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Five-frame phase-shifting algorithm insensitive to diode laser power variation

OPTICS COMMUNICATIONS 2001年第1-3期197卷 37-42页

作者： Afifi, M Nassim, K Rachafi, S Univ Chouaib Doukkali Fac Sci El Jadida Morocco Fac Sci Ben Msik Casablanca Morocco

The purpose of the present work is an elaboration a five-frame phase-shifting algorithm. which is insensitive to a bias intensity modulation introduced by a laser diode used as a phase shifter. This study, based on Fourier description, gives criterions on frequency spectra of sampling functions. The linear phase-shift miscalibration and the quadratic nonlinearity of detector error are evaluated for these algorithms. (C) 2001 Published by Elsevier Science B.V.

关键词： digital speckle pattern interferometry phase-shifting algorithm laser diode

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Suppression of multiple-beam interference noise in testing an optical-parallel plate by wavelength-scanning interferometry

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OPTICAL REVIEW 2002年第2期9卷 60-65页

作者： Hibino, K Takatsuji, T Natl Inst Ind Sci & Technol Tsukuba Ibaraki 3058564 Japan

Measurements of optical parallel plates in a Fizeau interferometer lead to problems from multiple-beam interference noise unless the back surface of the plate has an additional treatment to prevent its reflection from reaching the detector. Such internal-reflection noise can be separated from the fundamental interference signal by its modulation frequency in a wavelength-scanning interferometer. However, to completely eliminate the noise, the air-gap distance between the testing and reference surfaces of the interferometer must be adjusted to a specific value, depending on the thickness and refractive index of the plate. This adjustment requires an undesirable change in the air gap, which is related to the phase modulation rate of the interferometer, and also requires additional information regarding the testing plate, which makes the measurement laborious. We show that if we add new symmetries to the sampling functions of the phase measuring algorithm, we can obtain significantly greater tolerance for the air-gap error. A new 19-sample algorithm allows a tolerance of +/-23% while keeping the systematic errors at less than lambda/200. The periodicity of the new algorithm and an integrating bucket technique also provide more options for the thickness of the testing plate, which guarantees an air-gap distance more independent of this thickness.

关键词： phase measurement Fizeau interferometer wavelength scanning internal reflection phase-shifting algorithm optical parallel

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Robust, accurate seven-sample phase-shifting algorithm insensitive to nonlinear phase-shift error and second-harmonic distortion: a comparative study

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OPTICAL ENGINEERING 1999年第9期38卷 1524-1533页

作者： Zhang, H Lalor, MJ Burton, DR Liverpool John Moores Univ Sch Engn Coherent & Electroopt Res Grp Liverpool L3 3AF Merseyside England

A new seven-sample algorithm is derived, based on the Surrel six-sample algorithm, by using the averaging technique. The sensitivities of phase-shifting algorithms to phase-shift error and harmonics of nonsinusoidal waveforms are analyzed by the Fourier description method. Plots of the roof-mean-square phase error, produced by computer simulation, are presented in order to compare the new algorithm with the other four well-known phase-shifting algorithms. It is shown that the new algorithm is the least sensitive to linear phase-shift error and to quadratic nonlinear phase-shift error with linear compensation, when the fringe signal contains the second-harmonic distortion. A 3-D fringe projection phase-shifting profilometer was constructed using a white light source and projecting a quasisinusoidal grating with some second-harmonic distortion. Experiments were carried out to compare the five phase-shifting algorithms when different phase-shift errors exist, and the shape of a 3-D object was measured using the new seven-sample algorithm, (C) 1999 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(99)00109-9].

关键词： interferometry phase-shifting algorithm fringe analysis 3-D fringe projection profilometry

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A new error-compensating seven-sample phase-shifting algorithm and application in 3-D fringe projection profilometry

A new error-compensating seven-sample phase-shifting algorit...

