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angular Displacement sensor Based on Corrugated Substrate Integrated Waveguide (CSIW)

IETE JOURNAL OF RESEARCH 2022年第6期68卷 4620-4625页

作者： Soltan, A. Sadeghzadeh, R. A. Mohammad-Ali-Nezhad, S. KN Toosi Univ Technol Fac Elect Engn Tehran Iran Univ Qom Elect & Elect Dept Qom Iran

An angular displacement sensor is designed using a corrugated substrate integrated waveguide (CSIW) cavity resonator. Where, in the proposed cavity, instead of copper vias, one of the electric walls is made by a number of open quarter guided wavelength stubs and to make an angular displacement sensor, a rotatable copper sheet is located on the stubs. When the copper sheet rotates, the length of the stubs varies causing the shift of the resonant frequency. This relation between the variation of the rotation of the sheet and the resonant frequency shift is represented by an analytical model. According to the result of the measurement and that obtained by analytical model there is a good agreement between them, in addition the results indicate that the sensor provides an angle range of 21 degrees and a sensitivity of 11.3 MHz/degree.

关键词： angular sensor Cavity resonator Corrugated substrate integrated waveguide Microwave sensor

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Optical angular sensor for Space Applications

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sensorS 2021年第17期21卷 5979-5979页

作者： Dabsch, Alexander Rosenberg, Christoph Trimmel, Majesa Keplinger, Franz Univ Technol Vienna Inst Sensor & Actuator Syst A-1040 Vienna Austria

This paper describes a silicon/glass sensing structure for axial angle measurements. The presented optical angular sensor can statically measure the angle phi of any apparatus depending on the torsion of the optical component against the sensor housing. Core element of the sensor is an optical medium with an etched structure, which diffracts light from an LED according to the Fresnel equation. Two photodiodes, one for angle determination and one as reference, conduct the measurement. Hence, the signal splits up into two parts: one part transmits trough the optical system and the second part (the reflected wave) is used as reference signal. For self-referencing purposes, the wavelength spectrum of the LED has its maximum in the infrared regime near to the wavelength where silicon gets transparent (l similar to 1000 nm). More precisely, torsion angle and light intensity show a dependency given by Tstot if a straight etching structure (refraction profile) is used. To avoid multiple reflections of light, a coating layer restricts the illuminated area in the optical medium. With this setting a resolution of 0.05-degree rotation angle has been achieved and by stacking the construction, the sensor can measure an angular range from 30 degrees up to 270 degrees.

关键词： angular sensor optical sensor self-referencing Si-based-sensor

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Data Acquisition System for a Medical Tracking Device based on a Novel angular sensor How to Acquire and Process Data from the ASTRAS Tracking System 18

Data Acquisition System for a Medical Tracking Device based ...

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18th IEEE sensors Conference

作者： Iafolla, Lorenzo Witthauer, Lilian Freund, Sara Zam, Azhar Rauter, Georg Cattin, Philippe C. Univ Basel Dept Biomed Engn Allschwil Switzerland

ISBN: (纸本)9781728116341

This research is part of the MIRACLE project (Minimally Invasive Robot-Assisted Computer-guided LaserosteotomE) dedicated to the development of a robotic endoscope to perform minimally invasive laser osteotomies (bone cutting). In this framework, we developed a novel angular sensor called ASTRAS (angular sensor for TRAcking Systems) to serve as basic element of a tracking system for articulated devices (e.g. an articulated robotic endoscope). At each joint of the articulated endoscope one ASTRAS sensor is positioned, so that its shape and the pose of its tip can be calculated from the angle measurements. In ASTRAS, the angle is evaluated with high precision by processing the image cast by a shadow mask onto an image sensor. For an articulated endoscope, the acquisition and processing electronics of its tracking system based on ASTRAS has to fulfill the following requirements: 1) acquire and synchronize raw-data from the image sensors;2) process the images in real-time to compute the angles;3) provide one channel per endoscope joint;4) be embedded in a small electronic device (e.g. a single-board computer). In this paper, we propose a solution based on an Field Programmable Gate Array (FPGA) that can acquire raw data from the image sensors, synchronize, and process them. The proposed system has an embedded processor running an operating system (Linux) such that it can easily implement software solutions for both processing and communication. In addition, we also present the results of a preliminary test of the first prototype and show some novel ideas of development.

