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binary pseudo-random Array for Calibration of Interferometers with Transmission Spheres and Cylinders

Binary Pseudo-Random Array for Calibration of Interferometer...

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Conference on Interferometry and Structured Light

作者： Munechika, Keiko Rochester, Simon Chao, Weilun Lacey, Ian Pina-Hernandez, Carlos A. Yamada, Kaito Biskach, Michael P. Takacs, Peter Z. Griesmann, Ulf Yashchuk, Valeriy V. HighRI Opt Inc 5401 Broadway TerrSt 304 Oakland CA 94618 USA Rochester Sci LLC 2041 Tapscott Ave El Cerrito CA 94530 USA Lawrence Berkeley Natl Lab Ctr Xray Opt Berkeley CA 94720 USA Lawrence Berkeley Natl Lab Adv Light Source Berkeley CA 94720 USA NASA Goddard Space Flight Ctr 8800 Greenbelt Rd Greenbelt MD 20771 USA Surface Metrol Solut LLC 19 S 1st StUnit B901 Minneapolis MN 55401 USA Natl Inst Stand & Technol Sensor Sci Div Gaithersburg MD 20899 USA

ISBN: (纸本)9781510679306;9781510679313

binary pseudo-random array (BPRA) "white noise" artifacts are highly effective for characterizing the instrument transfer function (ITF) of surface topography metrology tools and wavefront measurement instruments. These BPRA artifacts feature all spatial frequencies within the instrument bandpass equally, resulting in a power spectral density with a white-noise-like character. This characteristic allows for direct ITF determination with uniform sensitivity across the entire spatial frequency range. We have developed a novel BPRA calibration standard that combines the diffractive pattern of a reflection computer-generated hologram (CGH) with the white noise generating BPRA pattern. By integrating these technologies using the same lithographic techniques, the resulting calibration sample enables ITF characterization of a Fizeau interferometer with a transmission sphere, or any nulling optic.

关键词： calibration instrument transfer function ITF power spectral density PSD interferometric microscopes binary pseudo-random test standard aberration surface metrology

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binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with significantly curved x-ray optics 19

Binary pseudo-random array standards for calibration of 3D o...

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Conference on Advances in X-Ray/EUV Optics and Components XIX

作者： Munechika, K. Yamada, K. Rochester, S. Barnard, H. Chao, W. Laceyd, I Pina-Hernandez, C. Takacs, P. Z. Yashchuk, V. V. HighRI Opt Inc 5401 Broadway TerrSt 304 Oakland CA 94618 USA Rochester Sci LLC 2041 Tapscott Ave El Cerrito CA 94530 USA Lawrence Berkeley Natl Lab Ctr Xray Opt Berkeley CA 94720 USA Lawrence Berkeley Natl Lab Adv Light Source Berkeley CA 94720 USA Surface Metrol Solut LLC 19 S 1st StUnit B901 Minneapolis MN 55401 USA

ISBN: (纸本)9781510679610;9781510679603

High-accuracy metrology is vitally important in manufacturing ultra-high-quality free-form mirrors designed to manipulate X-ray light with nanometer-scale wavelengths. The current capabilities and possibility for improvements in Xray mirror manufacturing are limited by inherent imperfections of the integrated metrology tools. In the case of Fizeau interferometry, metrology tools are currently calibrated with super-polished flat test-standard/reference mirrors. This is acceptable for measuring slightly curved X-ray optics. However, for even moderately curved aspherical X-ray mirrors the flat-reference calibration is not sufficiently accurate and stitching Fizeau interferometer-based surface metrology is used to mitigate the problem. But still, the retrace and aberration errors, as well as the limited spatial resolution, described with the instrument transfer function (ITF), can be transferred into the optical surface topography of X-ray mirrors obtained in stitching metrology. For ITF calibration, we have developed an original technique, based on test standards structured as two-dimensional (2D) highly-randomized (HR) binary pseudo-random arrays (BPRAs). The technique employs the unique properties of the HR BPRA patterns in the spatial frequency domain., i.e. the inherent 2D power spectral density of the HR BPRA pattern has a deterministic white-noise-like character that allows direct determination of the ITF with uniform sensitivity over the entire spatial frequency range and field-of-view of an instrument. Here, we explore technological, metrological, and analytical aspects essential for calibration of the retrace and aberration errors of Fizeau interferometers using different types of tilted test samples, including a super-polished reference mirror for the re-trace calibration and the uniformly redundant array (URA) BPRA standards for the geometrical distortion (aberration) calibration. While the first method was previously demonstrated by researchers at DIAMOND L

关键词： Fizeau interferometer retrace errors geometrical distortion calibration binary pseudo-random test standard instrument transfer function stitching surface metrology

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binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with aspheric x-ray optics 21

Binary pseudo-random array standards for calibration of 3D o...

