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Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX 2023

作者： Häcker, Annika-Verena Stauffenberg, Jaqueline Manske, Eberhard Institute of Process Measurement and Sensor Technology Production and Precision Measurement Technology Group Technische Universität Ilmenau Gustav-Kirchhoff-Straße 1 Thuringia Ilmenau98693 Germany

ISBN: (纸本)9781510665200

The semiconductor industry is an unbelievable fast-growing field with an exponential growth in the space optimization. But also, other large industrial field are getting smaller in the structure size, for example the field of optics. On the other hand, the customer demands get more and more complex and individual. This leads to an enormous growth potential for micro- and nanofabrication with direct laser writing. Under this circumstance the idea for a micro- and nanostructuring possibility with high precision on large areas was born.1 A setup was developed to combine a nanopositioning and nanomeasuring machine (NMM-1) with an extremely high precision and a two-photon based illumination system to realize a high-precision direct laser writing system.2 Besides its high positioning resolution of 0.1 nm and its metrological traceability based on an interferometrical measurement setup, the NMM-1 offers a positioning range of 25mm x 25mm x 5mm34 The aim is to design a direct laser writing setup, which enables a trans-scale fabrication without any stitching or combination of different positioning systems necessary. In order to benefit from this high positional accuracy, studies have been made to investigated the 2 photon absoption process and reduce line widths. The presented research shows investigations, which were made with the developed laser writing setup, to invested illumination dose and the voxel position of the writing laser, in order to improve microstructuring and to reduce structure widths. © 2023 SPIE.

关键词： Lithography

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Permanent tracebility of a Nanopositioning and Nanomeasuring Machine

Permanent tracebility of a Nanopositioning and Nanomeasuring...

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2023 ASPE Winter Topical Meeting: Precision Optical Metrology Workshop

作者： Manske, E. Blumröder, U. Köchert, P. Fröhlich, T. Kissinger, T. Ortlepp, I. Gerhardt, U. Mastylov, R. Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Ilmenau Germany Precision Engineering Division Braunschweig Germany Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Gustav-Kirchhoff-Str. 1 Ilmenau98693 Germany

ISBN: (纸本)9781713870876

Due to the frequency stabilization of He-Ne-lasers directly to a frequency comb controlled by a GPS atomic clock disciplined oscillator and their direct coupling with a Nanopositioning and Nanomeasuring Machine, directly traceable measurements are demonstrated. © (2023) by American Society for Precision Engineering (ASPE) All rights reserved.

关键词： Precision engineering

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Range Revolved Interferometry for use in high precision positioning systems 39

Range Revolved Interferometry for use in high precision posi...

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39th Annual Meeting of the American Society for Precision Engineering, ASPE 2024

作者： Grabowski, Axel Mittag, Sven Walenda, Carolin Kissinger, Thomas SE & Co. KG Auf der Roemerstrasse 1 Karlsruhe76228 Germany Institute for Process Measurement and Sensor Technology Technical University of Ilmenau Gustav-Kirchhoff-Str. 1 Ilmenau98693 Germany

ISBN: (纸本)9781887706612

We presented here a new fiber-based interferometer technology in a functional sample usable for industrial applications. We have shown an evaluation of the basic properties like positional noise, linearity and stability over 64 hours of measuring time. The unique features of the data processing scheme enable the system to measure with very low periodic errors. Additionally, it has been proven that the detection of more than one surface is doable and even further, that it is capable of measuring and tracking the thickness of optical transparent systems. Furthermore, it is possible to use the system in cryogenic environments. This has been demonstrated by characterizing different piezoelectric materials in a temperature range between room temperature and 4K. The form factor of the sensor heads is very small, enabling the construction of very compact piezo stages. © 2024 Proceedings - ASPE 2024 Annual Meeting. All rights reserved.

关键词： Piezoelectric materials

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Ultrastable, traceable optical frequencies for length metrology in long-range nanopositioning and nanomeasuring machines 22

Ultrastable, traceable optical frequencies for length metrol...

