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检索条件"主题词=Micro/nano Displacement Sensor"

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micro/nano displacement sensor for Piezoelectric Actuator with Multi-Stage Expansion Mechanism

Micro/Nano Displacement Sensor for Piezoelectric Actuator wi...

引用

IEEE/RSJ International Conference on Intelligent Robots and Systems

作者： Yu, Yong Song, Bo Chen, Renbing Ge, Yunjian Kagoshima Univ Grad Sch Sci & Engn Kagoshima 8900065 Japan

ISBN: (纸本)9781424466757

In this paper, a micro/nano displacement sensor for PZT actuator which could measure the minute displacement in micron or nanometer level has been proposed. This paper focus on the whole process of this novel sensor from the working principle, parameter determination to the FEM simulation and so forth. This sensor can enlarge the displacement of the PZT by utilizing the lever principle and the strain gauges can perceive the variation without amplifying the noise. About this sensor, we also use the flexure hinges as the rotation joints to obtain the expansion. In addition, we provide the accurate model for this special kind of displacement sensor, and through that people could design and set every parameter freely. Whatever the simulation results in FEM or the experiment data, both of which show that the sensor can perceive the displacement of the PZT actuator in micro/nano scale. Also, the characteristic experiment shows that the proposed sensor has a better performance such as higher level linearity, resolution than its former two generations.

关键词： micro/nano displacement sensor Mathematic model Flexure hinges Strain gauges displacement expansion

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Research on Signal Processing of micro/nano displacement sensor for Piezoelectric Actuator Based on Forward Linear Prediction Wavelet Transform

Research on Signal Processing of Micro/Nano Displacement Sen...

引用

IEEE International Conference on Mechatronics and Automation

作者： Chen, Renbing Yu, Yong Song, Bo Ge, Yunjian Chinese Acad Sci Inst Intelligent Machines Hefei Anhui Peoples R China Univ Sci & Technol China Dept Automat Hefei Anhui Peoples R China Kagoshima Univ Dept Engn Mech Kagoshima 8900065 Japan

ISBN: (纸本)9781424426928

The micro/nano displacement measurement system described in this paper is a sensor that could measure micro/nanometer displacement level and has applications in a PZT actuator. As it is used in precision instruments, the sensor is required not to accommodate much space in order to save the room of measuring device, and what's more, it can detect the system's useful signal from the polluted weak signal. Therefore, in this paper we propose a novel signal processing algorithm based on forward linear prediction wavelet transform (DWT-FLP). This method not only uses the fast wavelet transform to achieve signal's wavelet decomposition and wavelet reconstruction, but also utilizes the FLP to obtain the wavelet coefficients, it can get a good de-noise effect. In the end, some correlative experiments have been made, the results illustrate the validity of the filtering algorithm and the sensor has a higher level of static output, real-time, linearity, low absolute deviation and resolution.

关键词： micro/nano displacement sensor Weak Signal Detection De-noise DWT-FLP Filter Algorithm

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Development of micro/nano displacement sensor for Piezoelectric Actuator

Development of Micro/Nano Displacement Sensor for Piezoelect...

引用

IEEE RSJ International Conference on Intelligent Robots and Systems

作者： Yu, Yong Song, Bo Ge, Yunjian Kagoshima Univ Dept Mech Engn Kagoshima 8900065 Japan Chinese Acad Sci Inst Intelligent Machine Beijing 100864 Peoples R China Univ Sci & Technol Dept Automat Hefei Peoples R China

ISBN: (纸本)9781424438037

micro displacement measurement of the PZT actuator is a micro sensor which could measure the minute displacement in micron or nanometer level. In general, the sensor is required to accommodate little space in order to save the room of measuring device. In this paper, a mechanical micro displacement sensor with smaller volume has been proposed. This paper focus on the whole process of this novel sensor from the working principle, parameter determine to the FEM simulation as well as the characteristic experiment and so on. This sensor can enlarge the displacement of the PZT by utilizing the lever principle and the strain gauges can perceive the variation without amplifying the noise. In this sensor, we use the flexure hinges as the rotation joints to obtain the expansion. Whatever the simulation results in FEM or the experiment data, both of which show that the sensor can perceive the displacement of the PZT actuator in micro/nano scale. Also, the characteristic experiment shows that the proposed sensor has a higher level linearity, resolution and lower error.

关键词： micro/nano displacement sensor Flexure bilges Strain gauges displacement expansion

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Development and Analysis of micro/nano displacement sensor for Piezoelectric Actuator

Development and Analysis of Micro/Nano Displacement Sensor f...

引用

IEEE International Conference on Mechatronics and Automation

ISBN: (纸本)9781424426928

A novel generation of micro/nano displacement sensor for PZT actuator which could measure the minute displacement in micron or nanometer level has been performed in this paper. In general, the former two generations of sensor at IIM have been fabricated and tested successfully. In this paper, a new generation micro/nano displacement sensor with higher resolution has been proposed. This paper focus on the whole process of this novel sensor from the working principle, parameter determination to the FEM simulation and so forth. This sensor can enlarge the displacement of the PZT by utilizing the lever principle and the strain gauges can perceive the variation without amplifying the noise. About this sensor, we also use the flexure hinges as the rotation joints to obtain the expansion. In addition, we provide the accurate model for this special kind of displacement sensor, and through that people could design and set every parameter freely. The simulation results in FEM show that the theoretical model matched the simulation results and this new sensor would have a better performance than its last two generations.

关键词： micro/nano displacement sensor Mathematic model Flexure hinges Strain gauges displacement expansion

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Information Acquisition of a micro/nano displacement for Piezoelectric Actuator sensor Based on DSP2812

Information Acquisition of a Micro/Nano Displacement for Pie...

引用

8th World Congress on Intelligent Control and Automation (WCICA)

作者： Yu, Yong Chen, Renbing Sun, Hanyu Song, Bo Ge, Yunjian Kagoshima Univ Dept Mech Engn Kagoshima 8900065 Japan Chinese Acad Sci Inst Machine Intelligence Hefei Peoples R China Univ Sci & Technol China Dept Automat Hefei Peoples R China

ISBN: (纸本)9781424467129

A novel micro/nano displacement based on multi-stage expansion mechanism is presented. It combines the accuracy mechanism technology and real-time fine electronic technology. The paper focuses on from the working principle electronic information acquisition, hardware design to signal processing as well as the characteristic experiment and so on. micro/nano displacement was detected using four strain resistances pasted on elastomer which links to flexible hinges. It can obtain the displacement after mechanical expansion. After that, the signal needs electronic amplification, low-pass filter to get amplified useful signal from polluted weak signal, then send to AD977A for conversion from analog to digital. Then the data were sent to DSP2812 which handles the signal processing using FIR filer, besides, data can display and communicate with the upper PC. In the end, some correlative experiments have been made, the experiment data show that the sensor can perceive the displacement of the PZT actuator in micro/nano scale, also the circuit hardware system can enhance the signal's static output real-time, higher linearity and resolution.

关键词： micro/nano displacement sensor Digital signal processing FIR Weak signal detection

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