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Micro-organic Light-emitting Devices Fabricated by Room-temperature Curing Nanoimprint Lithography Using Diamond Molds

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MRS Online Proceedings Library 2011年第1期1395卷 33-38页

作者： Ippei Ishikawa Taisuke Okuno Shuji Kiyohara Yoshio Taguchi Yoshinari Sugiyama Yukiko Omata Yuichi Kurashima Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology Maizuru Kyoto Japan Application and Technical Section ELIONIX INC. Hachioji Tokyo Japan Department of Mechanical System Engineering University of Yamanashi Kofu Yamanashi Japan

Organic light-emitting devices (OLEDs) have attracted a lot of attention as a next generation display. In this study, we fabricated the micro-OLEDs by room-temperature curing nanoimprint lithography (RTC-NIL) using diamond molds. The diamond has superior durability and was used as mold material for RTC-NIL. The diamond molds have been fabricated by electron cyclotron resonance (ECR) oxygen ion shower with polysiloxane oxide mask in the electron beam (EB) lithography technology. We fabricated the diamond mold pattern with 10 µm-square dot. The diamond molds have been used to form an insulating layer in micro-OLEDs. The optimum thickness of N,N’-Diphenyl-N,N’-di(m-tolyl)benzidine (TPD) [hole transport layer], Tris(8-quinolinolato)aluminum (Alq3) [electron transport layer] and aluminum (Al) [cathode] were 40 nm, 40 nm and 200 nm, respectively. We succeeded in formation of insulating layer in micro-OLEDs and operation of micro-OLEDs with 10 µm-square-dot by RTC-NIL using diamond molds.

关键词： diamond optoelectronic microelectronics

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Pneumatic rubber actuators for a rehabilitation device to prevent contractures of finger joints

Pneumatic rubber actuators for a rehabilitation device to pr...

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International Conference on Mechatronics and Machine Vision in Practice

作者： Hironari Taniguchi Hidenori Toyooka Tetsuya Minatohara Makoto Fukuda Feifei Zhao Department of Electronics and Control Engineering Tsuyama National College of Technology Tsuyama-city OKAYAMA 708-8509 JAPAN Advanced Mechanical and Control System Engineering Course Tsuyama National College of Technology Tsuyama-city OKAYAMA 708-8509 JAPAN

ISBN: (纸本)9781467316439

There has been increased interest in use of pneumatic actuators in many fields, such as medical care and welfare. In particular, a pneumatic rubber actuator with soft material has many advantages such as low mass, flexibility, safety and user-friendliness. We therefore focus on pneumatic rubber actuators as a drive source of a rehabilitation device. This paper presents pneumatic rubber actuators for a rehabilitation device to prevent contractures of the finger joints. We propose two types of actuators. The fabrication of the actuators was based on molding silicon rubber. The actuators can not only operate in flexion and extension but can also twist and stretch out the finger. The actuators force and motion were characterized at different supply pressures. In addition, we investigated different possible methods of rehabilitation for fingers using the actuators. The metacarpophalangeal (MP) and the proximal interphalangeal (PIP) joint motion -were measured with the supply pressure of 150 kPa. The range of MP/PIP joint motion was from minus 3/9 degrees to 53/55 degrees. It was shown about 40 percent of its normal range. As a result, we confirmed the viability of the actuators for a finger rehabilitation device.

关键词： Pneumatic actuator rehabilitation device preventing contractures. actuators Pneumatic actuators Contracture supply pressures Pneumatic Finger Joint Rehabilitation rubbers Lake Restoration Fingers

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Fabrication of diamond nanopit arrays by room-temperature curing nanoimprint lithography using glass-like carbon molds

Fabrication of diamond nanopit arrays by room-temperature cu...