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Conference on Laser Interferometry IX - Techniques and Analysis

作者： Zhang, H Lalor, MJ Burton, DR Liverpool John Moores Univ Sch Engn Coherent & Electroopt Res Grp Liverpool L3 3AF Merseyside England

ISBN: (纸本)0819429333

In this paper, a new 7-sample algorithm is derived based on the Surrel 6-sample algorithm by using the averaging technique. The Surrel 6-sample algorithm and the new 7-sample algorithm are analyzed using the Fourier description method and it is shown that the new 7-sample is more insensitive to linear phase-shift miscalibration than the Surrel 6-sample algorithm. By computer simulation, it is found that the linear phase-shift miscalibration produces the periodic phase error at three times the fringe frequency when the fringe signal contains a second-harmonic component. P-V phase error plots show that the new 7-sample algorithm is the least sensitive to the linear phase-shift miscalibration of the five phase-shifting algorithms considered in this paper when the fringe signal contains the second-harmonic component (the ratio of the second-harmonic amplitude to the first-harmonic amplitude is more than 1%). A 3-D fringe projection phase-shifting profilometry is constructed using a white light source and projecting a quasi-sinusoidal grating. The fringe pattern is captured by a CCD camera connected to a frame grabber in a PC computer. The ne-tv 7-sample algorithm is used and the experimental results are presented.

关键词： interferometry phase-shifting algorithm fringe analysis 3-D fringe projection profilometry

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Error-compensating algorithms in phase-shifting interferometry: a comparison by error analysis

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OPTICS AND LASERS IN ENGINEERING 1999年第5期31卷 381-400页

作者： Zhang, H Lalor, MJ Burton, DR Liverpool John Moores Univ Sch Engn Coherent & Electroopt Res Grp Liverpool L3 3AF Merseyside England

In this paper, two families of phase-shifting algorithms with pi/2 phase steps are studied. In family I, three new algorithms are derived by using the averaging technique based on the Surrel six-sample algorithm with phase shifts of pi/2. Family II includes four well-known algorithms derived by the averaging technique based on the conventional four-sample algorithm with pi/2 phase steps. A polynomial model of phase-shift errors used to describe general expressions for calculation of the correct object phase via the Fourier spectra analysing method as a function of the harmonic order in the fringe signal is presented. The error-compensating properties of the algorithms in families I and II are investigated by the Fourier spectra analysing method. It is found that the averaging technique, when used in any of the algorithm with pi/2 phase steps, can improve the phase-shifting algorithm property: it is insensitive to phase-shift error when the fringe signal contains the first harmonic, but it can't be used to enhance the phase-shifting algorithm properties when the fringe signal contains higher order harmonics (n greater than or equal to 2). P-V (peak-valley) phase errors are calculated by the computer simulation and tables and plots are presented, from which the algorithms in families I and II are compared. It is shown that the algorithms in family I are more insensitive to phase-shift errors when the fringe signal contains the second harmonic and the algorithms in family II are more insensitive to phase-shift errors when the fringe signal is a sinusoidal waveform. (C) 1999 Elsevier Science Ltd. All rights reserved.

关键词： interferometry phase-shifting algorithm fringe analysis

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Non-contact high-precision surface three dimensional profiler

Non-contact high-precision surface three dimensional profile...

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Conference on Rough Surface Scattering and Contamination

作者： Jiang, JF He, YH Zhao, WS Harbin Inst Technol Mech Engn Dept 421 Harbin 150001 Peoples R China

ISBN: (纸本)0819432709

This paper presents a system to measure three-dimensional profile of a surface, based on the principle of scanning white light interferometry. It adopts a basic structure of Michelson interferometer and semiautomatic fast focus-adjusting mechanism. Through increasing the sampling frequency and applying the feature extracting algorithm, the precision and efficiency of measurement can be increased together.

