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Proposal of a novel peeling of nano-particle (PNP) process for localized material removal on a hard material surface by controllable magnetic fields 22

Proposal of a novel peeling of nano-particle (PNP) process f...

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22nd International Conference of the European Society for Precision engineering and Nanotechnology, EUSPEN 2022

作者： Permpatdechakul, Thitipat Khajornrungruang, Panart Suzuki, Keisuke Kutomi, Shotaro Graduate School of Computer Science and System Engineering Mechanical Information Science and Technology Course Kyushu Institute of Technology Fukuoka Japan Department of Intelligent and Control Systems Avanced Mechanical Division Kyushu Institute of Technology Fukuoka Japan School of Computer Science and System Engineering Advanced Mechanical Course Kyushu Institute of Technology Fukuoka Japan

ISBN: (纸本)9781998999118

This article proposes a novel Peeling of Nano-Particle (PNP) process to locally remove material on a hard material surface using controllable magnetic fields. Fe3O4 particles in the size range of 50-100 nm in aqueous solution (pH value 11 adjusted by KOH) were magnetically controlled to adhere and remove from a 4H-SiC surface by two electromagnetic coils, which were sandwiched between the substrate. The particle controlling phenomenon on the surface was experimentally observed and verified by our developed apparatus applying an evanescent field. According to the results, particles could be controlled to approach and remove from the substrate surface with 12mT of magnetic field at the selective area on the substrate surface to realise the proposed PNP process. © European Society for Precision engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. All rights reserved.

关键词： Magnetic fields

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Absolute longitudinal distance measurement verification of a standard polystyrene nanoparticle near a surface in water by means of multi-wavelength evanescent field 22

Absolute longitudinal distance measurement verification of a...

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22nd International Conference of the European Society for Precision engineering and Nanotechnology, EUSPEN 2022

作者： Blattler, Aran Khajornrungruang, Panart Suzuki, Keisuke Baba, Akiyoshi Goto, Daiki Graduate School of Computer Science and System Engineering Mechanical Information Science and Technology Course Kyushu Institute of Technology Fukuoka Japan Department of Intelligent and Control Systems Advanced Mechanical Division Kyushu Institute of Technology Fukuoka Japan Center of Microelectronic System Kyushu Institute of Technology Fukuoka Japan School of Computer Science and System Engineering Advanced Mechanical Course Kyushu Institute of Technology Fukuoka Japan

ISBN: (纸本)9781998999118

In the wet semiconductor process, abrasive nanoparticles are widely used in the chemical mechanical polishing (CMP) process to polish wafer surfaces for high planarization. During polishing, nanoparticles move with a high-speed three-dimensional (3D) position in the solution. In the 3D particles's moving positions, Z is a perpendicular longitudinal distance between the surface to the nanoparticle that plays a significant role in polishing, which could not be measured by general microscopy without longitudinal scanning. To understand nanoparticle phenomena near-surface, we have proposed and developed the apparatus with real-time fastmotion tracking on optical multi-wavelength evanescent fields microscopy to measure the 3D motion of the nanoparticle in water without scanning. In euspen's 2020, we could verify the relative distance ?Z of nanoparticles in water, but the absolute distance Z is unknown yet. In this manuscript, we have therefore developed an invisible nano-step height in water to verify the absolute height Z of an individual nanoparticle. The invisible nano-step height in water is made from an optical resin with a refractive index of 1.35 that is close to a refractive index of water to avoid unnecessary light during experimental verification. The nano-step height was less than 100 nm on a glass surface, fabricated using nanoimprint lithography. Polystyrene f100 nm standard particles in water were used to verify the height Z. The results of height Z of nanoparticles could be measured less than 100 nm with the measurement uncertainty ±10 nm (2s), which is related to the interferometer result of the nano-step height. © European Society for Precision engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. All rights reserved.

关键词： Nanoparticles

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Optical Evanescent Field for Direct Observation of Sub-100nm Particle Motion on Glass Surface 1

Optical Evanescent Field for Direct Observation of Sub-100nm...

