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Vertical two-dimensional WS_(2)flakes grown on flexible CNT film for excellent electrochemical performance

Rare Metals 2024年第1期43卷 164-174页

作者： Qian Gong Jing-Yun Zou Ming Ren Si-Qi Zhu Yu-Rong Zhou Li-Ming Zhao Jian Chen Yu-Long Wu Jiang-Tao Di Li-Xing Kang Qing-Wen Li School of Nano-Tech and Nano-Bionics University of Science and Technology of ChinaHefei 230026China Key Laboratory of Multifunctional Nanomaterials and Smart Systems Division of Advanced MaterialsSuzhou Institute of Nano-Tech and Nano-BionicsChinese Academy of SciencesSuzhou 215123China Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application School of Physical Science and TechnologySuzhou University of Science and TechnologySuzhou 215009China

Soft electrochemical actuators that can generate mechanical motions in response to electrical stimuli can be used as artificial muscles in microscale *** electrode materials are the key component of the electrochemical actuator because they limit the ion diffusion and accumulation processes and thus affect the deformation in fast response-time and potential engineering ***-dimensional materials,such as one-dimensional(1D)CNT and two-dimensional(2D)vertically stood WS_(2),are great electrode due to their good electrochemical stability and high surface-to-volume ratios,but show limited performances when being used on their own in the actuators because of low reconstruction or low conductivity.A combination of 1D CNT and 2D WS_(2)could form a heterojunction with both high electrochemical activity and great mechanical ***,by depositing highly disordered graphene nanosheets(HDGNs)on CNT films and then WS_(2)on the formed low-dimensional nanocarbon film,a hybrid WS_(2)/HDGN/CNT film was synthesized through a multistep CVD *** grown WS_(2)nanosheets were achieved by taking advantage of HDGNs which limits CNTs ***,the volume expansion caused by the transition from WO_(3)to WS-2can force the vertical growth of WS_(2).This hybrid film shows excellent electrochemical properties,such as high specific capacitance and high rate *** actuators based on the WS_(2)/HDGN/CNT films show good actuating performance,including stability and reconfigurability.

关键词： CNT Graphene Vertically growth WS_(2) Electrochemical actuators

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A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement

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Frontiers of Mechanical Engineering 2023年第2期18卷 297-317页

作者： Wendi GAO Bian TIAN Cunlang LIU Yingbiao MI Chen JIA Libo ZHAO Tao LIU Nan ZHU Ping YANG Qijing LIN Zhuangde JIANG Dong SUN State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesOverseas Expertise Introduction Center for Micro/Nano Manufacturing and Nano Measurement Technologies Discipline InnovationXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemSchool of Mechanical EngineeringXi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265599China State Key Laboratory of Robotics and Systems(HIT) Harbin 150006China Beijing Advanced Innovation Center for Intelligent Robots and Systems Beijing Institute of TechnologyBeijing 100081China Department of Biomedical Engineering City University of Hong KongHong KongChina

Capacitive sensors are efficient tools for biophysical force measurement,which is essential for the exploration of cellular ***,attention has been rarely given on the influences of external mechanical and internal electrical interferences on capacitive *** this work,a bionic swallow structure design norm was developed for mechanical decoupling,and the influences of structural parameters on mechanical behavior were fully analyzed and optimized.A bionic feather comb distribution strategy and a portable readout circuit were proposed for eliminating electrostatic *** instability was evaluated,and electrostatic decoupling performance was verified on the basis of a novel measurement method utilizing four complementary comb arrays and applicationspecific integrated circuit *** electrostatic pulling experiment showed that the bionic swallow structure hardly moved by 0.770 nm,and the measurement error was less than 0.009% for the area-variant sensor and 1.118% for the gap-variant sensor,which can be easily compensated in *** proposed sensor also exhibited high resistance against electrostatic rotation,and the resulting measurement error dropped below 0.751%.The rotation interferences were less than 0.330 nm and(1.829×10^(-7))°,which were 35 times smaller than those of the traditional differential *** on the proposed bionic decoupling method,the fabricated sensor exhibited overwhelming capacitive sensitivity values of 7.078 and 1.473 pF/μm for gap-variant and area-variant devices,respectively,which were the highest among the current *** immunity to mechanical disturbances was maintained simultaneously,i.e.,less than 0.369% and 0.058% of the sensor outputs for the gap-variant and area-variant devices,respectively,indicating its great performance improvements over existing devices and feasibility in ultralow biomedical force measurement.

