A microsensor array to measure chemical properties of biological liquids is presented. A hybrid integration technique is used to mount four sensor chips on a micro flow channel: a pressure, temperature, pH, combined p...
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A microsensor array to measure chemical properties of biological liquids is presented. A hybrid integration technique is used to mount four sensor chips on a micro flow channel: a pressure, temperature, pH, combined pO(2) and pCO(2) sensor chip. This results in a microsensor array which is developed to meet the technical requirements for space applications, The integration method allows to integrate other types of sensor chips, This multi-purpose and multi-user approach makes the microsensor array suitable for various biochemical applications. (C) 1997 Published by Elsevier Science S.A.
microsensor arrays with 1024 individually addressable amperometric cells are presented. The arrays have been realized in silicon planar technology on 10 mmx10 mm and 30 mmx30 mm substrates with separated hydrogel memb...
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microsensor arrays with 1024 individually addressable amperometric cells are presented. The arrays have been realized in silicon planar technology on 10 mmx10 mm and 30 mmx30 mm substrates with separated hydrogel membranes. The single sensor cell behaviour as well as the behaviour of the complete array have been investigated. To demonstrate the performance of the devices, a two-dimensional oxygen concentration mapping is presented.
A microsensor array with 32 rows and 32 columns of 1024 individual addressable amperometric cells on a 30 mm x 30 mm Si substrate has been developed. The performance of the two-dimensional measuring system is describe...
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A microsensor array with 32 rows and 32 columns of 1024 individual addressable amperometric cells on a 30 mm x 30 mm Si substrate has been developed. The performance of the two-dimensional measuring system is described with an example of a Clark-type oxygen-measurement system, leading to a novel nearly real-time oxygen-concentration mapping important for transplantation medicine and biosensor applications. Special attention has been paid to an easy, reliable mass-production process with integrated electrolyte and membrane immobilization, resulting in low-cost devices. Parameters influencing the measurements can be chosen by a specially developed software that allows nearly real-time amperometric measurements to be realized after an automated calibration of the whole array. As a sub-sensor for biosensors based on oxygen consumption or hydrogen peroxide production, exciting new possibilities for two-dimensional concentration mapping of many other analytes open new horizons in analytical chemistry.
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