A differential equation that is generally effective for squeeze film air damping of perforated plate and non perforated plate as well as in MEMS devices is *** perforated plate,the thickness and the dimensions of th...
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A differential equation that is generally effective for squeeze film air damping of perforated plate and non perforated plate as well as in MEMS devices is *** perforated plate,the thickness and the dimensions of the plate are not *** boundary conditions,pressure distribution and the damping force on the plate can be found by solving the differential *** expressions for damping pressure and damping force of a long strip holeplate are presented with a finite thickness and a finite *** the extreme conditions of very thin plate and very thin hole,the results are reduced to the corresponding results of the conventional Reynolds' ***, the effectiveness of the generalized differential equation is ***,the generalized Reynolds' equation will be a useful tool of design for damping structures in MEMS.
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