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Design for polymer optical waveguides realizing efficient light coupling via 45-degree mirrors

OPTICS EXPRESS 2019年第8期27卷 10839-10853页

作者： Morimoto, Yoshie Ishigure, Takaaki Keio Univ Grad Sch Sci & Technol Kohoku Ku 3-14-1 Hiyoshi Yokohama Kanagawa 2238522 Japan Keio Univ Fac Sci & Technol Kohoku Ku 3-14-1 Hiyoshi Yokohama Kanagawa 2238522 Japan

We design graded-index (GI) circular-core waveguides to realize low-loss light coupling via 45-degree mirrors using a ray-trace simulator. The waveguide's structural parameters, which determine the insertion loss of the waveguides with 45-degree mirrors, are the cladding thickness, the core size, the refractive index of materials, and the mirror angle. The optimum waveguide structural parameters are determined, and the GI circular-core waveguide with the appropriate structural parameters which is actually fabricated exhibits much lower total link loss than step-index (SI) core waveguides. The tight optical confinement of the GI-core contributes to the reduction of loss increment due to the mirror structure. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

关键词： Fiber waveguides Light sources polymer multimode waveguides polymer waveguides Printed circuit boards Vertical cavity surface emitting lasers

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Efficient coupling of narrow beams into polyimide waveguides by means of grating couplers with high-index coating

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APPLIED OPTICS 2010年第10期49卷 1972-1978页

作者： Bruck, Roman Hainberger, Rainer AIT Austrian Inst Technol GmbH Hlth & Environm Dept Nano Syst A-1220 Vienna Austria

The effect of a thin high-index coating deposited on polyimide waveguide grating couplers was investigated. A comprehensive numerical study was performed using an efficient simulation tool based on a Floquet-Bloch algorithm, and the results of this study were compared with experimentally obtained values for input coupling efficiencies. The application of a high-index coating permits efficient coupling from narrow beams even in material systems with a low index difference. This not only facilitates a denser integration of grating couplers but also permits low-loss lateral tapering to single-mode waveguides. (C) 2010 Optical Society of America

关键词： Coupling efficiency Grating couplers polymer multimode waveguides polymer waveguides Thin film deposition Waveguide gratings

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N x N polymer matrix switches using thermo-optic total-internal-reflection switch

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OPTICS EXPRESS 2012年第12期20卷 13284-13295页

作者： Han, Young-Tak Shin, Jang-Uk Park, Sang-Ho Lee, Hyung-Jong Hwang, Wol-Yon Park, Hyo-Hoon Baek, Yongsoon Korea Adv Inst Sci & Technol Photon Comp Syst Lab Taejon 305701 South Korea ETRI Convergence Components & Mat Res Lab Taejon 305700 South Korea ChemOptics Inc Opt Devices Res Team Taejon 305510 South Korea Lightron Fiber Opt Devices Inc Optoelect R&D Ctr Taejon 306220 South Korea

We have developed fully non-blocking optical matrix switches using a thermo-optic polymer 1 x 2 total-internal-reflection (TIR) switch as a unit switching element. The TIR switch consists of crossed multimode polymer waveguides and an offset heater electrode at the switching node. The fabricated 4 x 4 and 8 x 8 optical matrix switch chips show excellent switching performances. The insertion losses are less than 2.5 and 4.5 dB for the 4 x 4 and 8 x 8 matrix switches, respectively, and their switching isolations during a turned-off state are higher than 38 dB. The switching time is about 3 ms, and the power consumption for each switching element is below 30 mW. Compact integration of the 4 x 4 and 8 x 8 switch chips is achieved at sizes of 25 mm x 4.25 mm, and 42.4 mm x 5 mm, respectively, through an optimization of the waveguide and heater geometries. (C) 2012 Optical Society of America

关键词： Mode conversion Optical access networks Optical properties polymer multimode waveguides polymer waveguides Refractive index

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Low loss single-mode polymer optical waveguide with circular cores

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OSA CONTINUUM 2021年第3期4卷 1070-1085页

作者： Yakabe, Sho Kobayashi, Yui Matsui, Hitomi Saito, Yuki Manabe, Ken Ishigure, Takaaki Sumitomo Elect Ind Ltd Yokohama Kanagawa 2448588 Japan Keio Univ Fac Sci & Technol Yokohama Kanagawa 2238522 Japan

We experimentally demonstrate that the Mosquito method is capable of fabricating single-mode polymer optical waveguides with multiple cores while maintaining an identical mode-field diameter among them. The Mosquito method we developed is a technique to form circular cores in polymer waveguides using a commercially available microdispenser and multi-axis syringe scanning robot. However, the core shape tends to deteriorate from a circle because of the monomer flow due to the needle scan. We also demonstrate both theoretically and experimentally for the first time in this paper that the needles with a tapered outer form or just titled straight needles enable to form cores with a high circularity even if those cores are dispensed on any heights from the substrate surface. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

