检索结果-内蒙古大学图书馆

Conference on Optics and Photonics for Advanced Dimensional Metrology III

作者： Jeon, J. Kim, Y. Pusan Natl Univ Sch Mech Engn 2 Busandaehak Ro 63beon Gil Busan 46241 South Korea

ISBN: (纸本)9781510673120;9781510673137

In optical interferometry, phase-shifting algorithms can calculate the phase maps of the geometrical properties from measured samples with high accuracy. The phase-shifting algorithms require several interferograms captured from dynamic adjustable interferometers, with shifting occurring at uniform intervals. It is crucial to maintain the uniform shift intervals in phase-shifting algorithms because nonuniformities in intervals cause nonlinearities in the system and degrade the accuracy of measurement. However, experimental conditions inevitably introduce errors into dynamic adjustments due to environmental uncertainties. To address these drawbacks, we propose a novel method, shifte-dinterferogram generator, that eliminates the need for dynamic adjustments by utilizing a static optical interferometer with a single frame of interferogram. The proposed interferogram shifter involves capturing a single frame of an interferogram and employing deep learning to generate interferograms with ideal shifting intervals. For assessment of the proposed method, a single interferogram indicating surface shape of an optical flat was captured by Fizeau interferometer and given to the shifted-interferogram generator. The generated shifted interferograms were compared with the ideally shifted interferograms which contain exact shifting intervals and the results shows high similarities. Subsequently, the generated interferograms were used to extract phase, resulting in significantly improved accuracy comparable to more complex multi-step phase- shifting algorithms. This approach not only enhances measurement accuracy but also simplifies experimental setups, reducing susceptibility to environmental uncertainties.

关键词： deep learning optical interferometry phase-shifting algorithm shifted interferogram

来源：评论

学校读者我要写书评

暂无评论

Enhanced high dynamic range 3D shape measurement based on generalized phase-shifting algorithm

引用

OPTICS COMMUNICATIONS 2017年 385卷 43-53页

作者： Wang, Minmin Du, Guangliang Zhou, Canlin Zhang, Chaorui Si, Shuchun Li, Hui Lei, Zhenkun Li, YanJie Shandong Univ Sch Phys Jinan 250100 Peoples R China Dalian Univ Technol Dept Engn Mech Dalian 116024 Peoples R China Jinan Univ Sch Civil Engn & Architecture Jinan 2250020 Peoples R China

Measuring objects with large reflectivity variations across their surface is one of the open challenges in phase measurement profilometry (PMP). Saturated or dark pixels in the deformed fringe patterns captured by the camera will lead to phase fluctuations and errors. Jiang et al. proposed a high dynamic range real-time three-dimensional (3D) shape measurement method (Jiang et al., 2016) [17] that does not require changing camera exposures. Three inverted phase-shifted fringe patterns are used to complement three regular phase-shifted fringe patterns for phase retrieval whenever any of the regular fringe patterns are saturated. Nonetheless, Jiang's method has some drawbacks: (1) the phases of saturated pixels are estimated by different formulas on a case by case basis;in other words, the method lacks a universal formula;(2) it cannot be extended to the four step phase-shifting algorithm, because inverted fringe patterns are the repetition of regular fringe patterns;(3) for every pixel in the fringe patterns, only three unsaturated intensity values can be chosen for phase demodulation, leaving the other unsaturated ones idle. We propose a method to enhance high dynamic range 3D shape measurement based on a generalized phase-shifting algorithm, which combines the complementary techniques of inverted and regular fringe patterns with a generalized phase-shifting algorithm. Firstly, two sets of complementary phase-shifted fringe patterns, namely the regular and the inverted fringe patterns, are projected and collected. Then, all unsaturated intensity values at the same camera pixel from two sets of fringe patterns are selected and employed to retrieve the phase using a generalized phase-shifting algorithm. Finally, simulations and experiments are conducted to prove the validity of the proposed method. The results are analyzed and compared with those of Jiang's method, demonstrating that our method not only expands the scope of Jiang's method, but also improves measuremen

