Micro-Electro-Mechanical System (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro fabrication technology. With MEMS technologies, micron-...
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ISBN:
(纸本)9783642131356
Micro-Electro-Mechanical System (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro fabrication technology. With MEMS technologies, micron-scale sensors and other smart products can be manufactured. Because of its micron-scale. MEMS products' structure is nearly invisible, even the designer is hard to know whether the device is well-designed and well-produced. So a visual 3D MEMS simulation implement, named ZProcess[1], was proposed in our previous work to help designers realizing and improving their designs. ZProcess shows the MEMS device's 3D model using voxel method. Its accurate, but its speed is unacceptable when the scale of voxel-data is large. In this paper, an improved parallel MEMS simulation implementation is presented to accelerate ZProcess by using GPU (Graphic processing Unit). The experimental results show the parallel implement gets maximum 160 times speed up comparing with the sequential program.
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