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advanced Patterning Solutions (IWAPS), International Workshop on

作者： Yuguang Chen Sikun Li Jianfang He Libin Zhang Weijie Shi Ming Tang Yayi Wei Xiangzhao Wang Laboratory of Information Optics and Opto-Electronic Technology Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Science Shanghai China School of Optical and Electronic Information Huazhong University of Science and Technology Wuhan China Laboratory of Information Optics and Opto-Electronic Technology Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing China Integrated Circuit Advanced Process R&D Center Institute of Microelectronics Chinese Academy of Sciences Beijing China Dongfang Jingyuan Electron Limited Beijing China Wuhan National Laboratory for Optoelectronics (WNLO) & National Engineering Laboratory for Next Generation Internet Access System School of Optical and Electronic Information Huazhong University of Science and Technology Wuhan China Laboratory of Information Optics and Opto-Electronic Technology Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai China Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing China

ISBN: (纸本)9781665420808

A scanner matching method based on interior-point BFGS algorithm is proposed. This method minimizes the critical dimension (Cd) differences by optimizing parameters of illumination sources, including inner partial coherence factor, outer partial coherence factor, numerical aperture and opening angle of illumination poles for dipole and quadrupole sources. Simulations of scanner matching are performed. Scanners with annular, dipole and quadrupole sources are matched in the simulations. Through-pitch Line/space patterns are used as the matching targets. The results of these simulations show that, the proposed method can reduce root-mean-square of Cd differences after matching. In the majority of the simulation cases, the proposed method is faster than methods based on the Levenberg-Marquardt algorithm, and could even achieve better result. Analyses on the proposed method are given.

关键词： Simulation Lighting Optimization methods Coherence Stability analysis Numerical models Pattern matching

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The forefront of chemical engineering research

Nature Chemical Engineering

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Nature Chemical Engineering 2024年第1期1卷 18-27页

作者： Laura Torrente-Murciano Jennifer B. dunn Panagiotis d. Christofides Jay d. Keasling Sharon C. Glotzer Sang Yup Lee Kevin M. Van Geem Jean Tom Gaohong He Department of Chemical Engineering and Biotechnology University of Cambridge Cambridge UK Chemical and Biological Engineering Center for Engineering Sustainability and Resilience Northwestern University Evanston IL USA Department of Chemical and Biomolecular Engineering University of California Los Angeles Los Angeles CA USA Department of Chemical & Biomolecular Engineering University of California Berkeley Berkeley CA USA Department of Bioengineering University of California Berkeley Berkeley CA USA California Institute of Quantitative Biosciences (QB3) University of California Berkeley Berkeley CA USA Division of Biological Systems and Engineering Lawrence Berkeley National Laboratory Berkeley CA USA Joint BioEnergy Institute Emeryville CA USA Center for Biosustainability Danish Technical University Lyngby Denmark Center for Synthetic Biochemistry Shenzhen Institutes for Advanced Technologies Shenzhen China Department of Chemical Engineering University of Michigan Ann Arbor MI USA Metabolic and Biomolecular Engineering National Research Laboratory Systems Metabolic Engineering and Systems Healthcare Cross-Generation Collaborative Laboratory Department of Chemical and Biomolecular Engineering (BK21 four) BioProcess Engineering Research Center Korea Advanced Institute of Science and Technology (KAIST) Daejeon Republic of Korea Laboratory for Chemical Technology Department of Materials Textiles and Chemical Engineering Faculty of Engineering and Architecture Ghent University Ghent Belgium Chemical Process Development Global Product Development and Supply Bristol Myers Squibb New Brunswick NJ USA State Key Laboratory of Fine Chemicals R&D Center of Membrane Science and Technology School of Chemical Engineering Panjin Institute of Industrial Technology Liaoning Key Laboratory of Chemical Additive Synthesis and Separation Dalian University of Technology Dalian Liaoning China

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Frontispiz: Biological Nicotinamide Cofactor as a redox‐Active Motif for reversible Electrochemical Energy Storage

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Angewandte Chemie 2019年第47期131卷

作者： Jihyeon Kim Sunghyun Ko Chanwoo Noh Heechan Kim Sechan Lee dodam Kim Hyeokjun Park Giyun Kwon Giyeong Son Jong Wan Ko YounJoon Jung dongwhan Lee Chan Beum Park Kisuk Kang Department of Materials Science and Engineering Seoul National University 1 Gwanak-ro Gwanak-gu Seoul 08826 Republic of Korea Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology 335 Science Road Daejeon 305-701 Republic of Korea Department of Chemistry Seoul National University 1 Gwanak-ro Gwanak-gu Seoul 08826 Republic of Korea Advanced Forming Process R&D Group Korea Institute of Industrial Technology Republic of Korea