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1st International Conference on Robotics, engineering, Science, and Technology, RESTCON 2024

作者： Khajornrungruang, Panart Permpatdechakul, Thitipat Suzuki, Keisuke Blattler, Aran Terayama, Yutaka Goto, Daiki Phaisalpanumas, Pipat Bun-Athuek, Natthaphon Phunopas, Amornphun Kyushu Institute of Technology Iizuka-Shi Mechanical Science and Technology Division Dept. of Intelligent and Control System Faculty of Computer Science and Systems Engineering Fukuoka Japan Kyushu Institute of Technology Iizuka-Shi Mechanical Information Science and Technology Division Dept. of Interdisciplinary Informatics Graduate School of Computer Science and Systems Engineering Fukuoka Japan King Mongkut's University of Technology North Bangkok Bangsue Faculty of Engineering Dept. of Production and Robotics Engineering Bangkok Thailand Kyushu Institute of Technology Iizuka-Shi Mechanical Science and Technology Course Dept. of Intelligent and Control System Graduate School of Computer Science and Systems Engineering Fukuoka Japan King Mongkut's University of Technology North Bangkok Bangsue Faculty of Engineering Dept. of Industiral Engineering Bangkok Thailand King Mongkut's University of Technology North Bangkok Bangsue College of Industrial Technology Dept. of Mechanical Engineering Technology Bangkok Thailand

ISBN: (纸本)9798350348842

To directly investigate the dynamic nanoscale phenomenon on the surface being processed in wet conditions such as precision polishing, and cleaning in semiconductor industrial, an optical method for visualization and observation of each sub-100 nm sized particle that is moving on an interface such as a silica glass surface by applying an evanescent field have been proposing. Subsequently, we developed an experimental apparatus equipped with an optical microscopy system for verifying the moving particle observation method in a laboratory scale. This article introduces some experimentally direct observation results of duplicated wet processes. © 2024 IEEE.

关键词： Visualization

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Optical Evanescent Field for Direct Observation of Sub-100nm Particle Motion on Glass Surface

Optical Evanescent Field for Direct Observation of Sub-100nm...

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Robotics, engineering, Science, and Technology (RESTCON), International Conference on

作者： Panart Khajornrungruang Thitipat Permpatdechakul Keisuke Suzuki Aran Blattler Yutaka Terayama Daiki Goto Pipat Phaisalpanumas Natthaphon Bun-Athuek Amornphun Phunopas Dept. of Intelligent and Control System Faculty of Computer Science and Systems Engineering Mechanical Science and Technology Division Kyushu Institute of Technology Iizuka-Shi Fukuoka Japan Dept. of Interdisciplinary Informatics Graduate School of Computer Science and Systems Engineering Mechanical Information Science and Technology Division Kyushu Institute of Technology Iizuka-Shi Fukuoka Japan Dept. of Production and Robotics Engineering Faculty of Engineering King Mongkut’s University of Technology North Bangkok Bangsue Bangkok Thailand Dept. of Intelligent and Control System Graduate School of Computer Science and Systems Engineering Mechanical Science and Technology Course Kyushu Institute of Technology Iizuka-Shi Fukuoka Japan Dept. of Industiral Engineering Faculty of Engineering King Mongkut’s University of Technology North Bangkok Bangsue Bangkok Thailand Dept. of Mechanical Engineering Technology College of Industrial Technology King Mongkut’s University of Technology North Bangkok Bangsue Bangkok Thailand

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An Iterative Method for a Frequency Domain PID Controller Synthesis

An Iterative Method for a Frequency Domain PID Controller Sy...