关键词： phase-shifting algorithm High dynamic range (HDR) phase measuring profilometry (PMP) Fringe projection Least-square algorithm phase error

来源：评论

学校读者我要写书评

暂无评论

Robust, accurate seven-sample phase-shifting algorithm insensitive to nonlinear phase-shift error and second-harmonic distortion: a comparative study

引用

OPTICAL ENGINEERING 1999年第9期38卷 1524-1533页

作者： Zhang, H Lalor, MJ Burton, DR Liverpool John Moores Univ Sch Engn Coherent & Electroopt Res Grp Liverpool L3 3AF Merseyside England

A new seven-sample algorithm is derived, based on the Surrel six-sample algorithm, by using the averaging technique. The sensitivities of phase-shifting algorithms to phase-shift error and harmonics of nonsinusoidal waveforms are analyzed by the Fourier description method. Plots of the roof-mean-square phase error, produced by computer simulation, are presented in order to compare the new algorithm with the other four well-known phase-shifting algorithms. It is shown that the new algorithm is the least sensitive to linear phase-shift error and to quadratic nonlinear phase-shift error with linear compensation, when the fringe signal contains the second-harmonic distortion. A 3-D fringe projection phase-shifting profilometer was constructed using a white light source and projecting a quasisinusoidal grating with some second-harmonic distortion. Experiments were carried out to compare the five phase-shifting algorithms when different phase-shift errors exist, and the shape of a 3-D object was measured using the new seven-sample algorithm, (C) 1999 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(99)00109-9].

关键词： interferometry phase-shifting algorithm fringe analysis 3-D fringe projection profilometry

来源：评论

学校读者我要写书评

暂无评论

Five-frame phase-shifting algorithm insensitive to diode laser power variation

引用

OPTICS COMMUNICATIONS 2001年第1-3期197卷 37-42页

作者： Afifi, M Nassim, K Rachafi, S Univ Chouaib Doukkali Fac Sci El Jadida Morocco Fac Sci Ben Msik Casablanca Morocco

The purpose of the present work is an elaboration a five-frame phase-shifting algorithm. which is insensitive to a bias intensity modulation introduced by a laser diode used as a phase shifter. This study, based on Fourier description, gives criterions on frequency spectra of sampling functions. The linear phase-shift miscalibration and the quadratic nonlinearity of detector error are evaluated for these algorithms. (C) 2001 Published by Elsevier Science B.V.

关键词： digital speckle pattern interferometry phase-shifting algorithm laser diode

来源：评论

学校读者我要写书评

暂无评论

A novel phase retrieval method in fringe projection based on phase-shifting algorithm

引用

JOURNAL OF OPTICS-INDIA 2018年第4期47卷 534-541页

作者： Qiao, Naosheng Quan, Chenggen Hunan Univ Arts & Sci Hunan Prov Key Lab Photoelect Informat Integrat & Hunan Prov Cooperat Innovat Ctr Construct & Dev D Sch Phys & Elect Changde 415000 Peoples R China Natl Univ Singapore Dept Mech Engn 9 Engn Dr 1 Singapore 117576 Singapore

In order to reduce nonlinear phase error in fringe projection based on phase-shifting algorithm, a novel phase retrieval method is proposed. Firstly, on the basis of expression for wrapped phase and corresponding phase in N-step phase-shifting algorithm, the nonlinear phase error and its simple expression is deduced. Secondly, based on the four-step phase-shifting algorithm, the wrapped phase expression of actual measured object is obtained. The corresponding nonlinear phase error is derived in a simple form, and then the new phase error value is obtained by offsetting pi/4 from the nonlinear phase value. The mean of the new and original phase error values yields the final phase error;hence, the nonlinear phase errors are significantly reduced. Finally, the results of numerical simulations and experiments show that the proposed method is effective to reduce the nonlinear phase error due to system gamma nonlinearity in phase-shifting algorithm.