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22nd International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2022

作者： Blumröder, Ulrike Köchert, Paul Fröhlich, Thomas Füßl, Roland Ortlepp, Ingo Gerhardt, Uwe Mastylo, Rostyslav Flügge, Jens Bosse, Harald Manske, Eberhard Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Gustav-Kirchhoff-Str. 1 Ilmenau98693 Germany Precision Engineering Division Bundesallee 100 Braunschweig38116 Germany

ISBN: (纸本)9781998999118

Precise interferometric distance measurements play a crucial role in length measuring and positioning systems that provide resolving capabilities down to the sub-nm-range. Especially for applications in nanotechnology, length metrology has to face additional challenges due to increasing measurement ranges and traverse speed. Nanopositioning and measuring machines (NPMM) meet the demands on positioning with nm-accuracy over long measurement distances. Currently, the next generation of NPMMs (NPMM-200) provide a measuring range of 200 mm × 200 mm × 25 mm with a measuring repeatability up to 20 pm. This also sets new demands on the frequency stability of the laser sources used for interferometry. In this study we present two new approaches to create traceable, ultrastable optical frequencies at 633 nm that provide frequency stability below the electronic resolution limit of the interferometers (?s = 25.10-12) thus allowing to practically eliminate the influence of frequency distortions in the NPMM-200. Both approaches utilize an optical frequency comb to ensure traceability and long-term frequency stability. The first approach permanently couples the metrology lasers of the NPMM-200 to a comb line. The second approach is based on a diode laser stabilized to an ultrastable cavity. This allows to set up a frequency reference with enhanced-short-term frequency stability and high output power. Thus, in combination with the optical frequency comb a frequency stability better than 10-12independent on integration time is prospectively accessible. © European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. All rights reserved.

关键词： Frequency stability

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Two-Photon Direct Laser Writing Beyond the Diffraction Limit Using the Nanopositioning and Nanomeasuring Machine

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Nanomanufacturing and Metrology 2021年第3期4卷 149-155页

作者： Laura Mohr-Weidenfeller Annika-Verena Hacker Carsten Reinhardt Eberhard Manske Microsystems Technology Group Ilmenau University of TechnologyMax-Planck-Ring 12IlmenauGermany Institute for Process Measurement and Sensor Technology Ilmenau University of TechnologyGustav-Kirchhoff-Str.1IlmenauGermany Bremen University of Applied Science Neustadtswall 30BremenGermany

Since the first realization of two-photon direct laser writing(DLW)in Maruo et al.(Opt Lett 22:132-134,1997),the manufacturing using direct laser writing techniques spread out in many laboratories all over the *** materials with different material properties open a new field for micro-and *** achievable structuring resolution using this technique is reported to be sub-100 nm(Paz et *** *** Appl.24:042004,2012),while a smallest linewidth of 25 nm could be shown in Tan et al.(Appl Phys Lett 90:071106,2007).In our approach,the combination of DLW with the nanopositioning and nanomeasuring machine NMM-1 offers an improvement of the technique from the engineering side regarding the ultra-precise positioning(Weidenfeller et *** Adv Fabr Technol Micro/Nano Opt Photon Ⅺ 10544:105440E,2018).One big benefit besides the high positioning resolution of 0.1 nm is offered by the positioning range of 25 mm×25 mm×5 mm(Jager et *** Technisches Messen 67:319-323,2000;Manske et *** Meas Sci Technol 18:520-527,2007).Thus,a trans-scale fabrication without any stitching or combination of different positioning systems is *** immense synergy between the highly precise positioning and the DLW is demonstrated by the realization of resist lines and trenches whose center-to-center distance undergoes the modified diffraction limit for two-photon *** precise positioning accuracy enables a defined distance between illuminated ***,with a comparable huge width of the trenches of 1.655|im due to a low effective numerical aperture of 0.16,a resist line of 30 nm between two written trenches could be *** the interrelationships for achieving such narrow trenches have not yet been clarified,much smaller resist lines and trench widths are possible with this approach in the near future.

关键词： Direct laser writing Nanopositioning and nanomeasuring machine Two-photon absorption Laser power controlling

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Direct laser writing on 3D-substrates via differential confocal feedback 38

Direct laser writing on 3D-substrates via differential confo...