关键词： Glass waveguides Optical directional couplers Optical fibers polymer multimode waveguides polymer waveguides Waveguide cores

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Optical Interconnects

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JOURNAL OF LIGHTWAVE TECHNOLOGY 2016年第12期34卷 2883-2885页

作者： Palermo, Samuel Hao, Qinfen Jiang, Wei Yoo, S. J. Ben Texas A&M Univ College Stn TX 77843 USA Rutgers State Univ Piscataway NJ 08854 USA Univ Calif Davis Davis CA 95616 USA

No abstract available.

关键词： Optical interconnects Optical networks Photonic crystal waveguides Photonic crystals polymer multimode waveguides Silicon modulators

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Maskless lithography for versatile and low cost fabrication of polymer based micro optical structures

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OSA CONTINUUM 2020年第10期3卷 2808-2816页

作者： Khan, Muhammad Shaukat Lachmayer, Roland Roth, Bernhard Leibniz Univ Hannover Hannover Ctr Opt Technol D-30167 Hannover Germany Leibniz Univ Hannover Inst Prod Entwicklung & Geratebau D-30167 Hannover Germany Leibniz Univ Hannover Cluster Excellence PhoenixD D-30167 Hannover Germany

For applications in optical communication, sensing or information projection in automotive lighting, polymer based optical devices are of keen interest. Optical structures such as waveguides and gratings are basic blocks for these devices. We report on a simple, versatile, and yet low-cost fabrication method suited for both binary and multilevel diffractive microstructures as well as multimode optical waveguides in polymers. The fabrication of the diffractive structures, i.e. gratings, with two and multiple levels, is achieved by using a maskless optical lithography system employing a spatial light modulator. With the same system, waveguide cladding structures are realized by stitching of multiple single exposure patterns. For replication of these structures on polymer, e.g. polymethyl methacrylate (PMMA), a lab-made hot embossing machine is used. We then employ UV curable material and doctor blading to realize the waveguide cores. The created diffractive and waveguide structures are characterized in terms of diffraction efficiency and optical propagation loss, respectively, showing good optical quality and performance. With our fabrication system we have demonstrated a diffraction efficiency of 71% for multilevel grating structure and a propagation loss for stitched waveguides of 2.07 dB/cm at a wavelength of 638 nm. These basic elements will be employed to realize entire optical measurement systems for applications in sensing and integrated photonics in the next step. Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License. Further distribution of this work must maintain attribution to the author(s) and the published article's title, journal citation, and DOI.

关键词： Liquid crystal modulators Maskless lithography Optical devices polymer multimode waveguides polymer waveguides Waveguide cores

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GRATING COUPLERS IN PLANAR polymer WAVE-GUIDES WITH BEAM SHAPING PROPERTIES

GRATING COUPLERS IN PLANAR POLYMER WAVE-GUIDES WITH BEAM SHA...

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Conference on Nanofabrication Technologies and Device Integration, at the International Symposium on Integrated Optics

作者： WALDHAUSL, R KLEY, EB DANNBERG, P BRAUER, A KARTHE, W FRAUNHOFER INST APPL OPT & PREIS MECH D-07745 JENAGERMANY

ISBN: (纸本)0819415170

Investigations on input and output grating couplers with asymmetric triangular (blazed) profiles for planar polymer waveguides are reported. With blazed gratings a high outcoupling efficiency into one direction, either substrate or superstrate is achieved. The gratings are written directly into the waveguiding polymer layer by electron beam lithography and are replicated by embossing. Electron dose control across every grating period results in asymmetric blazed corrugation of the grating. Additionally, variation of the electron dose across the whole grating leads to a variable corrugation depth along the grating length. Two types of waveguide gratings were designed and produced, blazed corrugated gratings with constant groove depth and with variable groove depth, respectively. Input efficiencies of about 40% for gratings with constant grating depth were measured. The original gratings were replicated into nickel by electroplating. For a replicated grating we attained an efficiency of the outcoupled light into one diffraction order of about 74%. Waveguide grating couplers with blazed profile and variable grating groove depth are investigated. Thus, the intensity distribution of the outcoupled light can be varied and the field profile was matched to a Gaussian like profile.

关键词： Diffraction gratings waveguides polymers polymer multimode waveguides Beam shaping Diffraction Electron beam lithography Near field Refractive index Polymethylmethacrylate

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Flexible, Stable, and Easily Processable Optical Silicones for Low Loss polymer waveguides

Flexible, Stable, and Easily Processable Optical Silicones f...