关键词： micro-electro-mechanical system capacitive sensor bionics operation instability mechanical and electrical decoupling biomedical force measurement

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Surface repair of wide-bandgap perovskites for high-performance all-perovskite tandem solar cells

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Journal of Energy Chemistry 2024年第6期93卷 64-70,I0003页

作者： Xiaojing Lv Weisheng Li Jin Zhang Yujie Yang Xuefei Jia Yitong Ji Qianqian Lin Wenchao Huang Tongle Bu Zhiwei Ren Canglang Yao Fuzhi Huang Yi-Bing Cheng Jinhui Tong State Key Laboratory of Advanced Technology for Materials Synthesis and Processing Wuhan University of TechnologyWuhan 430070HubeiChina Key Lab of Artificial Micro-and Nano-Structures of Ministry of Education of China School of Physics and TechnologyWuhan UniversityWuhan 430072HubeiChina Department of Electrical and Electronic Engineering Photonics Research Institute(PRI)Research Institute for Intelligent Wearable Systems(iWEAR)The Hong Kong Polytechnic University999077Hong KongChina Laboratory of Advanced Materials Fudan UniversityShanghai 200438China Xianhu Laboratory of the Advanced Energy Science and Technology Guangdong Laboratory Foshan 528200GuangdongChina

Wide-bandgap(WBG)perovskite solar cells(PSCs)play a fundamental role in perovskite-based tandem solar ***,the efficiency of WBG PSCs is limited by significant open-circuit voltage losses,which are primarily caused by surface *** this study,we present a novel method for modifying surfaces using the multifunctional S-ethylisothiourea hydrobromide(SEBr),which can passivate both Pb^(-1)and FA^(-1)terminated surfaces,Moreover,the SEBr upshifted the Fermi level at the perovskite interface,thereby promoting carrier *** proposed method was effective for both 1.67 and 1.77 eV WBG PSCs,achieving power conversion efficiencies(PCEs)of 22.47%and 19.90%,respectively,with V_(OC)values of 1.28 and 1.33 V,along with improved film and device *** this advancement,we were able to fabricate monolithic all-perovskite tandem solar cells with a champion PCE of 27.10%,This research offers valuable insights for passivating the surface trap states of WBG perovskite through rational multifunctional molecular engineering.

关键词： Wide-bandgap perovskite Surface defect Multifunctional molecule All-perovskite tandem solar cells

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Reconfigurable Three-Dimensional Thermal Dome

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Engineering 2025年第3期46卷 236-244页

作者： Yuhong Zhou Fubao Yang Liujun Xu Pengfei Zhuang Dong Wang Xiaoping Ouyang Ying Li Jiping Huang State Key Laboratory of Surface Physics&Key Laboratory of Micro-and Nano-Photonic Structures(Ministry of Education) Department of PhysicsFudan UniversityShanghai 200438China Graduate School of China Academy of Engineering Physics Beijing 100193China International Joint Innovation Center The Electromagnetics Academy at Zhejiang UniversityZhejiang UniversityHaining 314400China State Key Laboratory of Extreme Photonics and Instrumentation&Key Laboratory of Advanced Micro-Nano Electronic Devices and Smart Systems and Applications of Zhejiang Province Zhejiang UniversityHangzhou 310027China School of Materials Science and Engineering Xiangtan UniversityXiangtan 411105China

Thermal metamaterial represents a groundbreaking approach to control heat conduction,and,as a crucial component,thermal invisibility is of utmost importance for heat *** the flourishing development of thermal invisibility schemes,they still face two limitations in practical ***,objects are typically completely enclosed in traditional cloaks,making them difficult to use and unsuitable for objects with heat ***,although some theoretical proposals have been put forth to change the thermal conductivity of materials to achieve dynamic invisibility,their designs are complex and rigid,making them unsuitable for large-scale use in real threedimensional(3D)***,we propose a concept of a thermal dome to achieve 3D *** scheme includes an open functional area,greatly enhancing its usability and *** features a reconfigurable structure,constructed with simple isotropic natural materials,making it suitable for dynamic *** performance of our reconfigurable thermal dome has been confirmed through simulations and experiments,consistent with the *** introduction of this concept can greatly advance the development of thermal invisibility technology from theory to engineering and provide inspiration for other physical domains,such as direct current electric fields and magnetic fields.

