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Large-Scale Integrated Flexible Tactile sensor array for Sensitive Smart Robotic Touch

ACS NANO 2022年第10期16卷 16784-16795页

作者： Zhao, Zhenxuan Tang, Jianshi Yuan, Jian Li, Yijun Dai, Yuan Yao, Jian Zhang, Qingtian Ding, Sanchuan Li, Tingyu Zhang, Ruirui Zheng, Yu Zhang, Zhengyou Qiu, Song Li, Qingwen Gao, Bin Deng, Ning Qian, He Xing, Fei You, Zheng Wu, Huaqiang Tsinghua Univ Beijing Natl Res Ctr Informat Sci & Technol BNRist Sch Integrated Circuits Beijing 100084 Peoples R China Chinese Acad Sci Suzhou Inst Nanotech & Nanobion Key Lab Nanodevices & Applicat Suzhou 215123 Peoples R China Tsinghua Univ Beijing Innovat Ctr Future Chips ICFC Beijing 100084 Peoples R China Tencent Robot X Shenzhen 518000 Peoples R China Tsinghua Univ Dept Precis Instrument State Key Lab Precis Measurement Technol & Instrum Beijing 100084 Peoples R China

In the long pursuit of smart robotics, it has been envisioned to empower robots with human-like senses, especially vision and touch. While tremendous progress has been made in image sensors and computer vision over the past decades, tactile sense abilities are lagging behind due to the lack of large-scale flexible tactile sensor array with high sensitivity, high spatial resolution, and fast response. In this work, we have demonstrated a 64 x 64 flexible tactile sensor array with a record-high spatial resolution of 0.9 mm (equivalently 28.2 pixels per inch) by integrating a high-performance piezoresistive film (PRF) with a large-area active matrix of carbon nanotube thinfilm transistors. PRF with self-formed microstructures exhibited high pressure-sensitivity of similar to 385 kPa-1 for multi walled carbon nanotubes concentration of 6%, while the 14% one exhibited fast response time of similar to 3 ms, good linearity, broad detection range beyond 1400 kPa, and excellent cyclability over 3000 cycles. Using this fully integrated tactile sensor array, the footprint maps of an artificial honeybee were clearly identified. Furthermore, we hardware-implemented a smart tactile system by integrating the PRF-based sensor array with a memristor-based computing-in-memory chip to record and recognize handwritten digits and Chinese calligraphy, achieving high classification accuracies of 98.8% and 97.3% in hardware, respectively. The integration of sensor networks with deep learning hardware may enable edge or near-sensor computing with significantly reduced power consumption and latency. Our work could empower the building of large-scale intelligent sensor networks for next-generation smart robotics.

关键词： pressure sensor array Piezoresistive film Carbon nanotube Memristor Smart tactile system

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pressure Mapping With Piezoresistive sensor on Oxide TFTs Backplane

IEEE ELECTRON DEVICE LETTERS

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IEEE ELECTRON DEVICE LETTERS 2023年第8期44卷 1304-1307页

作者： Park, Chanju Kim, Junyeong Jang, Jin Kyung Hee Univ Adv Display Res Ctr ADRC Dept Informat Display Seoul 02447 South Korea

We report a pixel circuit with a piezoresistive sensor using amorphous indium-gallium-zinc oxide (a-IGZO) thin-film transistor (TFT) backplane for large-area pressure mapping. The proposed pixel circuit consists of TFTs, piezoresistive sensor, and a capacitor. The pressure sensor shows a large resistance change between 10(11) and 10(7) ohm. The RC charging time to the capacitance can be modulated by pressure-dependent resistance within pre charging period for sensing. The pressure sensor array has a resolution of 0.625 mm, rising and falling times of 40 mu s and 10 mu s, respectively. The output voltage is between 0.15 V (zero pressure) and 1 V (2 kPa) without an external amplifier. We demonstrate the pressure mapping over 32 x 32 active-matrix pressure sensor array.