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2011 MRS Fall Meeting

作者： Kiyohara, Shuji Ito, Chigaya Ishikawa, Ippei Takikawa, Hirofumi Taguchi, Yoshio Sugiyama, Yoshinari Omata, Yukiko Kurashima, Yuichi Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Aza Shiroya Maizuru Kyoto 625-8511 Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology Toyohashi Aichi 441-8580 Japan Application and Technical Section Elionix Inc. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan Department of Mechanical System Engineering University of Yamanashi 4-3-11 Takeda Kofu Yamanashi 400-8511 Japan

ISBN: (纸本)9781605113722

We have proposed the use of glass-like carbon (GC), as mold material because the 27-maximum etching selectivity of polysiloxane film against GC, which was approximately six times larger than that of polysiloxane film against chemical vapor deposited (CVD) diamond film. We have investigated the fabrication of diamond nanopit arrays by room-temperature curing nanoimprint lithography (RTC-NIL) using GC mold, as applications to the emitter and the micro-gear. The polysiloxane has in the state of sticky liquid at room-temperature and negative-exposure characteristic. Therefore, the polysiloxane was used as RTC-imprint resist material, and also used as electron beam (EB) resist (oxide mask) material in EB lithography. We have fabricated the cylindrical GC nanodot mold with 500 nm-diameter, 600 nm-height and 2 μm-pitch. We carried out RTC-NIL using GC mold under the following optimum conditions: time from spin-coating to imprint of 1 min, imprinting pressure of 0.5 MPa and imprinting time of 5 min. Then, we have processed the diamond film with an electron cyclotron resonance (ECR) oxygen ion shower. We have fabricated diamond nanopit array with 250 nm-depth and 500 nm-diameter. The diameter of diamond nanopit pattern was in good agreement with that of GC mold. Moreover, the depth of the diamond nanopit patterns fabricated by RTC-NIL using cylindrical GC mold was three times larger than that using conical diamond mold. © 2012 Materials Research Society.

关键词： Chemical vapor deposition

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Nanofabrication of three-dimensional imprint diamond molds by ECR oxygen ion beams using polysiloxane

Nanofabrication of three-dimensional imprint diamond molds b...

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作者： Shuji, Kiyohara Tomoyuki, Kashiwagi Hirofumi, Takikawa Yuichi, Kurashima Yoshio, Taguchi Yoshinari, Sugiyama Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Aza Shiroya Maizuru Kyoto 625-8511 Japan Department of Electrical and Electronic Engineering Toyohashi University of Technology Toyohashi Aichi 441-8580 Japan Department of Mechanical Systems Engineering University of Yamanashi 4-3-11 Takeda Kofu Yamanashi 400-8511 Japan Application and Technical Section ELIONIX INC 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan

We have investigated the nanofabrication of three-dimensional (3D) chemical vapor deposited (CVD) diamond molds in Electron Cyclotron Resonance (ECR) oxygen ion beam etching technologies using polysiloxane [-R2SiO-]n as an electron beam (EB) mask and a room-temperature (RT)-imprint resist material. The polysiloxane exhibited a negative-exposure characteristic and its sensitivity was 5:5 × 10 -5 C/cm2. The maximum etching selectivity of polysiloxane film against diamond film was 4.7, which was obtained under the following ECR oxygen ion etching conditions: ion energy of 400 eV, ion incidence angle of 0 ° , microwave power of 100 W, gas pressure of 1:4 × 10 -2 Pa and stage temperature of 24 ° C. The diamond molds of cone and tetragonal pyramid dots were fabricated with polysiloxane mask in EB lithography technology using the RT-nanoimprint lithography (NIL) process. The dots are 500, 600, 700, 800, 900 nm in diameter and width respectively. The pitch between the dots is 2 μm, and each dot has a height of about 1 μm. It was found that the optimum imprinting pressure and its depth obtained after the press for 5 min were 0.5 MPa and 0.5 μm respectively. The resulting diameter of each imprinted polysiloxane pattern was in good agreement with that of the 3D-diamond mold. We carried out the RT-NIL process for the fabrication of diamond nanopatterns, using the 3D-diamond molds that we developed. © 2009 The Surface Science Society of Japan.

关键词： Room temperature

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Propulsive Force Estimation of Dolphins by Applying Two-point Hinged Oscillating Wing Theory for Underwater Robot

Propulsive Force Estimation of Dolphins by Applying Two-poin...

