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Nanoscale fabrication in aqueous KOH solution using tribo-nanolithography

Journal of Vacuum Science and technology B: Microelectronics and Nanometer Structures 2005年第6期23卷 2471-2475页

作者： Kawasegi, Noritaka Park, Jeong Woo Morita, Noboru Yamada, Shigeru Takano, Noboru Oyama, Tatsuo Ashida, Kiwamu Graduate School of Science and Engineering Toyama University 3190 Gofuku Toyama 930-8555 Japan Engineering Research Center Pusan National University 30 Jangjeon-dong Geumjeong-gu Busan 609-735 Korea Republic of Department of Mechanical and Intellectual Systems Engineering Toyama University 3190 Gofuku Toyama 930-8555 Japan Advanced Manufacturing Research Institute National Institute of Advanced Industrial Science and Technology 1-2-1 Namiki Tsukuba Ibaraki 305-8564 Japan

A simple process to fabricate a three-dimensional structure on silicon surface was developed by using tribo-nanolithography (TNL) in an aqueous KOH solution. An inclined rectangular structure can be fabricated by a process where a thin amorphous layer, having corrosion resistance against KOH, rapidly forms on the substrate at the diamond tip sample junction along the scanning pass of the tip, while simultaneously, the area not covered with the amorphous layer is being etched in KOH. An inclination of structure can be controlled by the scanning velocity. The scanning pitch is related to the corrosion resistance of the amorphous layer, rather than the change of inclination. We fabricated a structure having multiple inclinations based on these results, which indicates the possibility of using the TNL for three-dimensional nanofabrication. © 2005 American Vacuum Society.

关键词： Nanotechnology

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Dexterous micromanipulation supporting cell and tissue engineering

Dexterous micromanipulation supporting cell and tissue engin...

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2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Program

作者： Inoue, Kenji Arai, Tatsuo Tanikawa, Tamio Ohba, Kohtaro Department of Systems Innovation Graduate School of Engineering Science Osaka University 1-3 Machikaneyama Toyonaka Osaka 560-8531 Japan Intelligent Systems Research Institute National Institute of Advanced Industrial Science and Technology Tsukuba Central 2 1-1-1 Umezono Tsukuba Ibaraki 305-8568 Japan

ISBN: (纸本)0780394828

A dexterous micromanipulation system consisting of a two-fingered micro hand, an auto-focusing optical microscope, an image processing system and user interfaces has been developed. The micro hand has 6 DOF: 3 DOF for each of two fingers. These fingers work just like thumb and forefinger. Thus this hand can grasp, move, rotate and release micro objects. A human operator can operate this hand using a joystick or a keyboard, while seeing the microscope image displayed on a TV monitor. The developed system enables automated recognition and handling of micro objects. The microscope focuses on a micro object automatically and detects its position in depth. The image processing system recognizes the object and measures its position on the focal plane. Then, while tracking the micro object in 3D space, the micro hand follows and captures the object automatically. Using an atomic force microscope (AFM) and this micro hand, the mechanical properties of living cells have been measured. A real-time micro VR camera system which generates 3D virtual model of micro environment has been also developed.

关键词： Micromanipulators

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Eco-efficiency of advanced loop-closing systems for vehicles and household appliances in Hyogo Eco-town

Eco-efficiency of advanced loop-closing systems for vehicles...

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作者： Morioka, Tohru Tsunemi, Kiyotaka Yamamoto, Yugo Yabar, Helmut Yoshida, Noboru Division of Sustainable Energy and Environmental Engineering Graduate School of Engineering Osaka University 2-1 Yamadaoka Suita Osaka 565-0871 Japan Division of Sustainable Energy and Environmental Engineering Graduate School of Engineering Osaka University Japan Osaka University National Institute of Advanced Industrial Science and Technology Japan Department of Environmental Systems Faculty of Systems Engineering Wakayama University Wakayama Japan

The closing of material loops is a critical challenge in industrial ecology. It relies mainly on the utilization of recovered materials/ parts/products in the original and principal production system while their original function is retained at the highest level possible. In this study, advanced loop-closing systems for the recycling of end-of-life vehicles and electric household appliances are first designed in "Hyogo Eco-town." Second, a methodology for evaluating the eco-efficiency of these systems is developed. Finally, the eco-efficiency of the designed advanced loop-closing strategies for the two products is evaluated, based on the results of materials flow analysis and life-cycle assessment. The results show that, compared with conventional recycling systems, when an industrial complex and an advanced loop-closing system for end-of-life vehicles are established, the total economic value increases by 114% and the eco-efficiency in terms of the amount of direct material input is improved by 57%. This system permits the utilization of the by-products, wastes, and recovered materials that originate from other industrial sectors as input to production activities. In the case of end-of-life electric household appliances, an advanced loop-closing strategy to lengthen the product life with parts reuse improves the eco-efficiency in terms of carbon dioxide (CO2) emissions by 4% compared with the conventional replacement of the appliance with a new product along with the material recycling option. © 2005 by the Massachusetts institute of technology and Yale University.