关键词： Thermal domes Reconfigurable metamaterials Three-dimensional invisibility

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Small-size temperature/high-pressure integrated sensor via flip-chip method

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microsystems & nanoengineering 2024年第4期10卷 153-162页

作者： Mimi Huang Xiaoyu Wu Libo Zhao Xiangguang Han Yong Xia Yi Gao Zeyu Cui Cheng Zhang Xiaokai Yang Zhixia Qiao Zhikang Li Feng Han Ping Yang Zhuangde Jiang State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong UniversityXi’an 710049China Xi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and System Xi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China School of Mechanical Engineering Xi’an Jiaotong University710049 Xi’anChina School of Instrument Science and Technology Xi’an Jiaotong University710049 Xi’anChina Chongqing Key Laboratory of Micro-Nano Systems and Intelligent Sensing Chongqing Academician WorkstationChongqing 2011 Collaborative Innovation Center of Micro/Nano Sensing and Intelligent Ecological Internet of ThingsChongqing Technology and Business UniversityNan’an DistrictChongqing 400067China Xi’an Aerospace Yuanzheng Fluid Control Co.Ltd. Xi’an 710049China

Hydraulic technology with smaller sizes and higher reliability trends,including fault prediction and intelligent control,requires high-performance temperature and pressure-integrated *** designs rely on planar wafer-or chip-level integration,which is limited by pressure range,chip size,and low *** propose a small-size temperature/high-pressure integrated sensor via the flip-chip *** pressure and temperature units are arranged vertically,and the sensing signals of the two units are integrated into one plane through silicon vias and gold–gold bonding,reducing the lateral size and improving the efficiency of signal *** flip-chip technique ensures a reliable electrical connection.A square diaphragm with rounded corners is designed and optimised with simulation to sense high pressure based on the piezoresistive *** temperature sensing unit with a thin-film platinum resistor measures temperature and provides back-end high-precision compensation,which will improve the precision of the pressure *** integrated chip is fabricated by MEMS technology and packaged to fabricate the extremely small integrated *** integrated sensor is characterised,and the pressure sensor exhibits a sensitivity and sensitivity drift of 7.97mV/MPa and−0.19%FS in the range of 0–20 MPa and−40 to 120℃.The linearity,hysteresis,repeatability,accuracy,basic error,and zero-time drift are 0.16%FS,0.04%FS,0.06%FS,0.18%FS,±0.23%FS and 0.04%FS,*** measurement error of the temperature sensor and temperature coefficient of resistance is less than±1°C and 3142.997 ppm/℃,*** integrated sensor has broad applicability in fault diagnosis and safety monitoring of high-end equipment such as automobile detection,industrial equipment,and oil drilling platforms.

关键词： size corners sizes

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Facile assembly of flexible,stretchable and attachable symmetric microsupercapacitors with wide working voltage windows and favorable durability

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microsystems & nanoengineering 2024年第4期10卷 297-304页

作者： Xiangguang Han Xiaoyu Wu Libo Zhao Min Li Chen Jia Zhikang Li Jiaqi Xie Guoxi Luo Ping Yang Rabah Boukherroub Yurdanur Türker Mert UmutÖzkaynak Koray Bahadır Dönmez State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemXi’an Jiaotong UniversityXi’an 710049China School of Instrument Science and Technology Xi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai Yantai 264000China School of Mechanical Engineering Xi’an Jiaotong UniversityXi’anShaanxi 710049China Chongqing Key Laboratory of Micro-Nano Systems and Intelligent Sensing Chongqing Academician WorkstationChongqing 2011 Collaborative Innovation Center of Micro/Nano Sensing and Intelligent Ecological Internet of ThingsChongqing Technology and Business UniversityNan’an DistrictChongqing 400067China Univ.Lille CNRSUniv.Polytechnique Hauts-de-FranceUMR 8520-IEMNF-59000 LilleFrance Sabanci University Nanotechnology Research and Application Center(SUNUM) IstanbulTurkey Department of Materials Science and Engineering Istanbul Technical UniversityIstanbulTurkey