关键词： phase retrieval phase error System gamma nonlinearity phase-shifting algorithm Fringe projection

来源：评论

学校读者我要写书评

暂无评论

A new error-compensating seven-sample phase-shifting algorithm and application in 3-D fringe projection profilometry

A new error-compensating seven-sample phase-shifting algorit...

引用

Conference on Laser Interferometry IX - Techniques and Analysis

作者： Zhang, H Lalor, MJ Burton, DR Liverpool John Moores Univ Sch Engn Coherent & Electroopt Res Grp Liverpool L3 3AF Merseyside England

ISBN: (纸本)0819429333

In this paper, a new 7-sample algorithm is derived based on the Surrel 6-sample algorithm by using the averaging technique. The Surrel 6-sample algorithm and the new 7-sample algorithm are analyzed using the Fourier description method and it is shown that the new 7-sample is more insensitive to linear phase-shift miscalibration than the Surrel 6-sample algorithm. By computer simulation, it is found that the linear phase-shift miscalibration produces the periodic phase error at three times the fringe frequency when the fringe signal contains a second-harmonic component. P-V phase error plots show that the new 7-sample algorithm is the least sensitive to the linear phase-shift miscalibration of the five phase-shifting algorithms considered in this paper when the fringe signal contains the second-harmonic component (the ratio of the second-harmonic amplitude to the first-harmonic amplitude is more than 1%). A 3-D fringe projection phase-shifting profilometry is constructed using a white light source and projecting a quasi-sinusoidal grating. The fringe pattern is captured by a CCD camera connected to a frame grabber in a PC computer. The ne-tv 7-sample algorithm is used and the experimental results are presented.

关键词： interferometry phase-shifting algorithm fringe analysis 3-D fringe projection profilometry

来源：评论

学校读者我要写书评

暂无评论

Design of a phase-shifting algorithm for Interferometric Measurement of Optical Thickness Variation 7

Design of a Phase-shifting Algorithm for Interferometric Mea...

引用

Conference on Photonic Instrumentation Engineering VII

作者： Bae, Wonjun Kim, Yangjin Pusan Natl Univ Sch Mech Engn 2 Busandaehak Ro 63beon Gil Busan 46241 South Korea

ISBN: (数字)9781510633384

ISBN: (纸本)9781510633384

The optical thickness is an important property of transparent plates when fabricating critical components. Spatially nonuniform errors, which are major factors in the measurement of the absolute optical thickness, can be brought about by phase errors related to the nonlinear error term. In this study, equations and a new sampling window for suppressing spatially uniform errors were constructed. Using these equations and new sampling amplitudes, we designed a new phase-shifting algorithm with 17 samples. Herein, the characteristics and advantages to the measurement of highly reflective surfaces when applying this new 17-sample algorithm are presented based on a Fourier representation. In addition, the superiority of the new algorithm in terms of its error control is demonstrated by comparing the errors occurring from a varying object phase, as well as root mean square errors, with those from different conventional algorithms.

关键词： Wavelength-scanning interferometry phase-shifting algorithm optical thickness variation spatially uniform error

来源：评论

学校读者我要写书评

暂无评论

Design of the phase-shifting algorithm for flatness measurement of a mask blank glass

Design of the phase-shifting algorithm for flatness measurem...