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SICE Annual Conference

作者： Kenjiro Minamikawa Yasushi Kami Eitaku Nobuyama Atsushi Hosokawa Department of Mechanical and Electronic System Engineering Advanced Course of National Institute of Technology Akashi College Hyogo Japan Department of Electrical Systems Engineering Hiroshima Institute of Technology Hiroshima Japan Department of Intelligent and Control Systems Kyushu Institute of Technology Fukuoka Japan Department of Electrical and Computer Engineering National Institute of Technology Akashi College Hyogo Japan

This study is concerned with a control system design method with frequency response data named a finite number of frequency responses(an FNFR) model. In this paper a numerical descent direction is introduced and an iterative method for solving control problems formulated with the FNFR model is proposed with the descent direction. One feature of our approach is to update controller variables so that they approach to a feasible region of considering control problems from the outside. The efficiency of our method is shown by numerical examples.

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Application of quaternion neural network to EMG-based estimation of forearm motion

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2017 International Conference on Artificial Intelligence, ICAI 2017 at 2017 World Congress in computer Science, computer engineering and Applied Computing, CSCE 2017

作者： Firdaus, H. Ogawa, T. Mechanical and Electronic Systems Engineering Course Takushoku University Tokyo Japan Department of Electronics and Computer System Takushoku University Tokyo Japan

ISBN: (纸本)9781601324603

This paper presents the Application of Quaternion Neural Network (QNN) to Electromyography (EMG) based Estimation of Forearm Motion. Motion of human body can be modeled as a set of rotations in three-dimensional space by various joints. The aim of this research is to show the efficiency of QNN in estimation from EMG. We are trying to learn, estimate and simulate combined motion using QNN as well as comparing the estimation efficiency with the feedforward neural network (FNN). We are measuring EMG signal of target muscles while performing basic forearm motion. The efficiency of the estimation then determines by simulation with combine motion of forearm. It is expected in better performance of estimation in QNN compare to FNN. CSREA Press ©.

关键词： Efficiency

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Uniaxial stretch-induced axonal injury thresholds for axonal dysfunction and disruption and strain rate effects on thresholds for mouse neuronal stem cells

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Journal of Biomechanical Science and engineering 2017年第1期12卷 16-00598-16-00598页

作者： Kurtoglu, Evrim Nakadate, Hiromichi Kikuta, Kazuhiro Aomura, Shigeru Kakuta, Akira Graduate School of System Design Tokyo Metropolitan University Tokyo Japan Advanced Course of Mechanical and Computer Systems Engineering Tokyo National College of Technology 1220-2 Kunugida-machi Hachioji-shi Tokyo193-0997 Japan

In this paper, the proposed study aims to achieve a better understanding of neuronal tolerance and contribute to the prediction of the secondary degeneration of diffuse axonal injury (DAI). Therefore, a uniaxial stretching device which subjected cultured neurons to uniaxial stretch was employed to evaluate the effect of strain and strain rate along axon to realize the injury threshold. Neurons differentiated from mouse neuronal stem cells were injured and the morphology was observed before and after stretching with strains of 0.10, 0.12, 0.18, 0.23 at strain rates of 8, 11, 19, 26 s-1 respectively. Results suggest that the threshold for axonal dysfunction is around 0.18 strain whereas the threshold for axonal disruption is around 0.23 and the results of strain rate effect investigations on axonal dysfunction and disruption around these threshold values indicated that higher strain rate values such as 50 s-1 may have diminishing effects on threshold for axonal disruption. © 2017 The Japan Society of mechanical Engineers.

关键词： Stem cells

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A Two-Step Fault Diagnosis Framework for Rolling Element Bearings with Imbalanced Data

A Two-Step Fault Diagnosis Framework for Rolling Element Bea...