关键词： ASTRAS Medical Tracking Systems Rotary Encoder angular sensor NanEye Camera

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Integrated Circuit angular Displacement sensor with On-chip Pinhole Aperture

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sensorS 2020年第6期20卷 1794页

作者： Wijesinghe, Udumbara Dey, Akash Neel Marshall, Andrew Krenik, William Duan, Can Edwards, Hal Lee, Mark Univ Texas Dallas Dept Mat Sci & Engn Richardson TX 75080 USA Univ Texas Dallas Dept Elect & Comp Engn Richardson TX 75080 USA Texas Instruments Inc Dallas TX 75243 USA Univ Texas Dallas Dept Phys Richardson TX 75080 USA

sensors that remotely track the displacement of a moving object have a wide range of applications from robotic control to motion capture. In this paper, we introduce a simple, small silicon integrated circuit sensor that tracks the angular displacement of an object tagged with a small light source, such as a light-emitting diode (LED). This sensor uses a new angular transduction mechanism, differential diffusion of photoelectrons generated from the light spot cast by the light tag onto a Si anode, that is described by a simple physics model using pinhole optics and carrier diffusion. Because the light spot is formed by a pinhole aperture integrated on the sensor chip, no external focusing optics are needed, reducing system complexity, size, and weight. Prototype sensors based on this model were fabricated and their basic characteristics are presented. These sensors transduce angular displacement of an LED across orthogonal latitudinal and longitudinal arcs into normalized differential photocathode currents with signal linearly proportional to LED angular position across a +/- 40 degrees field-of-view. These sensors offer potential performance and ease-of-use benefits compared to existing displacement sensor technologies.

关键词： angular sensor position sensor displacement sensor position-sensitive detector motion tracking

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Proof of principle of a novel angular sensor concept for tracking systems

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sensorS AND ACTUATORS A-PHYSICAL 2018年 280卷 390-398页

作者： Iafolla, Lorenzo Witthauer, Lilian Zam, Azhar Rauter, Georg Cattin, Philippe Claude Univ Basel Ctr Med Image Anal & Nav CIAN Dept Biomed Engn Gewerbestr 14 CH-4123 Allschwil Switzerland Univ Basel Dept Biomed Engn BLOG Gewerbestr 14 CH-4123 Allschwil Switzerland Univ Basel Dept Biomed Engn Bioinspired RObots MED Lab BIROMED Gewerbestr 14 CH-4123 Allschwil Switzerland

Robot-assisted and computer-guided minimally-invasive procedures represent a turning point in Minimally-Invasive Surgery (MIS) because they overcome significant limitations found in current state-of-the-art manual MIS procedures (e.g. imprecise motion, hand tremor, fatigue of the surgeon, limited workspace/maneuverability, etc.). Importantly, robotic systems can only reach the required high accuracy and precision when a tracking system with the corresponding accuracy and precision level for the surgical tool's end-effector enables closed-loop feedback control. Herein, we present a tracking system meeting the above required high accuracy and precision called ASTRAS (angular sensor for TRAcking Systems). In this paper, the working principle and performance of ASTRAS are presented and characterized respectively. ASTRAS is arranged in a way that a tilt of a mirror produces a shift of a shadow cast on an image sensor. Since the mechanical constraints between the light source, mirrors, shadow mask, and image sensor are known, the angle can be derived from the measured shadow shift. The working principle of ASTRAS allows the measurement of 2 degrees of freedom at once. Additionally, the commercial availability of small image sensors (similar to 1 x 1 x 0.5 mm(3)) allows implementing ASTRAS in the future as a down-scaled version in surgical tools such endoscopes. The characterization of ASTRAS was performed with an experimental setup evaluating the angular measurement performance in one degree of freedom. The results revealed a precision of similar to 3.10(-6) rad, a thermal stability of 1.9.10(-5) rad/degrees C, a long term drift 10(-5) rad/day, and a linearity error of similar to 10(-4) rad. Future developments will focus on implementing a miniaturized prototype and making a chain of sensors to use in articulated devices. (C) 2018 Elsevier B.V. All rights reserved.