引用

Conference on Metrology, Inspection, and Process Control for Microlithography XXVIII

作者： Kim, Yangjin Hibino, Kenichi Sugita, Naohiko Mitsuishi, Mamoru Univ Tokyo Bunkyo Ku Tokyo 1138656 Japan AIST Tsukuba Ibaraki 3058564 Japan

ISBN: (纸本)9780819499738

Nonlinearity and non-uniformity of phase-shifts significantly contribute to the error of the evaluated phase in phase-shifting interferometry. However, state of the art error-compensating algorithms can counteract the linear mis-calibration and first-order nonlinearity associated with the phase-shift. We describe an error expansion method that is utilized to construct a phase-shifting algorithm that can compensate the second-order nonlinearity and non-uniformity of phase-shifts. The conditions for eliminating the effect of second-order nonlinearity and non-uniformity of phase-shifts are given as a set of linear equations for the sampling amplitudes. We developed a novel 11-sample phase-shifting algorithm that can compensate for the second-order nonlinearity and non-uniformity of phase-shifts and is robust up to a 4th harmonic. Experimental results show that the surface shape of a transparent plate could be measured with a precision of 1 nm, over the 120-mm-diameter aperture.

关键词： Interferometry mask glass flatness phase-shifting algorithm phase shift error coupling

来源：评论

学校读者我要写书评

暂无评论

Improved 2+1 phase-shifting algorithm for suppressing ambient light influence

引用

OPTICAL ENGINEERING 2020年第12期59卷 124107-124107页

作者： Wu, Haitao Cao, Yiping An, Haihua Zhang, Hechen Zhang, Yujiao Yang, Na Sichuan Univ Dept Optoelect Chengdu Peoples R China

By constructing two phase-shifted fringe images and a flat image, the 2 + 1 phase-shifting algorithm can reduce the error caused by motion and realize real-time and high-resolution three-dimensional (3-D) measurement. However, the nonlinear gamma of the digital light processing and the ambient light will affect the light-field distribution of the flat image, and extensive experiments have shown that the distribution of the captured flat image is inconsistent with the DC component of the deformed patterns. Therefore, based on the linear calibration model, a more realistic DC component of the deformed patterns is deduced from the captured flat image. The AC components of the deformed patterns can be extracted more genuinely by subtracting the deduced DC component from deformed patterns. So, the influence of ambient light can be suppressed efficiently to improve 3-D measuring accuracy. The experimental results show the feasibility and validity of the proposed method. (c) 2020 Society of Photo-Optical Instrumentation Engineers (SPIE)

关键词： flat image phase-shifting algorithm ambient light linear calibration model least square method

来源：评论

学校读者我要写书评

暂无评论

Least-squares phase-shifting algorithm of coherence scanning interferometry with windowed B-spline fitting, resampled and subdivided phase points for 3D topography metrology

引用

MEASUREMENT 2023年第1期217卷

作者： Duan, Yiting Li, Zexiao Zhang, Xiaodong Tianjin Univ State Key Lab Precis Measuring Technol & Instrumen Lab Micro Nano Mfg Technol Tianjin 300072 Peoples R China

3D topography metrology of optical micro-structured surfaces is critical for characterizing surface texture and form errors. The coherence scanning interferometry (CSI) faces many challenges for improving the accuracy of 3D topography metrology. In this paper, the least-squares (L-S) phase-shifting algorithm of coherence scanning interferometry with windowed B-spline fitting, resampled and subdivided phase points is proposed, which provides high accuracy of 3D surface topography. The proposed algorithm avoids the introduction of complex judgment criterion of fringe orders, and tedious phase unwrapping. Comparison with generalized phase-shifting algorithm, the wrong textures do not appear on the reconstructed 3D surfaces and 2D profiles for optical grating and Micro-lens array (MLA) surfaces using the proposed algorithm. Experimental results show that a VLSI step surface has high repeated measurement accuracy with a standard deviation of 1.6 nm, the periodic error of the proposed algorithm for PMMA MLA sub-aperture units is about 20 nm, and the mean value of PMMA MLA four random sub-aperture units are 6.66 nm (Sq), 77.63 nm (Sp), 36.38 nm (Sv), 114.18 nm (Sz) and 4.90 nm (Sa), respectively.

关键词： Coherence scanning interferometry phase-shifting algorithm Least-squares Windowed B-spline fitting Topography metrology

来源：评论

学校读者我要写书评

暂无评论

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案：

请选择收藏分类：

通借通还

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：