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Frontispiece: Biological Nicotinamide Cofactor as a redox-Active Motif for reversible Electrochemical Energy Storage

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Angewandte Chemie International Edition 2019年第47期58卷

作者： Jihyeon Kim Sunghyun Ko Chanwoo Noh Heechan Kim Sechan Lee dodam Kim Hyeokjun Park Giyun Kwon Giyeong Son dr. Jong Wan Ko Prof. dr. YounJoon Jung Prof. dr. dongwhan Lee Prof. dr. Chan Beum Park Prof. dr. Kisuk Kang Department of Materials Science and Engineering Seoul National University 1 Gwanak-ro Gwanak-gu Seoul 08826 Republic of Korea Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology 335 Science Road Daejeon 305-701 Republic of Korea Department of Chemistry Seoul National University 1 Gwanak-ro Gwanak-gu Seoul 08826 Republic of Korea Advanced Forming Process R&D Group Korea Institute of Industrial Technology Republic of Korea

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Biological Nicotinamide Cofactor as a redox‐Active Motif for reversible Electrochemical Energy Storage

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Angewandte Chemie 2019年第47期131卷

Nicotinamide adenine dinucleotide (NAd + ) is one of the most well‐known redox cofactors carrying electrons. Now, it is reported that the intrinsically charged NAd + motif can serve as an active electrode in electrochemical lithium cells. By anchoring the NAd + motif by the anion incorporation, redox activity of the NAd + is successfully implemented in conventional batteries, exhibiting the average voltage of 2.3 V. The operating voltage and capacity are tunable by altering the anchoring anion species without modifying the redox center itself. This work not only demonstrates the redox capability of NAd + , but also suggests that anchoring the charged molecules with anion incorporation is a viable new approach to exploit various charged biological cofactors in rechargeable battery systems.

关键词： Bioenergetik Cofaktoren Energiespeicherung Organische Elektroden redoxchemie

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Challenges in Skill-based Engineering of Industrial Automation Systems

Challenges in Skill-based Engineering of Industrial Automati...

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IEEE International Conference on Emerging Technologies and Factory Automation

作者： Somayeh Malakuti Jurgen Bock Michael Weser Pierre Venet Patrick Zimmermann Mathias Wiegand Julian Grothoff Constantin Wagner Andreas Bayha ABB Corporate Research Center Ladenburg Germany R&D Corporate Research KUKA Deutschland GmbH Augsburg Germany Digital Engineering Fraunhofer IGCV Augsburg Germany Advanced Product Engineering Festo AG & Co. KG Esslingen Germany Chair of Process Control Engineering RWTH Aachen University Aachen Germany Model-based Systems Engineering Fortiss GmbH Munich Germany

Skill-based engineering is gaining attention as a means to increase flexibility and changeability in engineering industrial automation systems. This paper proposes the Skill-based Engineering Model (SEM), which formally describes the core entities that play a role in skill-based engineering. Accordingly, we propose a four dimensional classification scheme for skills, and assess the suitability of a property model and OWL ontologies to describe and match skills. For each case, we identify a list of challenges that must be addressed to make skill-based engineering a reality in industrial automation systems. We believe that this paper can guide researchers to study various open aspects of skill-based engineering to make it feasible in complex industrial automation systems.

关键词： Skill Property Ontology PPr model Taxonomy

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FinFET Integration Issues and Potential Solutions:Threshold Voltage Adjustment,Punch-Through-Stopper,And Stress Enhancement

FinFET Integration Issues and Potential Solutions:Threshold ...

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Small is All, The Future of Nanotechnology——BIT’s 6th Annual World Congress of Nano Science & Technology-2016

作者： Huilong Zhu Miao Xu Xin Wei Yanbo Zhang IC Advanced Process R&D Center Institute of Microelectronics Chinese Academy of Sciences

FinFETs are widely used in chip *** the aggressively scaling down of transistor size,it is very challenged to obtain low power consumption and good *** this paper,some key issues,such as Vt roll-off,formation of punch-through-stopper layer(PTSL),and loss of stress enhancement,are *** solve the problems mentioned above,vertical halo implantation,charged PTSL,and stress recovering methods are introduced.

