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检索条件"主题词=micro-mirror-array"
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Development of individually addressable micro-mirror-arrays for space applications
Development of individually addressable micro-mirror-arrays ...
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Conference on MOEMS and Miniaturized Systems
作者: Dutta, SB Ewin, AJ Jhabvala, M Kotecki, CA Kuhn, JL Mott, DB NASA Goddard Space Flight Ctr Greenbelt MD 20771 USA
A two dimensional array of individually addressable micro-mirrors with 100 mu mx100 mum pixel size, capable of tilting +/- 10 degrees by electrostatic actuation is being developed and fabricated at the Detector Develo... 详细信息
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Planarization for the integration of CMOS and micro mirror arrays
Planarization for the integration of CMOS and Micro Mirror A...
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Conference on Metrology, Inspection, and Process Control for microlithography XVI
作者: Zheng, Y Dutta, M Kotecki, C Zincke, C QSS Grp Inc Lanham MD 20706 USA
A large format (2Kx2K) individually addressable micro-mirror-array (MMA) has been developed at NASA, GSFC for possible application in the Next Generation Space Telescope (NGST). The 100micronx100micron aluminum micro-... 详细信息
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