关键词： Environmental engineering

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Characteristic comparison of epitaxial PZT and PMN-PT films grown on (100)cSrRuO3//(100)SrTiO3 substrates by metalorganic chemical vapor deposition

Characteristic comparison of epitaxial PZT and PMN-PT films ...

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2005 MRS Fall Meeting

作者： Yokoyama, Shintaro Okamoto, Satoshi Saito, Keisuke Iijima, Takashi Okino, Hirotake Yamamoto, Takashi Nishida, Ken Katoda, Takashi Sakai, Joe Funakubo, Hiroshi Department of Innovative and Engineered Materials Tokyo Institute of Technology Yokohama 226-8502 Japan Application Laboratory Bruker AXS Yokohama 221-0022 Japan Research Institute of Instrumentation Frontier National Institute of Advanced Industrial Science and Technology Tsukuba 305-8568 Japan Department of Communications Engineering National Defense Academy Yokosuka 239-8686 Japan Department of Electronic and Photonic Systems Engineering Kouchi University of Technology Kouchi 782-8502 Japan Ishikawa 923-1292 Japan

ISBN: (纸本)155899856X

We grew the epitaxial Pb(Zr1-xTix)O3 [PZT] and (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 [PMN-PT] films, above 2 μm in thickness, on (100)cSrRuO 3//(100)SiTiO3 substrates by metalorganic chemical vapor deposition (MOCVD), PbTiO3 content (x) dependencies of the crystal structure, dielectric and piezoelectric properties were systematically investigated for these films. The constituent phase changed from a rhombohedral (pseudocubic) single phase, a mixture phase of rhombohedral (pseudocubic) and tctragonal phases, and a tetragonal single phase with increasing x for both of PZT and PMN-PT films. The mixture phase region was observed when x=0.40-0.60 for PZT films and x=0.40-0.55 for PMN-PT films, which became wider than that reported ones for PZT sintered bodies and PMN-PT single crystals. In addition, x value moves to the higher one than that reported for the single crystal and/or the sintered body in case of PMN-PT films, while was almost the same in case of PZT films. The dependence of relative dielectric constant Εr was maximum at the mixed phase region for both films, which were similar to the case of their bulk materials. The higher value of Εr was ascertained for the PMN-PT films compared with PZT films, however, the magnitude was lower than the reported one for bulk materials. The longitudinal electric-field-induced strain Δ33 and transverse piezoelectric coefficient e31f for PZT films were also maximum at the mixed phase region, on the other hand, that for PMN-PT films were maximum at larger x edge of rhombohedral (pseudocubic) region, Almost the same order of Δx 33 was observed under applied electric fields up to 100 kV/cm, while larger e31f was observed in PMN-PT films compared with the case of PZT films. e31fcoefficients of - 8.9 C/m2 and -11.0 C/m2 were calculated for the PZT film with x=0.46 and for the PMN-PT film with x=0.39, respectively. © 2006 Materials Research Society.

关键词： Epitaxial films

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Steering control of the personal riding-type wheeled mobile platform (PMP)

Steering control of the personal riding-type wheeled mobile ...

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2005 IEEE/RSJ International Conference on Intelligent Robots and systems

作者： M. Sasaki N. Yanagihara O. Matsumoto K. Komoriya Faculty of Engineering Tamagawa University Machida Tokyo Japan Intelligent Systems Institute National Institute for Advanced Industrial Science and Technology Tsukuba Japan

This paper reports on the continued development of a new concept for a personal vehicle called the 'personal riding-type wheeled mobile platform (PMP)' that consists of two wheels and a standing base for a human rider. The two wheels are driven independently, and forward and backward movement and steering are achieved by simply changing the relative position of the rider's center of gravity (COG) on the base. The vehicle has two distinct advantages: a reduction in total weight through its simple structure and a space-saving design that does not use a steering unit. We have already proposed the first prototype (PMP-1) and its posture stabilizing and running control methods, and we have achieved proper forward and backward movement according to the rider's intentions. This paper describes our proposed structure for detecting the rider's COG on the base and the steering control method in order to achieve steering control by changing the position of the rider's COG and the second prototype (PMP-2) whose weight is smaller than 12kg. We also investigated the steering control method to improve maneuverability in various estimated standing poses. Our experimental results demonstrate that natural steering control can be achieved using the rider's COG based on the rider's intentions.

