining

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Effective elastic constants of hexagonal array of soft fibers

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COMPUTATIONAL MATERIALS SCIENCE 2017年 139卷 395-405页

作者： Drygas, Piotr Gluzman, Simon Mityushev, Vladimir Nawalaniec, Wojciech Univ Rzeszow Dept Math Anal Fac Math & Nat Sci Pigonia 1 PL-35959 Rzeszow Poland 3000 Bathurst St Apt 606 Toronto ON M6B 3B4 Canada Pedag Univ Ul Podchorazych 2 PL-30084 Krakow Poland

Analytical formulae for the effective elastic constants of 2D composites with soft unidirectional fibers arranged in the hexagonal array are obtained for arbitrary concentration of fibers, from dilute case to percolation. It is supposed that every section of composites perpendicular to fibers is the hexagonal array with circular holes or soft inclusions. First, a polynomial approximation in concentration is obtained by application of functional equations. Further, an asymptotic analysis is applied to the obtained polynomial with using of the known asymptotic formulae in percolation regime. Finally, the formula for the effective shear modulus is suggested. It can be applied to the typical matrices made from ceramics, metals and polymers, and to other materials as well, e.g., for resin and thallium. (C) 2017 Elsevier B.V. All rights reserved.

关键词： Effective elastic constants hexagonal array Percolation regime Symbolic computation

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Parallel contextual hexagonal array P systems 11th

Parallel contextual hexagonal array P systems

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11th International Conference on Bio-inspired Computing – Theories and Applications, BIC-TA 2016

作者： Suseelan, James Immanuel Thomas, D.G. Thamburaj, Robinson Nagar, Atulya K. Jayasankar, S. Department of Mathematics Madras Christian College Tambaram Chennai600 059 India Department of Mathematics and Computer Science Liverpool Hope University Liverpool United Kingdom Department of Mathematics Ramakrishna Mission Vivekananda College Chennai600 004 India

ISBN: (纸本)9789811036101

We introduce new P system models, called as external and internal parallel contextual hexagonal array P systems, based on the external and internal parallel contextual hexagonal array grammars. We can generate hexagonal arrays using these P system models with the help of Z-direction, X-direction and Y-direction external or internal parallel contextual hexagonal array rules. We discuss some basic properties of these P systems and give some comparison results in terms of their generative powers. © Springer Nature Singapore Pte Ltd. 2016.

关键词： hexagonal array P system Parallel contextual array

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