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Study of the 6.x nm short wavelength radiation spectra of laser-produced erbium plasmas for BEUV lithography

Plasma Science and Technology 2023年第6期25卷 41-51页

作者：吴涛王倩陈柳安陆培祥 Hubei Key Laboratory of Optical Information and Pattern Recognition School of Optical Information and Energy EngineeringWuhan Institute of TechnologyWuhan 430205People's Republic of China Guangdong Intelligent Robotics Institute Dongguan 523808People's Republic of China

Beyond extreme ultraviolet(BEUV)radiation with a wavelength of 6.x nm for lithography is responsible for reducing the source wavelength to enable continued miniaturization of semiconductor *** this work,the Required BEUV light at 6.x nm wavelength was generated in dense and hot Nd:YAG laser-produced Er *** spectral contributions from the 4p–4d and 4d–4f transitions of singly,doubly and triply excited states of Er XXIV–Er XXXII in the BEUV band were calculated using Cowan and the Flexible Atomic *** was also found that the radiative transitions between multiply excited states dominate the narrow wavelength window around 6.x *** the assumption of collisional radiative equilibrium of the laser-produced Er plasmas,the relative ion abundance in the experiment was *** the Boltzmann quantum state energy level distribution and Gram–Charlier fitting function of unresolved transition arrays(UTAs),the synthetic spectrum around 6.x nm was finally obtained and compared with the experimental *** spatio-temporal distributions of electron density and electron temperature were calculated based on radiation hydrodynamic simulation in order to identify the contributions of various ionic states to the UTAs arising from the Er plasmas near 6.x nm.

关键词： laser-produced plasmas unresolved transition array collisional radiative equilibrium

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Soft x-ray emission from laser-produced strontium ions

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JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS 2020年第2期53卷

作者： Miyazaki, Takanori O'Sullivan, Gerry Dunne, Padraig Univ Coll Dublin Sch Phys Dublin 4 Ireland

Soft x-ray spectra, in the range from 2 nm to 9 nm, were recorded from strontium plasmas formed by pulses from 20 ps, 170 ps and 5.5 ns Nd:YAG lasers operating at the fundamental wavelength of 1064 nm. Features due to 3d-4p and 3d-4f transitions were identified by comparison with spectra from adjacent ions and atomic structure calculations with both the Cowan code and the Flexible Atomic Code. As in the spectra of ions of other elements in the fifth row of the periodic table, resonant lines 3d(n)-3d(n-1)4p(1), 3d(n)-3d(n-1)4f(1) and satellite lines 3d(n-1)4s(1)-3d(n-2)4s(1)4p(1), 3d(n-1)4s(1)-3d(n-2)4s(1)4f(1) of Delta n = 1 were observed over the 3.0-8.5 nm region, emitted by 10+ to 19+ ions. These Delta n = 1 transitions provide a range of narrow band emission features which may match to specific multi layer combinations for reflective optics in the extreme ultraviolet region of the spectrum.

关键词： laser produced plasma strontium soft x-ray spectroscopy unresolved transition array Cowan code flexible atomic code

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EUV emission spectra in collisions of highly charged tantalum ions with nitrogen and oxygen molecules

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 2017年 408卷 213-216页

作者： Tanuma, Hajime Numadate, Naoki Uchikura, Yoshiyuki Shimada, Kento Akutsu, Takuto Long, Elaine O'Sullivan, Gerry Tokyo Metropolitan Univ Dept Phys 1-1 Minami Osawa Hachioji Tokyo 1920397 Japan Univ Coll Dublin Sch Phys Dublin 4 Ireland

We have performed ion beam collision experiments using multiply charged tantalum ions and observed EUV (extreme ultra-violet) emission spectra in collisions of ions with molecular targets, N-2 and O-2. Broad UTAs (un-resolved transition arrays) from multiply charged Ta ions were observed, and the mean wavelengths of the UTAs shifted and became shorter at higher charge statea of Ta ions. These UTAs may be attributed to the 4f-5d and 4f-5g transitions. Not only the UTA emission from incident ions, but also the sharp emission lines from multiply charged fragment atomic ions were observed. Production of temporary highly charged molecular ions, their kinetic energy and fragmentation processes have been investigated with coincident detection technique. However, the observation of emission from the fragments might be for the first time. The formation mechanisms of the multiply charged fragment atomic ions from target molecules are discussed. (C) 2017 Elsevier B.V. All rights reserved.

关键词： Charge exchange spectroscopy Extreme ultra-violet unresolved transition array Fragmentation

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Corrections to statistical modeling of spectra for plasmas at moderate or low temperatures

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HIGH ENERGY DENSITY PHYSICS 2011年第4期7卷 277-284页

作者： Gilleron, F. Pain, J. -C. Porcherot, Q. Bauche, J. Bauche-Arnoult, C. CEA Commissariat Energie Atom DAM DIF F-91297 Arpajon France Lab Aimee Cotton F-91405 Orsay France

For plasmas in LTE at moderate or low temperatures (1-50 eV), the statistical approach for calculating emission or absorption spectra may become inaccurate and need improvement to account for the Boltzmann factor in the population of the levels. In this work, corrections to the transition rates are computed by using the moments of emission or absorption zones, which represent the set of levels within a configuration that provide the dominant part of the emissivity (or opacity). Partition functions are also improved by using high-order moments of level energy distributions. Corrections to the statistical models are derived in a non-relativistic framework as a function of these moments, which can be deduced from already published formulas. Numerical comparisons of detailed line-by-line and statistical calculations are presented that clearly illustrate the importance of correcting the models at low temperatures. Thus, these corrections are of great interest for applications such as Warm Dense Matter, LTE photo-absorption experiments where the targets are heated to similar to T(c) 20 eV and astrophysical plasmas. (C) 2011 Elsevier B.V. All rights reserved.

