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A metallic microcantilever electric contact probe array incorporated in an atomic force microscope

REVIEW OF SCIENTIFIC INSTRUMENTS 2000年第5期71卷 2087-2093页

作者： Ondarçuhu, T Nicu, L Cholet, S Bergaud, C Gerdes, S Joachim, C CNRS Ctr Elaborat Mat & Etud Struct F-31055 Toulouse 4 France CNRS Lab Automat & Architecture Syst F-31077 Toulouse France

We present the realization and performance of a multiprobe microcontactor made of an array of metallic microcantilevers inserted in an atomic force microscope (AFM). This instrument permits simultaneous AFM imaging and electrical characterization of nanoscale devices. It is therefore well adapted for future generations of molecular devices. The probes are 2-mu m-wide metallic cantilevers that are brought in contact with 3 mu m x 3 mu m metallic pads of a nanocircuit using a nanopositioning table. The performance of the instrument, tested on mesoscopic metallic wires and carbon nanotubes, shows that the reproducibility of the electrical contact between the probes and the circuit is better than 99.2%. (C) 2000 American Institute of Physics. [S0034-6748(00)00305-1].

关键词： .metallic electric contact probe array atomic force microscope Structurales-Centre mes-Centre National Ondarc cantilevers

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On-Line Detection System for Internal Flaws in As-Hot-Rolled Steel Strip Using Ultrasonic probe array

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JOURNAL OF THE JAPAN INSTITUTE OF METALS 2012年第9期76卷 546-554页

作者： Takada, Hajime Tomura, Yasuo Aratani, Makoto Yamasaki, Takuya Sasaki, Toshihiro JFE Steel Corp Steel Res Lab Kawasaki Kanagawa 2100855 Japan JFE Steel Corp E Japan Works Chiba 2600835 Japan

A new ultrasonic immersion test method for detecting internal flaws in a running steel strip has been developed. A transmitting probe array and a receiving probe array are arranged face-to-face on opposite sides of the strip in water, and two flaw echoes are received by the receiving probe array: (1) Flaw echo reflected first at an internal flaw and next at the surface wall of the strip;and (2) Flaw echo reflected first at the back wall of the strip and next at an internal flaw. A linear area in the strip can be tested within a cycle of ultrasonic pulse repetition by integrating the transmission of a line-focused ultrasonic beam (25 MHz in frequency) using all elements in the transmitting probe array at once with the parallel processing of signals received by the receiving probe array. An ultrasonic detection system based on this method was subsequently installed in the No. 6 pickling line at JFE Steel, Chiba District. The steel strip being tested is immersed in water by using six additional deflector rolls. The transmitting probe array and receiving probe array cover the width of the strip so that testing of the entire volume of the strip is realized. It is confirmed that inclusions with a minimum volume of 5 x 10(-5) mm(3) can be detected at a signal-to-noise ratio in the range of 9-10 dB. The detection results are rapidly fed back to the steelmaking process to improve steel cleanliness. As a result, steel coils have maintained a high level of internal cleanliness with a dramatic reduction in defects found during the users' manufacturing process.

关键词： internal flaws nonmetallic inclusion probe array line-focused beans steel strip

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Simultaneous electromagnetic measurement using a parallel modulated probe array

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IEEE TRANSACTIONS ON ELECTROMAGNETIC COMPATIBILITY 2007年第2期49卷 263-269页

作者： Chen, Qiang Sawaya, Kunio Habu, Tomohiro Hasumi, Ryoichi Tohoku Univ Sendai Miyagi 9808579 Japan Device Co Ltd Saitama 3650005 Japan

A simultaneous measurement method using a parallel modulated probe array is proposed to measure the electromagnetic field radiated by antennas at different locations simultaneously. Each modulated probe is excited by a local signal with different frequency, so that the received intermediate frequency (IF) signal contains different frequency components which indicate the relative magnitude of the radio-frequency signal at positions of the probes, and all the IF components are measured simultaneously by a broadband microwave receiver. The effect of the local signal on the received IF signal and interaction effect between the probe array and the measured antenna are investigated. The accuracy of the method is shown by measuring the antenna radiation pattern. A 3-D antenna radiation measurement system based on the present method is also developed. The performance of the system is demonstrated by measuring the radiation efficiency of antennas.

关键词： electromagnetic (EM) field measurement modulation probe probe array

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Ultra-sharp high-aspect-ratio probe array for SECM and AFM analysis

Ultra-sharp high-aspect-ratio probe array for SECM and AFM a...

