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Development of two-frame shadow moire profilometry by iterative self-tuning technique

OPTICAL ENGINEERING 2018年第11期57卷 114101-114101页

作者： Du, Hubing Zhang, Shaofeng Zhao, Zixin Yu, Jianhong Liu, Haitao Xian Technol Univ Sch Mechatron Engn Xian Shaanxi Peoples R China Xi An Jiao Tong Univ State Key Lab Mfg Syst Engn Xian Shaanxi Peoples R China

Shadow moire fringes have a complex intensity distribution, which makes the existing arcsine function or arccosine function that is used in random phase-shift extraction algorithms unstable in applications. We propose a high-precision algorithm to determine the random phase shift in a robust way. The idea consists of constructing three consecutive fringe patterns by the addition of two background terms suppressed fringe patterns. Then, an iterative self-tuning phase-shifting algorithm is developed to extract the measurement phase in a pointwise manner. Due to the use of an iterative procedure and tangent function, the present method can evaluate the phase shift accurately and robustly and can be implemented easily in many applications. In addition, the proposed method provides a solution for the development of the two-frame random shadow moire technique. We present simulation and optical experiments to demonstrate the correctness of the proposed method. The results show that the proposed method performs better than other methods. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE).

关键词： phase-shifting algorithm shadow moire phase phase-shifting

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phase-measuring algorithm to suppress inner reflection of transparent parallel plate in wavelength tuning Fizeau interferometer

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PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY 2017年 48卷 67-74页

作者： Kim, Yangjin Sugita, Naohiko Mitsuishi, Mamoru Pusan Natl Univ Sch Mech Engn 2Busandaehak ro 63beon gil Busan 46241 South Korea Univ Tokyo Dept Mech Engn Bunkyo Ku 7-3-1 Hongo Tokyo 1138656 Japan

Optical thickness variation is a fundamental characteristic of transparent optical devices. When measuring this variation by using a wavelength-tuning Fizeau interferometer, the measurement accuracy depends on the phase-shifting algorithm being used. Therefore, the phase-shifting algorithm should compensate for any errors incurred during the measurement, including the phase-shift error, coupling errors, and bias modulation of intensity. Among these errors, however, the coupling errors between the higher harmonics resulting from the inner reflections of the transparent plate and phase-shift error have not previously been considered. This paper presents a derivation of a 19-sample phase-shifting algorithm that can compensate for the miscalibration and 1st-order nonlinearity of the phase shift, coupling errors, and bias modulation of intensity during wavelength tuning. The characteristics of the 19-sample algorithm were estimated with respect to the Fourier representation in the frequency domain. The phase error of measurements performed using the 19-sample algorithm was discussed and compared with that of measurements obtained using other conventional phase-shifting algorithms. Finally, the optical thickness variation of a fused silica parallel plate was obtained using a wavelength-tuning Fizeau interferometer and the 19-sample algorithm. The measurement accuracy was discussed by comparing the ripples in the crosstalk noise with those calculated using other phase-shifting algorithms. The experimental results indicated that the optical thickness variation measurement accuracy for the fused silica plate was approximately 2 nm. (C) 2016 Elsevier Inc. All rights reserved.

关键词： Precision measurement Interferometry Optical thickness phase-shifting algorithm phase error

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Statistical and interferometric determination of the optical thickness of a multilayer transparent plate

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OPTICAL REVIEW 2017年第6期24卷 734-740页

作者： Kim, Yangjin Hibino, Kenichi Pusan Natl Univ Sch Mech Engn 2 Busandaehak Ro63beon Gil Busan 46241 South Korea Natl Inst Adv Ind Sci & Technol 1-1-1 Umezono Tsukuba Ibaraki 3058563 Japan

Wavelength-tuning Fizeau interferometry has been widely used to measure and estimate the optical thickness of optical components. However, in multilayer interferometry, the coupling errors between the higher harmonics and phase-shift error cause systematic errors in the calculated phase distribution. This paper presents the derivation of a 15-sample phase-shifting algorithm that can compensate for the phase-shift miscalibration and up-to-first-order nonlinearity of the coupling errors between the second-order harmonic and phase-shift error. The characteristics of the 15-sample algorithm are estimated with respect to the Fourier representation in the frequency domain. The optical thickness of a highly reflective lithium niobate crystal wafer is measured using a wavelength-tuning Fizeau interferometer and 15-sample algorithm. Finally, the optical thickness is determined from the measured data using the statistical Student's t test.