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Conference on Organic Photonic Materials and Devices XV

作者： Swatowski, Brandon W. Amb, Chad M. Breed, Sarah K. Deshazer, David J. Weidner, W. Ken Dangel, Roger F. Meier, Norbert Offrein, Bert J. Dow Corning Corp 2200 W Salzburg Rd Midland MI 48708 USA IBM Res GmbH CH-8803 Ruschlikon Switzerland

ISBN: (纸本)9780819493910

Photopatternable optical silicone materials have been developed that can be fabricated into flexible polymer waveguides using conventional film processing and photolithography techniques. waveguides designed for multimode applications have demonstrated loss of 0.05 dB/cm at 850 nm. These waveguides have proven stable in 85% relative humidity and 85 degrees C storage conditions for greater than 2000 hours to date with no degradation in optical performance. Further, this polymer waveguide system has shown sufficient adhesion to flexible polyimide substrates without any curling, and passed bending tests to a 1 mm radius without damage.

关键词： waveguides Coating Silicon polymers polymer multimode waveguides Signal attenuation Ultraviolet radiation Cladding Photomasks Lithography

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Compact and high efficiency polymer air-trench waveguide bends and splitters

Compact and high efficiency polymer air-trench waveguide ben...

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Conference on Micromachining Technology For Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII

作者： Lin, Yongbin Rahmanian, Nazli Kim, Seunghyun Nordin, Gregory P. Univ Alabama Nano & Micro Devices Ctr Huntsville AL 35899 USA Brigham Young Univ Dept Elect & Comp Engn 458 CB Provo UT 84602 USA

ISBN: (纸本)9780819465757

A fabrication process for PFCB waveguide air-trench bends with scanning electron microscope (SEM)-based electron beam lithography (EBL) and autoalignment has been developed and high efficiency air-trench bends (97.2% for TE polarization and 96.2% for TM polarization) have been demonstrated. We have successfully developed a high aspect ratio (18:1) anisotropic PFCB etch using a CO/O-2 etch chemistry in an inductively coupled plasma reactive ion etcher (ICP RIE) for PFCB waveguide air-trench splitter fabrication. The fabricated splitters, show a 90.1 % overall efficiency and similar to 85-to-15 (85:15) splitting ratio for 950 nm wide splitter trench, which closely matches 2D-FDTD simulation results. Using air-trench bends, an ultracompact PFCB arrayed waveguide grating (AWG) 8 x 8 wavelength demultiplexer for Wavelength Division Multiplexing (WDM) application had been designed. Compared to a conventional AWG in the same material system, the air-trench bend AWG reduces the area required by a factor of 20. Compact ring resonators using these splitters and bends has been designed and fabrication and improvements are currently underway.

关键词： waveguides Etching Polarization Refractive index Electron beam lithography polymer multimode waveguides polymers Reactive ion etching Anisotropic etching Scanning electron microscopy

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Flexible polymer pillars for optical chip assembly: Materials, structures, and characterization

Flexible polymer pillars for optical chip assembly: Material...

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Conference on Optoelectronic Integrated Circuits IX

作者： Bakir, Muhannad S. Kohl, Paul A. Glebov, Alexei L. Elce, Ed Bhusari, Dhananjay Lee, Michael G. Meindl, James D. Georgia Inst Technol Microelect Res Ctr 791 Atlant Dr Atlanta GA 30332 USA Adv Optoelectron Technol Dept Fujitsu Labs Amer Sunnyvale CA 94085 USA Promerus LLC Brecksville OH 44141 USA

ISBN: (纸本)9780819465894

In an effort to address the need for robust optical chip I/O interconnects, we describe the fabrication and testing of microscopic polymer pillars for use as a flexible optical bridge between the chip and the substrate. The polymer pillars are photoimaged using the polymer Avatrel to a height of up to 350 mu m. The photodefinable polymer Avatrel was used for the fabrication of the optical pillars due to its ease of processing and its unique material properties that include high T-g and low modulus. To evaluate the performance of the polymer pillars, the optical coupling efficiency from a light source to an optical aperture with and without an optical pillar is measured. For a light source with 12 degrees beam divergence, a 30 x 150 mu m polymer pillar improves the coupling efficiency by 3 to 4.5 dB compared to pillar-free (free-space) optical coupling. Due to the high mechanical compliance of the optical pillars, we also demonstrate that polymer pillars enhance the optical coupling efficiency between the chip and the substrate when they are misaligned in the lateral direction and that the displacement tolerance can be doubled from 15 to 30 lam for a 1 dB power loss budget.

关键词： polymers Free space optics Light sources polymer thin films Optical fabrication waveguides polymer multimode waveguides Sensors Optical interconnects Optical testing

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