关键词： ASTRAS angular sensor Rotary encoder Medical tracking device

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Highly-sensitive, absolute and self-powered triboelectric angular sensors for industrial robots

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NANO ENERGY 2025年 134卷

作者： Jian, Gang Yang, Ning Zhu, Shangtao Du, Yuhang Wang, Fengwei Chinese Acad Sci Shenzhen Inst Adv Technol Shenzhen Inst Adv Elect Mat Shenzhen 518055 Peoples R China Jiangsu Univ Sci & Technol Sch Mat Sci & Engn Zhenjiang 212100 Peoples R China

In the field of industrial automation, angular sensor plays a significant role due to its function to control the precise operation of industrial robotics. There is an urgent and great need while a lacking field for highperformance, ultra-precise and low-cost angular sensors. In this study, we design a self-powered absolute and highly sensitive angular sensor to build an angular monitoring system and an angular sensor architecture for industrial robots. Using the non-contact triboelectric nanogenerator technology based on electrostatic induction coupling effect, the angular sensor possesses high sensitivity of 0.132 V/degrees/s and a high resolution of 0.035 degrees. The multi-strip non-contact electrode structure is optimized in the system. It possesses advantages of no additional power supply, excellent frequency response, high output sensitivity, large measurement range and strong antijamming ability. When combined with smart robots, angular sensors demonstrate accurate angular measurement and high response speed, enabling human-computer interaction. The adjustable resolution of the angular sensor is achieved by adjusting the internal gear drive, which can be used to naturally amplify the angular rotation characteristics. A motion rehabilitation detection system is proposed, which can simplify the signal processing circuit and has a simple and reliable structure. This research shows that the new generation of high precision, super durability, self-powered angular sensor system with non-contact triboelectric nanogenerator technology has significant advantages and can be widely used in the field of industrial robotics and rehabilitation aids.

关键词： Triboelectric nanogenerator angular sensor Absolute Robot Durability

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Non-Orthogonality and Amplitude Mismatch of Vertical Hall Based angular sensors Due to In-Plane Shear Stress

Non-Orthogonality and Amplitude Mismatch of Vertical Hall Ba...

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IEEE sensors Conference

作者： Besserer, Reto Mermoud, Yves Gnos, Tobias Reymond, Serge Kejik, Pavel Muttersbach, Jens Wursch, Christoph Huber, Samuel OST Eastern Switzerland Univ Appl Sci Buchs Switzerland MPS Tech Switzerland Sarl Tolochenaz Switzerland

ISBN: (纸本)9781665484640

We report on the influence of in-plane shear stress on the output of CMOS vertical Hall devices (VHD) and co-integrated stress sensors implemented in standard 180 nm CMOS technology. Experimental investigations on a torsional bridge setup for an angular sensor frontend with VHD orientations along < 110 > crystal directions resulted in values of 16.6 degrees of non-orthogonality error per 100 MPa of shear stress. Similarly, with VHD orientations along < 100 > a relative amplitude change of 16.5% was observed. The results are in agreement with values obtained from FEM numerical simulations.

关键词： vertical Hall angular sensor orthogonality error amplitude mismatch mechanical stress

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Active Compensation of Shear-Stress-Related Nonorthogonality in CMOS Vertical Hall-Based Angle sensors

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IEEE sensorS JOURNAL 2024年第24期24卷 40262-40273页

作者： Gnos, Tobias Besserer, Reto Mermoud, Yves Reymond, Serge Bourdelle, Pierre-Francois Kejik, Pavel Wursch, Christoph Huber, Samuel OST Eastern Switzerland Univ Appl Sci Inst Computat Engn CH-9471 Buchs Switzerland OST Eastern Switzerland Univ Appl Sci Inst Microtechnol & Photon CH-9471 Buchs Switzerland MPS Monolith Power Syst CH-1131 Tolochenaz Switzerland

