One of the main error sources for phase shifting interferometry is the linear phase shift error. Thispaper presents a self-calibrating phase-measuring algorithm that is free from errors produced by this errorsource. I...
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ISBN:
(纸本)0819422487
One of the main error sources for phase shifting interferometry is the linear phase shift error. This
paper presents a self-calibrating phase-measuring algorithm that is free from errors produced by this error
source. In the other words, the proposed algorithm is able to obtain an accurate phase at every pixel point
in the interferograms over a wide range of equally spaced phase shifts. The algorithm requires the
acquisition of five phase shifted interferograms. It resembles the well-known Carre' s algorithm, but with
one extra frame. This algorithm, however, has considerable advantages over Cane' s algorithm.
One important issue in phase-shifting interferometry is to eliminate phase-shift errors so as to enhance achievable measurement accuracy. We propose a new phase-measuring algorithm that can identify the actual amounts...
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One important issue in phase-shifting interferometry is to eliminate phase-shift errors so as to enhance achievable measurement accuracy. We propose a new phase-measuring algorithm that can identify the actual amounts of phase shifts directly from interferograms without prior calibration, This is named the A-bucket algorithm and has the advantage of being inherently free from any phase-shift error that is constant across an interferogram. The main emphasis of this paper is given to a practicable application of the A-bucket algorithm to prove that accurate measurement is allowed in portable mode even in the presence of vibration.
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