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Optical and EUV Nanolithography XXXVIII 2025

作者： Belkner, Johannes Stauffenberg, Jaqueline Fan, Chao Koppka, Christian Kissinger, Thomas Fröhlich, Thomas Technische Universität Ilmenau Institute for Process Measurement and Sensor Technology Gustav-Kirchhoff-Straße 1 Ilmenau98693 Germany Technische Universität Ilmenau Institute for Micro- and Nanotechnologies Gustav-Kirchhoff-Straße 1 Ilmenau98693 Germany

ISBN: (纸本)9781510686342

Mask-less lithography like direct laser writing (DLW) is a popular tool for flexible prototyping of integrated circuits, MEMS, NEMS and more recently photonic structures such as 3D meta materials or waveguides. Although the latter already demonstrated impressive free-standing 3D structures, the structuring on arbitrarily shaped free-form 3D substrates is often overlooked. To realize accurate and homogeneous structures, a tightly focused exposure spot must be maintained on different heights of the substrate. Therefore, a novel optical probe is integrated into the beam-path to provide a feedback-signal for a highly accurate nano-positioning and nanomeasuring machine (NPMM). The designed differential confocal probe demonstrates single-digit nanometer axial resolution of single surfaces. Its signal is integrated into the control structure of the NPMM and is additionally used for preliminary in-situ characterization of the substrate. A first demonstration on a 5° inclined glass substrate exhibits straightness below the visual diffraction limit. © 2025 SPIE.

关键词： Laser materials processing

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Intra-spectral temperature-compensated FBG sensors for hydrogen detection and beyond

Intra-spectral temperature-compensated FBG sensors for hydro...

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Optica Sensing Congress 2023, AIS, FTS, HISE, sensors, ES 2023 - Part of Optical sensors and Sensing Congress 2023

作者： Buchfellner, F. Bian, Q. Moos, F. Nicolai, J. Zhang, F. Hu, W. Yang, M. Koch, A.W. Roths, J. Photonics Lab. Munich University of Applied Sciences Lothstrasse 34 Munich80335 Germany Institute for Measurement Systems and Sensor Technology Technical University Munich Munich80333 Germany Advanced Photonic Components Lab Carleton University OttawaONK1S 5B6 Canada National Engineering Research Center for Optical Fiber Sensing Technology Wuhan University of Technology Wuhan430070 China

Intra-spectral referencing of the notch to the π-FBG envelope enables direct measurement and compensation of temperature within an FBG element. This enhances reliability and enables versatile real-field applications ... 详细信息

ISBN: (纸本)9781957171241

关键词： Fiber Bragg gratings

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Detection of an Approximately Periodic Sequence of Pulses for Acoustic Condition Monitoring

Detection of an Approximately Periodic Sequence of Pulses fo...

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European Signal Processing Conference (EUSIPCO)

作者： J. Lindenberger C. Pichler S. Schuster O. Lang M. Neumayer A. Haberl C. Staudinger B. Lehner C. Feilmayr H. Wegleiter M. Huemer Silicon Austria Labs GmbH Linz Austria Institute of Electrical Measurement and Sensor Systems Graz University of Technology Graz Austria voestalpine Stahl GmbH Linz Austria Institute of Signal Processing Johannes Kepler University Linz Austria K1-MET GmbH Linz Austria

ISBN: (数字)9789464593617

ISBN: (纸本)9798331519773

Acoustic condition monitoring is a cost-effective approach to maintain proper machine operation. Defective machines often generate knocking sounds, e.g., due to loose metal parts, which can be modelled as an approximately periodic sequence of acoustic pulses. Based on a signal model for these sequential pulses, we derive a z-transform-based maximum a posteriori ratio test (MAPRT) detector that reliably detects such knocking noises. The proposed detector is tested with measurement data showing that it is more robust than the commonly used generalized likelihood ratio test (GLRT) pitch detector. Furthermore, the proposed MAPRT detector can be implemented efficiently using the chirp z-transform.

关键词： Condition monitoring Chirp Noise Metals Europe Detectors Computational efficiency Reliability Monitoring Periodic structures

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Research of laser atmospheric propagation of large-aperture antenna measurement 8

Research of laser atmospheric propagation of large-aperture ...