关键词： Portable media players Wheels Lighting control Humans Prototypes Control systems Gravity Space vehicles Land vehicles Road vehicles

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Tsunami monitoring system by stratospheric LTA platform

Tsunami monitoring system by stratospheric LTA platform

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AIAA 5th Aviation technology, Integration, and Operations Conference, ATIO and the AIAA 16th Lighter-than-Air systems technology Conference and Balloon systems Conference

作者： Koyama, Noboru Onda, Masahiko Sasaki, Yasunori Miura, Ryu Akinaga, Wakoto International Meteorological and Oceanographic Consultant Co. Ltd. Tokyo Japan National Institute of Advanced Industrial Science and Technology Tsukuba Ibaragi Japan National Defense Academy Yokosuka Kanagawa Japan National Institute of Information and Communications Technology Yokosuka Kanagawa Japan NEC Toshiba Space Systems Co. Ltd. Tokyo Japan Engineering Division Intelligent Systems Research Institute AIAA Department of Earth and Ocean Sciences Wireless Innovation System Group Sales and Marketing Division

ISBN: (纸本)1563477408

Tsunamis break out due to an oceanic earthquake or landslide and are propagated to far distant coasts at a very high speed resulting in serious damages to the coastal populations. This paper proposes a full-fledged advanced tsunami monitoring system which detects outbreaks of tsunamis and immediately disseminates alarm signals directly to the coastal populations from stationary LTA (Lighter-Than-Air) platforms positioned in the stratosphere over undersea epicenter areas. These platforms could also be used for other missions such as local weather observation, naval traffic monitoring etc., thus could be operated more economically than conventional tsunami monitoring and warning systems. Copyright © 2005 by the American institute of Aeronautics and Astronautics, Inc. All rights reserved.

关键词： Tsunamis

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Intravascular shear stress imaging based on ultrasonic velocity vector measurement

Intravascular shear stress imaging based on ultrasonic veloc...

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IEEE Symposium (IUS) Ultrasonics

作者： N. Nitta K. Homma T. Shiina National Institute for Advanced Industrial Science and Technology Tsukuba Japan Graduate School of Systems and Information Engineering University of Tsukuba Tsukuba Japan

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On friction picking up a piece of fabric from layers

On friction picking up a piece of fabric from layers

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IEEE International Conference on Mechatronics and Automation

作者： E. Ono K. Kitagaki M. Kakikura Intelligent Systems Research Institute National Institute for Advanced Industrial Science and Technology Tsukuba Japan Department of Electronic Engineering Tokyo Denki University Japan

This paper investigates picking up a piece of fabric that is a limp material with softness and flexibility. Fabric is characterized by its non-linear properties and intricate factors of deformation. A robot hand for fabric is developed and tried to pick up a piece of fabric from layers experimentally. Relationships between its successful behavior and fabric properties are considered.

关键词： Friction Fabrics Service robots Fingers Humans Textile industry Shape Intelligent systems industrial electronics Electronics industry

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Distributed self-reconfiguration control of modular robot M-TRAN

Distributed self-reconfiguration control of modular robot M-...

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IEEE International Conference on Mechatronics and Automation

作者： H. Kurokawa K. Tomita A. Kamimura E. Yoshida S. Kokaji S. Murata Intelligent Systems Research Institute National Institute for Advanced Industrial Science and Technology Tsukuba Ibaraki Japan Interdiciplinary Graduate School of Science and Engineering Tokyo Institute of Technology Yokohama Japan

Geometric self-reconfiguration sequences and a distributed control method are developed for the modular robot M-TRAN. Large scale self-reconfiguration contains several clusters of modules moving in parallel. A decentralized and asynchronous control is suitable for such a task. A multi thread type simulation program was developed to design and verify such self-reconfiguration sequences. A distributed controller system was developed for the new M-TRAN hardware, which can realize decentralized and asynchronous control of modules. Its basic functions were verified by experiments.

关键词： Distributed control Robot control Hardware Control systems Intelligent robots Service robots Centralized control Kinematics Prototypes Communication system control

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Distributed controller for cooperative joint torque control of compact humanoid robots

Distributed controller for cooperative joint torque control ...

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IEEE-RAS International Conference on Humanoid Robots

作者： N. Tomokuni M. Saiga T. Yabuta Intelligent Systems Research Institute Advanced Industrial Science and Technology Tsukuba Ibaraki Japan Department of Mechanical Engineering Yokohama National University Yokohama Japan

This paper describes the design issues of distributed control system for compact humanoid robots. First, structure of distributed servo controller is proposed which is connected to a real-time serial interface. This servo-controller system has torque control function by improving a servocontroller of a conventional radio-control servomechanism. By use of this proposed distributed controller, a compact humanoid robot with 22 degrees of freedom is made which has compliance control function. Experimental results give good evidence of the proposed distributed controller architecture

关键词： Torque control Distributed control Humanoid robots Servomechanisms Communication system control Control systems Radio control Robot control Force control Mechanical engineering

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