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SICE Annual Conference

作者： Kaito Yoshiki Harukaze Tanaka Koji Okuto Takashi Saito Fumitake Fujii Masaaki Ikeda Department of Mechanical and Control Engineering Advanced Course National Institute of Technology Tokuyama College Yamaguchi Japan Department of Mechanical and Electrical Engineering National Institute of Technology Tokuyama College Yamaguchi Japan Graduate School of Sciences and Technology for Innovation Yamaguchi University Yamaguchi Japan

ISBN: (数字)9784907764838

ISBN: (纸本)9798331544461

Since it is very difficult for humans to perform tasks underwater, underwater robots have been actively studied in recent years. In this study, a propulsive force estimation method based on the two-point hinged oscillating wing theory is implemented and proposed for the purpose of developing an underwater robot that can perform various underwater tasks in place of humans. The proposed method is modified from the previous study in terms of the placement of the hinge points to consider a propulsive force generated by the caudal peduncle. The estimation results show that the propulsive force obtained by this method has an error with the propulsive force obtained by analysis. From this fact, the influence of the two-point hinged oscillating wing theory on the propulsive force estimation is discussed. The effect of changing the placement of the hinge points is also discussed.

关键词： Autonomous underwater vehicles Accuracy Torque Force Estimation Tail Propulsion Fasteners Robots Dolphins

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Diamond nanopit arrays fabricated by room-temperature nanoimprinting using diamond molds

Diamond nanopit arrays fabricated by room-temperature nanoim...

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2010 MRS Fall Meeting

作者： Kiyohara, Shuji Kumagai, Masaya Taguchi, Yoshio Sugiyama, Yoshinari Omata, Yukiko Kurashima, Yuichi Takikawa, Hirofumi Advanced Faculty of Electric and Control System Engineering Course Maizuru National College of Technology 234 Aza Shiroya Maizuru Kyoto 625-8511 Japan Application and Technical Section ELIONIX Inc. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan Department of Mechanical System Engineering University of Yamanashi 4-3-11 Takeda Kofu Yamanashi 400-8511 Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology Toyohashi Aichi 441-8580 Japan

ISBN: (纸本)9781605112596

We have investigated the nanopatterning of chemical vapor deposited (CVD) diamond films in room-temperature nanoimprint lithography (RT-NIL), using a diamond nanodot mold. We have proposed the use of polysiloxane as an electron beam (EB) mask and RT-imprint resist materials. The diamond molds of cylinder dot using the RT-NIL process were fabricated with polysiloxane oxide mask in EB lithography technology. The dot in minimum diameter is 500 nm. The pitch between the dots is 2 μm, and dot has a height of about 600 nm. It was found that the optimum imprinting conditions for the RT-NIL : time from spin-coating to imprinting t1 of 1 min , pressure time t2 of 5 min, imprinting pressure P of 0.5 MPa. The imprint depth obtained after the press under their conditions was 500 nm. We carried out the RT-NIL process for the fabrication of diamond nanopit arrays, using the diamond nanodot molds that we developed. The resulting diamond nanopit arrays with 500 nm-diameter and 200 nm-depth after the electron cyclotron resonance (ECR) oxygen ion beam etching were fabricated. The diameter of diamond nanopit arrays was in good agreement with that of the diamond nanodot mold. © 2011 Materials Research Society.

关键词： Silicones

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Fabrication of Diamond Nanopit arrays by Room-temperature Curing Nanoimprint Lithography Using Glass-like Carbon Molds

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MRS Online Proceedings Library 2011年第1期1395卷 27-32页

作者： Shuji Kiyohara Chigaya Ito Ippei Ishikawa Hirofumi Takikawa Yoshio Taguchi Yoshinari Sugiyama Yukiko Omata Yuichi Kurashima Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology Maizuru Kyoto Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology Toyohashi Aichi Japan Application and Technical Section ELIONIX INC. Hachioji Tokyo Japan Department of Mechanical System Engineering University of Yamanashi Kofu Yamanashi Japan