关键词： Absorption Emission Levels Lines Configuration unresolved transition array DCA model

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The effect of first order superconfiguration energies on the opacity of hot dense matter

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HIGH ENERGY DENSITY PHYSICS 2015年 15卷 59-66页

作者： Krief, Menahem Feigel, Alexander Hebrew Univ Jerusalem Racah Inst Phys IL-91904 Jerusalem Israel Soreq NRC IL-81800 Yavne Israel

We have recently completed developing a new super transition array (STA) code for calculating absorption and emission spectra of LTE plasmas. The code follows the theory of Bar-Shalom et al. with various improvements. In this work we focus on the first order correction for the Boltzmann populations for which traditional calculations can be very costly. We present here a method faster by an order of magnitude than the traditional method. We then investigate the effect of this correction on the opacity spectra of several elements. Finally we interpret results of a recent opacity experiment on gold plasma. A good agreement is reached. (C) 2015 Elsevier B.V. All rights reserved.

关键词： Opacity Gold opacity unresolved transition array Super transition array Configuration average energy First order superconfiguration average energy

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Variance and shift of transition arrays for electric and magnetic multipole transitions

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HIGH ENERGY DENSITY PHYSICS 2015年 17卷 254-262页

作者： Krief, Menahem Feigel, Alexander Hebrew Univ Jerusalem Racah Inst Phys IL-91904 Jerusalem Israel Soreq NRC IL-81800 Yavne Israel

Generalized analytical expressions for the two-electron relativistic unresolved-transition-array (UTA) energy variance and shift for electric and magnetic transitions of general multipole order are presented. The revised expressions are shown to agree with the exact moments calculated directly from the energy levels of two-electron configurations. We show that for electric transitions of even multipole order and for magnetic transitions, the available expressions in the literature, which are implemented in widely used atomic codes, are incorrect. We suggest an alternative method for the calculation of the UTA energy variance and shift by using the analytical expressions for the two-electron energy levels and line-strengths. The method is much more efficient and simple than the use of the traditional lengthy analytic expressions. Finally, the effect of UTA widths on Super-transition-array (STA) spectral opacity is shown for several examples. (C) 2015 Elsevier B.V. All rights reserved.

关键词： Atomic spectra unresolved transition array UTA Super transition array Multipole transitions Magnetic transitions

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13.5 nm emission from composite targets containing tin

13.5 nm emission from composite targets containing tin

引用

Conference on Emerging Lithographic Technologies IX

作者： Hayden, P Cummings, A Gaynor, L Murphy, N O'Sullivan, G Sheridan, P Sokell, E White, J Dunne, P Univ Coll Dublin Dept Expt Phys Dublin 4 Ireland

ISBN: (纸本)0819457310

The aim of this study is to investigate ways to maximise the efficiency of tin based laser produced plasmas as sources of EUV radiation in the 2% band centered on 13.5 nm. It has been found that targets containing below 15% tin atoms by number emit more brightly in the spectral region around 13.5 nm than pure tin targets. Furthermore, if the remaining material in the target is composed on primarily low-Z atoms, then both plasma continuum radiation and Bremsstrahlung radiation are greatly reduced. In addition, if the target is illuminated with a prepulse, the conversion efficiency shows a distinct increase. The third parameter under examination is the laser power density, which controls the ion distribution in the plasma. The influence of low-Z atoms on the tin ion distribution in the plasma has been investigated and found to be of little consequence. Measurements were made in the region from 9 - 17 nm on an absolutely calibrated 0.25-m flat field grazing incidence spectrograph, and on two 2-m grazing incidence spectrographs. Spectra and conversion efficiency data from a range of target materials and illumination regimes are presented.

关键词： laser plasma EUV source unresolved transition array

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Optimising an EUV source for 13.5 nm

Optimising an EUV source for 13.5 nm

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Conference on Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications

作者： O'Sullivan, G Cummings, A Duffy, G Dunne, P Fitzpatrick, A Hayden, P McKinney, L Murphy, N O'Reilly, D Sokell, E White, J Natl Univ Ireland Univ Coll Dublin Dept Expt Phys Dublin 4 Ireland

ISBN: (纸本)0819450693

The emission spectra of laser produced plasmas of pure tin targets are dominated by recombination continuum emission throughout the entire EUV spectral region with intense structure due to line emission dominating the spectra in the 13 14 nm region. This feature arises from resonant 4p(6)4d(n) - 4p(5)4d(n+1) + 4p(6)4d(n-1)4f emission lines that are generally concentrated in a narrow band, 5-10 eV wide, which overlaps considerably in adjacent ion stages to form an intense unresolved transition array (UTA). Such plasmas are optically thick;the strongest lines are attenuated and frequently appear in absorption. However, if tin comprises a few percent of a predominantly low-Z matrix, the recombination is suppressed and the plasmas can become optically thin to resonance radiation. Under these conditions, resonance line emission can dominate the spectra. The application of a collisional radiative (CR) model, combined with ab initio atomic structure calculations, allows one to estimate the laser plasma parameters that will optimise the UTA as efficient narrow bandwidth emitters of EUV radiation. The dependence on laser power density of both in-band emission and debris generation from pure tin targets is presented. The influence of a pre-pulse on the plasma output is also investigated.

关键词： tin laser plasma EUV source unresolved transition array

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