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optical modeling of SiOx thin films for physicochemical property measurement by spectroscopic ellipsometry

optical MATERIALS 2025年 164卷

作者： Ge, Fangqi Wang, Likun Han, Gaorong Liu, Yong Ma, Sainan Zhejiang Univ Ningbo Innovat Ctr Ningbo 315100 Peoples R China Zhejiang Univ Sch Mat Sci & Engn Hangzhou 310058 Peoples R China

Spectroscopic ellipsometry (SE) is widely recognized for measuring the optical parameters of thin films, and its potential for in-depth analysis attracts attention from both scientific and technological aspects. Here, an advanced optical modeling approach was proposed to extend SE to investigate the physicochemical properties of SiOx thin films. Amorphous silicon oxide thin films (SiOx, 0 <= x <= 2) were deposited via mid-frequency magnetron sputtering under varying oxygen partial pressures and sputtering powers. The Tauc-Lorentz model was first developed to extract the optical properties of amorphous silicon (a-Si) and SiO2, then the Bruggeman Effective Medium Approximation (BEMA) model based on the derived optical constants (n, k) of a-Si and SiO2 was further employed to reveal the structure and optical properties of SiOx thin films. The SE results were simultaneously verified through profilometer, UV-vis-NIR spectrophotometer, Fourier transform infrared spectroscopy, and X-ray photoelectron spectroscopy, ensuring the accuracy and reliability of the modeling. Our work provides a theoretical and methodological foundation for advancing SE as a non-destructive in-situ technique, which is not only suitable for amorphous silicon oxide films but also for other non-stoichiometric thin films.

关键词： Spectroscopic ellipsometry optical modeling Physicochemical property Magnetron sputtering SiOx films

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optical modeling of Alkaline Saw-Damage-Etched Rear Surfaces of Monocrystalline Silicon Solar Cells

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IEEE JOURNAL OF PHOTOVOLTAICS 2014年第6期4卷 1436-1444页

作者： Liu, Zhe Sahraei, Nasim Hoex, Bram Aberle, Armin G. Peters, Ian Marius Natl Univ Singapore Solar Energy Res Inst Singapore Singapore 117574 Singapore Natl Univ Singapore Dept Elect & Comp Engn Singapore 117583 Singapore

In this study, we propose a geometric optical model to represent alkaline saw-damage-etched (SDE) surfaces of monocrystalline silicon wafers. An experimental study is carried out to characterize the optical properties of alkaline SDE surfaces on monocrystalline silicon wafers. Based on the surface characteristics measured by goniometry and height profiling, a geometric optical model is developed to describe the SDE surface with two parameters: characteristic angle and planar fraction. Using the path-tracing method, spectral reflectance simulations are carried out for four different types of samples. With the measured characteristic angle of 22 degrees and planar fraction of 0.25 or 0.36, we find that this representation of SDE surface can predict the reflection and transmission with a root-mean-square error (RMSE) of the equivalent current density from 0.19 to 0.57 mA/cm(2). The developed model is also applied to the optical loss analysis of aluminum local back surface field (Al-LBSF) solar cells with an SDE rear surface. We find that SDE rear surfaces provide better light trapping than planar surfaces. As a consequence, Al-LBSF solar cells with pyramids on the front and an SDE rear are predicted to produce 0.6 mA/cm(2) more photocurrent than similar cells with a planar rear surface.

关键词： Alkaline saw damage etching optical modeling silicon wafer solar cells textured silicon surfaces

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optical modeling as optimization tool for single and double junction polymer solar cells

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THIN SOLID FILMS 2008年第20期516卷 7188-7192页

作者： Eerenstein, W. Slooff, L. H. Veenstra, S. C. Kroon, J. M. Energy Res Ctr Netherlands NL-1755 ZG Petten Netherlands Dutch Polymer Inst NL-5600 AX Eindhoven Netherlands

We have used optical modeling to calculate whether optical absorption and corresponding current densities in solar cells consisting of PF10TBT:PCBM (1:4) can be enhanced, either in single junctions by applying optical spacers or by going to a tandem structure. The current densities are calculated from the optical absorption using experimentally determined IQE values. When an optical spacer is used, the thickness of the transparent electron transport layer (ETL) and hole transport layer (HTL) is very important. The absorption, and thus current density, in a single junction solar cell could be enhanced by 10% by reducing the HTL (PEDOT) thickness and by inserting a thin ETL (30 nm ZnO). The current density in a tandem consisting of two PF10TBT:PCBM blend layers is strongly dependent on the thickness of these blend layers. An increase of 20% is possible for a layer combination of 150 nm and 250 nm, combined with appropriate ETL and HTL layer thicknesses, and assuming no further losses. (c) 2007 Elsevier B.V. All rights reserved.

