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simulation and optimization of reactor airflow and magnetic field for enhanced thin film uniformity in physical vapor deposition

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MICROELECTRONIC ENGINEERING 2025年 296卷

作者： Wu, Yongshuan Liu, Kefan She, Pengcheng Li, Junhui Cent South Univ Sch Mech & Elect Engn Changsha 410083 Peoples R China Cent South Univ State Key Lab Precis Mfg Extreme Serv Performance Changsha 410083 Peoples R China 48th Res Inst China Elect Technol Grp Corp Changsha 410111 Peoples R China

Planar magnetron sputtering reactors are widely utilized in the semiconductor industry due to their high deposition rate, low substrate temperature, and capability for large-area coating. Careful control of the reactor's flow field and magnetic field is essential to ensure appropriate thickness uniformity of the thin film and uniform etching of the target. Utilizing finite element analysis software, simulations were conducted to obtain numerical solutions for the airflow and magnetic field. An increase in the inlet diameter from 4 mm to 5 mm resulted in a 63.4 % decrease in the gas distribution unevenness coefficient. Conversely, increasing the outlet diameter from 1 mm to 2 mm led to a 636.6 % increase in the coefficient. At a pitch of 11.7 mm, the horizontal magnetic field component on the target surface peaked at 0.24 T, covering a larger area. A dual-runway structure reduced the circumferential component of the horizontal magnetic field by more than half. Analysis of the results precipitated the optimization of key component structures, resulting in an optimal solution: an air ring diameter of 5 mm, an outlet diameter of 1 mm, outlet spacing of 12 mm, double inlets, and 38 outlets on each side of the air ring. Further optimization determined the optimal magnet-to-target surface spacing of 11.7 mm, with the dual-runway structure effectively improving the uniformity of the radial magnetic field distribution and increasing the target etching area. This study provides a theoretical basis for optimizing planar magnetron sputtering reactors.

关键词： Magnetron sputtering Airflow field Magnetic field Distribution uniformity simulation and optimization

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simulation and optimization of the key parameters of combined floor and Kang heating terminal based on differentiated thermal demands

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ENERGY AND BUILDINGS 2022年第0期254卷 111624-111624页

作者： Li, Tao Wang, Zhifan Mao, Qianjun Li, Guannan Wang, Dengjia Liu, Yanfeng Wuhan Univ Sci & Technol Sch Urban Construct Wuhan 430065 Peoples R China Xian Univ Architecture & Technol State Key Lab Green Bldg Western China Xian 710055 Peoples R China

Previous experimental studies have shown that the alternating operation of the combined floor and Kang heating terminal has obvious advantages in satisfying the differentiated thermal demands, but it is still difficult to meet the indoor air temperature and bed temperature at the same time. For better use of the combined heating terminal, more in-depth simulation and optimization research are carried out. Firstly, based on the experimental research, an analysis model of heat dissipation performance of the combined heating terminal with alternating operation is established, and the accuracy of the model is verified by the experimental data. Secondly, by setting up the meteorological data of typical building and typical day, the heat storage/release performance of the combined heating terminal and its influence on thermal environment in the alternating operation process are simulated and analyzed. The design parameters, operation parameters and strategies are explored based on the temperature response time and the satisfaction degree of differentiated thermal demands. The influence characteristics of each parameter of the combined heating terminal on the thermal environment are obtained. Finally, the energy consumption under two different working conditions of the combined heating terminal temporal-spatial partitioned and the traditional comprehensive heating mode is compared and discussed. The results show that the energy saving rate of the combined heating terminal temporal-spatial partitioned heating mode can reach to 27.3%. The research results can provide a design basis for the application of combined floor and Kang heating terminal in the rural buildings in northwest China. (c) 2021 Elsevier B.V. All rights reserved.

