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Investigation of Co/TaN bilayer as Cu diffusion barrier

Investigation of Co/TaN bilayer as Cu diffusion barrier

引用

2010 10th IEEE International Conference on Solid-state and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

作者： Hai-Sheng Lu Shao-Fcng Ding Guo-Ping Ru Yu-Long Jiang Xin-Ping Qu State key lab of ASIC and system Department of microelectronics Fudan University Shanghai 200433 China

ISBN: (纸本)9781424457977

The diffusion barrier properties of Co/TaN bilayer as Cu adhesion layer/diffusion barrier on the Si and low k (k=2.5) substrates were investigated. The barrier was prepared by using ion-beam sputtering technique. The barrier property was investigated by sheet resistance, X-ray diffraction (XRD), and Auger electron spectroscopy (AES) and electrical measurements. No obvious Cu diffusion and agglomeration was observed after annealing at 500℃ for 30 min. Results show that Co/TaN has a good potential as cost effective adhesion/diffusion stack in copper metallization.

关键词： Copper Annealing Silicon Resistance Adhesives X-ray scattering Temperature measurement

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An Analytic Threshold Voltage Model for the Double-Gate Schottky-Barrier Source/Drain MOSFETs

An Analytic Threshold Voltage Model for the Double-Gate Scho...

引用

2010 10th IEEE International Conference on Solid-state and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

作者： Peicheng Li Guangxi Hu Guanghui Mei Ran Liu Yi Jiang Tingao Tang ASIC & System State Key Lab School of Microelectronics Fudan University Shanghai 200433 China

ISBN: (纸本)9781424457977

The threshold voltage, Vth of a double-gate SchottkyBarrier (DGSB) source/drain (S/D) metal-oxidesemiconductor field-effect transistor (MOSFET) has been investigated. An analytic expression for surface potential in the channel is obtained and the results are verified via simulations, good agreement is observed. A new definition for Vth is given, and an analytic expression for V,h is presented. We find that when the silicon thickness, tsi is small (<3 nm), V,h is very sensitive to it. Vth increases dramatically with the decreasing of tsi. Vth also increases with the increasing of the oxide thickness, and with the decreasing of the drain-so'irce voltage. These results can be of great help to the ultralargescale integrated-circuit (ULSI) designers.

关键词： threshold voltage double gate surface potential metal-oxide-semiconductor field effect transistors VOLTAGE Very large scale integration

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A Novel Vector/SIMD Multiply-Accumulate Unit based on Reconfigurable Booth Array

A Novel Vector/SIMD Multiply-Accumulate Unit based on Reconf...

引用

2010 10th IEEE International Conference on Solid-state and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

作者： Heng Quan Ruijin Xiao Kaidi You Xiaoyang Zeng Zhiyi Yu State Key Lab of ASIC and System Fudan University Shanghai 201203 P.R.China

This paper presents a 32-bit vector multiplyaccumulate (MAC) architecture capable of supporting multiple precisions. The vector MAC can perform one 32x32, one 32x16, two 16x16, four 8×8 bit signed/unsigned multiply-accumulate using Booth encoding algorithm and Wallace tree compressing. A reconfigurable Booth encoding array is implemented using 8×8 Booth unit as the basic element, and longer bit modes are obtained by combining these elements selectively. This MAC unit can also perform multiply between scalar and vector operands. 32-bit SIMD (Single Instruction Multiple Date) extended ISA (Instruction Set Architecture) and 3-stage pipeline are implemented for the MAC unit. The design is synthesized in 0.13μm SMIC technology under worst case condition, and the critical path of MAC is 2.5ns.

关键词： Encoding Arrays Pipelines Registers Digital signal processing Multimedia communication

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A Novel Multi-Core Processor for Communication Applications

A Novel Multi-Core Processor for Communication Applications

引用

2010 10th IEEE International Conference on Solid-state and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

作者： Ruijin Xiao Heng Quan Kaidi You Bei Huang Xiaoyang Zeng Zhiyi Yu State Key Lab of ASIC and System Fudan University Shanghai 201203 P.R.China

This paper proposes a novel multi-core processor with SIMD(Single Instruction Multiple Data) ISA (Instruction Set Architecture) and extended register file for communication applications. To acquire better parallel computing capability, we implement SIMD ISA and increase the number of register file from 32 to 64. 5×5 homogeneous 2-D mesh NoC (Network-onChip) topology is adopted to further enhance the parallelism, scalability and programmability. RS (Reed-Solomon) (255,239,8) decoding algorithm is implemented to evaluate the performance. Simulation result shows it could achieve 2.175 Gbps of throughput in worst case of RS 8-error incoming codeword under a maximum 350MHz clock frequency at SMIC 0.13um worst process corner, and the throughput is higher than other published implementations.

关键词： Registers Multicore processing Decoding Program processors Clocks Throughput Parallel processing

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FSK/ASK Re-modulation WDM-PON with Image Rejection Receiver

FSK/ASK Re-modulation WDM-PON with Image Rejection Receiver

引用

Asia Communications and Photonics Conference and Exhibition(2010亚洲光纤通信与光弹博览会及研讨会 ACP 2010)

作者： Yuan Fang Xiao Liu Xi Zheng Wuliang Fang Chunning Hou Yufeng Shao Nan Chi Department of Communication Science & Engineering State Key Lab of ASIC & System Fudan University Shanghai China

ISBN: (纸本)9780819485564

We propose FSK/ASK re-modulation WDM-PON with coherent receiver. Apparent BER improvement is obtained by utilizing FSK image rejection receiver, especially for long distance transmission. Parameters in image rejection receiver which affect the system performance are analyzed. Results show that the presented scheme is promising in super long reach access network.