关键词： FinFET Integration Issues and Potential Solutions:Threshold Voltage Adjustment,Punch-Through-Stopper,And Stress Enhancement

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Effect of intermetallic compound thickness on anisotropy of Al/Cu honeycomb rods fabricated by hydrostatic extrusion process

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Transactions of Nonferrous Metals Society of China 2016年第2期26卷 456-463页

作者： Tae-hyuk LEE Moon-soo SIM Sin-hyeong JOO Kyoung-tae PArK Ha-guk JEONG Jong-hyeon LEE Graduate School of Department of Advanced Materials Engineering Chungnam National University Rapidly Solidified Materials Research Center Chungnam National University Graduate School of Energy Science & Technology Chungnam National University Rare Metal R&D Group Korea Institute of Industrial Technology Advanced Fusion Process R&D Group Korea Institute of Industrial Technology

The effect of intermetallic compound （IMC） thickness on the thermal and mechanical properties of Al/Cu honeycomb rods was investigated. The Al/Cu honeycomb rods were fabricated using repeated hydrostatic extrusions at 200 ℃. during the process, an IMC layer with 1μm in thickness was generated at the Al/Cu interface. different IMC thicknesses were obtained by post-heat treatment at 420 ℃ for 0.5 to 2 h. The IMC thickness increased to 10.1μm. The IMC layers were identified as Al2Cu （θ）, AlCu （η2）, and Al4Cu9（γ1） phases. The thermal conductivities in the longitudinal direction and cross direction decreased by 11.9% （（268±4.8） to （236±4.4） W/（m·K）） and 10.4% （（210±3.2） to （188±2.8） W/（m＆#183;K））, respectively, with increasing IMC thickness. The ultimate tensile strength and elongation of the Al/Cu honeycomb rod are （103±8.4） MPa and （73±6.2）%, respectively. The ultimate tensile strength increased to （131±6.5） MPa until the IMC thickness reached 7.7μm. It subsequently decreased to （124±3.9） MPa until the IMC thickness reached 10.1μm. The elongation of the Al/Cu honeycomb rod then sharply decreased to （29±2.5）% with increasing IMC thickness.

关键词： intermetallic compound Al/Cu honeycomb rod anisotropy thermal conductivity tensile strength hydrostatic extrusion

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Identification of kinematic hardening material parameters for martensitic steel sheets 1st

Identification of kinematic hardening material parameters fo...

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1st International Conference on Civil Engineering and Materials Science, ICCEMS 2016

作者： Song, J.H. Park, J.S. Lee, C.A. Kim, H.Y. Choi, W.H. Metal Forming R&D Group Research Institute of Advanced Manufacturing Technology Korea Institute of Industrial Technology 156 Gaetbeol-ro Yeonsu-Gu Incheon21999 Korea Republic of Department of Mechanical and Biomedical Engineering Kangwon National University 1 Kangwondaehak-gil Chuncheon-si Gangwon-do24341 Korea Republic of R&D Center Sewon Co. Ltd 54 Dalseodae-ro Dalseo-gu Daegu42702 Korea Republic of

ISBN: (纸本)9783038357483

The identification of the material models which are used in the finite element analysis for the forming operation and springback are very important in terms of accurate predictions. The aim of this paper is to characterize both the anisotropy and the hardening of the ultra-high strength steel such as martensitic steel (MS steel) in order to identify material parameters of constitutive equation, which able to reproduce the mechanical behavior. Uniaxial tensile tests were carried out for characterizing the anisotropic plastic behavior of the MS steel. Cyclic tests under tension-compression load were also carried out for characterizing the Bauschinger effect during reverse deformation. Yoshida-Uemori hardening model associated with orthotropic yield criterion Hill’s 1948 is used to represent the in-plane mechanical behavior of the martensitic steel. The resented results show a very good agreement between model predictions and experiments: flow stresses during loading and reverse loading are well reproduced. © 2016 Trans Tech Publications, Switzerland.

关键词： Anisotropy

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EBSd-based Analysis of the relation between Oxide Scale Microstructure and Pickling Characteristics of a Commercial Hot rolled Strip

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Microscopy and Microanalysis 2016年第S3期22卷 1940-1941页

作者： Gozde Karacali Kemal davut Eregli Iron and Steel Works Inc. Hot Rolled Products and Process R&D Dept. Eregli Zonguldak Turkey Atilim University Metal Forming Center of Excellence Incek Ankara Turkey Atilim University Department of Metallurgical and Materials Engineering Incek Ankara Turkey

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