关键词： phase-shifting algorithm Coupling error Optical thickness Wavelength tuning Student's t test

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Multi-wavelength phase-shifting interferometry for micro-structures measurement based on color image processing in white light interference

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OPTICS AND LASERS IN ENGINEERING 2016年 82卷 41-47页

作者： Guo, Tong Li, Feng Chen, Jinping Fu, Xing Hu, Xiaotang Tianjin Univ State Key Lab Precis Measuring Technol & Instrume Tianjin 300072 Peoples R China

Conventional multi-wavelength phase-shifting interferometry utilizes two or three monochromatic light sources, such as lasers, to realize the measurement of the surface topography with large discontinuity. In this paper, the white light source, with a single-chip CCD color camera, is used to accomplish multi wavelength phase-shifting interferometry. In addition, we propose an algorithm which combines white light phase-shifting algorithm, equivalent wavelength method and fringe order method to achieve measuring and calibrating the micro-structures ranging from nanometer scale to micrometer scale. Finally, the proposed method is validated by a traceable step height standard. (C) 2016 Elsevier Ltd. All rights reserved.

关键词： White light interference Multi-wavelength Color image phase-shifting algorithm

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Using higher steps phase-shifting algorithms and linear least-squares fitting in white-light scanning interferometry

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OPTICS AND LASERS IN ENGINEERING 2015年 66卷 165-173页

作者： Shen, Ming-Hsing Hwang, Chi-Hung Wang, Wei-Chung Natl Tsing Hua Univ Dept Power Mech Engn Hsinchu 30013 Taiwan Natl Appl Res Labs Instrument Technol Researcher Ctr Hsinchu Taiwan

White-light scanning interferometry (WLSI) has been a well-established tool for measuring the profile of objects. Since the white-light source is continuous in spectrum, the phase ambiguity problem can be avoided. Specimens with discontinuous profile can therefore be possibly measured by WLSI. In this paper, using higher steps, i.e. nine and eleven steps, phase-shifting algorithms (PSAs) based on local linear conditions of envelope function were proposed. The actual zero optical path difference position was retrieved by extracting the phase value and phase compensation. Maximum intensity peak positions at five points were used to calculate the center wavelength of the light source by both phase unwrapping and linear least-squares fitting. Both simulated and experimental results showed that the proposed nine- and eleven-step PSAs have good linearity and robustness to accurately measure the profile and center wavelength of the light source. (C) 2014 Elsevier Ltd. All rights reserved.

关键词： phase-shifting algorithm Linear least-squares fitting Local linear condition Micro-profile measurement White-light scanning Interferometry

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An improved two-step phase-shifting profilometry

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OPTIK 2016年第1期127卷 288-291页

作者： Liu YePeng Du Guangliang Zhang ChaoRui Zhou CanLin Si ShuChun Lei Zhenkun Shandong Univ Sch Phys Jinan 250100 Peoples R China

An improved two-step phase-shifting profilometry is put forward in three-dimensional (3D) shape measurement. Firstly, two phase-shifted randomly sinusoidal fringe patterns are projected onto the tested object by digital-light-processing (DLP) projector. The fringe patterns modulated with the object's surface are captured by a CCD camera. Secondly, the background and modulation components are obtained by parameter estimation using the least square method;fringe normalization is accomplished by the background bias removal and modulation normalization of a given deformed fringe. Then based on the statics characteristics of fringe gray, the phase step between two phase-shifted randomly sinusoidal fringe patterns is determined by using the inverse cosine function. Then, the phase is extracted from the two frame's normalized patterns and the step value. Finally, the experimental evaluation is conducted to prove the validity and performance of the proposed method. The experimental result is analyzed and compared with that of the method by reference 16. The effectiveness and superiority of the proposed method has been demonstrated. (C) 2015 Elsevier GmbH. All rights reserved.