In automation, transportation, and consumer applications, countless products rely on low-cost, accurate angle sensors. A common method to realize such an angle sensor in CMOS technology utilizes two vertical Hall devices (VHDs) to measure the direction of the in-plane magnetic field components of a rotating permanent magnet through corresponding sine and cosine signals. However, the accuracy of VHD-based angle sensors was found to be compromised by, e.g., misalignment and imperfections of the fabrication processes and mechanical stress due to the piezo-Hall effect leading to nonorthogonality due to crosstalk between sine and cosine signals originating from stress-related changes of the sensitive directions. In this work, we present an active compensation method for the shear-stress-related directional sensitivity of VHD-based angle sensors. The method translates the signal of a cointegrated piezoresistive shear stress sensor into crosstalk compensation counterbalancing the direction changes and therefore re-establishing orthogonality between sine and cosine signals. The method was demonstrated with CMOS-integrated VHD and stress sensors exposed to in-plane shear stress in a torsional bridge setup at temperatures between 26 degrees C and 96 degrees C. As a result, at 26 degrees C and 21-MPa stress, the standard deviation (STD) of the measured orthogonality error decreased from 2.5 degrees to a noise-limited 0.28 degrees, while the systematic orthogonality error was significantly reduced from 3.6 degrees to 0.1 degrees after compensation. This significant improvement underscores the effectiveness of the active compensation method in mitigating the impact of mechanical stress, thereby enhancing the accuracy and reliability of VHD-based angle sensors.

关键词： sensors Stress Conductivity Magnetic sensors Tensors Mechanical sensors Magnetomechanical effects Active compensation angular sensor mechanical stress orthogonality error vertical Hall

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Ultra Miniaturized Absolute Rotary Encoder Integrated into Hinge Joint

Ultra Miniaturized Absolute Rotary Encoder Integrated into H...

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2024 IEEE sensors Conference

作者： Filipozzi, Massimiliano Vergne, Celine Rauter, Georg Cattin, Philippe C. Univ Basel Dept Biomed Engn Allschwil Switzerland FHNW Inst Med Engn & Med Informat Muttenz Switzerland

ISBN: (纸本)9798350363524;9798350363517

In minimally invasive endoscopy systems, traditional optical tracking solutions commonly employed in computer-assisted surgeries are not applicable due to the lack of line-of-sight. Electromagnetic tracking (EMT), in contrast, has been used as an alternative, but it is limited by its susceptibility to interference from metal objects. The accuracy achieved with EMT is often inadequate for many applications. To address this limitation, for endoscopes based on rotational joints, we propose a novel solution: a miniature absolute rotary encoder integrated into a hinge joint. Our system characterization reveals excellent performance, with a precision of 0.0009 degrees (corresponding to a resolution of 13 bit over a range of 45 degrees) and an accuracy of +/- 0.2 degrees. These results are achieved within a compact footprint of 2 x 1.5 x 1 mm(3), making it suitable for integration into minimally invasive endoscopy systems.

关键词： Miniaturized rotary encoder Absolute rotary encoder angular sensor Hinge joint

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Effective Compensation of the Piezo-Hall Effect in CMOS-integrated 3D Hall sensors

Effective Compensation of the Piezo-Hall Effect in CMOS-inte...

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2024 IEEE sensors Conference

作者： Fleck, Anja Cornils, Martin Paul, Oliver Univ Freiburg Dept Microsyst Engn IMTEK Freiburg Germany TDK Micronas GmbH Res & Dev Freiburg Germany

ISBN: (纸本)9798350363524;9798350363517

A highly effective method based on half-blind calibration is demonstrated for the dynamic compensation of the mechanical stress cross-sensitivity of a CMOS-integrated 3D Hall sensor system caused by the piezo-Hall effect. The system combines a Hall plate with two orthogonal vertical Hall sensors. For the first time, the use of dedicated stress sensors is avoided by exploiting a piezoresistive signal from the Hall plate. The combination of this signal with the output signals of the three Hall sensors in respective polynomial sensor response models allows to infer the three corresponding magnetic induction components largely cleared of the piezo-Hall effect due to an in-plane uniaxial normal stress. Model parameters are extracted at 25 degrees C by simultaneously applying stress between 0MPa and -90MPa and 3D magnetic inductions up to 30mT. As a result, the residual angular resolution of the system is reduced from about 4 degrees to below 0.1 degrees in the investigated stress range.

关键词： piezo-Hall effect mechanical stress 3D Hall sensor angular sensor compensation

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