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Smart Structures and Materials 2004 Conference

作者： Tao, Y Fasching, RJ Primz, FB Rapid Prototyping Lab Stanford CA 94305 USA

ISBN: (纸本)0819453064

A powerful experimental tool, ultra-sharp nano-electrode array is designed, fabricated and characterized. The application on a combination of Scanning Electrochemical Microscopy (SECM) and the Atomic Force Microcopy (AFM) is demonstrated. It can measure sample electrochemically initiated by SECM changes of topography while detecting topography using AFM. In order to realize this, a specialized probe system that is composed of a micro-mechanical bending structure necessary for the AFM mode and an electrochemical UME-tip required for a high performance SECM is crucial. The probe array is a row of silicon transducers embedded in silicon nitride cantilever array. The sharp high-aspect ratio (20:1) silicon tips are shaped and a thin layer of silicon nitride is deposited, which embeds the silicon tips in a-silicon nitride layer so that they protrude through the nitride. Thus, the embedded silicon tips with a diameter less than 600 nm, the top radius less than 20 run, and the aspect ratio as high as 20 can be achieved. A metal layer and an insulator layer are deposited on these tip structures to make each probe selectively conductive. Finally, cantilever structures are shaped and released by etching the silicon substrate from the backside. Electrochemical and impedance spectroscopic characterization show electrochemical functionality of the transducer system.

关键词： SECM AFM high aspect ratio nano electrodes probe array

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A novel MEMS probe array for the biological measurement

A novel MEMS probe array for the biological measurement

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IEEE MTT-S International Microwave Symposium

作者： Kim, JM Oh, DH Baek, CW Cho, JW Kwon, Y Cheon, C Kim, YK Seoul Natl Univ Sch EESC Seoul 151600 South Korea

ISBN: (纸本)0780388453

In this paper, the concept of a probe array for the measurement of biological properties is firstly proposed and we firstly implement a novel probe array for the biological measurement using MEMS technology. Through this work, we experimentally show the feasibility of the micromachined probe array for biological application. Until now, there have been no researches about probe array for the dielectric measurement. Many researchers have performed the dielectric measurement of liquids or biological samples using a single probe which is manufactured by laser machining. They should perform repetitive experiments point by point in order to extract the biological information of multiple points using a single probe. Moreover the size of single probe and Subminiature A (SMA) connector, which is connected with probe and test cable of network analyzer, are limited and the cost of probe and connector are very high. However, we can obtain the biological information of multiple points by one contact with a sample using the MEMS probe array at;time. Also we can reduce the size and cost of probe using wafer level process.

关键词： MEMS probe array multiple points biological information

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The Dense Sampling Antenna Measurement based on Square Wave-guide probe array 16

The Dense Sampling Antenna Measurement based on Square Wave-...

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16th International Conference on Microwave and Millimeter Wave Technology (ICMMT)

作者： Wang, Xinquan Hu, Dahai Dong, Jigang Wang, Yahai Zhao, Rui Chang, Qinggong Wang, Jinbang Nian, Fushun Ceyear Technol Co Ltd Automat Testing Div Qingdao Peoples R China

ISBN: (纸本)9798350389968

This article introduces the dense sampling antenna measurement based on square wave-guide probe array. Dense sampling is designed to reduce the sampling error of the probe array, and the antenna pattern results and testing efficiency of the square wave-guide probe array antenna measurement are compared with a single probe. The experimental results demonstrate that the square wave-guide probe array test can enhance the test efficiency many times when compared to the conventional single probe test. Furthermore, the test accuracy of the probe array is similar to that of the single probe. The square wave-guide probe array measurement method has the potential to significantly improve the development and production efficiency of antennas.

关键词： the dense sampling antenna measurement probe array

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Determination of CYP2D6 Gene Alleles by the CYP450 probe array Using the Affymetrix GeneChip System: Comparison with Sequencing Results

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Drug Metabolism and Pharmacokinetics 2002年第2期17卷 157-160页

作者： Ishida, Seiichi Ozawa, Shogo Soyama, Akiko Saito, Yoshiro Murayama, Norie Saeki, Mayumi Division of Pharmacology Tokyo Japan Division of Biochemistry and Immunochemistry Tokyo Japan Division of Xenobiotic Metabolism and Disposition National Institute of Health Sciences Tokyo Japan

We determined the CYP2D6 alleles in cell lines derived from 81 Japanese individuals with the CYP450 probe arrays using an Affymetrix GeneChip apparatus. Sequencing of the CYP2D6 exons from these same cell lines was performed to determine the accuracy of the allele calls by the Affymetrix probe array. Comparison of the results showed differences in the data from three cell lines for the CYP2D6*10 alleles between these two methods. These results indicated that the CYP450 probe array must be utilized cautiously for typing CYP2D6*10 alleles, which are frequently observed in the Japanese population. © 2002, The Japanese Society for the Study of Xenobiotics. All rights reserved.

关键词： Affymetrix GeneChip alleles CYP2D6 probe array sequencing single nucleotide polymorphisms (SNP)

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High-Resolution Flaw Detection Using Eddy-Current probe array Based on Giant Magnetoresistance Sensors

High-Resolution Flaw Detection Using Eddy-Current Probe Arra...