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2016 13th International Conference on Ubiquitous Robots and Ambient Intelligence (URAI)

作者： Yuan Lan Weiwei Zong Xiaojian Ding Xiaoyan Xiong Xiaohang Han Jiahai Huang Bing Ma Key Laboratory of Ministry of Education in Advance Transducers and Intelligent Control System Institute of Mechatronics Engineering under School of Mechanical EngineeringTaiyuan University of Technology Department of Computer Science Wayne State University Science and Technology on Information Systems Engineering Laboratory The Second Research Institute of China Electronic Technology Group Corporation

Rolling element bearings constitute the key parts on rotating machinery and their fault diagnosis are of great importance. In this paper, a novel Two-Step fault diagnosis framework is proposed to diagnose the status of rolling element bearings with imbalanced data. The Wavelet Packet Transform(WPT) is used to determine the feature vectors. 16-dimensional wavelet packet node energies were extracted from the original datasets as the feature vectors prepared to input to the ***, our proposed framework consists of two steps for the fault diagnosis, where Step One makes use of Weighted Extreme Learning Machine(weighted ELM) in an effort to classify the normal or abnormal categories, and Step Two further diagnoses the underlying anomaly in details. The effectiveness of our proposed approach is testified on the raw data collected from the rolling element bearing experiments conducted in our Institute,and the empirical results showed that our approach is really fast and can achieve the diagnosis accuracies more than 95%.

关键词： Two-Step fault diagnosis framework Weighed ELM ELM Bearing fault diagnosis

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A Two-Step Fault Diagnosis Framework for Rolling Element Bearings with Imbalanced Data

A Two-Step Fault Diagnosis Framework for Rolling Element Bea...

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International Conference on Ubiquitous Robots and Ambient Intelligence

作者： Yuan Lan Weiwei Zong Xiaojian Ding Xiaoyan Xiong Xiaohang Han Jiahai Huang Bing Ma Key Laboratory of Ministry of Education in Advance Transducers and Intelligent Control System Institute of Mechatronics Engineering under School of Mechanical Engineering Taiyuan University of Technology Department of Computer Science Wayne State University Science and Technology on Information Systems Engineering Laboratory The Second Research Institute of China Electronic Technology Group Corporation

ISBN: (纸本)9781509008223

Rolling element bearings constitute the key parts on rotating machinery and their fault diagnosis are of great importance. In this paper, a novel Two-Step fault diagnosis framework is proposed to diagnose the status of rolling element bearings with imbalanced data. The Wavelet Packet Transform (WPT) is used to determine the feature vectors. 16-dimensional wavelet packet node energies were extracted from the original datasets as the feature vectors prepared to input to the classifiers. Next, our proposed framework consists of two steps for the fault diagnosis, where Step One makes use of Weighted Extreme Learning Machine (weighted ELM) in an effort to classify the normal or abnormal categories, and Step Two further diagnoses the underlying anomaly in details. The effectiveness of our proposed approach is testified on the raw data collected from the rolling element bearing experiments conducted in our Institute, and the empirical results showed that our approach is really fast and can achieve the diagnosis accuracies more than 95%.

关键词： Two-Step fault diagnosis framework Weighed ELM ELM Bearing fault diagnosis

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Integration of feature of vein detection and needle puncture control for blood collection assistance system

Transactions of Japanese Society for Medical and Biological ...

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Transactions of Japanese Society for Medical and Biological engineering 2014年 52卷 O-488-O-489页

作者： Tsunoda, Hirohide Hosokawa, Sho Saito, Hirokazu Advance Course of Mechanical and Computer System Engineering Tokyo National College of Technology Japan Department of Mechanical Engineering Tokyo National College of Technology Japan

The purpose of this study is development a blood collection assistance system for accident prevention. In the past studies, a vein detection system by using absorbance of the hemoglobin and a needle puncture system by using the peak detection of puncture force and the blood detection by electrode were individually developed. In this study, the each system were integrated to assist the series of blood collection procedure. The needle position was calibrated by using infrared (IR) markers monitored via IR camera. The accuracy of the positioning was within 0.4mm of the error to a blood vessel model of 0.4mm diameter. The blood collection assistance system could perform the series of blood collection procedure such as positioning the needle tip to blood vessel, needle puncturing and stop. © 2014, Japan Soc. of Med. Electronics and Biol. engineering. All rights reserved.

关键词： Needles

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