force sensing is a crucial task for robots, especially when the end effectors such as fingers and hands need to interact with an unknown environment, for example in a humanoid robot. In order to sense such forces, a f...
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ISBN:
(纸本)9781479969449
force sensing is a crucial task for robots, especially when the end effectors such as fingers and hands need to interact with an unknown environment, for example in a humanoid robot. In order to sense such forces, a force/torquesensor is an essential component. Many available force/torquesensors are based on strain gauges, but other sensing principles are also possible. In this paper we describe steps towards a capacitivetype based sensor. Several MEMS capacitivesensors are described in the literature;however very few larger sensors are available, as capacitivesensors usually have disadvantages such as severe hysteresis and temperature sensitivity. On the other hand, capacitivesensors have the advantage of the availability of small sized chips for sensor readout and digitization. We employ copper beryllium for the transducer, which has been modified from the ones described in the literature to be able to be used in a small sized, robust force/torquesensor. Therefore, as the first step toward the goal of building such a sensor, in this study we have created a prototype sensing unit and have tested its sensitivity. No viscoelastic materials are used for the sensing unit, which usually introduce severe hysteresis in capacitivesensors. We have achieved a high signal-to-noise ratio, high sensitivity and a range of 10 Newton.
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