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International Symposium on Plasma- and Process-Induced Damage

作者： D.A. Gajewski J. Walls M. Martin T. Remmel Advanced Module Integration and Development Laboratory Motorola Digital DNA Laboratories Tempe AZ USA Advanced Process Development & External Research Motorola Digital DNA Laboratories Tempe AZ USA

We present constant voltage (CV) time-dependent dielectric breakdown (TDDB) measurements of integrated metal-insulator-metal (MIM) capacitors with plasma-enhanced chemical vapor deposited Si/sub 3/N/sub 4/ nitride (PEN) dielectric. We demonstrate tight breakdown distributions for the capacitors in a full-flow Al-based integration scheme. We achieved these excellent results by design rules to reduce plasma damage, careful process control, and an appropriate treatment of process variability. These results are superior to previously published reports that showed much wider fail time distributions for similar dielectrics and integration schemes. We also demonstrate promising performance for PEN MIM capacitors in a short-flow Cu-based integration scheme. Finally, we discuss application of several possible models ("E," "/spl radic/E," and "I/E") to the data for predicting the PEN lifetime at operating conditions.

关键词： Plasma measurements Plasma chemistry MIM capacitors Breakdown voltage Dielectric breakdown Dielectric measurements Metal-insulator structures Chemicals Electric breakdown Process control

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Affordability, logistics R&D and fleet systems

引用

NAVAL ENGINEERS JOURNAL 1996年第3期108卷 199-213页

作者： Schulte, DP Skolnick, A He has supported the development and operation of several naval systems including advanced component selection for Trident II fire control and navigation systems. He served as branch manager of the Surface Ship ASW Combat System Branch which acted as the acquisition engineering agent for the AN/SQQ-89 Surface Ship Anti-Submarine Warfare Weapon System. He was then selected to manage the Module Engineering Department which provided engineering support to numerous naval systems including the AN/BSY-1 Submarine Combat System and the Trident II fire control and navigation system. He then served as the deputy program manager for NAVSEA Progressive Maintenance (2M/ATE). He holds a B.S. degree in Electrical Engineering from Purdue University and currently is pursuing a Maste's degree in Public Environmental Affairs at Indiana University—Purdue University Indianapolis. He served at Applied Physics Laboratory/The Johns Hopkins University in missile development then aboard USS Boston (CAG-1) and played leading roles in several weapon system developments (Regulus Terrier Tartar Talos) inertial navigation (Polaris) deep submergence (DSRV) and advanced ship designs (SES). He later was director Combat System Integration Naval Sea Systems Command and head Combat Projects Naval Ship Engineering Center. He led the Navy's High Energy Lasers and Directed Energy Weapons development efforts. He was vice president advanced technology at Operations Research Inc. and vice president maritime engineering at Defense Group Inc. before starting SSC in 1991. Dr. Skolnick holds a B.S. degree in Mathematics and Economics Queens College an M.A. degree in Mathematics and Philosophy Columbia University an M.S. degree in Electrical/Aeronautical Engineering U.S. Naval Postgraduate School and a Ph.D. in Electrical Engineering and Applied Mathematics from Polytechnic University in New York. He is the author of many published papers on engineering design issues source selection procedures and large-scale complex technology problems

The Fleet continues to require high performance systems that can operate with dependability in the seas' unforgiving environments and under hostile action. Those demands are not new. What has changed is the urgent priority formerly assigned to national defense issues. The arguments for continued superpower military strength are now roiled in politics along with unsettled budgets and uncertain force level projections. Current expectations revolve about indefinite fiscal and operational issues (difficult funding constraints and broadband threats). In the actual event of ''doing more with less,'' a practical response is to apply the creative power available from sound engineering judgement and the crucible of experience to the immediate needs of the Fleet. The attempt to shorten the path between advanced development effort and Fleet use has been tried occasionally in the past, often, without exemplary results. The Sustainable Hardware and Affordable Readiness Practices (SHARP) program, is a generic R&D effort under OpNav sponsorship that has been working steadily on sensible solutions to product engineering problems. Armed today with fast-time, large-scale computation abilities and modern tools for technical problem solving coupled with specialized engineering knowledge, it has been refreshed and is underway satisfying existing Fleet needs. The relationship between fully responsive engineering services and current operational needs is always demanding. The connection between advanced engineering development (6.3 category funds) and immediate Fleet usage brings added complexity and challenge, both technical and organizational. Illustrative examples of affordable engineering solutions to ''retain, revise, replace or retire'' questions are presented within the context of both Fleet realities and budgetary limitations. The discussion covers legacy system support, civil/military considerations and Fleet maintenance issues. It describes the substantial and critical payoffs i

关键词： Warships

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