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Conference on Interferometry XXI

作者： Munechika, Keiko Chao, Weilun Dhuey, Scott Lacey, Ian Pina-Hernandez, Carlos Rochester, Simon Yashchuk, Valeriy V. HighRI Opt Inc 5401 Broadway TerrSt 304 Oakland CA 94618 USA Lawrence Berkeley Natl Lab Ctr Xray Opt Berkeley CA 94720 USA Lawrence Berkeley Natl Lab Mol Foundry Berkeley CA 94720 USA Lawrence Berkeley Natl Lab Adv Light Source Berkeley CA 94720 USA Rochester Sci LLC 2041 Tapscott Ave El Cerrito CA 94530 USA

ISBN: (纸本)9781510654310;9781510654303

High-accuracy surface metrology is vitally important in manufacturing ultra-high-quality free-form mirrors designed to manipulate x-ray light with nanometer-scale wavelengths. The current and potential capabilities of x-ray mirror manufacturing are limited by inherent imperfections of the integrated metrology tools. Metrology tools are currently calibrated with super-polished flat test-standard/reference mirrors. This is acceptable for fabrication of slightly curved x-ray optics. However, for even moderately curved aspherical x-ray mirrors the flat-reference calibration is not sufficiently accurate. For micro-stitching interferometry developed for surface measurements with curved x-ray mirrors, the tool aberration errors are known to be transferred into the optical surface topography of x-ray mirrors. Our approach to improving metrology is to thoroughly calibrate the measuring tool and apply the results of the calibration to deconvolution of the measured data. Here we explore the application of a recently developed technique for calibrating the instrument transfer function (ITF) of 3D optical surface profilers to metrology with significantly curved x-ray optics. The technique, based on test standards patterned with two-dimensional (2D) binary pseudo-random arrays (BPRAs), employs the unique properties of the BPRA patterns in the spatial frequency domain. The inherent 2D power spectral density of the pattern has a deterministic white-noise-like character that allows direct determination of the ITF with uniform sensitivity over the entire spatial frequency range and field of view of an instrument. The high efficacy of the technique has been previously demonstrated in application to metrology with flat and slightly curved optics. Here, we concentrate on development of an efficient fabrication process for production of highly randomized (HR) BPRA test standards on flat and 500-mm spherical optical substrates. We also compare and discuss the results of the ITF calibratio

关键词： surface metrology calibration instrument transfer function binary pseudo-random test standard power spectral density aspheric optics x-ray optics

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binary pseudo-random array test standard optimized for characterization of interferometric microscopes 4

Binary pseudo-random array test standard optimized for chara...

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Conference on Applied Optical Metrology IV

作者： Munechika, Keiko Cabrini, Stefano Chao, Weilun Lacey, Ian Pina-Hernandez, Carlos Rochester, Simon Yashchuk, Valeriy V. HighRI Opt Inc 5401 Broadway TerrSt 304 Oakland CA 94618 USA Lawrence Berkeley Natl Lab Mol Foundry Berkeley CA 94720 USA Lawrence Berkeley Natl Lab Ctr Xray Opt Berkeley CA 94720 USA Lawrence Berkeley Natl Lab Adv Light Source Berkeley CA 94720 USA Rochester Sci LLC 2041 Tapscott Ave El Cerrito CA 94530 USA

ISBN: (数字)9781510644731

ISBN: (纸本)9781510644731

We describe a technique for measuring the instrument transfer function (ITF) of an interferometric microscope, allowing both characterization and data processing to increase the fidelity and effective resolution of the tool. The technique, based on test samples structured as two-dimensional (2D) binary pseudo-random arrays (BPRAs), employs the unique properties of the BPRA patterns in the spatial frequency domain. The inherent 2D power spectral density of the pattern has a deterministic white-noise-like character that allows direct determination of the ITF with uniform sensitivity over the entire spatial frequency range and field-of-view of an instrument. As such, the BPRA samples satisfy the characteristics of a test standard: functionality, ease of specification and fabrication, reproducibility, and low sensitivity to manufacturing error. We discuss the results of the development and application of highly randomized (HR) BPRA test samples with elementary feature sizes in the range from 80 nm and up to 2.5 mu m, optimized for the ITF characterization of interferometric microscopes broadly used for 2D optical surface profiling. The data acquisition and analysis procedures for different applications of the ITF calibration technique developed are also discussed.

