咨询与建议

限定检索结果

文献类型

  • 1 篇 会议

馆藏范围

  • 1 篇 电子文献
  • 0 种 纸本馆藏

日期分布

主题

  • 1 篇 dimensionality r...
  • 1 篇 etching evolutio...
  • 1 篇 cellular model
  • 1 篇 plasma etching

机构

  • 1 篇 school of softwa...
  • 1 篇 national quemoy ...

作者

  • 1 篇 tungchun shen
  • 1 篇 chintan lee
  • 1 篇 linqiu wang

语言

  • 1 篇 英文
检索条件"主题词=etching evolution algorithm"
1 条 记 录,以下是1-10 订阅
排序:
An Improved Dimensionality Reduction Fitting algorithm based on 3D Cellular Model
An Improved Dimensionality Reduction Fitting Algorithm based...
收藏 引用
International Conference on Information, Communication and Engineering (ICICE)
作者: Linqiu Wang Tungchun Shen Chintan Lee School of Software and Microelctronics Peking University National Quemoy University
Plasma etching processing plays a key role in integrated circuits (IC) fabrication technology. For exploring the optimization scheme of etching process, a novel three-dimensional (3D) cellular model with improved para... 详细信息
来源: 评论