关键词： Combined floor and Kang heating terminal simulation and optimization Differentiated thermal demands Energy conservation

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simulation and optimization of dynamic characteristics of intelligent AC contactor

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INTERNATIONAL JOURNAL OF APPLIED ELECTROMAGNETICS AND MECHANICS 2010年第1-2期33卷 225-233页

作者： Zhang, Guogang Chen, Wei Ke, Chunjun Zheng, Peng Geng, Yingsan Xi An Jiao Tong Univ Elect Engn Coll Key Lab Elect Insulat & Power Equipment Xian 710049 Shaanxi Prov Peoples R China

Dynamic characteristics reflect the real situation of an AC contactor and are very important to the optimum design of AC contactors. A simulation model of intelligent AC contactor has been established using the ADAMS software with developing a user subroutine in which the iterated Runge-Kutta method is adopt to solve a set of differential equations that describe the coupling of circuit, electromagnetic and mechanical systems. Because of reusing the analysis results obtained from the simulation of static characteristics accomplished by the ANSYS software, the simulation model runs more efficiently. In addition, by using the ADAMS/solver in the batch mode, an optimization library have been integrated with the ADAMS software and successfully used to seek the optimal control parameters to minimize the contact bounces and core bounces. The simulation results show that the intelligent AC contactor with PWM control can effectively reduce the bounces and energy consumption.

关键词： AC contactor dynamic characteristics simulation and optimization

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simulation and optimization of a production/inventory system based on immune evolutionary algorithm

Simulation and optimization of a production/inventory system...

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14th International Conference on Management Science and Engineering

作者： Wang Xu-ping Zhao Hai Shang Hong-yan Dalian Univ Technol Sch Management Dalian 116024 Peoples R China Changan Univ Sch Econ & Management Xian 710064 Shaanxi Peoples R China

ISBN: (纸本)9787560322780

This paper discusses the simulation and optimization of a production/inventory system, which is composed of one workshop and some warehouses. Accepting the material supplying from upriver suppliers, the workshop produces the products and make the supplying to their downriver manufactories. The warehouses are used to store the materials and the products. However, it is a big problem that how to allocate resources appropriately to satisfy the JIT mode of the core manufactories. Thus aiming at assistant machining and distribution, we construct a logistics simulation model for the system and design an immune evolutionary algorithm to resolve it. After simulation process of biologic immune evolutionary, we can achieve the optimal result for the key resources allocation problem, including inventory of both materials and productions, transport equipments.

关键词： immune evolutionary algorithm JIT production/inventory resources allocation simulation and optimization

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simulation and optimization of Airborne Training Process

Simulation and Optimization of Airborne Training Process

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International Conference on Fuzzy System and Data Mining (FSDM)

作者： Wang, Hong Qu, Wen-Jing Zhou, Ya-Hong Air Force Airborne Acad Guilin 541003 Guangxi Peoples R China

ISBN: (纸本)9781614996194;9781614996187

Airborne training is an important way to improve airborne skill. Using transport aircraft, Parachuters go through the processes of lifting off, deplaning, controlling in the air and landing. There are three major stages in airborne training processes: preparation, enforcement and returning. Focusing on the processes of airborne training, we use ExtenSim platform to simulate and try to find ways to optimize the training process.

关键词： Airborne training process simulation and optimization

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simulation and optimization research on good-sized auto fitting production-inventory system

Simulation and optimization research on good-sized auto fitt...

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IEEE International Conference on Automation and Logistics

作者： Wang, Xuping Zhao, Hai Shang, Hongyan Dalian Univ Technol Inst Syst Engn Dalian Liaoning Peoples R China Changan Univ Sch Econ & Management Xian Peoples R China

ISBN: (纸本)9781424415304

Good-sized auto fittings Production-Inventory system has following drawbacks: overfilled warehouse, low efficiency of supply chain management and high logistics cost such as holding cost, ordering cost and so on. To solve these problems, this paper proposes a new simulation model and a new optimization model. Then the optimization model calculates the value of adaptive function by running the simulation model, outputting of which is controlled by these decision-making variables: products' safety stocks, material ordering batch and controlling strategy of the system's productivity. Finally, a case is designed. Running the simulation model and optimization model for three days, we get optimal solution of this case. Comparison between enterprise data and result of the case validates the simulation and optimization model. The model proposed in this paper can help third party logistics for auto business to lower logistics cost.

关键词： simulation and optimization good-sized auto fittings optimization function resources allocation

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simulation and optimization of dynamic characteristics of intelligent AC contactor

Simulation and optimization of dynamic characteristics of in...

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14th International Symposium on Applied Electromagnetics and Mechanics (ISEM 2009)

作者： Zhang, Guogang Chen, Wei Ke, Chunjun Zheng, Peng Geng, Yingsan Xi An Jiao Tong Univ Elect Engn Coll Key Lab Elect Insulat & Power Equipment Xian 710049 Shaanxi Prov Peoples R China

关键词： AC contactor dynamic characteristics simulation and optimization

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simulation and optimization of Automatic Transmission Hydraulic Control Module 2

Simulation and Optimization of Automatic Transmission Hydrau...