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8th International Conference on Speckle Metrology, Speckle 2023

作者： Zhang, Xuan Gao, Ming Wang, Hu Lin, Shangmin Jin, Yu Lai, Yunqiang Lv, Hong He, Wenlong Xi'an Technological University No.2 Xuefuzhonglu Road Shaanxi Xi'an710021 China Xi an Institute of Optics and Precision Mechanics Chinese Academy of Science No.17 Xinxi Road Shaanxi Xi'an710119 China University of Chinese Academy of Sciences No.1 Yanqihu East Rd Huairou District Beijing101408 China Xi an Space Sensor Optical Technology Engineering Research Center No.17 Xinxi Road Shaanxi Xi'an710119 China Key Laboratory of Space Precision Measurement Technology Chinese Academy of Sciences No.17 Xinxi Road Shaanxi Xi'an710119 China

ISBN: (数字)9781510674592

ISBN: (纸本)9781510674585

Laser measurement technology is widely used in antenna main reflector and subreflector deformation or pose measurement. Based on the laser measurement technology, atmospheric turbulence caused by the atmospheric characteristics or the convergence effect of the antenna itself will affect the refractive index disturbance during laser propagation, which affects the accuracy of the laser measurement of the antenna deformation or pose. In order to solve the problem of laser atmospheric propagation deflection caused by atmospheric turbulence on the near-ground of a large-aperture antenna, firstly, this paper decomposes the laser atmospheric propagation path into multiple isotropic air layers, calculates the atmospheric refractive index of each air layer, obtains the atmospheric refractive index of the whole laser propagation path through curve fitting methods, and then assesses the laser deflection. Secondly, the turbulence intensity under sunny daytime and cloudy nighttime are evaluated, the laser spot position deviation is compared and analyzed, and the matching relationship among turbulence intensity, theoretical deviation of the laser spots, and actual spot deviation is obtained. Finally, the deflection of laser atmospheric propagation is fitted and calculated by measuring environmental data matched to the actual experimental data of the Nanshan 26m radio telescope antenna, which verifies the effectiveness and feasibility of the proposed method. © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.

关键词： Refractive index

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Comprehensive angular scattering distribution analysis for resource-efficient manufacturing 56

Comprehensive angular scattering distribution analysis for r...

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56th CIRP International Conference on Manufacturing Systems, CIRP CMS 2023

作者： Eifler, Matthias Brodmann, Boris Linke, Barbara Müller, Alexander Seewig, Jörg IU International University Juri-Gagarin-Ring 152 Erfurt99084 Germany Institute for Measurement and Sensor-Technology Rheinland-Pfälzische Technische Universität Kaiserslautern-Landau Gottlieb-Daimler Straße 44 Kaiserslautern67663 Germany Optosurf GmbH Nobelstraße 9-13 EttlingenD-76275 Germany Manufacturing and Sustainable Technologies Research Laboratory University of California Davis 1 Shields Ave DavisCA95616 United States

Most measuring principles for surface topography measurement cannot be broadly used within machine tools due to the rough environment featuring vibrations, dust, cooling liquid, or temperature gradients. Having to measure outside of the machine tool results in large quality control loops. The angular-resolved scattering light sensor is an established measuring principle which can be used directly in the manufacturing environment and thus allows small quality control loops and a resource-efficient manufacturing since deviations in the manufacturing process can be detected almost immediately. For the evaluation of the surface characteristics, the angular distribution of the surface within a lightspot is typically characterized by its center of gravity (M-parameter) and its variance (Aq-parameter) as described in the guideline VDA 2009. These two parameters provide only little information about the angular distribution and the workpiece quality and for certain, function-oriented applications and expanded data analysis can be beneficial to allow the monitoring in more manufacturing systems with high benefitss for resource-efficient manufacturing. We suggest using additional parameters of the angular distribution and perform a correlation analysis with the machining parameters of an exemplified manufacturing process to find parameters that feature a more pronounced correlation with the process parameters than Aq and thus allow an improved monitoring of the manufacturing process in this paper. The example process chosen is a grinding process with different tool grit sizes, tool surface speeds, feed rates, and coolant air flow power. With this case study it can be demonstrated how a more comprehensive analysis of the scattering of surface angles can lead to an improved process monitoring since the correlation between the process parameters and the parameters of the angular distribution shows how sensitively different deviations in the process can be detected, e.g. when the

关键词： correlation analysis inline metrology roughness scattering light

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