关键词： ~Active-matrix (AM) pressure sensor array InGaZnO thin-film transistor (TFT) pixel circuit

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Wideband MVDR beamforming for acoustic vector sensor linear array

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IEE PROCEEDINGS-RADAR SONAR AND NAVIGATION 2004年第3期151卷 158-162页

作者： Chen, HW Zhao, JW Northwestern Polytech Univ Inst Acoust Engn Xian 710072 Shaanxi Peoples R China

A wideband minimum variance distortionless response (MVDR) beamforming approach for an acoustic vector sensor linear array is presented, which is based on coherent signal subspace preprocessing, to solve the problem of direction of arrival (DOA) estimation for wideband coherent acoustic sources. The concept of wideband focusing is introduced into wideband processing for the acoustic vector sensor array, and the relationship between the wideband focusing matrices of the acoustic vector sensor array and the pressure sensor array is derived. Simulation results show that wideband MVDR beamforming of an acoustic vector sensor linear array outperforms that of a pressure sensor when dealing with wideband coherent sources, in the following aspects: realising unambiguous direction finding in the whole space, i.e. no left/right ambiguity problem;allowing the uniform interelement spacing to exceed the Nyquist half-wavelength upper limit;and having a better performance for DOA estimation when dealing with sources close to endfire.

关键词： wideband MVDR beamforming wideband coherent acoustic sources direction-of-arrival estimation array signal processing DOA estimation direction of arrival coherent signal subspace preprocessing Acoustic signal processing wideband minimum variance distortionless response beamforming acoustic transducer arrays pressure sensor array direction finding acoustic vector sensor linear array wideband focusing matrices acoustic signal processing Signal processing and detection

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Unobtrusive Sleep Stage Identification Using a pressure-Sensitive Bed Sheet

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IEEE sensorS JOURNAL 2014年第7期14卷 2092-2101页

作者： Samy, Lauren Huang, Ming-Chun Liu, Jason J. Xu, Wenyao Sarrafzadeh, Majid Univ Calif Los Angeles Dept Comp Sci Los Angeles CA 90095 USA Univ Calif Los Angeles Wireless Hlth Inst Los Angeles CA 90095 USA

Sleep constitutes a big portion of our lives and is a major part of health and well-being. Monitoring the quality of sleep can aid in the medical diagnosis of a variety of sleep and psychiatric disorders and can serve as an indication of several chronic diseases. Sleep stage analysis plays a pivotal role in the evaluation of the quality of sleep and is a proven biometric in diagnosing cardiovascular disease, diabetes, and obesity [32]. We describe an unobtrusive framework for sleep stage identification based on a high-resolution pressure-sensitive e-textile bed sheet. We extract a set of sleep-related biophysical and geometric features from the bed sheet and use a two-phase classification procedure for Wake -Non Rapid Eye Movement Rapid Eye Movement stage identification. A total of seven allnight polysomnography recordings from healthy subjects were used to validate the proposed bed sheet system and the ability to extract sleep stage information from it. When compared with the gold standard, the described system achieved 70.3% precision and 71.1% recall on average. These results suggest that unobtrusive sleep macrostructure analysis could be a viable option in clinical and home settings in the near future. Compared with existing techniques for sleep stage identification, the described system is unobtrusive, fits seamlessly into the user's familiar sleep environment, and has additional advantages of comfort, low cost, and simplicity.

关键词： Sleep staging sleep quality polysomnography respiratory rate bed sheet pressure sensor array unobtrusive e-textile

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Personal Inertial Navigation System Assisted by MEMS Ground Reaction sensor array and Interface ASIC for GPS-Denied Environment

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IEEE JOURNAL OF SOLID-STATE CIRCUITS 2018年第11期53卷 3039-3049页

作者： Guo, Qingbo Deng, William H. Bebek, Ozkan Cavusoglu, M. Cenk Mastrangelo, Carlos H. Young, Darrin J. Univ Utah Elect & Comp Engn Dept Salt Lake City UT 84112 USA Apple Inc Cupertino CA 95014 USA Univ Calif Berkeley Dept Cognit Sci Berkeley CA 94720 USA Ozyegin Univ Dept Mech Engn TR-34794 Istanbul Turkey Case Western Reserve Univ Dept Elect Engn & Comp Sci Biomed Engn & Mech & Aerosp Engn Cleveland OH 44106 USA Univ Utah Elect & Comp Engn Dept Salt Lake City UT 84112 USA