关键词： calibration instrument transfer function power spectral density interferometric microscopes binary pseudo-random test standard aberration surface metrology

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Reliability investigation of the instrument transfer function calibration technique based on binary pseudo-random array standards 27

Reliability investigation of the instrument transfer functio...

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Conference on Advances in X-Ray/EUV Optics and Components XVII

作者： Yashchuk, Valeriy V. Munechika, Keiko Rochester, Simon Chao, Weilun Lacey, Ian Pina-Hernandez, Carlos Takacs, Peter Z. Lawrence Berkeley Natl Lab Adv Light Source Berkeley CA 94720 USA HighRI Opt Inc 5401 Broadway TerrSt 304 Oakland CA 94618 USA Rochester Sci LLC 2041 Tapscott Ave El Cerrito CA 94530 USA Lawrence Berkeley Natl Lab Mat Sci Div Berkeley CA 94720 USA Surface Metrol Solut LLC 19 S 1st St Minneapolis MN 55401 USA

ISBN: (纸本)9781510654655;9781510654648

The reliability of the instrument transfer function (ITF) calibration technique based on binary pseudo-random array (BPRA) standards is investigated and demonstrated in application to interferometric microscopes. We demonstrate the linearity of the calibration ( that is, independence of the ITF calibration on the standards root-mean-square roughness) via comparison of the ITF measurements with a number of artifacts with the etched depth varying from 30 nm to 120 nm. We also show that the calibration does not depend on the surface reflectivity, at least in the range between similar to 36% and similar to 80%. The criteria for selection of the geometrical parameters of the BPRA standard design appropriate for a particular interferometric microscope arrangement (including optical magnification), as well as the data acquisition and analysis procedures for different applications are also discussed.

关键词： calibration instrument transfer function binary pseudo-random test standard power spectral density interferometric microscopes aberration surface metrology

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Towards super-resolution interference microscopy metrology of x-ray variable-line-spacing diffraction gratings: Recent developments 27

Towards super-resolution interference microscopy metrology o...

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Conference on Advances in X-Ray/EUV Optics and Components XVII

作者： Rochester, Simon English, Damon Lacey, Ian Munechika, Keiko Yashchuk, Valeriy V. Rochester Sci LLC 2041 Tapscott Ave El Cerrito CA 94530 USA Lawrence Berkeley Natl Lab Engn Div Berkeley CA 94720 USA Lawrence Berkeley Natl Lab Adv Light Source Berkeley CA 94720 USA HighRI Opt Inc 5401 Broadway TerrSt 304 Oakland CA 94618 USA

ISBN: (纸本)9781510654655;9781510654648

We report on recent work towards improving interference microscopy metrology of variable-line-spacing (VLS) x-ray diffraction gratings through a combination of techniques: image reconstruction to correct for distortion and blurring, multi-image super-resolution data acquisition to increase resolution beyond the single-image limit, and image stitching to increase the measurement area. Here, we concentrate on precision characterization and correction for lens distortion (aka geometrical distortion) and provide precise measurements of the effective image pixel distribution. We present and analyze the results of geometrical distortion measurements performed with test samples, including traditional checkerboard test artifacts and binary pseudo-random array (BPRA) standards patterned with two-dimensional uniformly redundant arrays (URA). The URA BPRA standards are also useful for measurement of the instrument transfer function (ITF), a measure of the optical aberrations and limited lateral resolution of the instrument. We also outline other essential elements and the next steps of the project on development of so-called super-resolution interference microscopy, enabling more precise measurements of VLS groove density than previously possible. The global aim of this project is to integrate our metrology technique into the manufacture of high-resolution x-ray gratings.

关键词： variable line spacing grating VLS grating geometrical distortion instrument transfer function binary pseudo-random super-resolution power spectral density interferometric microscope

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