The paper addresses the identification of spatial-temporal mirror surface deformations as a result of laser-based heat load within the lithography process of integrated circuit production. The thermal diffusion and su...
详细信息
The paper addresses the identification of spatial-temporal mirror surface deformations as a result of laser-based heat load within the lithography process of integrated circuit production. The thermal diffusion and surface deformation are modeled by separation of the spatial-temporal effects using data-driven orthogonal decomposition. A novel tree adjoining grammar (TAG) and sparsity enhanced symbolic-regression-based learning methods are deployed to discover temporal dynamics that connect the spatial variation. The resulting datadriven procedure is applied to automatically synthetise a compact model representation of synthetic thermal effects induced mirror surface deformations. Copyright (C) 2021 The Authors.
The paper addresses the identification of spatial-temporal mirror surface deformations as a result of laser-based heat load within the lithography process of integrated circuit production. The thermal diffusion and su...
详细信息
The paper addresses the identification of spatial-temporal mirror surface deformations as a result of laser-based heat load within the lithography process of integrated circuit production. The thermal diffusion and surface deformation are modeled by separation of the spatial-temporal effects using data-driven orthogonal decomposition. A novel tree adjoining grammar (TAG) and sparsity enhanced symbolic-regression-based learning methods are deployed to discover temporal dynamics that connect the spatial variation. The resulting data-driven procedure is applied to automatically synthetise a compact model representation of synthetic thermal effects induced mirror surface deformations.
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