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IEEE International Magnetics Conference (INTERMAG)

作者： Bui, Long-Vu Jeng, Jen-Tzong Huang, Hua-Chih Huu-Thang Nguyen Van-Dong Doan Truong-Han Nguyen Natl Kaohsiung Univ Sci & Technol Dept Mech Engn Kaohsiung 807618 Taiwan Thai Nguyen Univ Technol Fac Mech Engn Thai Nguyen 250000 Vietnam Univ Da Nang Univ Technol & Educ Fac Elect & Elect Engn Da Nang 550000 Vietnam

ISBN: (纸本)9798350362213;9798350362220

This work presents a flaw detection system consisting of an array of eddy-current (EC) probes based on giant-magnetoresistance (GMR) sensors for mapping the defects on a metal sheet. Prior to measurement, a spatially-dependent calibration process was done to compensate the inter-channel inconsistency in responsivity and positioning. The calibrated 8-channel probe array exhibits high-sensitivity, which enables the detection of tiny feature with superior spatial resolution. The proposed system allows for the visualization of the geometric characteristics of the flaws with an inter-spacing of more than 2 mm on a copper sample. The suggested approach has great potential in nondestructive testing of metallic sheets for the characterization of small and intricate shape flaws.

关键词： Eddy current probe array Giant Magnetoresistance Nondestructive Testing Flaw Detection

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Three-dimensional measurement of a stationary plasma plume with a Faraday probe array

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AEROSPACE SCIENCE AND TECHNOLOGY 2021年 110卷 106480-106480页

作者： Zhang, Zhe Zhang, Zun Xu, Shuting Ling, William Yeong Liang Ren, Junxue Tang, Haibin Beihang Univ Sch Instrumentat & Optoelect Engn Beijing 100191 Peoples R China Beihang Univ Sch Space & Environm Beijing 100191 Peoples R China Beihang Univ Sch Aeronaut Sci & Engn Beijing 100191 Peoples R China Beijing Inst Technol Sch Aerosp Engn Beijing 100081 Peoples R China Beihang Univ Sch Astronaut Beijing 100191 Peoples R China

Recently, an increasing number of small satellites have chosen electric propulsion (EP) as the propulsion system for motion control in space flights. Research on the ejected high energy plasma plumes from EP thrusters has attracted significant interest due to their interactions with the components of satellites. This work demonstrates a probe array diagnostic platform (with 67 Faraday probes on the array) that enables the acquisition of the full three-dimensional morphology of the plume current density from the near-field to the far-field of EP stationary thrusters. The plume parameters of an ion thruster including the 3-D plume morphology, divergence angle, and thrust vector angle are measured using this diagnostic platform. From 250 to 700 mm from the thruster exit, the plume field exhibits a stable divergence angle of 43.6.. By fitting circles to the contours of each cut plane, the average thrust vector angle is calculated to be 1.3., and the repeatability error for the circle center fitting is approximately 2.2%. The current density profiles on exit cut planes demonstrate an "elliptical distortion" phenomenon in the plume shape. Using the ellipse fitting method, it is found that an elliptical shape was formed in the near-field of the plume. As the plume propagates to the far-field, the distortion of the ellipse becomes more apparent (the aspect ratio is 1:1.14). Some possible causes may be the geo-magnetic field, background vacuum environment distribution, or thruster manufacturing error. The thrust vector data can provide a basis for the control strategy of the satellites. In addition, the 3-D plume current density data can give us a comprehensive understanding of the plume plasma physics. These results may also provide an accurate and rich database for parameters for future plume simulations. (C) 2021 Elsevier Masson SAS. All rights reserved.

关键词： Electric propulsion Ion thrusters probe array 3-D plume morphology Thrust vector angle Elliptical distortion

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An on-line detection technique for internal flaws in as-hot-rolled steel strip using ultrasonic probe array

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TETSU TO HAGANE-JOURNAL OF THE IRON AND STEEL INSTITUTE OF JAPAN 2004年第11期90卷 883-889页

作者： Takada, H Yamasaki, T Tomura, Y Unzaki, H Sasaki, T Aratani, M JFE R&D Corp Instrument & Control Engn Dept Kawasaki Ku Kawasaki Kanagawa 2100855 Japan JFE Steel Corp E Japan Works Chiba Japan

A new ultrasonic immersion testing method for the detection of internal flaws in a running steel strip has been developed. It consists of a transmitting probe array and a receiving probe array arranged face-to-face on opposite sides of the strip in water, and two flaw echoes given as follows are received by the receiving probe array. (1) Flaw echo reflected first at a internal flaw and next at the surface wall of the strip. (2) Flaw echo reflected first at the back wall of the strip and next at a internal flaw. A linear area in the strip can be tested within a cycle Of ultrasonic pulse repetition by integrating transmission of line-focused ultrasonic beam (25 MHz in frequency) using all elements in the transmitting probe array at once with parallel processing of signals received by the receiving probe array. In succession, an ultrasonic detecting system has been installed in No. 6 Pickling Line at JFE Steel Chiba District. Steel strip being tested is immersed in water by using 6 additional deflector rolls. The transmitting probe array and the receiving probe array cover whole width of the strip so that testing of whole volume of the strip is realized. It is confirmed that an inclusion with 5 X 10(-5) mm(3) in minimum volume can be detected with signal-to-noise ratio in the range of 9-10 dB. The system is being used for the evaluation of commercial products without trouble, and very useful for internal quality control and assurance in the production line.

关键词： internal flaws non-metallic inclusion probe array line-focused beam steel strip

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