A novel Step Oxide-Bypassed (SOB) trench VDMOS structure is designed based on the Oxide-Bypassed concept proposed by Liang Y C. This structure is suitable for breakdown voltage below 300V to obtain ultra-low specifi...
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A novel Step Oxide-Bypassed (SOB) trench VDMOS structure is designed based on the Oxide-Bypassed concept proposed by Liang Y C. This structure is suitable for breakdown voltage below 300V to obtain ultra-low specific on-resistance. The main feature of this structure is the various thicknesses of sidewall oxide,which modulate electric field distribution in the drift region and the charge compensation effect. As a result, the breakdown voltage is increased no less than 20% due to the more uniform electric field of the drift region,while the specific on-resistance was reduced by 40%-60% for the step oxide bypassed compared with the oxide-bypassed structure.
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