A personal inertial navigation system (PINS) assisted by a microelectromechanical systems (MEMS)-based 13 x 26 ground reaction sensor array (GRSA) and a low-power interface application-specified integrated circuit (ASIC) has been designed and demonstrated for GPS-denied environment. The GRSA operating in a contact mode achieves a sensitivity of approximately 3.7 fF/kPa at each sensor node. An electronic interface system, consisting of a capacitance-to-voltage (C/V) converter followed by a correlated double sampling stage, is designed to convert the GRSA capacitance change to an analog output voltage. The analog output voltage is then digitized by a 12-bit cyclic analog-to-digital converter (ADC). Switch capacitance compensation technique is employed to ensure the ADC performance. The ASIC is fabricated in 0.35-mu m CMOS process and dissipates a power of 3 mW. The prototype system incorporates a GRSA, an ASIC, and a commercial nine degree-of-freedom (DOF) inertial measurement unit (IMU) in the heel region of a boot. The GRSA can determine an accurate foot-on-ground timing based on the pressure profiles detected during walking, thus enabling an accurate position calculation and a precise zero velocity update. Furthermore, a system calibration procedure measures the IMU inherent directional drift and scaling factor errors, and compensates them for the navigation data to achieve a superior performance. The prototype system demonstrates a position accuracy of approximately 5.5 m over a navigation distance of 3100 m. The prototype system also achieves a consistent performance over different field tests with various distances and random paths. System characterization results further indicate a tradeoff between sensor array size and system resolution for a given navigation performance requirement, thus providing a design guideline for future system optimization.

关键词： Capacitance-to-voltage (C/V) converter capacitive sensor cyclic analog-to-digital converter GPS-denied navigation ground reaction sensor array (GRSA) inertial measurement unit (IMU) personal inertial navigation system (PINS) pressure sensor array switch capacitance compensation tactile sensor array

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Breathing Signal Fusion in pressure sensor arrays

Breathing Signal Fusion in Pressure Sensor Arrays

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2008 IEEE International Workshop on Medical Measurements and Applications (MeMeA 2008)

作者： M. Holtzman A. Arcelus R. Goubran F. Knoefel Department of Systems and Computer Engineering Carleton University Ottawa ONT Canada Faculty of Medicine University of Ottawa Ottawa ONT Canada

pressure sensors can be used to unobtrusively obtain breathing signals from a person in bed. Obtaining a single representation of the breathing signal from an array of such sensors requires data-level fusion. We propose a decision directed adaptive linear estimator to perform this fusion online. The proposed method was compared with three other online fusion methods and two offline methods using one hundred data records collected from five healthy participants. The decision directed adaptive linear estimator had signal to noise ratios comparable to the offline correlation method that it was adapted from and better mutual information results. In the presence of movement noise and for low amplitude signals, the proposed method also provides good fusion performance.

关键词： pressure sensor array Intelligent sensors Data fusion Unobtrusive monitoring Breathing signal

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Mechanical imaging: A new technology for medical diagnostics

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INTERNATIONAL JOURNAL OF MEDICAL INFORMATICS 1998年第2期49卷 195-216页

作者： Sarvazyan, A Artann Labs N Brunswick NJ 08530 USA

Mechanical imaging (MI) is a newly developed modality of medical diagnostics based on reconstruction of tissue structure and viscoelastic properties using mechanical sensors. The essence of MI is the solution to an inverse problem using the data of stress patterns on the surface of tissue compressed by a pressure sensor array. Imaged tissue structures are presented in terms of their visoelastic properties. Evaluation of tissue 'hardness' (shear elasticity modulus) provides a means for characterizing the tissue, differentiating normal and diseased Conditions and detecting tumors and other lesions. In contrast to the other existing methods of medical imaging which use sophisticated hardware such as superconductive magnets, expensive X-ray equipment and complex ultrasonic phased arrays, MI hardware consists of inexpensive mechanical sensors and a positioning system connected to a PC. A key feature of MI is 'knowledge-based imaging'. To produce a three-dimensional image, the computer uses both the measured parameters of an individual examined object and a general database on anatomy and pathology of the object. Two applications of MI are currently being developed: MI for mass screening and detection of breast cancer and MI for imaging the prostate and diagnosing prostate diseases. ii prototype of the device for mechanical imaging of the prostate has been developed and is being tested clinically at the Robert Wood Johnson Medical School, New Jersey. The device is comprised of a transrectal probe with a position sensor and a pressure sensor array mounted on the articulated rip, an electronic unit and a PC. Results of extensive laboratory studies with rubber prostate models and initial data obtained in clinical trials strongly suggests that for certain applications the MI technology, as a new modality of imaging, has a diagnostic potential comparable to that of conventional diagnostic technologies. Mechanical imaging of the prostate appeared to be an efficient means of obj

关键词： mechanical imaging medical diagnostics pressure sensor array

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Personal Navigation via High-Resolution Gait-Corrected Inertial Measurement Units

