A comb-drive actuator for lateral movement of over 100μm under low driving voltage is designed. Side stability is analyzed to improve the performance of the actuator. According to the analysis,a comb-drive actuator w...
详细信息
A comb-drive actuator for lateral movement of over 100μm under low driving voltage is designed. Side stability is analyzed to improve the performance of the actuator. According to the analysis,a comb-drive actuator with small comb gap,high-stiffness-ratio prebent suspension beams, non-initial overlap, and linear-engaged-length comb teeth is proposed and the parameters of the actuator are derived. Experiments indicate that the actuator resonates at 573Hz with a Q factor of 35.88 and reaches a maximum displacement of over 100μm at a driving voltage of 7IV,which fulfills the design requirements and matches the analytical value to within 2.1%.
首次提出并实现了一种利用笼式共轴系统搭建的Littman结构平移透镜外腔半导体激光器。通过微调节架驱动准直透镜平移从而改变光栅表面的激光入射角,可以实现约8.5 nm的连续波长调谐,准直透镜平移1μm波长改变约0.02 nm,实验测量值与理论计算值能够很好地吻合。通过压电陶瓷驱动准直透镜平移,研究了Littman结构平移透镜外腔半导体激光器的跳模特性并定性分析了发生跳模的基本原理。此外,该外腔系统的出射激光具有优异的单模特性和稳定性,室温下工作电流为300 m A时单模输出功率超过18 m W。
暂无评论