介绍和讨论低温和高温超导超薄材料的制备及超导特性,并和普通非超薄超导材料特性相比较。超薄超导材料可以用于制备超导单光子探测器(Supercon ducting Single Photon Detector,简称SSPD)和超导热电子测辐射热仪(Superconducting Hot E...
详细信息
介绍和讨论低温和高温超导超薄材料的制备及超导特性,并和普通非超薄超导材料特性相比较。超薄超导材料可以用于制备超导单光子探测器(Supercon ducting Single Photon Detector,简称SSPD)和超导热电子测辐射热仪(Superconducting Hot Electron Bolometer,简称SHEB)。详细分析并讨论其应用。
A comb-drive actuator for lateral movement of over 100μm under low driving voltage is designed. Side stability is analyzed to improve the performance of the actuator. According to the analysis,a comb-drive actuator w...
详细信息
A comb-drive actuator for lateral movement of over 100μm under low driving voltage is designed. Side stability is analyzed to improve the performance of the actuator. According to the analysis,a comb-drive actuator with small comb gap,high-stiffness-ratio prebent suspension beams, non-initial overlap, and linear-engaged-length comb teeth is proposed and the parameters of the actuator are derived. Experiments indicate that the actuator resonates at 573Hz with a Q factor of 35.88 and reaches a maximum displacement of over 100μm at a driving voltage of 7IV,which fulfills the design requirements and matches the analytical value to within 2.1%.
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