With the increasing development of intelligent robots and wearable electronics,the demand for high-performance flexible energy storage devices is drastically *** this study,flexible symmetric microsupercapacitors(MSCs)that could operate in a wide working voltage window were developed by combining laser-direct-writing graphene(LG)electrodes with a phosphoric acid-nonionic surfactant liquid crystal(PA-NI LC)gel *** increase the flexibility and enhance the conformal ability of the MSC devices to anisotropic surfaces,after the interdigitated LG formed on the polyimide(PI)film surface,the devices were further transferred onto a flexible,stretchable and transparent polydimethylsiloxane(PDMS)substrate;this substrate displayed favorable flexibility and mechanical characteristics in the bending ***,the electrochemical performances of the symmetric MSCs with various electrode widths(300,400,500 and 600μm)were *** findings revealed that symmetric MSC devices could operate in a large voltage range(0–1.5 V);additionally,the device with a 300μm electrode width(MSC-300)exhibited the largest areal capacitance of 2.3 mF cm^(−2)at 0.07 mA cm^(−2)and an areal(volumetric)energy density of 0.72μWh cm−2(0.36 mWh cm^(−3))at 55.07μWcm−2(27.54mWcm−3),along with favorable mechanical and cycling *** charging for~20 s,two MSC-300 devices connected in series could supply energy to a calculator to operate for~130 s,showing its practical application potential as an energy storage ***,the device displayed favorable reversibility,stability and *** 12 months of aging in air at room temperature,its electrochemical performance was not altered,and after charging-discharging measurements for 5000 cycles at 0.07 mA cm^(−2),~93.6%of the areal capacitance was still retained;these results demonstrated its practical long-term application potential as an energy storage device.

关键词： cycling durability electrode

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Ultrasensitive SERF atomic magnetometer with a miniaturized hybrid vapor cell

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microsystems & nanoengineering 2024年第4期10卷 367-376页

作者： Yintao Ma Yao Chen Mingzhi Yu Yanbin Wang Shun Lu Ju Guo Guoxi Luo Libo Zhao Ping Yang Qijing Lin Zhuangde Jiang State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemsXi’an Jiaotong UniversityXi’an 710049China School of Mechanical Engineering Xi’an Jiaotong UniversityXi’an 710049China School of Instrument Science and Technology Xi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing YantaiYantai 265503China

The chip-scale hybrid optical pumping spin-exchange relaxation-free(SERF)atomic magnetometer with a single-beam arrangement has prominent applications in biomagnetic measurements because of its outstanding features,including ultrahigh sensitivity,an enhanced signal-to-noise ratio,homogeneous spin polarization and a much simpler optical configuration than other *** this work,a miniaturized single-beam hybrid optical pumping SERF atomic magnetometer based on a microfabricated atomic vapor cell is *** the optically thin Cs atoms are spinpolarized,the dense Rb atoms determine the experimental *** enhanced signal strength and narrowed resonance linewidth are experimentally proven,which shows the superiority of the proposed magnetometer *** using a differential detection scheme,we effectively suppress optical noise with an approximate five-fold ***,the cell temperature markedly affects the performance of the *** systematically investigate the effects of temperature on the magnetometer *** theoretical basis for these effects is explained in *** developed miniaturized magnetometer has an optimal magnetic sensitivity of 20 fT/Hz^(1/2).The presented work provides a foundation for the chip-scale integration of ultrahighly sensitive quantum magnetometers that can be used for forward-looking magnetocardiography(MCG)and magnetoencephalography(MEG)applications.

关键词： pumping polarization magnetometer

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Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams

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microsystems & nanoengineering 2023年第1期9卷 91-102页

作者： Mingzhi Yu Libo Zhao Shanshan Chen Xiangguang Han Chen Jia Yong Xia Xiaozhang Wang Yonglu Wang Ping Yang Dejiang Lu Zhuangde Jiang State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University710049Xi’anChina Xi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and System Xi’an Jiaotong University710049Xi’anChina Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing 265503YantaiChina

With the increasing demand for multidirectional vibration measurements,traditional triaxial accelerometers cannot achieve vibration measurements with high sensitivity,high natural frequency,and low cross-sensitivity ***,for piezoresistive accelerometers,achieving pure axial deformation of the piezoresistive beam can greatly improve performance,but it requires the piezoresistive beam to be located in a specific position,which inevitably makes the design more complex and limits the performance ***,a monolithically integrated triaxial high-performance accelerometer with pure axial stress piezoresistive beams was designed,fabricated,and *** controlling synchronous displacements at both piezoresistive beam ends,the pure axial stress states of the piezoresistive beams could be easily achieved with position independence without tedious *** measurement unit for the z-axis acceleration was innovatively designed as an interlocking proof mass structure to ensure a full Wheatstone bridge for sensitivity *** pure axial stress state of the piezoresistive beams and low cross-sensitivity of all three units were verified by the finite element method(FEM).The triaxial accelerometer was fabricated and *** showing extremely high sensitivities(x axis:2.43 mV/g/5 V;y axis:2.44 mv/g/5 V;z axis:2.41 mV/g/5 V(without amplification by signal conditioning circuit))and high natural frequencies(x/y axes:11.4 kHz;z-axis:13.2 kHz)were *** approach of this paper makes it simple to design and obtain high-performance piezoresistive accelerometers.