关键词： optical modeling polymer solar cells tandem structures polyfluorenes

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optical modeling of MEMS corner cube retroreflectors with misalignment and nonflatness

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IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS 2002年第1期8卷 26-32页

作者： Zhu, XM Hsu, VS Kahn, JM Univ Calif Berkeley Dept Elect Engn & Comp Sci Berkeley CA 94720 USA

Micromachined corner cube retroreflectors (CCRs) can be employed as transmitters in free-space optical communication links. In this application, a CCR is illuminated by an unmodulated beam, and one mirror of the CCR is intentionally misaligned to modulate the intensity of the retroreflected beam. The low power consumption, small size, and ease of operation of a CCR makes it an attractive option for certain types of optical links. However, curvature and misalignment of the micromachined mirrors can cause CCRs to perform far from theoretical limits. In this paper, we develop two methods to predict the optical performance of CCRs having ideal or nonideal mirrors. We first introduce a discretized analysis method based on ray tracing and scalar diffraction theory. We then propose a simpler phase-shift model under the assumptions that the misalignment and surface nonflatness are small and that they do not alter the optical topology of the CCR. These assumptions are satisfied by typical CCRs to be used in free-space optical links. Using our two methods, we determine tolerances on mirror curvature and misalignment for representative micromachined CCRs.

关键词： free-space optical communications MEMS CCR misalignment optical modeling surface curvature

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optical modeling for Polarization-dependent optical Power Dissipation of Thin-film Organic Solar Cells at Oblique Incidence

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JOURNAL OF THE optical SOCIETY OF KOREA 2012年第1期16卷 6-12页

作者： Kim, Jungho Jung, Sungyeop Jeong, Inkyung Kyung Hee Univ Dept Informat Display Seoul 130701 South Korea

We present the optical models and calculation results of thin-film organic solar cells (OSCs) at oblique incidence of light, using the transfer matrix method. The simple expression for the optical power dissipation is derived at oblique incidence for s- and p-polarized light. The spatial distribution of the electric field intensity, the optical power density, and the optical power dissipation are calculated in both s- and p-polarized light with respect to the incidence angle. We identify how the light absorption efficiency for p-polarized light becomes relatively larger than that for s-polarized light as the incidence angle increases.

关键词： Organic solar cell optical modeling Oblique incidence Transfer matrix method

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optical modeling for a two-stage parabolic trough concentrating photovoltaic/thermal system using spectral beam splitting technology

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SOLAR ENERGY MATERIALS AND SOLAR CELLS 2010年第10期94卷 1686-1696页

作者： Jiang, Shouli Hu, Peng Mo, Songping Chen, Zeshao Univ Sci & Technol China Dept Thermal Sci & Energy Engn Hefei 230027 Anhui Peoples R China

A two-stage parabolic trough concentrating photovoltaic/thermal (PV/T) system is described, which contains a concentrator, a spectral beam splitting filter, an evacuated collector tube and the solar cell components. The nondimensional optical model with the focal length of the concentrator as the characteristic length has been developed to analyze the properties of the concentrating system using the beam splitting filter. The geometry concentration ratio and the size of solar image at different structure parameters have been obtained. Based on the ray tracing algorithms, a detailed three-dimensional model is set up to evaluate the local radiation flux density distribution on the elements' surfaces. And the effects of the solar brightness distribution and optical errors (e.g., alignment error and tracking error) are also involved. Furthermore, the spectral distribution of the solar radiation is illustrated with the beam splitting filter, which has been specially designed using the needle optimization method. It is shown that using the filter the heat load of the cell can be reduced by 20.7%, up to 10.5% of the total incident solar energy can be recovery by the receiver, and the overall optical efficiency in theory is about 0.764. (C) 2010 Elsevier B.V. All rights reserved.

关键词： Solar energy Power generation system Parabolic trough collector optical modeling Beam splitting filter

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optical modeling of bioluminescence in whole cell biosensors

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BIOSENSORS & BIOELECTRONICS 2009年第7期24卷 1969-1973页

作者： Ben-Yoav, Hadar Elad, Tal Shlomovits, Omer Belkin, Shimshon Shacham-Diamand, Yosi Tel Aviv Univ Fac Engn Sch Elect Engn Dept Phys Elect IL-69978 Tel Aviv Israel Hebrew Univ Jerusalem Inst Life Sci IL-91904 Jerusalem Israel

Bioluminescence-based whole cell biosensors are devices that can be very useful for environmental monitoring applications. The advantages of these devices are that they can be produced as a single-chip, low-power, rugged, inexpensive component, and can be deployed in a variety of non-laboratory settings. such biosensors encounter inherent problems in overall system light collection efficiency. The However light emitted from the bioluminescent microbial cells is isotropic and passes through various media before it reaches the photon detectors. We studied the bioluminescence distribution and propagation in microbial whole cell biochips. optical emission and detection were modeled and simulated using an optical ray tracing method. Light emission, transfer and detection were simulated and optimized with respect to two fundamental system parameters: system geometry and bacterial concentration. Optimization elucidated some of the optical aspects of the biochip, e.g. detector radius values between 300 and 750 mu m, and bacterial fixation radius values between 800 and 1200 mu m. Understanding theses aspects may establish a basis for future optimization of similar chips. (C) 2008 Elsevier B.V. All rights reserved.

