The sensitivity of integrated circuitparameters regarding manufacturing process variation represents a very important ongoing topic in the semiconductor industry. Establishing the functional relationship between them...
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ISBN:
(纸本)9781728112015
The sensitivity of integrated circuitparameters regarding manufacturing process variation represents a very important ongoing topic in the semiconductor industry. Establishing the functional relationship between them at an early stage, i.e. simulation, would create an advantage in terms of circuit improvement and eventually high production yield. This paper presents a methodology for finding the influence of technologyparameters (i.e. Process Control Monitor parameters) on device performance. The methodology is based on Machine Learning algorithms and Bayesian Optimization framework with the purpose of modelling the functional dependenciesbetweentechnology and circuitparameters. The experimental results prove that the device performance is highly sensitive to technologyparameters variation and this dependency can be modelled.
Early (pre-silicon) yield estimation with regard to technology variations represents a cost-effective solution in the semiconductor industry. This paper presents preliminary results on a yield estimation methodology t...
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ISBN:
(纸本)9781728109961
Early (pre-silicon) yield estimation with regard to technology variations represents a cost-effective solution in the semiconductor industry. This paper presents preliminary results on a yield estimation methodology that models and uses the Electrical parameters dependence on the manufacturing process variation, namely the Process Control Monitor parameters.
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