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2nd International Conference on Robotics and Automation Engineering (ICRAE)

作者： Jiang, J. N. Wang, S. H. Sun, W. B. Beihang Univ Sch Transportat Sci & Engn Beijing 100191 Peoples R China Beihang Univ Beijing Key Lab High Efficient Power Transmiss & Beijing 100191 Peoples R China

ISBN: (纸本)9781538613061

Multi-domain modeling and simulation is a new method to solve the complex multi-domain coupling problem in recent years. In the process of studying a hydraulic system, it is noticed that the pressure fluctuation of the system is very large by doing experiments. And based on modeling and simulation of the hydraulic system, it is found that there are some problems in the structure of the hydraulic control module. To reduce the pressure fluctuation of the system, a nonlinear dynamic model of the hydraulic control module is presented with the multi-domain dynamic simulation software called simulationX. After that, the simulation results are compared with the experiment results in order to validate the correctness of this model. By using the accurate system model to study the dynamic characteristic of the hydraulic control module, which indicates that the cause of pressure fluctuation in the system is the hydraulic oil backflow occurs at the entrance of the pressure regulating valve.

关键词： multi-domain modeling hydraulic system simulation and optimization

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simulation and optimization FRAMEWORK FOR ADDITIVE MANUFACTURING PROCESSES

SIMULATION AND OPTIMIZATION FRAMEWORK FOR ADDITIVE MANUFACTU...

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International Conference on Innovative Design and Manufacturing (ICIDM)

作者： Zhou, Yuhaowei Chen, Han Tang, Yunlong Gopinath, Sainath Xu, Xin Zhao, Yaoyao Fiona McGill Univ Dept Mech Engn Montreal PQ H3A 2T5 Canada

ISBN: (纸本)9781479962709

Different from the traditional subtractive manufacturing, additive manufacturing -- a more flexible and material saving manufacturing technology has been developed in these recent years. This paper presents a simulation and optimization framework for Additive Manufacturing (AM) processes in practical industry. Starting from multi-level part design, to process optimization and planning, from energy and material consumption to the Key Performance Indicator (KPI) evaluation, the paper presents a complete practical working flow of AM technologies. Four models are developed within the framework: the design model, the process optimization and planning model, the energy and material consumption model and the production model. All the four models connect subsequently one another. Their concepts and corresponding methods will be presented in order in each chapter of the paper. A close optimization loop can be formed by these models. The feedbacks of each model will be used to optimize the design as well as the process planning. Preliminary experiments data are generalized and analysed by each model.

关键词： Additive Manufacturing simulation and optimization Multi-level Design Method Process Planning Energy and Material Consumption KPIs

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simulation and optimization of energy saving distillation process for high-purity trichlorosilane with material properties

Simulation and optimization of energy saving distillation pr...

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3rd International Conference on Industry, Information System and Material Engineering (IISME 2013)

作者： Zhang, Yuandi Xe, Gang Hou, Yanqing Kunming Univ Sci & Technol City Coll Kunming 650051 Yunnan Peoples R China Kunming Univ Sci & Technol Fac Met & Energy Engn Kunming 650093 Yunnan Peoples R China

ISBN: (纸本)9783037856673

In order to reduce the production cost of polysilicon, the raw material of the photovoltaic industry, applying heat integrated distillation technology of two towers in trichlorosilane distillation process consisting of removal of light components after removing heavy components. By assistant of a chemical process software, the new energy-saving process is simulated, the main parameters of two towers are optimized and the best implementation solution are provided. The optimum parameters for the first tower are the operation pressure of 500 kPa, the number of theoretical plates of 32, the position of feed plate of 24, reflux ratio of 4.2 and the distillate to feed ratio of 0.8516. For the second tower, the operation pressure, the number of theoretical plates, the position of feed plate, the reflux ratio and the bottoms to feed ratio are 250 kPa, 74, 15, 111 and 0.9652 respectively. The results showed that the new process can save energy consumption up to 50%, the coefficient of recovery for trichlorosilane is up to 98.7% while the high purity of trichlorosilane can ensure the resulted polysilicon excellent photovoltaic properties.

关键词： polysilicon trichlorosilane distillation energy saving simulation and optimization

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