关键词： Whole cell biosensor Bioluminescence Stray light analysis Water toxicity optical modeling Biochip

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optical modeling of finely textured amorphous silicon solar cells

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SOLAR ENERGY MATERIALS AND SOLAR CELLS 2002年第3期71卷 399-405页

作者： Rowlands, SF Livingstone, J Lund, CP Murdoch Univ Phys & Energy Studies Perth WA 6150 Australia Univ Western Australia Perth WA 6907 Australia

It has long been known that the use of finely textured. transparent conducting oxide layers substantially improves the performance of thin film amorphous silicon (a-Si:H) solar cells. Major efforts to understand the nature of this effect and to fully capture its potential have been made by researchers using advanced modeling techniques. In this work, modeling the oblique angle optical performance and use of an effective medium approximation to simulate microrough interfaces suggests that effective interface grading makes a significant contribution to optical enhancement. (C) 2002 Elsevier Science B.V. All rights reserved.

关键词： textured a-Si : H solar cell optical modeling optical enhancement effective medium approximation

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optical modeling of needle like silicon surfaces produced by an ICP-RIE process

Optical modeling of needle like silicon surfaces produced by...

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Conference on Photonics for Solar Energy Systems III

作者： Kroll, Matthias Kaesebier, Thomas Otto, Martin Salzer, Roland Wehrspohn, Ralf Kley, Ernst-Bernhard Tuennermann, Andreas Pertsch, Thomas Univ Jena Inst Appl Phys Max Wien Pl 1 D-07743 Jena Germany Martin Luther Univ Halle Wittenberg Inst Phys MD Grp D-06120 Halle Germany Fraunhofer Inst Mech Mat D-06120 Halle Germany

ISBN: (纸本)9780819481986

We present results of rigorous optical modeling of reactive ion etched crystalline silicon surfaces, so called Black Silicon, for different etching parameters and compare them to experimental data. Reactive ion etching of crystalline silicon with SF6 and O-2 can produce a surface consisting of sharp randomly distributed needle like features with a characteristic lateral spacing of about a few hundreds of nanometers and a wide range of aspect ratios depending on the process parameters. Due to the very low reflectance over a broad spectral range such surface textures can be beneficial for photon management in photovoltaic applications. To gain a detailed understanding of the optical properties of Black Silicon surfaces we recovered the full three dimensional geometry of differently etched samples. With these data we calculated the optical response using the finite differences time domain method. From the calculations we will give insight into the magnitude of resonant phenomena within the Black Silicon and the resulting near field enhancement. Furthermore we will present carrier generation profiles which quantify the effect of absorption enhancement due to the nanostructured surface. We also investigate the angular forward scattering distribution into the silicon substrate and the resulting path length enhancement which is crucial for the near band edge absorption especially in thin solar cells.

关键词： Black Silicon crystalline solar cells optical modeling light trapping anti-reflection coating

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optical modeling OF AMORPHOUS AND METAL INDUCED CRYSTALLIZED SILICON WITH AN EFFECTIVE MEDIUM APPROXIMATION

OPTICAL MODELING OF AMORPHOUS AND METAL INDUCED CRYSTALLIZED...

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作者： THEOPHILLUS FREDERIC GEORGE MULLER University of the Western Cape

学位级别：博士

Hydrogenated amorphous silicon (a-Si: H) is second only to crystalline silicon in volume manufacturing of solar cells due to its attractive characteristics for solar panel manufacturing. These are lower manufacturing costs, and the fact that it can be deposited on any surface, and in any shape even on flexible substrates. The metal induced crystallization of hydrogenated amorphous silicon has been the subject of intense scrutiny in recent years. By combining the technology of hydrogenated amorphous silicon thin films with the superior characteristics of c-Si material, it is hoped that more efficient solar cells can be produced. In this thesis we report on the metal-mediated-thermally induced changes of the structural and optical properties of hydrogenated amorphous silicon deposited by hot-wire CVD, where aluminium and nickel were used to induce crystallization. The metal-coated amorphous silicon was subjected to a thermal annealing regime of between 150 and 520°C. The structural measurements, obtained by Raman spectroscopy, show partial crystallization occurring at 350 °C. At the higher annealing temperatures of 450°C and 520°C complete crystallization occurs. Reflection and transmission measurements in the UV-visible range were then used to extract the optical properties. By adopting the effective medium approximation a single optical model could be constructed that could successfully model material that was in different structural phases, irrespective of metal contamination. Changes in the absorption of the material in various stages of transition were confirmed with a directly measured absorption technique, and the modelled absorption closely followed the same trends This study forms part of the larger overall solar cell research project, of which the primary aim is to eventually develop a silicon solar panel that optimises the characteristics for best performance.

关键词： Metal induced crystallization Polycrystalline silicon Annealing Effective medium approximation optical modeling Absorption Band gap Phase Transition Protocrystalline silicon Structural order

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