关键词： Differential phase shift keying Heterodyne detection Optical access networks Passive optical networks Phase shift Signal processing

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An Area Efficient Architecture of Resisting Long Echo Channel Estimation for DTMB system

An Area Efficient Architecture of Resisting Long Echo Channe...

引用

2010 10th IEEE International Conference on Solid-state and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

作者： Yunlong Ge Xubin Chen Changsheng Zhou Yun Chen Yizhi Wang Xiaoyang Zeng State Key Lab of ASIC and System Fudan University Shanghai 201203 P.R.China

This paper proposed a VLSI architecture of resisting long echo channel estimation which is based on the algorithm proposed in [1]. FFT module reusing and clock gating are used in order to reduce the hardware complexity and power consumption. The synthesis results show that the area can be reduced to only 65.5％ of architecture in which FFT modules are not be reused. And the power can also be reduced a lot (the Design Compiler result shows that the power of the scheme can reduced to 29.6％ of that before optimization).

关键词： DTMB channel estimation long echo area efficient VLSI.

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A Fully Programmable Frame Synchronization Architecture of OFDM systems Implemented on a Multi-Core Processor Platform

A Fully Programmable Frame Synchronization Architecture of O...

引用

2010 10th IEEE International Conference on Solid-state and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

作者： Wenhua Fan Bei Huang Jialin Cao Yun Chen Zhiyi Yu Xiaoyang Zeng State Key Lab of ASIC and System Fudan University Shanghai 201203 P.R.China

This paper presents a fully programmable frame synchronization architecture of OFDM systems implemented on a multi-core processor platform. By utilizing the guard interval in OFDM signals, the coarse symbol synchronization (CSS) and the fractional carrier frequency offset estimation (CFO) are considered simultaneously. The multi-core processor platform is a 2-Dimension mesh array of SIMD (Single Instruction Multiple Data) cores, and is well suited for digital communication applications. By exploring the task-level parallelism on many cores, data-level parallelism on SIMD cores, minimization of memory access, and route-lengthminimized task mapping techniques, the implementation can achieve a throughput up to 224Mbps, which shows the great advantage of multi-core processor platform.

关键词： Multicore processing OFDM Synchronization Throughput Program processors Frequency estimation

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Design and simulation of a high resolution ultrasonic micro-transducer derived by LiNbO3

Design and simulation of a high resolution ultrasonic micro-...

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2010 10th IEEE International Conference on Solid-state and Integrated Circuit Technology

作者： Zhang, Jin-Ying Ji, Xin-Ming Xu, Wei-Jiang Carlier, Julien Nongaillard, Bertrand Huang, Yi-Ping ASIC and System State Key Lab Department of Microelectronics Fudan University Shanghai 200433 China Départment d'Opto-Acoustic-Electronique CNRS UMR 8520 Université de Valenciennes et du Hainaut Cambrésis France

ISBN: (纸本)9781424457984

A 100 MHz high resolution ultrasonic micro-transducer with a focal lens is designed for medical imaging based on monocrystalline lithium niobate (LiNbO3) 36°/Y-cut. Finite element analysis is used to characterize the impulse response of this transducer and the stationary wave propagation. The results show that the focal lens attributes a lot to the directivity and the resolution. The wave derived by LiNbO3 36°/Y-cut element demonstrates a better property compared with ZnO. The energy of transmitted wave at the focus is increased by 16.53% and 314.7% due to LiNbO3 and the matching layers, respectively. ©2010 IEEE.

关键词： Lithium compounds

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Coherent Detection of 40-Gb/s Optical Minimum-Shift keying Modulation

Coherent Detection of 40-Gb/s Optical Minimum-Shift Keying M...

引用

Asia Communications and Photonics Conference and Exhibition(2010亚洲光纤通信与光弹博览会及研讨会 ACP 2010)

作者： Li Tao Bo Huang Yufeng Shao Junwen Zhang Jiangbo Zhu Nan Chi Department of Communication Science and Engineering and State Key Lab of ASIC & System Fudan University Shanghai 200433 China

Optical minimum-shift keying exhibits a promising application for its high compact spectrum. In this paper, we propose a new heterodyne detection scheme to demodulate 40Gb/s MSK signal, compare it with the homodyne de... 详细信息

ISBN: (纸本)9780819485564

关键词： Heterodyne detection Homodyne detection Minimum shift keying Modulation techniques Phase noise Phase shift

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Study of IQ Imbalance in a Single-Side Band Radioover-Fiber system Based on OFDM-MSK Modulation

Study of IQ Imbalance in a Single-Side Band Radioover-Fiber ...

引用

Asia Communications and Photonics Conference and Exhibition(2010亚洲光纤通信与光弹博览会及研讨会 ACP 2010)

作者： Xinying Li Yufeng Shao Wuliang Fang Bo Huang Junwen Zhang Shumin Zou Chunning Hou Nan Chi Department of Communication Science and Engineering State Key Lab of ASIC & System Fudan University Shanghai 200433 China

We propose a single-side band (SSB) Radio-over-Fiber (RoF) system based on OFDM-MSK modulation. Inphase/quadrature-phase (IQ) imbalance effect can significantly degrade the system performance. In order to obtain a better system performance, at the transmitter, the phase departure tolerance should be within 1 degree and the amplitude departure tolerance within 5% in the electrical domain, while in the optical domain, 10 degrees and 40%, respectively. At the receiver, the phase departure tolerance should be within 2 degrees and the amplitude departure tolerance within 10%.

关键词： Optical transmitters Optical receivers Optical fibers Optical modulation Passive optical networks

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