We have proposed the use of glass-like carbon (GC), as mold material because the 27-maximum etching selectivity of polysiloxane film against GC, which was approximately six times larger than that of polysiloxane film against chemical vapor deposited (CVD) diamond film. We have investigated the fabrication of diamond nanopit arrays by room-temperature curing nanoimprint lithography (RTC-NIL) using GC mold, as applications to the emitter and the micro-gear. The polysiloxane has in the state of sticky liquid at room-temperature and negative-exposure characteristic. Therefore, the polysiloxane was used as RTC-imprint resist material, and also used as electron beam (EB) resist (oxide mask) material in EB lithography. We have fabricated the cylindrical GC nanodot mold with 500 nm-diameter, 600 nm-height and 2 µm-pitch. We carried out RTC-NIL using GC mold under the following optimum conditions: time from spin-coating to imprint of 1 min, imprinting pressure of 0.5 MPa and imprinting time of 5 min. Then, we have processed the diamond film with an electron cyclotron resonance (ECR) oxygen ion shower. We have fabricated diamond nanopit array with 250 nm-depth and 500 nm-diameter. The diameter of diamond nanopit pattern was in good agreement with that of GC mold. Moreover, the depth of the diamond nanopit patterns fabricated by RTC-NIL using cylindrical GC mold was three times larger than that using conical diamond mold.

关键词： diamond nanostructure ion-beam processing

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Diamond Nanopit Arrays Fabricated by Room-Temperature Nanoimprinting using Diamond Molds

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MRS Online Proceedings Library 2011年第1期1282卷 117-122页

作者： Shuji Kiyohara Masaya Kumagai Yoshio Taguchi Yoshinari Sugiyama Yukiko Omata Yuichi Kurashima Hirofumi Takikawa Advanced Faculty of Electric and Control System Engineering Course Maizuru National College of Technology Maizuru Japan Application and Technical Section ELIONIX INC. 3-7-6 Motoyokoyama Hachioji Tokyo Japan Department of Mechanical System Engineering University of Yamanashi 4-3-11 Takeda Kofu Yamanashi Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology Toyohashi Aichi Japan

关键词： diamond ion-beam processing nanoscale

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An Iterative Method for a Frequency Domain PID controller Synthesis

An Iterative Method for a Frequency Domain PID Controller Sy...

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SICE Annual Conference

作者： Kenjiro Minamikawa Yasushi Kami Eitaku Nobuyama Atsushi Hosokawa Department of Mechanical and Electronic System Engineering Advanced Course of National Institute of Technology Akashi College Hyogo Japan Department of Electrical Systems Engineering Hiroshima Institute of Technology Hiroshima Japan Department of Intelligent and Control Systems Kyushu Institute of Technology Fukuoka Japan Department of Electrical and Computer Engineering National Institute of Technology Akashi College Hyogo Japan

This study is concerned with a control system design method with frequency response data named a finite number of frequency responses(an FNFR) model. In this paper a numerical descent direction is introduced and an iterative method for solving control problems formulated with the FNFR model is proposed with the descent direction. One feature of our approach is to update controller variables so that they approach to a feasible region of considering control problems from the outside. The efficiency of our method is shown by numerical examples.

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A Basic Experiment for Image-Based Position Measurement of Objects at Sea

A Basic Experiment for Image-Based Position Measurement of O...

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Annual Conference of the IEEE Industrial Electronics Society

作者： Fumiaki Takemura Norimitsu Sakagami Satoru Takahashi Rintaro Ono Yumiko Nakanishi Natsuki Uechi Kazuma Noha Kuniaki Kawabata Shinichi Sagara Chiaki Katagiri Yuji Yamamoto Department of Mechanical Systems Engineering National Institute of Technology Okinawa College Department of Navigation and Ocean Engineering Tokai University Department of Intelligent Mechanical Systems Engineering Kagawa University Department of Maritime Civilization Tokai University Cultural Property Preservation Division Osaka Prefectural Board of Education Advanced Course National Institute of Technology Okinawa College RIKEN-XJTU Joint Research Unit Department of Mechanical and Control Engineering Kyushu Institute of Technology Okinawa Prefectural Museum and Art Museum Asian Research institute of underwater archaeology

ISBN: (纸本)9781479917631

This paper presents an image-based position measurement of underwater objects using a low-cost maritime mobile robot with a monocular camera. Visual recognition of distant underwater objects is possible in the water with high transparency, for example, in the coastal sea area of Okinawa prefecture, Japan. In this paper, we apply the proposed method to estimate the position of an old anchor that is at a deep of 30 [m] and is estimated to be hundreds-of-years-old in an archaeological site in Ishigaki Island. We explain the measurement principle of the proposed method and the developed system. Moreover, we describe the experiment conducted off the coast of Ishigaki Island and show the experimental results of the proposed method.

关键词： Position measurement of underwater objects Image processing Camera GPS Attitude sensor Depth sensor

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