关键词： axial proof independence

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Highly sensitive flexible heat flux sensor based on a microhole array for ultralow to high temperatures

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microsystems & nanoengineering 2023年第5期9卷 345-356页

作者： Le Li Bian Tian Zhongkai Zhang Meng Shi Jiangjiang Liu Zhaojun Liu Jiaming Lei Shuimin Li Qijing Lin Libo Zhao Zhuangde Jiang School of Mechanical Engineering Xi’an Jiaotong University710049 Xi’anChina State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemXi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China

With the growing demand for thermal management of electronic devices,cooling of high-precision instruments,and biological cryopreservation,heat flux measurement of complex surfaces and at ultralow temperatures has become highly ***,current heat flux sensors(HFSs)are commonly used in high-temperature scenarios and have problems when applied in low-temperature conditions,such as low sensitivity and *** this study,we developed a flexible and highly sensitive HFS that can operate at ultralow to high temperatures,ranging from−196°C to 273°*** sensitivities of HFSs with thicknesses of 0.2 mm and 0.3 mm,which are efficiently manufactured by the screen-printing method,reach 11.21μV/(W/m2)and 13.43μV/(W/m2),*** experimental results show that there is a less than 3%resistance change from bending to ***,the HFS can measure heat flux in both exothermic and absorptive cases and can measure heat flux up to 25 kW/***,we demonstrate the application of the HFS to the measurement of minuscule heat flux,such as heat dissipation of human skin and cold *** technology is expected to be used in heat flux measurements at ultralow temperatures or on complex surfaces,which has great importance in the superconductor and cryobiology field.

关键词： high stretching superconductor

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An integrated micromachined flexible ultrasonicinductive sensor for pipe contaminant multiparameter detection

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microsystems & nanoengineering 2024年第4期10卷 271-283页

作者： Zheng Yuan Xiaoyu Wu Zhikang Li Jiawei Yuan Yihe Zhao Zixuan Li Shaohui Qin Qi Ma Xuan Shi Zilong Zhao Jiazhu Li Shiwang Zhang Weixuan Jing Xiaozhang Wang Libo Zhao State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesXi’an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and SystemXi’an Jiaotong UniversityXi’an 710049China School of Mechanical Engineering Xi’an Jiaotong UniversityXi’an 710049China School of Instrument Science and Technology Xi’an Jiaotong UniversityXi’an 710049China Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing Yantai 265503China

Pipe contaminant detection holds considerable importance within various industries,such as the aviation,maritime,medicine,and other pertinent *** capability is beneficial for forecasting equipment potential failures,ascertaining operational situations,timely maintenance,and lifespan ***,the majority of existing methods operate offline,and the detectable parameters online are relatively *** constraint hampers real-time on-site detection and comprehensive assessments of equipment *** address these challenges,this paper proposes a sensing method that integrates an ultrasonic unit and an electromagnetic inductive unit for the real-time detection of diverse contaminants and flow rates within a *** ultrasonic unit comprises a flexible transducer patch fabricated through micromachining technology,which can not only make installation easier but also focus the sound ***,the sensing unit incorporates three symmetrical solenoid *** a comprehensive analysis of ultrasonic and induction signals,the proposed method can be used to effectively discriminate magnetic metal particles(e.g.,iron),nonmagnetic metal particles(e.g.,copper),nonmetallic particles(e.g.,ceramics),and *** inclusive categorization encompasses nearly all types of contaminants that may be present in a ***,the fluid velocity can be determined through the ultrasonic Doppler frequency *** efficacy of the proposed detection principle has been validated by mathematical models and finite element *** contaminants with diverse velocities were systematically tested within a 14mm diameter *** experimental results demonstrate that the proposed sensor can effectively detect contaminants within the 0.5−3mm range,accurately distinguish contaminant types,and measure flow velocity.

关键词： inductive holds ultrasonic

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