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IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT 2010年第11期59卷 3018-3027页

作者： Bebek, Oezkan Suster, Michael A. Rajgopal, Srihari Fu, Michael J. Huang, Xuemei Cavusoglu, M. Cenk Young, Darrin J. Mehregany, Mehran van den Bogert, Antonie J. Mastrangelo, Carlos H. Case Western Reserve Univ Dept Elect Engn & Comp Sci Cleveland OH 44106 USA Cleveland Clin Lerner Res Inst Dept Biomed Engn Cleveland OH 44195 USA Bilkent Univ Dept Elect & Elect Engn TR-06800 Ankara Turkey Univ Utah Dept Elect & Comp Engn Salt Lake City UT 84112 USA

In this paper, a personal micronavigation system that uses high-resolution gait-corrected inertial measurement units is presented. The goal of this paper is to develop a navigation system that uses secondary inertial variables, such as velocity, to enable long-term precise navigation in the absence of Global Positioning System (GPS) and beacon signals. In this scheme, measured zero-velocity duration from the ground reaction sensors is used to reset the accumulated integration errors from accelerometers and gyroscopes in position calculation. With the described system, an average position error of 4 m is achieved at the end of half-hour walks.

关键词： Dead reckoning inertial measurement Kalman filter (KF) pedestrian navigation system pressure sensor array

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Measurement of Dynamic Forces Applied to Skin During Lateral Patient Transfers using the ALTA System 19

Measurement of Dynamic Forces Applied to Skin During Lateral...

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19th IEEE sensors Applications Symposium (SAS)

作者： Masson, Philippe Lariviere-Chartier, Julien Forster, Phillippe Ault, Laura Wallace (Smieee), Bruce Sveistrup, Heidi Carleton Univ Syst & Comp Engn Ottawa ON Canada SAM3 Innovat Hub Ottawa ON Canada Bruyere Res Inst Ottawa ON Canada Univ Ottawa Fac Hlth Sci Ottawa ON Canada

ISBN: (纸本)9798350369267;9798350369250

Alternative patient transfer methods and systems are required to improve transfer safety and experience for patients and staff. Current sling and other transfer methods to lift or move patients apply forces to the patient that cause injury, especially for patients with frail skin or other conditions that put them at risk. New solutions must also reduce the risk for staff injuries associated with the physical labour required to transfer patients using slings or other systems. This paper assesses the forces applied to adult mock patients and adult-size manikins using the Able Innovations ALTA transfer system;a new alternative lateral transfer system. A novel sensor is used that was developed to measure normal and shear forces applied to skin. Increased normal forces can cause injury through contusions. This paper shows that with the ALTA transfer system the patient experienced an increased normal force of similar to 50% over their normal body weight, reduced from an increase of >300% previously reported for sling transfers. Shear forces can cause injury through skin tears with 14.5N shown to cause tissue damage. Again, this paper shows a maximum shear force of 1.4N during transfer that is substantially lower than the 8N shear force previously reported for sling transfers. The work also shows the challenges associated with the measurement of dynamic forces within a complex interaction between a mechatronics system and human subject.

关键词： pressure sensing normal and shear force sensors pressure sensor array patient transfer systems

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Apnea Event Detection Methodology using pressure sensors

Apnea Event Detection Methodology using Pressure Sensors

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IEEE International Symposium on Medical Measurements and Applications (IEEE MeMeA)

作者： Azimi, H. Bouchard, M. Goubran, R. A. Knoefel, F. Univ Ottawa Sch Elect Engn & Comp Sci Ottawa ON Canada Carleton Univ Dept Syst & Comp Engn Ottawa ON Canada Bruyere Res Inst Ottawa ON Canada Bruyere Res Inst Bruyere Continuing Care Ottawa ON Canada

ISBN: (纸本)9781538684276

A method is proposed in this paper for the detection of suspected central apnea events from nocturnal data measured with pressure sensor arrays. Optimized set of time and frequency measures computed from overlapping segments of 9 s are fed to a support vector machine-based classifier to identify the possible origin of the segments, i.e., not-apneic or apneic episodes. The classifier decision on the sequence of successive segments is then used to detect a complete event. The classifier accuracy for the test data-set and the overall F-score of the system is found to be 94.43% and 74.44%, respectively.

关键词： central apnea detection unobtrusive sensors apnea classification pressure sensor array

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