Two kinds of thin-film SOI high voltage MOSFETs are *** is general structure,the other is novel two-drift-region *** gate width is 760μm,and the active area is 8.58×10 -2 mm *** experiments show that the bre...
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Two kinds of thin-film SOI high voltage MOSFETs are *** is general structure,the other is novel two-drift-region *** gate width is 760μm,and the active area is 8.58×10 -2 mm *** experiments show that the breakdown voltages of the two-drift-region and general structures are 26V and 17V,respectively,and the on resistances are 65Ω and 80Ω,respectively.
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