关键词： phase-shifting algorithm Normalization Least square method phase measuring profilometry(PMP) Deformed fringe pattern

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High-speed high-accuracy three-dimensional shape measurement using digital binary defocusing method versus sinusoidal method

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OPTICAL ENGINEERING 2017年第7期56卷 074102-074102页

作者： Hyun, Jae-Sang Li, Beiwen Zhang, Song Purdue Univ Sch Mech Engn W Lafayette IN 47907 USA

This paper presents our research findings on high-speed high-accuracy three-dimensional shape measurement using digital light processing (DLP) technologies. In particular, we compare two different sinusoidal fringe generation techniques using the DLP projection devices: direct projection of computer-generated 8-bit sinusoidal patterns (a.k.a., the sinusoidal method), and the creation of sinusoidal patterns by defocusing binary patterns (a.k.a., the binary defocusing method). This paper mainly examines their performance on high-accuracy measurement applications under precisely controlled settings. Two different projection systems were tested in this study: a commercially available inexpensive projector and the DLP development kit. Experimental results demonstrated that the binary defocusing method always outperforms the sinusoidal method if a sufficient number of phase-shifted fringe patterns can be used. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)

关键词： high three-dimensional optical metrology binary defocusing method phase-shifting algorithm fringe analysis structured light

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Center Wavelength Measurement Based on Higher Steps phase-shifting algorithms in White-Light Scanning Interferometry 37

Center Wavelength Measurement Based on Higher Steps Phase-Sh...

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37th National Conference on Theoretical and Applied Mechanics (37th-NCTAM) / 1st International Conference on Mechanics (1st-ICM)

作者： Shen, Ming-Hsing Hwang, Chi-Hung Wang, Wei-Chung Natl Tsing Hua Univ Dept Power Mech Engn Hsinchu 30013 Taiwan Natl Appl Res Labs Instrument Technol Researcher Ctr Hsinchu 30076 Taiwan

Traditionally, monochromatic wavelength interferometry is applied to the measurement of smooth surfaces. Owing to the phase ambiguity, the range of depth measurement with a monochromatic light source is limited. To overcome this problem, with the fact that white-light source is continuous in spectrum, the white-light scanning interferometry (WLSI) can be used to measure discontinuous profile. In this paper, envelope function based on local linear conditions was developed and WLSI using higher steps phase-shifting algorithms (PSAs) was proposed. Maximum intensity peak positions at five points were used to calculate the center wavelength of the light source by both phase unwrapping and linear least-squares fitting. Both simulated and experimental results showed that the proposed PSAs have good linearity and robustness to accurately measure center wavelength of the white-light source (C) Published by Elsevier Ltd.

关键词： White-light scanning interferometry phase-shifting algorithm Linear least-squares fitting Local linear condition

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Measurement of Thickness and Refractive Index of Optical Samples Simultaneously Using Full-Range One-Shot Frequency-Domain Optical Coherence Tomography

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FIBER AND INTEGRATED OPTICS 2015年第3期34卷 171-182页

作者： Cheng, Hsu-Chih Huang, Chia-Tsai Natl Formosa Univ Dept Electroopt Engn Huwei Township Yunlin County Taiwan Natl Cheng Kung Univ Inst Electroopt Sci & Engn Dept Photon Tainan 70101 Taiwan

This article proposes an improved frequency-domain optical coherence tomography for simultaneously measuring the thickness and refractive index of an unknown sample. In conventional frequency-domain optical coherence tomography systems, the spectrum of interference signals generates mirror signals and autocorrelation terms that result in a restricted measurement range. This study presents an improved method that involves applying a phase-shifting algorithm to orthogonally polarized light beams to increase the measurement range and eliminate unnecessary noise. However, a disadvantage is that the proposed method is suitable for the imaging of no (or very low) birefringent samples and needs to align properly the light's states of polarization.

关键词： phase-shifting algorithm orthogonal polarized light frequency-domain optical coherence tomography

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Composite phase-shifting algorithm for three-dimensional shape compression

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OPTICAL ENGINEERING 2010年第6期49卷 063604-063604页

作者： Karpinsky, Nikolaus Zhang, Song Iowa State Univ Dept Mech Engn Ames IA 50011 USA

With recent advancements in 3-D imaging and computational technologies, acquiring 3-D data is unprecedentedly simple. However, the use of 3-D data is still limited due to the size of 3-D data, especially 3-D video data. Therefore, the study of how to store and transmit the 3-D data in real time is vital. We address a technique that encodes a 3-D surface shape into a single 24-bit color image. In particular, this image is generated by advanced computer graphics tools with two primary color channels encoded as sine and cosine fringe images, and the third channel encoded as a stair image to unwrap the phase obtained from the two fringe images. An arbitrary 3-D shape can then be recovered from a single image. We test 3-D shapes with differing levels of complexity along with various image formats. Experiments demonstrate that, without significantly losing the shape quality, the compression ratio can go up to 1:36.86, compared with the native smallest possible 3-D data representation method. (C) 2010 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3456632]

关键词： phase-shifting algorithm fringe analysis compression three-dimensional

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