关键词： surface topography measurement scanning white light interferometry tranditional interferometry optical path difference optimal interference point piezeoelectric transmitter CCD (Charge Coupled Device) phase-shifting algorithm feature extracting algorithm sampling frequency maximum contrast

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Fourier description of the phase-measuring process in two-wavelength phase-shifting interferometry

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OPTICS COMMUNICATIONS 1997年第1-3期137卷 27-30页

作者： Onodera, R Ishii, Y Department of Electronics University of Industrial Technology 4-1-1 Hashimotodai Sagamihara Kanagawa 229-11 Japan

Two-wavelength phase-shifting interferometry with dual frequency-modulated laser diodes has been investigated by using Fourier analysis. The phase shifts for each wavelength are produced by changing the wavelengths of the laser diodes through variation of the injection currents. The counter-stepping phase shifts introduce equal fundamental frequencies with opposite signs into two-wavelength interferograms. A Fourier description indicates that the phase difference between two wavelengths can be directly determined from the four-stepping algorithm presented in the interferogram domain. The frequency tunability in the laser diode can easily make the fundamental frequencies set required for the two-wavelength interferometry.

关键词： two-wavelength interferometry phase-shifting algorithm Fourier analysis laser-diode interferometry

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Effect of quantization error on the computed phase of phase-shifting measurements

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APPLIED OPTICS 1997年第10期36卷 2070-2075页

作者： Zhao, B Surrel, Y ECOLE NATL SUPER MINES DEPT MECH & MAT ENGN F-42023 ST ETIENNE 2 FRANCE

The effect of the quantization of fringe intensity on the phase error in phase-shifting measurements is formulated by a characteristic polynomial method. A numerical simulation is performed, and its result is in good agreement with the analytical one. Several factors influencing the quantization effects are investigated. (C) 1997 Optical Society of America.

关键词： phase-shifting algorithm quantization phase error characteristic polynomials

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Efficient nonlinear algorithm for envelope detection in white light interferometry

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JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION 1996年第4期13卷 832-843页

作者： Larkin, KG []Department of Physical Optics The University of Sydney NSW 2006 Australia

A compact and efficient algorithm for digital envelope detection in white light interferograms is derived from a well-known phase-shifting algorithm. The performance of the new algorithm is compared with that of Principal criteria considered are computational efficiency and accuracy in The new algorithm is shown to be near optimal in terms of computational efficiency and can be represented as a second-order nonlinear filter. In combination with a carefully designed peak detection method the algorithm exhibits exceptionally good performance on simulated interferograms. (C) 1996 Optical Society of America

关键词： interferometry white light interferometry interference microscopy phase-shifting algorithm low coherence nonlinear filter envelope detection demodulation

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phase-shifting FOR NONSINUSOIDAL WAVE-FORMS WITH phase-SHIFT ERRORS

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JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION 1995年第4期12卷 761-768页

作者： HIBINO, K OREB, BF FARRANT, DI LARKIN, KG UNIV SYDNEY SCH PHYS SYDNEY NSW 2006 AUSTRALIA

In phase measurement systems that use phase-shifting techniques, phase errors that are due to nonsinusoidal waveforms can be minimized by applying synchronous phase-shifting algorithms with more than four samples. However, when the phase-shift calibration is inaccurate, these algorithms cannot eliminate the effects of nonsinusoidal characteristics. It is shown that, when a number of samples beyond one period of a waveform such as a fringe pattern are taken, phase errors that are due to the harmonic components of the waveform can be eliminated, even when there exists a constant error in the phase-shift interval. A general procedure for constructing phase-shifting algorithms that eliminate these errors is derived. It is shown that 2j + 3 samples are necessary for the elimination of the effects of higher harmonic components up to the jth order. As examples, three algorithms are derived, in which the effects of harmonic components of low orders can be eliminated in the presence of a constant error in the phase-shift interval.

关键词： phase MEASUREMENT phase-shifting algorithm phase-SHIFT ERROR NONSINUSOIDAL SIGNALS INTERFEROMETRY

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